CN115989635A - 谐振器、滤波器及电子设备 - Google Patents

谐振器、滤波器及电子设备 Download PDF

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Publication number
CN115989635A
CN115989635A CN202080103518.1A CN202080103518A CN115989635A CN 115989635 A CN115989635 A CN 115989635A CN 202080103518 A CN202080103518 A CN 202080103518A CN 115989635 A CN115989635 A CN 115989635A
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CN
China
Prior art keywords
reflective
bus bar
electrode
piston
interdigital
Prior art date
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Pending
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CN202080103518.1A
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English (en)
Inventor
肖祥
西村和紀
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Huawei Technologies Co Ltd
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Huawei Technologies Co Ltd
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Publication date
Application filed by Huawei Technologies Co Ltd filed Critical Huawei Technologies Co Ltd
Publication of CN115989635A publication Critical patent/CN115989635A/zh
Pending legal-status Critical Current

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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538Formation
    • H03H9/14541Multilayer finger or busbar electrode
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02543Characteristics of substrate, e.g. cutting angles
    • H03H9/02574Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02637Details concerning reflective or coupling arrays
    • H03H9/02685Grating lines having particular arrangements
    • H03H9/02724Comb like grating lines
    • H03H9/02732Bilateral comb like grating lines
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • H03H9/644Coupled resonator filters having two acoustic tracks
    • H03H9/6456Coupled resonator filters having two acoustic tracks being electrically coupled
    • H03H9/6469Coupled resonator filters having two acoustic tracks being electrically coupled via two connecting electrodes
    • H03H9/6476Coupled resonator filters having two acoustic tracks being electrically coupled via two connecting electrodes the tracks being electrically parallel
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • H03H9/6483Ladder SAW filters

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

一种谐振器、滤波器(1010)及电子设备(100),涉及谐波抑制技术领域,能够减少谐振器在谐振点和反谐振点之间的杂波。该谐振器包括:压电衬底(200)、叉指换能器(01);叉指换能器(01)包括:沿第一方向(XX’)依次交替且并列设置的多个第一叉指电极(11)和多个第二叉指电极(12);沿垂直第一方向(YY’)上分布在多个叉指电极(T)的不同侧的第一汇流条(10)和第二汇流条(20);第一汇流条(10)与第一叉指电极(11)连接,第二汇流条(20)与第二叉指电极(12)连接;设置在第一叉指电极(11)两个端部上表面的第一piston(1)和第二piston(3),设置在第二叉指电极(12)两个端部上表面的第三piston(3)和第四piston(4);第一piston(1)相对于第二piston(2)靠近第一汇流条(10),第三piston(3)相对于第四piston(4)靠近第一汇流条(1);第一piston(1)与第三piston(3)的长度不同,第二piston(2)和第四piston(4)的长度不同。

Description

PCT国内申请,说明书已公开。

Claims (13)

  1. PCT国内申请,权利要求书已公开。
CN202080103518.1A 2020-11-03 2020-11-03 谐振器、滤波器及电子设备 Pending CN115989635A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2020/126075 WO2022094743A1 (zh) 2020-11-03 2020-11-03 谐振器、滤波器及电子设备

Publications (1)

Publication Number Publication Date
CN115989635A true CN115989635A (zh) 2023-04-18

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EP (1) EP4228155A4 (zh)
CN (1) CN115989635A (zh)
WO (1) WO2022094743A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114978089B (zh) * 2022-05-20 2023-11-21 武汉敏声新技术有限公司 一种谐振器及其制备方法、滤波器
CN115208349A (zh) * 2022-09-16 2022-10-18 深圳新声半导体有限公司 一种声表面波滤波器
CN116192085A (zh) * 2023-02-20 2023-05-30 无锡市好达电子股份有限公司 横向激发体声波谐振器
CN116366022A (zh) * 2023-03-20 2023-06-30 江苏卓胜微电子股份有限公司 温度补偿声表面换能器及制造方法
CN116683885B (zh) * 2023-05-23 2023-12-22 无锡市好达电子股份有限公司 一种具有活塞模式的声表面波装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7576471B1 (en) * 2007-09-28 2009-08-18 Triquint Semiconductor, Inc. SAW filter operable in a piston mode
US7939989B2 (en) * 2009-09-22 2011-05-10 Triquint Semiconductor, Inc. Piston mode acoustic wave device and method providing a high coupling factor
DE102010005596B4 (de) * 2010-01-25 2015-11-05 Epcos Ag Elektroakustischer Wandler mit verringerten Verlusten durch transversale Emission und verbesserter Performance durch Unterdrückung transversaler Moden
KR102636251B1 (ko) * 2016-02-24 2024-02-14 (주)와이솔 횡모드 억제를 위한 표면 탄성파 디바이스
JP6509151B2 (ja) * 2016-03-11 2019-05-08 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ
CN109328431B (zh) * 2016-06-27 2022-07-29 株式会社村田制作所 弹性波滤波器装置
WO2018216548A1 (ja) * 2017-05-22 2018-11-29 株式会社村田製作所 弾性波装置
JP2019091978A (ja) * 2017-11-13 2019-06-13 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
DE102018108732A1 (de) * 2018-04-12 2019-10-17 RF360 Europe GmbH Dünnschicht SAW-Wandler mit verbesserten Eigenschaften, elektroakustisches Filter und HF-Filter
CN109004914B (zh) * 2018-07-11 2022-05-03 开元通信技术(厦门)有限公司 一种声表面波器件及其制备方法
DE102018124372A1 (de) * 2018-10-02 2020-04-02 RF360 Europe GmbH Elektroakustischer Resonator
JP6819834B1 (ja) * 2019-02-18 2021-01-27 株式会社村田製作所 弾性波装置
CN110572136B (zh) * 2019-09-09 2022-11-01 杭州左蓝微电子技术有限公司 一种叉指换能器

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WO2022094743A1 (zh) 2022-05-12
EP4228155A4 (en) 2023-12-20
EP4228155A1 (en) 2023-08-16

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