CN117317078A - White light CSP (chip size reduction) preparation method suitable for vertical chip and application thereof - Google Patents

White light CSP (chip size reduction) preparation method suitable for vertical chip and application thereof Download PDF

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Publication number
CN117317078A
CN117317078A CN202311597930.5A CN202311597930A CN117317078A CN 117317078 A CN117317078 A CN 117317078A CN 202311597930 A CN202311597930 A CN 202311597930A CN 117317078 A CN117317078 A CN 117317078A
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China
Prior art keywords
film
white light
fluorescent
preparation
light csp
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CN202311597930.5A
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Chinese (zh)
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CN117317078B (en
Inventor
刘昊睿
刘东顺
许瑞龙
谭晓华
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TECORE SYNCHEM Inc
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TECORE SYNCHEM Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • H01L33/0095Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • H01L33/501Wavelength conversion elements characterised by the materials, e.g. binder
    • H01L33/502Wavelength conversion materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • H01L33/505Wavelength conversion elements characterised by the shape, e.g. plate or foil
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • H01L2933/0041Processes relating to semiconductor body packages relating to wavelength conversion elements

Abstract

The invention relates to the field of semiconductor packaging, in particular to a white light CSP (chip size reduction) preparation method applicable to vertical chips and application thereof. The white light CSP preparation method suitable for the vertical chip comprises the following steps: (1) preparation of a fluorescent base film: taking a fluorescent film with the size being cut down, and arranging laser cutting vertical chip bonding pad sites in the central area of the fluorescent film; (2) white light CSP assembly: adhering the prepared fluorescent substrate film to a double-sided adhesive tape, and inserting a vertical chip into the fluorescent substrate film through a bonding pad site; (3) Cutting the fluorescent substrate film, and removing the double-sided tape to obtain the white light CSP. The white light CSP preparation method suitable for the vertical chip not only can realize the simplicity, convenience and high efficiency of the preparation method, but also can further improve the technical problem of poor color temperature concentration caused by the traditional dispensing encapsulation method.

