CN1150397A - 清洗方法以及清洗装置 - Google Patents

清洗方法以及清洗装置 Download PDF

Info

Publication number
CN1150397A
CN1150397A CN95193443A CN95193443A CN1150397A CN 1150397 A CN1150397 A CN 1150397A CN 95193443 A CN95193443 A CN 95193443A CN 95193443 A CN95193443 A CN 95193443A CN 1150397 A CN1150397 A CN 1150397A
Authority
CN
China
Prior art keywords
cleaning
fluid
aforementioned
cleaned
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN95193443A
Other languages
English (en)
Chinese (zh)
Inventor
今城康隆
中村孝一郎
稻田实
河越竣一
土屋武司
都川岁一
丰岛范夫
川岛大辅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dong Jing Electric Co Ltd
Toshiba Corp
Original Assignee
Dong Jing Electric Co Ltd
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dong Jing Electric Co Ltd, Toshiba Corp filed Critical Dong Jing Electric Co Ltd
Publication of CN1150397A publication Critical patent/CN1150397A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
CN95193443A 1994-04-14 1995-04-14 清洗方法以及清洗装置 Pending CN1150397A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP100727/94 1994-04-14
JP10072794 1994-04-14

Publications (1)

Publication Number Publication Date
CN1150397A true CN1150397A (zh) 1997-05-21

Family

ID=14281655

Family Applications (1)

Application Number Title Priority Date Filing Date
CN95193443A Pending CN1150397A (zh) 1994-04-14 1995-04-14 清洗方法以及清洗装置

Country Status (4)

Country Link
KR (1) KR970702105A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN1150397A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW270904B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
WO (1) WO1995028235A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101196563B (zh) * 2006-12-05 2012-06-20 中芯国际集成电路制造(上海)有限公司 超声波探测器及其应用于液面探测的方法
CN104014501A (zh) * 2014-06-11 2014-09-03 山东鸿民轧辊模具有限公司 轧辊真空热处理清洗设备
CN105408032A (zh) * 2013-05-31 2016-03-16 米切尔·鲍尔戴特 电子部件和/或电路专用清洁装置
CN107081303A (zh) * 2016-02-12 2017-08-22 光洋机械产业株式会社 洗净方法及此洗净方法所使用的洗净装置
CN108015277A (zh) * 2017-11-24 2018-05-11 北京遥感设备研究所 一种3d打印冷板流道自动清洗装置
CN112424874A (zh) * 2018-07-05 2021-02-26 法玛通公司 核燃料组件制造方法、核燃料组件制造工厂及扩展该工厂的方法
CN112439659A (zh) * 2015-04-02 2021-03-05 玛太克司马特股份有限公司 清洗方法、喷砂方法
CN113663978A (zh) * 2021-08-16 2021-11-19 湖南省计量检测研究院 一种真空超声洗瓶机
CN113866097A (zh) * 2021-09-09 2021-12-31 中国科学院大气物理研究所 光学仪器镜面自动清洁系统及其使用方法
CN116251779A (zh) * 2021-12-10 2023-06-13 力晶积成电子制造股份有限公司 清洗装置与清洗方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001246331A (ja) 2000-03-08 2001-09-11 Sharp Corp 洗浄装置
US7252100B1 (en) * 2003-03-28 2007-08-07 Emc Corporation Systems and methods for processing a set of circuit boards
JP5072062B2 (ja) * 2006-03-13 2012-11-14 栗田工業株式会社 水素ガス溶解洗浄水の製造方法、製造装置及び洗浄装置
KR101100372B1 (ko) * 2009-04-22 2011-12-30 주식회사 케이피엠테크 단일조 방식의 세정장치
US10994311B2 (en) 2013-05-31 2021-05-04 Michel Bourdat Specific device for cleaning electronic components and/or circuits
US12269070B2 (en) * 2020-12-16 2025-04-08 The Boeing Company Flexible cavitation apparatus
US12296431B2 (en) 2021-12-02 2025-05-13 The Boeing Company Automated cavitation processing

