JP7648606B2 - 水素センサ、水素検知方法および水素検知装置 - Google Patents

水素センサ、水素検知方法および水素検知装置 Download PDF

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JP7648606B2
JP7648606B2 JP2022515322A JP2022515322A JP7648606B2 JP 7648606 B2 JP7648606 B2 JP 7648606B2 JP 2022515322 A JP2022515322 A JP 2022515322A JP 2022515322 A JP2022515322 A JP 2022515322A JP 7648606 B2 JP7648606 B2 JP 7648606B2
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electrode
hydrogen
layer
metal oxide
exposed portion
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JPWO2021210453A1 (https=
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運也 本間
幸治 片山
賢 河合
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Nuvoton Technology Corp Japan
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005—H2

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP2022515322A 2020-04-16 2021-04-06 水素センサ、水素検知方法および水素検知装置 Active JP7648606B2 (ja)

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JP2020073461 2020-04-16
JP2020073461 2020-04-16
PCT/JP2021/014645 WO2021210453A1 (ja) 2020-04-16 2021-04-06 水素センサ、水素検知方法および水素検知装置

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JPWO2021210453A1 JPWO2021210453A1 (https=) 2021-10-21
JP7648606B2 true JP7648606B2 (ja) 2025-03-18

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US (1) US12158459B2 (https=)
EP (1) EP4137806B1 (https=)
JP (1) JP7648606B2 (https=)
CN (1) CN115335689B (https=)
WO (1) WO2021210453A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2023017748A1 (https=) * 2021-08-11 2023-02-16
WO2023047759A1 (ja) * 2021-09-22 2023-03-30 ヌヴォトンテクノロジージャパン株式会社 水素検知装置及び水素検知装置の制御方法
WO2023136083A1 (ja) * 2022-01-17 2023-07-20 ヌヴォトンテクノロジージャパン株式会社 水素検知方法、駆動回路および水素検知装置
WO2024009891A1 (ja) * 2022-07-04 2024-01-11 ヌヴォトンテクノロジージャパン株式会社 水素検知装置及びその製造方法
JPWO2024053537A1 (https=) * 2022-09-06 2024-03-14
WO2025173708A1 (ja) * 2024-02-15 2025-08-21 ヌヴォトンテクノロジージャパン株式会社 センサーパッケージおよびセンサーパッケージの製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017173307A (ja) 2016-03-18 2017-09-28 パナソニックＩｐマネジメント株式会社 水素センサ及び燃料電池自動車、並びに水素検出方法。
JP2017181494A (ja) 2016-03-25 2017-10-05 パナソニックＩｐマネジメント株式会社 気体センサ、水素検出方法、及び燃料電池自動車
JP2017215312A (ja) 2016-05-25 2017-12-07 パナソニックＩｐマネジメント株式会社 気体センサ装置、気体センサモジュール、及び気体検知方法
WO2018143016A1 (ja) 2017-01-31 2018-08-09 パナソニックＩｐマネジメント株式会社 気体センサ
WO2019044256A1 (ja) 2017-09-04 2019-03-07 パナソニックＩｐマネジメント株式会社 気体センサ、気体検知装置、燃料電池自動車および気体センサの製造方法

Family Cites Families (10)

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JPS5958348A (ja) * 1982-09-29 1984-04-04 Hitachi Ltd 水素ガス検知素子
JPS6040945A (ja) * 1983-08-16 1985-03-04 Hochiki Corp 半導体ガスセンサ
DE102009054435A1 (de) * 2009-11-25 2011-05-26 Kechter, Andreas, Dipl.-Ing. Heizbarer Gassensor und Verfahren zu dessen Herstellung
JP2017022938A (ja) 2015-07-14 2017-01-26 キヤノン株式会社 振動型アクチュエータの制御装置及び制御方法
EP3343212B1 (en) 2015-08-28 2019-11-06 Panasonic Intellectual Property Management Co., Ltd. Gas sensor and fuel cell vehicle
CN107315033B (zh) * 2016-04-26 2021-08-06 新唐科技日本株式会社 气体检测装置以及氢检测方法
JP6840170B2 (ja) * 2016-12-15 2021-03-10 ヌヴォトンテクノロジージャパン株式会社 水素検出装置、燃料電池自動車、水素漏洩監視システム、複合センサモジュール、水素検出方法、およびプログラム
JP7433286B2 (ja) * 2019-03-07 2024-02-19 ヌヴォトンテクノロジージャパン株式会社 気体センサとその製造方法、および燃料電池自動車
JP7138240B2 (ja) * 2019-04-16 2022-09-15 ヌヴォトンテクノロジージャパン株式会社 気体センサの駆動方法及び気体検出装置
JP7486123B2 (ja) * 2020-07-02 2024-05-17 パナソニックＩｐマネジメント株式会社 ガスセンサ装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017173307A (ja) 2016-03-18 2017-09-28 パナソニックＩｐマネジメント株式会社 水素センサ及び燃料電池自動車、並びに水素検出方法。
JP2017181494A (ja) 2016-03-25 2017-10-05 パナソニックＩｐマネジメント株式会社 気体センサ、水素検出方法、及び燃料電池自動車
JP2017215312A (ja) 2016-05-25 2017-12-07 パナソニックＩｐマネジメント株式会社 気体センサ装置、気体センサモジュール、及び気体検知方法
WO2018143016A1 (ja) 2017-01-31 2018-08-09 パナソニックＩｐマネジメント株式会社 気体センサ
WO2019044256A1 (ja) 2017-09-04 2019-03-07 パナソニックＩｐマネジメント株式会社 気体センサ、気体検知装置、燃料電池自動車および気体センサの製造方法

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Publication number Publication date
WO2021210453A1 (ja) 2021-10-21
JPWO2021210453A1 (https=) 2021-10-21
EP4137806A4 (en) 2023-10-04
CN115335689A (zh) 2022-11-11
CN115335689B (zh) 2026-02-10
EP4137806A1 (en) 2023-02-22
US12158459B2 (en) 2024-12-03
US20230022428A1 (en) 2023-01-26
EP4137806B1 (en) 2025-02-26

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