Description

White light CSP (chip size reduction) preparation method suitable for vertical chip and application thereof
Technical Field
The invention relates to the field of semiconductor packaging, in particular to a white light CSP (chip size reduction) preparation method applicable to vertical chips and application thereof.
Background
In recent years, with the increasing demand and demand for electronic products, semiconductor technology, and in particular, packaging technology for semiconductors, has received very extensive attention and intensive research. CSP (chip scale package) technology has evolved in this context, including vertical chip package structures and methods.
Most of the conventional vertical chip packaging methods are die bonding and wire bonding (die bonding), and packaging is performed by a glue dispensing encapsulation method, so that the method is relatively simple to operate, but in the process of glue dispensing encapsulation, glue is poured into a needle cylinder to be extruded onto the surface of a chip, and the glue can be precipitated along with time, but the color temperature concentration of a product is poor, and the structural stability is poor. Chinese patent CN202310143815.4 provides a CSP packaging structure of a forward-mounted LED chip and a preparation method thereof, and states that the CSP packaging structure prepared by the CSP packaging structure can realize high-efficiency preparation of CSP light sources by arranging crystal bonding wires on a substrate, and has the advantages of convenient combination, flexible use and high preparation efficiency. However, the method only adopts an improved dispensing and encapsulating method, and the main technical effect is to improve the preparation efficiency, but the technical problem of poor color temperature concentration of the product caused by the dispensing and encapsulating method is not solved.
Therefore, in order to solve the above problems, the present application provides a new white light CSP preparation method suitable for vertical chips.
Disclosure of Invention
In order to solve the above problems, the first aspect of the present invention provides a method for preparing white light CSP suitable for vertical chips, comprising the steps of: (1) preparation of a fluorescent base film: taking a fluorescent film with the size being cut down, and arranging laser cutting vertical chip bonding pad sites in the central area of the fluorescent film; (2) white light CSP assembly: adhering the prepared fluorescent substrate film to a double-sided adhesive tape, and inserting a vertical chip into the fluorescent substrate film through a bonding pad site; (3) Cutting the fluorescent substrate film, and removing the double-sided tape to obtain the white light CSP.
The first aspect of the present invention provides a method for preparing white light CSP suitable for vertical chips, comprising the steps of: (1) preparation of a fluorescent base film: arranging laser cutting fluorescent films with the same shape and size in the central area of the fluorescent film according to the shape and size of a bonding pad on a chip, and exposing hollowed-out bonding pad sites of the vertical chip to obtain the fluorescent film; (2) white light CSP assembly: setting a double-sided tape on the temporary carrier, setting a fluorescent base film on the double-sided tape, and embedding bonding pads on the chip into bonding pad sites cut in advance; (3) Finally, cutting the fluorescent substrate film around each embedded chip, and removing the double-sided tape to obtain the white light CSP.
As a preferable scheme, the thickness of the fluorescent film is 120-180 μm; the thickness of the fluorescent base film is consistent with that of the fluorescent film.
As a preferable scheme, the thickness of the fluorescent film is 140-160 μm; the thickness of the fluorescent base film is consistent with that of the fluorescent film.
As a preferable mode, the fluorescent film is any one of hot melt adhesive films.
As a preferable scheme, the hot-melt adhesive film is any one of a solid silica gel film, a semi-solid hot-melt silica gel film and a liquid hot-melt silica gel film.
As a preferable scheme, the hot melt adhesive film is a semi-solid hot melt silica gel film.
As a preferable scheme, the average viscosity of the semi-solid hot-melt silica gel film and the liquid hot-melt silica gel film is 10000-15000 mPa.s, and the testing temperature is 50 ℃.
As a preferable scheme, the average viscosity of the semi-solid hot-melt silica gel film and the liquid hot-melt silica gel film is 10000-11000 mPa.s, and the testing temperature is 50 ℃.
As a preferable scheme, the average viscosity of the semi-solid hot-melt silica gel film and the liquid hot-melt silica gel film is 10000 mPa.s, and the testing temperature is 50 ℃.
As a preferable scheme, the step (2) further comprises a vacuum baking step: and carrying out vacuum baking on the assembled white light CSP under the baking conditions of 1-5 KPa, 160-180 ℃ for 3-5 hours.
As a preferred embodiment, the baking conditions are 2.5KPa,165℃for 3 hours.
As a preferred embodiment, the optical dicing of the pad sites of the vertical chip in the step (1) is consistent with the shape and size of the pads on the vertical chip.
As a preferable scheme, the double-sided adhesive tape is any one of a double-sided UV adhesive tape, a double-sided pyrolytic adhesive tape and a double-sided heat-resistant adhesive tape.
As a preferred embodiment, the double-sided adhesive tape is a double-sided UV adhesive tape.
In this application, through adopting the compound scheme of above-mentioned ingenious pad position and double-sided tape, provide a novel CSP encapsulation scheme and avoided the relatively poor problem of colour temperature concentration degree that current point glue encapsulation can appear. Through cutting of bonding pad site and the nesting of chip bonding pad together with the fixation effect of double faced adhesive tape, can directly encapsulate the chip through the mode of hot melt bonding in the assembly process, need not use the mode of point to wait for the diffusion and the sediment of point glue, thereby avoid the various quality problems that the sediment that appear in the diffusion process of point glue and lead to.
The second aspect of the present invention provides a white light CSP obtained by the above-mentioned method for producing a white light CSP suitable for use in a vertical chip.
The third aspect of the present invention provides an application of the above-mentioned white light CSP preparation method suitable for vertical chips, including an application of the white light CSP preparation method in a white light CSP device preparation method with high power and high structural stability.
The beneficial effects are that:
1. compared with the existing dispensing encapsulation method, the white light CSP preparation method suitable for the vertical chip is a novel encapsulation preparation method and has the advantages of being simple in operation, flexible in use, high in preparation efficiency and the like.
2. The white light CSP preparation method suitable for the vertical chip not only can realize the simplicity, convenience and high efficiency of the preparation method, but also can further improve the technical problem of poor color temperature concentration caused by the traditional dispensing encapsulation method.
3. The white light CSP preparation method suitable for the vertical chip has the characteristics of strong processability and excellent self stability, and can ensure that the white light CSP can still maintain excellent dimensional stability in a long-time carrier transportation process.
4. According to the white light CSP preparation method suitable for the vertical chip, through cutting of the bonding pad sites, nesting of the bonding pads of the chip and fixing of the double-sided adhesive, the chip can be directly packaged in a hot melt bonding mode in the assembly process, a dispensing mode is not used, and diffusion and precipitation of dispensing are achieved, so that various quality problems caused by uneven precipitation in the dispensing diffusion process are avoided.
5. The white light CSP preparation method suitable for the vertical chip provides a brand-new thought for the packaging method of the vertical chip, can avoid the technical problems of the prior packaging technology in the packaging process, thereby realizing a smart and stable packaging structure and having very excellent market prospect.
Drawings
Fig. 1 is a flow chart showing the steps of a method for preparing white light CSP of the vertical chip.
Fig. 2 is a schematic structural diagram of a fluorescent substrate film in the preparation process of the white CSP of example 1 of the present application.
Fig. 3 is a schematic structural diagram of a vertical chip in the process of preparing a white CSP of embodiment 1 of the present application.
Fig. 4 is a schematic diagram of an assembly structure of a white CSP in the process of preparing a white CSP of example 1 of the present application.
Fig. 5 is a schematic diagram of the structure of the independent white light CSP finally obtained in example 1 of the present application.
In the figure:
1-fluorescent film, 2-vertical chip bonding pad site, 3-double-sided tape, 4-vertical chip, 5-bonding pad.
Detailed Description
Example 1
Embodiment 1 in a first aspect provides a method for preparing white light CSP suitable for vertical chips, as shown in fig. 1, the steps include: (1) preparation of a fluorescent base film: arranging laser cutting fluorescent films with the same shape and size in the central area of the fluorescent film according to the shape and size of a bonding pad on a chip, and exposing hollowed-out bonding pad sites of the vertical chip to obtain the fluorescent film; (2) white light CSP assembly: setting a double-sided tape on the temporary carrier, setting a fluorescent base film on the double-sided tape, and embedding bonding pads on the chip into bonding pad sites cut in advance; (3) Finally, cutting the fluorescent substrate film around each embedded chip, and removing the double-sided tape to obtain the white light CSP.
The thickness of the fluorescent film is 150 μm; the thickness of the fluorescent base film is consistent with that of the fluorescent film.
The hot melt adhesive film is a semisolid hot melt silica gel film, the average viscosity of the semisolid hot melt silica gel film is 10000 mPa.s, and the testing temperature is 50 ℃.
The step (2) further comprises a vacuum baking step: the assembled white CSP was vacuum baked at 2.5KPa,165℃for 3 hours.
The optical cutting of the vertical chip pad sites in step (1) corresponds to the shape and size of the pads on the vertical chip.
The double-sided adhesive tape is a double-sided UV adhesive tape purchased from Dongguan, hefeng New Material technology Co., ltd.
The structure of the fluorescent base film is shown in fig. 2, the fluorescent film 1 and the cut-out vertical chip pad sites 2. The structure of the chip is shown in fig. 3 to include a vertical chip 4 and two pads 5 on the vertical chip 4.
In the process of preparing the package, as shown in fig. 4, the double-sided tape 3 is positioned at the bottommost part, and the vertical chip 4 is embedded into the vertical chip pad site 2, so as to form the packaged package structure. Then dicing is performed around the individual chips, and the resulting individual white light CSP structure includes phosphor film 1, vertical chips 4, and pads 5 as shown in fig. 5.
Example 2
The specific implementation of this example is the same as example 1, except that: the thickness of the fluorescent film was 160. Mu.m
Example 3
The specific implementation of this example is the same as example 1, except that: the average viscosity of the semi-solid hot melt silica gel film is 10500 mPas, and the testing temperature is 50 ℃.
Example 4
The specific implementation of this example is the same as example 1, except that: the average viscosity of the semi-solid hot-melt silica gel film is 11000 mPas, and the testing temperature is 50 ℃.
Comparative example 1
The specific embodiment of this comparative example is the same as example 1, except that: the average viscosity of the semi-solid hot-melt silica gel film is 20000 mPas, and the testing temperature is 50 ℃.
Comparative example 2
The specific embodiment of this comparative example is the same as example 1, except that: the average viscosity of the semi-solid hot melt silica gel film is 6000 mPas, and the testing temperature is 50 ℃.
Comparative example 3
The specific embodiment of this comparative example is the same as example 1, except that: the semi-solid hot-melt silica gel film has an average viscosity of 40000 mPas and a test temperature of 50 ℃.
Comparative example 4
The specific embodiment of this comparative example is the same as example 1, except that: the baking condition is 1KPa,150 ℃ and 3 hours.
Evaluation of Performance
Wafer thrust: the testing method comprises the following steps: the glass plate is stuck with a double-sided UV film (purchased from Dongguan, hefeng new material technology Co., ltd.) and the prepared single material, the fluorescent film is stuck on the double-sided UV film. The glass plate was placed on a pusher and fixed, the pusher head was placed at a position 2/3 of the wafer height, and the wafer was pushed to obtain the pusher force value, and the results are reported in Table 1.
TABLE 1

