CN113906325B - 光偏转器及其制造方法 - Google Patents

光偏转器及其制造方法 Download PDF

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Publication number
CN113906325B
CN113906325B CN202080040745.4A CN202080040745A CN113906325B CN 113906325 B CN113906325 B CN 113906325B CN 202080040745 A CN202080040745 A CN 202080040745A CN 113906325 B CN113906325 B CN 113906325B
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CN
China
Prior art keywords
torsion bar
mirror
optical deflector
ripple
rotation axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
CN202080040745.4A
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English (en)
Chinese (zh)
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CN113906325A (zh
Inventor
秋山庆太
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
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Stanley Electric Co Ltd
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Publication date
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Publication of CN113906325A publication Critical patent/CN113906325A/zh
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Publication of CN113906325B publication Critical patent/CN113906325B/zh
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN202080040745.4A 2019-06-06 2020-05-20 光偏转器及其制造方法 Active CN113906325B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019106111A JP7297538B2 (ja) 2019-06-06 2019-06-06 光偏向器及び製造方法
JP2019-106111 2019-06-06
PCT/JP2020/019976 WO2020246245A1 (ja) 2019-06-06 2020-05-20 光偏向器及び製造方法

Publications (2)

Publication Number Publication Date
CN113906325A CN113906325A (zh) 2022-01-07
CN113906325B true CN113906325B (zh) 2024-12-10

Family

ID=73652846

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080040745.4A Active CN113906325B (zh) 2019-06-06 2020-05-20 光偏转器及其制造方法

Country Status (5)

Country Link
US (1) US12248138B2 (enExample)
EP (1) EP3982186A4 (enExample)
JP (1) JP7297538B2 (enExample)
CN (1) CN113906325B (enExample)
WO (1) WO2020246245A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7600030B2 (ja) * 2021-05-14 2024-12-16 スタンレー電気株式会社 光偏向器
JP2023008577A (ja) * 2021-07-06 2023-01-19 スタンレー電気株式会社 光偏向器
JP7751997B2 (ja) * 2021-07-13 2025-10-09 スタンレー電気株式会社 Ｍｅｍｓ光偏向器及び光走査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1820219A (zh) * 2004-02-27 2006-08-16 松下电器产业株式会社 照明光源及使用了该照明光源的2维图像显示设备
JP2014102354A (ja) * 2012-11-19 2014-06-05 Stanley Electric Co Ltd 光偏向器

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6613591B1 (en) * 2002-03-07 2003-09-02 Memc Electronic Materials, Inc. Method of estimating post-polishing waviness characteristics of a semiconductor wafer
US6872319B2 (en) * 2002-09-30 2005-03-29 Rockwell Scientific Licensing, Llc Process for high yield fabrication of MEMS devices
JP2006319387A (ja) 2005-05-10 2006-11-24 Seiko Epson Corp Ｍｅｍｓレゾネータ
US7573625B2 (en) 2005-07-07 2009-08-11 Lexmark International, Inc. Multiharmonic galvanometric scanning device
JP2009031643A (ja) * 2007-07-30 2009-02-12 Canon Inc 揺動体装置、光偏向器およびそれを用いた画像形成装置
JP5172364B2 (ja) * 2008-01-16 2013-03-27 スタンレー電気株式会社 光偏向器
JP5444968B2 (ja) * 2009-05-11 2014-03-19 ミツミ電機株式会社 アクチュエータ及びこれを用いた光走査装置
JP5397136B2 (ja) * 2009-09-30 2014-01-22 住友電気工業株式会社 Ｉｉｉ族窒化物半導体レーザ素子、及びｉｉｉ族窒化物半導体レーザ素子を作製する方法
JP2012063413A (ja) 2010-09-14 2012-03-29 Ricoh Co Ltd 光走査装置およびこの光走査装置を組み込んだ画像形成装置ならびに投影装置
JP6369742B2 (ja) * 2014-02-26 2018-08-08 北陽電機株式会社 微小機械装置
JP6809018B2 (ja) * 2016-07-26 2021-01-06 株式会社リコー 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP6455547B2 (ja) 2017-05-24 2019-01-23 ミツミ電機株式会社 光走査装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1820219A (zh) * 2004-02-27 2006-08-16 松下电器产业株式会社 照明光源及使用了该照明光源的2维图像显示设备
JP2014102354A (ja) * 2012-11-19 2014-06-05 Stanley Electric Co Ltd 光偏向器

Also Published As

Publication number Publication date
US20220236556A1 (en) 2022-07-28
US12248138B2 (en) 2025-03-11
CN113906325A (zh) 2022-01-07
WO2020246245A1 (ja) 2020-12-10
JP2020201308A (ja) 2020-12-17
JP7297538B2 (ja) 2023-06-26
EP3982186A1 (en) 2022-04-13
EP3982186A4 (en) 2023-06-21

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