CN114402530A - 弹性波滤波器 - Google Patents

弹性波滤波器 Download PDF

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Publication number
CN114402530A
CN114402530A CN202080064475.0A CN202080064475A CN114402530A CN 114402530 A CN114402530 A CN 114402530A CN 202080064475 A CN202080064475 A CN 202080064475A CN 114402530 A CN114402530 A CN 114402530A
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CN
China
Prior art keywords
elastic wave
resonator
electrode finger
edge region
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080064475.0A
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English (en)
Chinese (zh)
Inventor
谷口康政
大门克也
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication date
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Publication of CN114402530A publication Critical patent/CN114402530A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02881—Means for compensation or elimination of undesirable effects of diffraction of wave beam
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6489—Compensation of undesirable effects
    • H03H9/6496—Reducing ripple in transfer characteristic

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202080064475.0A 2019-09-27 2020-09-17 弹性波滤波器 Pending CN114402530A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019176704 2019-09-27
JP2019-176704 2019-09-27
PCT/JP2020/035303 WO2021060150A1 (ja) 2019-09-27 2020-09-17 弾性波フィルタ

Publications (1)

Publication Number Publication Date
CN114402530A true CN114402530A (zh) 2022-04-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080064475.0A Pending CN114402530A (zh) 2019-09-27 2020-09-17 弹性波滤波器

Country Status (5)

Country Link
US (1) US12244296B2 (https=)
JP (1) JP7334786B2 (https=)
KR (1) KR102722444B1 (https=)
CN (1) CN114402530A (https=)
WO (1) WO2021060150A1 (https=)

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JPWO2024143112A1 (https=) * 2022-12-28 2024-07-04
CN119743106A (zh) * 2024-12-12 2025-04-01 锐石创芯(重庆)微电子有限公司 弹性波装置和滤波器

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US12244300B2 (en) 2021-05-17 2025-03-04 Taiyo Yuden Co., Ltd. Ladder-type filter and multiplexer
JP7656487B2 (ja) * 2021-05-17 2025-04-03 太陽誘電株式会社 ラダー型フィルタおよびマルチプレクサ
WO2023048191A1 (ja) * 2021-09-24 2023-03-30 株式会社村田製作所 フィルタ装置
WO2023048256A1 (ja) * 2021-09-27 2023-03-30 株式会社村田製作所 弾性波装置
WO2025084161A1 (ja) * 2023-10-17 2025-04-24 株式会社村田製作所 弾性波装置およびマルチプレクサ

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JPWO2024143112A1 (https=) * 2022-12-28 2024-07-04
CN119743106A (zh) * 2024-12-12 2025-04-01 锐石创芯(重庆)微电子有限公司 弹性波装置和滤波器

Also Published As

Publication number Publication date
KR102722444B1 (ko) 2024-10-25
WO2021060150A1 (ja) 2021-04-01
JPWO2021060150A1 (https=) 2021-04-01
US12244296B2 (en) 2025-03-04
US20220216853A1 (en) 2022-07-07
JP7334786B2 (ja) 2023-08-29
KR20220044321A (ko) 2022-04-07

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