Claims (4)

1. A white light CSP preparation method suitable for vertical chips is characterized in that: the method comprises the following steps: (1) preparation of a fluorescent base film: taking a fluorescent film with the size being cut down, and arranging laser cutting vertical chip bonding pad sites in the central area of the fluorescent film; (2) white light CSP assembly: adhering the prepared fluorescent substrate film to a double-sided adhesive tape, and inserting a vertical chip into the fluorescent substrate film through a bonding pad site; (3) Cutting the fluorescent substrate film, and removing the double-sided tape to obtain white light CSP;
the thickness of the fluorescent film is 120-180 mu m; the thickness of the fluorescent substrate film is consistent with that of the fluorescent film;
the fluorescent film is any one of hot melt adhesive films;
the hot melt adhesive film is any one of a solid silica adhesive film, a semi-solid hot melt silica adhesive film and a liquid hot melt silica adhesive film;
the average viscosity of the semi-solid hot melt silica gel film and the liquid hot melt silica gel film is 10000-15000 mPa.s, and the test temperature is 50 ℃;
the step (2) further comprises a vacuum baking step: vacuum baking is carried out on the assembled white light CSP, wherein the baking condition is 1-5 KPa, 160-180 ℃ and 3-5 hours;
and (3) the shape and the size of the bonding pad of the optical cutting vertical chip in the step (1) are consistent with those of the bonding pad on the vertical chip.
2. The method for producing white light CSP suitable for use in vertical chips of claim 1, wherein: the double-sided adhesive tape is any one of a double-sided UV adhesive tape, a double-sided pyrolytic adhesive tape and a double-sided heat-resistant adhesive tape.
3. A white light CSP produced by the method for producing a white light CSP suitable for use in a vertical chip according to any one of claims 1 to 2.
4. An application of the white light CSP preparation method of any one of claims 1 to 2, wherein: the method is applied to the preparation method of the white light CSP equipment with high power and high structural stability.
CN202311597930.5A 2023-11-28 2023-11-28 White light CSP (chip size reduction) preparation method suitable for vertical chip and application thereof Active CN117317078B (en)

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CN106449951A (en) * 2016-11-16 2017-02-22 厦门市三安光电科技有限公司 Manufacturing method of light emitting diode packaging structure
CN107591468A (en) * 2017-07-14 2018-01-16 昆山芯乐光光电科技有限公司 A kind of emitting led method for packing of one side based on CSP encapsulating structures
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CN108281531A (en) * 2018-01-19 2018-07-13 昆山琉明光电有限公司 A kind of CSP LED encapsulation methods
CN109830474A (en) * 2018-12-17 2019-05-31 江西省晶能半导体有限公司 Glory LED core piece preparation method and glory LED lamp bead preparation method
CN216054770U (en) * 2021-08-16 2022-03-15 江西晶亮光电科技协同创新有限公司 LED light-emitting device
CN116314550A (en) * 2023-02-21 2023-06-23 硅能光电半导体(广州)有限公司 CSP (chip scale package) structure of forward-mounted LED (light emitting diode) chip, preparation method of CSP structure and COB (chip on board) light source

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080121911A1 (en) * 2006-11-28 2008-05-29 Cree, Inc. Optical preforms for solid state light emitting dice, and methods and systems for fabricating and assembling same
CN103254889A (en) * 2012-02-16 2013-08-21 展晶科技(深圳)有限公司 Manufacturing method of phosphor film, packaging method of corresponding light emitting diode
CN104979432A (en) * 2014-04-08 2015-10-14 刘胜 Technologies of packaging LED chip directly emitting white light
CN104979452A (en) * 2014-04-08 2015-10-14 刘胜 Method for manufacturing and packaging light-emitting diode chip on wafer
CN106449951A (en) * 2016-11-16 2017-02-22 厦门市三安光电科技有限公司 Manufacturing method of light emitting diode packaging structure
CN107591468A (en) * 2017-07-14 2018-01-16 昆山芯乐光光电科技有限公司 A kind of emitting led method for packing of one side based on CSP encapsulating structures
CN108109993A (en) * 2017-11-20 2018-06-01 鸿利智汇集团股份有限公司 A kind of manufacturing method of CSP
CN108281531A (en) * 2018-01-19 2018-07-13 昆山琉明光电有限公司 A kind of CSP LED encapsulation methods
CN109830474A (en) * 2018-12-17 2019-05-31 江西省晶能半导体有限公司 Glory LED core piece preparation method and glory LED lamp bead preparation method
CN216054770U (en) * 2021-08-16 2022-03-15 江西晶亮光电科技协同创新有限公司 LED light-emitting device
CN116314550A (en) * 2023-02-21 2023-06-23 硅能光电半导体(广州)有限公司 CSP (chip scale package) structure of forward-mounted LED (light emitting diode) chip, preparation method of CSP structure and COB (chip on board) light source

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