KR102722444B1 - 탄성파 필터 - Google Patents

탄성파 필터 Download PDF

Info

Publication number
KR102722444B1
KR102722444B1 KR1020227007368A KR20227007368A KR102722444B1 KR 102722444 B1 KR102722444 B1 KR 102722444B1 KR 1020227007368 A KR1020227007368 A KR 1020227007368A KR 20227007368 A KR20227007368 A KR 20227007368A KR 102722444 B1 KR102722444 B1 KR 102722444B1
Authority
KR
South Korea
Prior art keywords
elastic wave
resonator
filter
wave resonator
resonators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020227007368A
Other languages
English (en)
Korean (ko)
Other versions
KR20220044321A (ko
Inventor
야스마사 타니구치
카츠야 다이몬
Original Assignee
가부시키가이샤 무라타 세이사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 무라타 세이사쿠쇼 filed Critical 가부시키가이샤 무라타 세이사쿠쇼
Publication of KR20220044321A publication Critical patent/KR20220044321A/ko
Application granted granted Critical
Publication of KR102722444B1 publication Critical patent/KR102722444B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02881—Means for compensation or elimination of undesirable effects of diffraction of wave beam
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6489—Compensation of undesirable effects
    • H03H9/6496—Reducing ripple in transfer characteristic

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
KR1020227007368A 2019-09-27 2020-09-17 탄성파 필터 Active KR102722444B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019176704 2019-09-27
JPJP-P-2019-176704 2019-09-27
PCT/JP2020/035303 WO2021060150A1 (ja) 2019-09-27 2020-09-17 弾性波フィルタ

Publications (2)

Publication Number Publication Date
KR20220044321A KR20220044321A (ko) 2022-04-07
KR102722444B1 true KR102722444B1 (ko) 2024-10-25

Family

ID=75165763

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227007368A Active KR102722444B1 (ko) 2019-09-27 2020-09-17 탄성파 필터

Country Status (5)

Country Link
US (1) US12244296B2 (https=)
JP (1) JP7334786B2 (https=)
KR (1) KR102722444B1 (https=)
CN (1) CN114402530A (https=)
WO (1) WO2021060150A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12244300B2 (en) 2021-05-17 2025-03-04 Taiyo Yuden Co., Ltd. Ladder-type filter and multiplexer
JP7656487B2 (ja) * 2021-05-17 2025-04-03 太陽誘電株式会社 ラダー型フィルタおよびマルチプレクサ
WO2023048191A1 (ja) * 2021-09-24 2023-03-30 株式会社村田製作所 フィルタ装置
WO2023048256A1 (ja) * 2021-09-27 2023-03-30 株式会社村田製作所 弾性波装置
WO2025084161A1 (ja) * 2023-10-17 2025-04-24 株式会社村田製作所 弾性波装置およびマルチプレクサ
CN119743106A (zh) * 2024-12-12 2025-04-01 锐石创芯(重庆)微电子有限公司 弹性波装置和滤波器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010251889A (ja) 2009-04-13 2010-11-04 Panasonic Corp 弾性波共振器及びこれを用いたラダー型フィルタ

