CN115135996B - 光透射性积层体的检查方法 - Google Patents

光透射性积层体的检查方法

Info

Publication number
CN115135996B
CN115135996B CN202180016062.XA CN202180016062A CN115135996B CN 115135996 B CN115135996 B CN 115135996B CN 202180016062 A CN202180016062 A CN 202180016062A CN 115135996 B CN115135996 B CN 115135996B
Authority
CN
China
Prior art keywords
light
laminate
defect
transmitting laminate
transmitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202180016062.XA
Other languages
English (en)
Chinese (zh)
Other versions
CN115135996A (zh
Inventor
田中卓哉
望月政和
小西隆博
伊崎章典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to CN202510938075.2A priority Critical patent/CN120761412A/zh
Priority to CN202510938146.9A priority patent/CN120761413A/zh
Priority to CN202510938016.5A priority patent/CN120761411A/zh
Publication of CN115135996A publication Critical patent/CN115135996A/zh
Application granted granted Critical
Publication of CN115135996B publication Critical patent/CN115135996B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/023—Optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/108—Miscellaneous
    • G01N2201/1087—Focussed scan beam, e.g. laser

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Laminated Bodies (AREA)
CN202180016062.XA 2020-02-28 2021-02-16 光透射性积层体的检查方法 Active CN115135996B (zh)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202510938075.2A CN120761412A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938146.9A CN120761413A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938016.5A CN120761411A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-032701 2020-02-28
JP2020032701A JP7451227B2 (ja) 2020-02-28 2020-02-28 光透過性積層体の検査方法
PCT/JP2021/005643 WO2021172089A1 (ja) 2020-02-28 2021-02-16 光透過性積層体の検査方法

Related Child Applications (3)

Application Number Title Priority Date Filing Date
CN202510938016.5A Division CN120761411A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938075.2A Division CN120761412A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938146.9A Division CN120761413A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法

Publications (2)

Publication Number Publication Date
CN115135996A CN115135996A (zh) 2022-09-30
CN115135996B true CN115135996B (zh) 2026-04-03

Family

ID=77491087

Family Applications (4)

Application Number Title Priority Date Filing Date
CN202180016062.XA Active CN115135996B (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938146.9A Pending CN120761413A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938016.5A Pending CN120761411A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938075.2A Pending CN120761412A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法

Family Applications After (3)

Application Number Title Priority Date Filing Date
CN202510938146.9A Pending CN120761413A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938016.5A Pending CN120761411A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938075.2A Pending CN120761412A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法

Country Status (5)

Country Link
JP (4) JP7451227B2 (https=)
KR (4) KR20220145816A (https=)
CN (4) CN115135996B (https=)
TW (3) TW202521974A (https=)
WO (1) WO2021172089A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7451227B2 (ja) * 2020-02-28 2024-03-18 日東電工株式会社 光透過性積層体の検査方法
KR20240045215A (ko) * 2021-08-17 2024-04-05 닛토덴코 가부시키가이샤 광투과성 적층체의 검사 방법
JP7723528B2 (ja) 2021-08-20 2025-08-14 株式会社シマノ 充電装置および充電システム
JP2023105601A (ja) 2022-01-19 2023-07-31 日東電工株式会社 表面保護フィルムおよび表面保護フィルム付光学部材
JP7288989B1 (ja) 2022-01-31 2023-06-08 日東電工株式会社 長尺光学フィルムの検査方法
JP7472927B2 (ja) * 2022-03-17 2024-04-23 味の素株式会社 樹脂シート及びその製造方法、並びに欠点検出方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001264259A (ja) * 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP2005134573A (ja) * 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
JP2018509752A (ja) * 2015-01-21 2018-04-05 ケーエルエー−テンカー コーポレイション 焦点体積方法を用いたウェーハ検査