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916195Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1970-03-18 1974-04-23
JPS55120180U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-02-16 1980-08-26
JPS61125386U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-01-24 1986-08-06
WO1991013697A1 (fr) * 1990-03-16 1991-09-19 Kabushiki Kaisha Toshiba Procede de nettoyage et appareil prevu a cet effet
JPH0513587U (ja) * 1991-08-07 1993-02-23 株式会社北村製作所 超音波洗浄装置
JPH06210252A (ja) * 1993-01-21 1994-08-02 Uchinami Techno Clean:Kk 水中洗浄方法及びその装置
JPH06326072A (ja) * 1993-05-17 1994-11-25 Sony Corp 洗浄装置
JPH0760208A (ja) * 1993-08-31 1995-03-07 Trinity Ind Corp 洗浄装置

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101196563B (zh) * 2006-12-05 2012-06-20 中芯国际集成电路制造(上海)有限公司 超声波探测器及其应用于液面探测的方法
CN105408032A (zh) * 2013-05-31 2016-03-16 米切尔·鲍尔戴特 电子部件和/或电路专用清洁装置
CN104014501A (zh) * 2014-06-11 2014-09-03 山东鸿民轧辊模具有限公司 轧辊真空热处理清洗设备
CN112439659A (zh) * 2015-04-02 2021-03-05 玛太克司马特股份有限公司 清洗方法、喷砂方法
CN107081303A (zh) * 2016-02-12 2017-08-22 光洋机械产业株式会社 洗净方法及此洗净方法所使用的洗净装置
CN108015277A (zh) * 2017-11-24 2018-05-11 北京遥感设备研究所 一种3d打印冷板流道自动清洗装置
CN112424874A (zh) * 2018-07-05 2021-02-26 法玛通公司 核燃料组件制造方法、核燃料组件制造工厂及扩展该工厂的方法
CN113663978A (zh) * 2021-08-16 2021-11-19 湖南省计量检测研究院 一种真空超声洗瓶机
CN113663978B (zh) * 2021-08-16 2022-05-24 湖南省计量检测研究院 一种真空超声洗瓶机
CN113866097A (zh) * 2021-09-09 2021-12-31 中国科学院大气物理研究所 光学仪器镜面自动清洁系统及其使用方法
CN116251779A (zh) * 2021-12-10 2023-06-13 力晶积成电子制造股份有限公司 清洗装置与清洗方法

Also Published As

Publication number Publication date
WO1995028235A1 (fr) 1995-10-26
KR970702105A (ko) 1997-05-13
TW270904B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1996-02-21

Similar Documents

Publication Publication Date Title
CN1150397A (zh) 清洗方法以及清洗装置
CN1107554C (zh) 利用高密度压缩液化气的清洗机构、清洗设备及清洗方法
US8327861B2 (en) Megasonic precision cleaning of semiconductor process equipment components and parts
CN1162895C (zh) 湿式处理装置
CN1240488C (zh) 基板处理装置及基板清洗方法
CN1184715A (zh) 清洗用双流体喷嘴与采用该喷嘴的清洗装置及清洗方法
CN1949086A (zh) 基板处理方法以及基板处理装置
CN101578688A (zh) 基板的处理装置以及处理方法
JP2007301529A (ja) 洗浄装置
TWI819302B (zh) 用於化學處理一基板之模組
KR20040032121A (ko) 세정 시스템, 초음파 세정 장치, 진공 건조 장치, 세정장치, 세정조, 건조조 및 생산 시스템
KR20080047670A (ko) 세정 장치 및 이를 이용한 세정 방법
FI3003583T3 (en) Specific process for cleaning electronic components and/or circuits
JPH07278860A (ja) 機械部品の脱脂洗浄装置
JP2004141778A (ja) 部品類の洗浄装置及び洗浄方法
JP6648526B2 (ja) 洗浄装置及び洗浄方法
CN1284159A (zh) 改进的化学干燥和净化系统
KR100862231B1 (ko) 세정액 분사 장치 및 이를 갖는 기판 세정 장치
JP2009302406A (ja) 基板の処理装置及び処理方法
CN113118132B (zh) 一种超声驱动控制的微液滴集群清洗方法
CN211330454U (zh) 回流焊设备助焊剂冷凝器清洗装置
JP2008307444A (ja) 洗浄装置及び洗浄方法
CN113118103A (zh) 一种共混超声驱动控制微液滴集群清洗系统
TW201801170A (zh) 洗淨方法及洗淨裝置
JPH05161880A (ja) 水を主体とした洗浄方法及びその装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C01 Deemed withdrawal of patent application (patent law 1993)
WD01 Invention patent application deemed withdrawn after publication
REG Reference to a national code

Ref country code: HK

Ref legal event code: GR

Ref document number: 1032439

Country of ref document: HK