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002217680A (ja) 2001-01-22 2002-08-02 Toyo Commun Equip Co Ltd ラダー型弾性表面波フィルタ
JP2003198317A (ja) * 2001-12-21 2003-07-11 Fujitsu Media Device Kk 弾性表面波共振子及び弾性表面波フィルタ
US8476991B2 (en) * 2007-11-06 2013-07-02 Panasonic Corporation Elastic wave resonator, elastic wave filter, and antenna sharing device using the same
US8294331B2 (en) * 2009-09-22 2012-10-23 Triquint Semiconductor, Inc. Acoustic wave guide device and method for minimizing trimming effects and piston mode instabilities
US7939989B2 (en) * 2009-09-22 2011-05-10 Triquint Semiconductor, Inc. Piston mode acoustic wave device and method providing a high coupling factor
DE102010005596B4 (de) 2010-01-25 2015-11-05 Epcos Ag Elektroakustischer Wandler mit verringerten Verlusten durch transversale Emission und verbesserter Performance durch Unterdrückung transversaler Moden
JP6355328B2 (ja) * 2013-12-19 2018-07-11 太陽誘電株式会社 弾性表面波デバイス及びフィルタ
KR102083803B1 (ko) * 2014-06-23 2020-03-03 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
JP6793635B2 (ja) * 2015-03-31 2020-12-02 京セラ株式会社 弾性波モジュール
CN107615654B (zh) * 2015-06-24 2020-08-21 株式会社村田制作所 滤波器装置
WO2017073425A1 (ja) * 2015-10-30 2017-05-04 京セラ株式会社 弾性波共振子、弾性波フィルタ、分波器、通信装置および弾性波共振子の設計方法
US10084427B2 (en) * 2016-01-28 2018-09-25 Qorvo Us, Inc. Surface acoustic wave device having a piezoelectric layer on a quartz substrate and methods of manufacturing thereof
JP6509151B2 (ja) * 2016-03-11 2019-05-08 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ
JP6632481B2 (ja) * 2016-06-22 2020-01-22 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ
WO2018003338A1 (ja) * 2016-06-27 2018-01-04 株式会社村田製作所 弾性波フィルタ装置
US9998097B2 (en) * 2016-07-15 2018-06-12 Murata Manufacturing Co., Ltd. Radio-frequency front-end circuit and communication device
JP6465441B2 (ja) * 2016-07-29 2019-02-06 太陽誘電株式会社 マルチプレクサ
CN109690942B (zh) * 2016-09-13 2023-01-13 株式会社村田制作所 弹性波装置、高频前端电路以及通信装置
WO2018061949A1 (ja) * 2016-09-29 2018-04-05 株式会社村田製作所 弾性波フィルタ装置、マルチプレクサ、高周波フロントエンド回路及び通信装置
WO2018061950A1 (ja) * 2016-09-29 2018-04-05 株式会社村田製作所 弾性波フィルタ装置、マルチプレクサ、高周波フロントエンド回路及び通信装置
JP2018064270A (ja) * 2016-10-13 2018-04-19 スカイワークス ソリューションズ，インコーポレイテッドＳｋｙｗｏｒｋｓ Ｓｏｌｕｔｉｏｎｓ，Ｉｎｃ． 可変電極指ピッチと接続配列とを有する弾性表面波素子
US10924086B2 (en) * 2016-10-14 2021-02-16 Qorvo Us, Inc. Surface acoustic wave (SAW) device with antireflective structure
CN110140296B (zh) * 2016-12-28 2023-01-13 株式会社村田制作所 纵耦合谐振器型弹性波滤波器
KR102270389B1 (ko) * 2017-02-08 2021-06-29 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치
US10804950B2 (en) * 2017-03-22 2020-10-13 Kyocera Corporation Acoustic wave device, multiplexer, and communication apparatus
JP7224094B2 (ja) * 2017-06-26 2023-02-17 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ
US10873313B2 (en) * 2017-09-01 2020-12-22 Skyworks Solutions, Inc. Piston mode lamb wave resonators
JP2019092095A (ja) * 2017-11-16 2019-06-13 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
WO2019117106A1 (ja) * 2017-12-13 2019-06-20 株式会社村田製作所 フィルタ装置およびマルチプレクサ
JP7033462B2 (ja) * 2018-02-19 2022-03-10 ＮＤＫ ＳＡＷ ｄｅｖｉｃｅｓ株式会社 弾性表面波デバイス
JP7080671B2 (ja) * 2018-02-27 2022-06-06 ＮＤＫ ＳＡＷ ｄｅｖｉｃｅｓ株式会社 弾性表面波デバイス
KR20210068131A (ko) * 2018-10-16 2021-06-08 도호쿠 다이가쿠 음향파 디바이스들
US11177791B2 (en) * 2019-02-01 2021-11-16 Qorvo Us, Inc. High quality factor transducers for surface acoustic wave devices
US11146241B2 (en) * 2019-02-08 2021-10-12 Vtt Technical Research Centre Of Finland Ltd Low loss acoustic device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010251889A (ja) 2009-04-13 2010-11-04 Panasonic Corp 弾性波共振器及びこれを用いたラダー型フィルタ

Also Published As

Publication number Publication date
CN114402530A (zh) 2022-04-26
WO2021060150A1 (ja) 2021-04-01
JPWO2021060150A1 (https=) 2021-04-01
US12244296B2 (en) 2025-03-04
US20220216853A1 (en) 2022-07-07
JP7334786B2 (ja) 2023-08-29
KR20220044321A (ko) 2022-04-07

Similar Documents

Publication Publication Date Title
KR102722444B1 (ko) 탄성파 필터
JP6479086B2 (ja) ラダー型弾性波フィルタと、これを用いたアンテナ共用器
US8710940B2 (en) Elastic wave device having a capacitive electrode on the piezoelectric substrate
JP6555346B2 (ja) 弾性波フィルタ装置
KR101514742B1 (ko) 탄성 표면파 장치
CN101796727B (zh) 弹性边界波装置
US7915976B2 (en) Surface acoustic wave resonator and ladder-type filter
WO2018168836A1 (ja) 弾性波素子、弾性波フィルタ装置およびマルチプレクサ
CN103329437A (zh) 弹性表面波滤波器装置
JP7008633B2 (ja) 弾性波フィルタ装置
CN115360994B (zh) 梯形滤波器及多工器
CN114270707B (zh) 弹性波装置
JP5273247B2 (ja) ラダー型フィルタ
JP7656487B2 (ja) ラダー型フィルタおよびマルチプレクサ
JP2021122090A (ja) 弾性波フィルタ
WO2011142183A1 (ja) 弾性表面波装置
WO2022091582A1 (ja) 弾性波フィルタ
US8222973B2 (en) Elastic wave resonator, ladder filter and duplexer
JPWO2010125934A1 (ja) 弾性波装置
US12438521B2 (en) Acoustic wave device and composite filter device
WO2023080167A1 (ja) フィルタ装置及びマルチプレクサ
JP2010263296A (ja) 弾性境界波装置
WO2023248636A1 (ja) 弾性波装置
WO2021045031A1 (ja) 弾性波フィルタ

Legal Events

Date Code Title Description
A201 Request for examination
PA0105 International application

Patent event date: 20220304

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20220304

Comment text: Request for Examination of Application

PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20240325

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20241002

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20241022

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20241023

End annual number: 3

Start annual number: 1

PG1601 Publication of registration