JP7297538B2 - 光偏向器及び製造方法 - Google Patents

光偏向器及び製造方法 Download PDF

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Publication number
JP7297538B2
JP7297538B2 JP2019106111A JP2019106111A JP7297538B2 JP 7297538 B2 JP7297538 B2 JP 7297538B2 JP 2019106111 A JP2019106111 A JP 2019106111A JP 2019106111 A JP2019106111 A JP 2019106111A JP 7297538 B2 JP7297538 B2 JP 7297538B2
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Japan
Prior art keywords
mirror
torsion bar
optical deflector
section
manufacturing
Prior art date
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JP2019106111A
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English (en)
Japanese (ja)
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JP2020201308A5 (enExample
JP2020201308A (ja
Inventor
慶太 秋山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
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Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP2019106111A priority Critical patent/JP7297538B2/ja
Priority to US17/616,605 priority patent/US12248138B2/en
Priority to PCT/JP2020/019976 priority patent/WO2020246245A1/ja
Priority to CN202080040745.4A priority patent/CN113906325B/zh
Priority to EP20818091.9A priority patent/EP3982186A4/en
Publication of JP2020201308A publication Critical patent/JP2020201308A/ja
Publication of JP2020201308A5 publication Critical patent/JP2020201308A5/ja
Application granted granted Critical
Publication of JP7297538B2 publication Critical patent/JP7297538B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2019106111A 2019-06-06 2019-06-06 光偏向器及び製造方法 Active JP7297538B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2019106111A JP7297538B2 (ja) 2019-06-06 2019-06-06 光偏向器及び製造方法
US17/616,605 US12248138B2 (en) 2019-06-06 2020-05-20 Light deflector and manufacturing method
PCT/JP2020/019976 WO2020246245A1 (ja) 2019-06-06 2020-05-20 光偏向器及び製造方法
CN202080040745.4A CN113906325B (zh) 2019-06-06 2020-05-20 光偏转器及其制造方法
EP20818091.9A EP3982186A4 (en) 2019-06-06 2020-05-20 LIGHT DEFLECTOR AND METHOD OF MANUFACTURING

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019106111A JP7297538B2 (ja) 2019-06-06 2019-06-06 光偏向器及び製造方法

Publications (3)

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JP2020201308A JP2020201308A (ja) 2020-12-17
JP2020201308A5 JP2020201308A5 (enExample) 2022-05-30
JP7297538B2 true JP7297538B2 (ja) 2023-06-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019106111A Active JP7297538B2 (ja) 2019-06-06 2019-06-06 光偏向器及び製造方法

Country Status (5)

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US (1) US12248138B2 (enExample)
EP (1) EP3982186A4 (enExample)
JP (1) JP7297538B2 (enExample)
CN (1) CN113906325B (enExample)
WO (1) WO2020246245A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7600030B2 (ja) * 2021-05-14 2024-12-16 スタンレー電気株式会社 光偏向器
JP2023008577A (ja) * 2021-07-06 2023-01-19 スタンレー電気株式会社 光偏向器
JP7751997B2 (ja) * 2021-07-13 2025-10-09 スタンレー電気株式会社 Ｍｅｍｓ光偏向器及び光走査装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006319387A (ja) 2005-05-10 2006-11-24 Seiko Epson Corp Ｍｅｍｓレゾネータ
US20070008401A1 (en) 2005-07-07 2007-01-11 Lexmark International, Inc. Multiharmonic galvanometric scanning device
WO2010131557A1 (ja) 2009-05-11 2010-11-18 ミツミ電機株式会社 アクチュエータ及びアクチュエータを用いた光走査装置
JP2012063413A (ja) 2010-09-14 2012-03-29 Ricoh Co Ltd 光走査装置およびこの光走査装置を組み込んだ画像形成装置ならびに投影装置
JP2014102354A (ja) 2012-11-19 2014-06-05 Stanley Electric Co Ltd 光偏向器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6613591B1 (en) * 2002-03-07 2003-09-02 Memc Electronic Materials, Inc. Method of estimating post-polishing waviness characteristics of a semiconductor wafer
US6872319B2 (en) * 2002-09-30 2005-03-29 Rockwell Scientific Licensing, Llc Process for high yield fabrication of MEMS devices
WO2005083493A1 (ja) * 2004-02-27 2005-09-09 Matsushita Electric Industrial Co., Ltd. 照明光源及びそれを用いた２次元画像表示装置
JP2009031643A (ja) * 2007-07-30 2009-02-12 Canon Inc 揺動体装置、光偏向器およびそれを用いた画像形成装置
JP5172364B2 (ja) * 2008-01-16 2013-03-27 スタンレー電気株式会社 光偏向器
JP5397136B2 (ja) * 2009-09-30 2014-01-22 住友電気工業株式会社 Ｉｉｉ族窒化物半導体レーザ素子、及びｉｉｉ族窒化物半導体レーザ素子を作製する方法
JP6369742B2 (ja) * 2014-02-26 2018-08-08 北陽電機株式会社 微小機械装置
JP6809018B2 (ja) * 2016-07-26 2021-01-06 株式会社リコー 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP6455547B2 (ja) 2017-05-24 2019-01-23 ミツミ電機株式会社 光走査装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006319387A (ja) 2005-05-10 2006-11-24 Seiko Epson Corp Ｍｅｍｓレゾネータ
US20070008401A1 (en) 2005-07-07 2007-01-11 Lexmark International, Inc. Multiharmonic galvanometric scanning device
WO2010131557A1 (ja) 2009-05-11 2010-11-18 ミツミ電機株式会社 アクチュエータ及びアクチュエータを用いた光走査装置
JP2012063413A (ja) 2010-09-14 2012-03-29 Ricoh Co Ltd 光走査装置およびこの光走査装置を組み込んだ画像形成装置ならびに投影装置
JP2014102354A (ja) 2012-11-19 2014-06-05 Stanley Electric Co Ltd 光偏向器

Also Published As

Publication number Publication date
US20220236556A1 (en) 2022-07-28
US12248138B2 (en) 2025-03-11
CN113906325A (zh) 2022-01-07
WO2020246245A1 (ja) 2020-12-10
JP2020201308A (ja) 2020-12-17
CN113906325B (zh) 2024-12-10
EP3982186A1 (en) 2022-04-13
EP3982186A4 (en) 2023-06-21

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