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6559465B1 (en) * 1996-08-02 2003-05-06 Canon Kabushiki Kaisha Surface position detecting method having a detection timing determination
NL1006378C2 (nl) 1997-06-23 1998-12-24 Tno Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen.
JPH11183151A (ja) * 1997-12-22 1999-07-09 Canon Inc 透明シート検査装置
JP2001228091A (ja) * 2000-02-14 2001-08-24 Kobe Steel Ltd 欠陥検査方法及びその装置
JP2002303714A (ja) * 2001-04-03 2002-10-18 Toppan Printing Co Ltd カラーフィルタの製造方法
JP2003139713A (ja) * 2001-10-30 2003-05-14 Tomoegawa Paper Co Ltd シート材料
JP3974400B2 (ja) * 2002-01-07 2007-09-12 日東電工株式会社 シート状成形体の検査結果記録方法及び検査結果記録システム及びロール状成形体
JP2004054092A (ja) * 2002-07-23 2004-02-19 Elpida Memory Inc マスクおよびその製造方法
JP2005062165A (ja) 2003-07-28 2005-03-10 Nitto Denko Corp シート状製品の検査方法、検査システム、シート状製品、及び、画像表示装置
WO2009025210A1 (ja) 2007-08-23 2009-02-26 Nitto Denko Corporation 積層フィルムの欠陥検査方法およびその装置
JP2009069142A (ja) * 2007-08-23 2009-04-02 Nitto Denko Corp 積層フィルムの欠陥検査方法およびその装置
WO2009128115A1 (ja) * 2008-04-15 2009-10-22 日東電工株式会社 光学フィルム積層体ロールならびにその製造方法および装置
JP2012002676A (ja) 2010-06-17 2012-01-05 Toshiba Corp マスク欠陥検査装置およびマスク欠陥検査方法
JP2013231662A (ja) * 2012-04-27 2013-11-14 Mitsubishi Chemicals Corp 積層体の検査方法、積層体の製造方法、及び積層体の検査装置
JP2015225041A (ja) * 2014-05-29 2015-12-14 住友化学株式会社 積層偏光フィルムの欠陥検査方法
JP6437329B2 (ja) * 2015-02-03 2018-12-12 住友化学株式会社 光学フィルムの欠陥検査方法
JP6807637B2 (ja) * 2015-09-30 2021-01-06 日東電工株式会社 偏光子の検査方法および偏光板の製造方法
WO2017098970A1 (ja) * 2015-12-10 2017-06-15 日東電工株式会社 円偏光板およびそれを用いたフレキシブルな画像表示装置
JP2017166903A (ja) 2016-03-15 2017-09-21 株式会社大真空 欠陥検査装置及び欠陥検査方法
CN109856049A (zh) 2018-12-14 2019-06-07 杭州元色科技有限公司 透明板材瑕疵检测全内反射光导入装置及载片方法
JP2019215371A (ja) * 2019-08-26 2019-12-19 住友化学株式会社 光学フィルム及び積層光学フィルムの欠陥検査方法
JP7451227B2 (ja) * 2020-02-28 2024-03-18 日東電工株式会社 光透過性積層体の検査方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001264259A (ja) * 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP2005134573A (ja) * 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
JP2018509752A (ja) * 2015-01-21 2018-04-05 ケーエルエー−テンカー コーポレイション 焦点体積方法を用いたウェーハ検査

Also Published As

Publication number Publication date
JP7766141B2 (ja) 2025-11-07
KR20260023611A (ko) 2026-02-20
CN115135996A (zh) 2022-09-30
JP2024111327A (ja) 2024-08-16
JP7451227B2 (ja) 2024-03-18
TW202521975A (zh) 2025-06-01
JP2023053294A (ja) 2023-04-12
TW202141029A (zh) 2021-11-01
KR20220145816A (ko) 2022-10-31
TW202519849A (zh) 2025-05-16
WO2021172089A1 (ja) 2021-09-02
KR20260025440A (ko) 2026-02-24
TW202521974A (zh) 2025-06-01
CN120761413A (zh) 2025-10-10
JP2024083647A (ja) 2024-06-21
KR20260025441A (ko) 2026-02-24
JP7498815B2 (ja) 2024-06-12
JP2021135219A (ja) 2021-09-13
CN120761411A (zh) 2025-10-10
CN120761412A (zh) 2025-10-10

Similar Documents

Publication Publication Date Title
CN115135996B (zh) 光透射性积层体的检查方法
US10345096B2 (en) Optical strain gauge
CN107850759B (zh) 亚微米晶片对准
JP2021135219A5 (https=)
CN115728308A (zh) 层叠光学膜、光学膜的缺陷检查方法及层叠光学膜的制法
CN104081153B (zh) 确定衬底形状变化的设备和方法
JP2025019281A (ja) 光透過性積層体の検査方法および検査装置
KR20240144891A (ko) 장척 광학 필름의 검사 방법
TWI920061B (zh) 光透射性積層體之檢查方法
WO2023021854A1 (ja) 光透過性積層体の検査方法
JP5092150B2 (ja) 試料片の厚さ及び屈折率の計測方法及び装置
JP2019109060A (ja) 光学素子の検査方法
JP2025095461A (ja) 位相差フィルムの検査装置、位相差フィルムの製造装置、位相差フィルムの検査方法、及び位相差フィルムの製造方法
CN112924457A (zh) 测定方法、管理方法以及光学部件的制造方法
JP2009210300A (ja) 観察方法及び観察装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant