CN115335689B - 氢传感器、氢检测方法以及氢检测装置 - Google Patents

氢传感器、氢检测方法以及氢检测装置

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Publication number
CN115335689B
CN115335689B CN202180024260.0A CN202180024260A CN115335689B CN 115335689 B CN115335689 B CN 115335689B CN 202180024260 A CN202180024260 A CN 202180024260A CN 115335689 B CN115335689 B CN 115335689B
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CN
China
Prior art keywords
electrode
hydrogen
layer
metal oxide
exposed portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202180024260.0A
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English (en)
Chinese (zh)
Other versions
CN115335689A (zh
Inventor
本间运也
片山幸治
河合贤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nuvoton Technology Corp Japan
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Nuvoton Technology Corp Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nuvoton Technology Corp Japan filed Critical Nuvoton Technology Corp Japan
Publication of CN115335689A publication Critical patent/CN115335689A/zh
Application granted granted Critical
Publication of CN115335689B publication Critical patent/CN115335689B/zh
Active legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005—H2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
CN202180024260.0A 2020-04-16 2021-04-06 氢传感器、氢检测方法以及氢检测装置 Active CN115335689B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-073461 2020-04-16
JP2020073461 2020-04-16
PCT/JP2021/014645 WO2021210453A1 (ja) 2020-04-16 2021-04-06 水素センサ、水素検知方法および水素検知装置

Publications (2)

Publication Number Publication Date
CN115335689A CN115335689A (zh) 2022-11-11
CN115335689B true CN115335689B (zh) 2026-02-10

Family

ID=78084850

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180024260.0A Active CN115335689B (zh) 2020-04-16 2021-04-06 氢传感器、氢检测方法以及氢检测装置

Country Status (5)

Country Link
US (1) US12158459B2 (https=)
EP (1) EP4137806B1 (https=)
JP (1) JP7648606B2 (https=)
CN (1) CN115335689B (https=)
WO (1) WO2021210453A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2023017748A1 (https=) * 2021-08-11 2023-02-16
WO2023047759A1 (ja) * 2021-09-22 2023-03-30 ヌヴォトンテクノロジージャパン株式会社 水素検知装置及び水素検知装置の制御方法
WO2023136083A1 (ja) * 2022-01-17 2023-07-20 ヌヴォトンテクノロジージャパン株式会社 水素検知方法、駆動回路および水素検知装置
WO2024009891A1 (ja) * 2022-07-04 2024-01-11 ヌヴォトンテクノロジージャパン株式会社 水素検知装置及びその製造方法
JPWO2024053537A1 (https=) * 2022-09-06 2024-03-14
WO2025173708A1 (ja) * 2024-02-15 2025-08-21 ヌヴォトンテクノロジージャパン株式会社 センサーパッケージおよびセンサーパッケージの製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5958348A (ja) * 1982-09-29 1984-04-04 Hitachi Ltd 水素ガス検知素子
JPS6040945A (ja) * 1983-08-16 1985-03-04 Hochiki Corp 半導体ガスセンサ
DE102009054435A1 (de) * 2009-11-25 2011-05-26 Kechter, Andreas, Dipl.-Ing. Heizbarer Gassensor und Verfahren zu dessen Herstellung
JP2017022938A (ja) 2015-07-14 2017-01-26 キヤノン株式会社 振動型アクチュエータの制御装置及び制御方法
EP3343212B1 (en) 2015-08-28 2019-11-06 Panasonic Intellectual Property Management Co., Ltd. Gas sensor and fuel cell vehicle
JP6761764B2 (ja) * 2016-03-18 2020-09-30 パナソニックセミコンダクターソリューションズ株式会社 水素センサ及び燃料電池自動車、並びに水素検出方法
JP6738749B2 (ja) * 2016-03-25 2020-08-12 パナソニックセミコンダクターソリューションズ株式会社 気体センサ、水素検出方法、及び燃料電池自動車
CN107315033B (zh) * 2016-04-26 2021-08-06 新唐科技日本株式会社 气体检测装置以及氢检测方法
CN107436313B (zh) 2016-05-25 2021-08-27 新唐科技日本株式会社 气体传感器装置、气体传感器模块及气体检测方法
JP6840170B2 (ja) * 2016-12-15 2021-03-10 ヌヴォトンテクノロジージャパン株式会社 水素検出装置、燃料電池自動車、水素漏洩監視システム、複合センサモジュール、水素検出方法、およびプログラム
JP6886304B2 (ja) * 2017-01-31 2021-06-16 ヌヴォトンテクノロジージャパン株式会社 気体センサ
WO2019044256A1 (ja) * 2017-09-04 2019-03-07 パナソニックＩｐマネジメント株式会社 気体センサ、気体検知装置、燃料電池自動車および気体センサの製造方法
JP7433286B2 (ja) * 2019-03-07 2024-02-19 ヌヴォトンテクノロジージャパン株式会社 気体センサとその製造方法、および燃料電池自動車
JP7138240B2 (ja) * 2019-04-16 2022-09-15 ヌヴォトンテクノロジージャパン株式会社 気体センサの駆動方法及び気体検出装置
JP7486123B2 (ja) * 2020-07-02 2024-05-17 パナソニックＩｐマネジメント株式会社 ガスセンサ装置

Also Published As

Publication number Publication date
JP7648606B2 (ja) 2025-03-18
WO2021210453A1 (ja) 2021-10-21
JPWO2021210453A1 (https=) 2021-10-21
EP4137806A4 (en) 2023-10-04
CN115335689A (zh) 2022-11-11
EP4137806A1 (en) 2023-02-22
US12158459B2 (en) 2024-12-03
US20230022428A1 (en) 2023-01-26
EP4137806B1 (en) 2025-02-26

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