CN117881941A - 工件高度测量装置和采用了该装置的安装基板检查装置 - Google Patents
工件高度测量装置和采用了该装置的安装基板检查装置 Download PDFInfo
- Publication number
- CN117881941A CN117881941A CN202180101809.1A CN202180101809A CN117881941A CN 117881941 A CN117881941 A CN 117881941A CN 202180101809 A CN202180101809 A CN 202180101809A CN 117881941 A CN117881941 A CN 117881941A
- Authority
- CN
- China
- Prior art keywords
- scan
- height
- workpiece
- scanning
- line light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims description 106
- 238000007689 inspection Methods 0.000 title claims description 30
- 238000005259 measurement Methods 0.000 claims abstract description 178
- 238000003384 imaging method Methods 0.000 claims abstract description 99
- 230000003287 optical effect Effects 0.000 claims abstract description 51
- 238000000034 method Methods 0.000 claims abstract description 41
- 238000005520 cutting process Methods 0.000 claims abstract description 17
- 230000001678 irradiating effect Effects 0.000 claims abstract description 5
- 238000001514 detection method Methods 0.000 claims description 10
- 230000007547 defect Effects 0.000 claims description 7
- 238000012545 processing Methods 0.000 description 45
- 238000010586 diagram Methods 0.000 description 36
- 230000007812 deficiency Effects 0.000 description 28
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- 238000013500 data storage Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 5
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- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 208000032005 Spinocerebellar ataxia with axonal neuropathy type 2 Diseases 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 208000033361 autosomal recessive with axonal neuropathy 2 spinocerebellar ataxia Diseases 0.000 description 1
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- 238000004088 simulation Methods 0.000 description 1
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- 239000013589 supplement Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/50—Depth or shape recovery
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0815—Controlling of component placement on the substrate during or after manufacturing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/54—Revolving an optical measuring instrument around a body
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/032173 WO2023032095A1 (ja) | 2021-09-01 | 2021-09-01 | ワーク高さ計測装置、及びこれを用いた実装基板検査装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117881941A true CN117881941A (zh) | 2024-04-12 |
Family
ID=85410941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202180101809.1A Pending CN117881941A (zh) | 2021-09-01 | 2021-09-01 | 工件高度测量装置和采用了该装置的安装基板检查装置 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPWO2023032095A1 (ja) |
| KR (1) | KR20240042042A (ja) |
| CN (1) | CN117881941A (ja) |
| DE (1) | DE112021007975T5 (ja) |
| TW (1) | TWI818349B (ja) |
| WO (1) | WO2023032095A1 (ja) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3018887B2 (ja) * | 1994-02-01 | 2000-03-13 | トヨタ自動車株式会社 | 三次元形状測定装置 |
| JP5564348B2 (ja) * | 2010-07-15 | 2014-07-30 | 株式会社キーエンス | 画像処理装置及び外観検査方法 |
| JP2012122844A (ja) * | 2010-12-08 | 2012-06-28 | Aisin Seiki Co Ltd | 表面検査装置 |
| JP2015072197A (ja) | 2013-10-03 | 2015-04-16 | 株式会社ニコン | 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、及び形状測定プログラム |
| JP6184289B2 (ja) * | 2013-10-17 | 2017-08-23 | 株式会社キーエンス | 三次元画像処理装置、三次元画像処理方法、三次元画像処理プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器 |
| TWI758383B (zh) * | 2017-07-19 | 2022-03-21 | 日商日本電產理德股份有限公司 | 攝影裝置、凸塊檢查裝置以及攝影方法 |
| KR102515369B1 (ko) * | 2018-09-27 | 2023-03-29 | 야마하하쓰도키 가부시키가이샤 | 3차원 측정 장치 |
| WO2020136885A1 (ja) * | 2018-12-28 | 2020-07-02 | ヤマハ発動機株式会社 | 三次元計測装置、及び、ワーク作業装置 |
-
2021
- 2021-09-01 JP JP2023544886A patent/JPWO2023032095A1/ja active Pending
- 2021-09-01 WO PCT/JP2021/032173 patent/WO2023032095A1/ja active Application Filing
- 2021-09-01 KR KR1020247007577A patent/KR20240042042A/ko unknown
- 2021-09-01 DE DE112021007975.1T patent/DE112021007975T5/de active Pending
- 2021-09-01 CN CN202180101809.1A patent/CN117881941A/zh active Pending
- 2021-11-09 TW TW110141608A patent/TWI818349B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20240042042A (ko) | 2024-04-01 |
| TW202311702A (zh) | 2023-03-16 |
| WO2023032095A1 (ja) | 2023-03-09 |
| DE112021007975T5 (de) | 2024-05-08 |
| JPWO2023032095A1 (ja) | 2023-03-09 |
| TWI818349B (zh) | 2023-10-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |