CN113382953A - 一种传感器 - Google Patents
一种传感器 Download PDFInfo
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- CN113382953A CN113382953A CN201980069540.6A CN201980069540A CN113382953A CN 113382953 A CN113382953 A CN 113382953A CN 201980069540 A CN201980069540 A CN 201980069540A CN 113382953 A CN113382953 A CN 113382953A
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- 239000003570 air Substances 0.000 claims description 31
- 238000001514 detection method Methods 0.000 claims description 14
- 239000007779 soft material Substances 0.000 claims description 11
- 238000009434 installation Methods 0.000 claims description 10
- 239000012080 ambient air Substances 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 230000007613 environmental effect Effects 0.000 abstract description 4
- 230000005236 sound signal Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000004205 dimethyl polysiloxane Substances 0.000 description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000002861 polymer material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- -1 polydimethylsiloxane Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0609—Pressure pulsation damping arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
- G01D11/245—Housings for sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
- H04R1/04—Structural association of microphone with electric circuitry therefor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2410/00—Microphones
- H04R2410/07—Mechanical or electrical reduction of wind noise generated by wind passing a microphone
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
一种传感器,包括具有容纳腔(11)的壳体(10)、设于容纳腔(11)内且能因其运动而使得容纳腔内的媒介产生压力变化的挠性板(20)和用于感测压力变化的压力感测组件(30),压力感测组件(30)与挠性板(20)组装在一起并可一起运动。外界待测信号传递到传感器后,挠性板(20)产生运动引发空气扰动,再藉由压力感测组件(30)接收空气扰动的压力变化并进行信号感测。相较于传统的声音传感器,本发明的传感器无需通过与外界环境连通的开口传导声压以感测声音信号,因此,可避免异物、噪音等环境因素对传感器造成的影响,有效降低非待测物产生的信号,压力感测组件能感测到挠性板相对两侧的压力变化,可有效提升传感器的灵敏度。
Description
PCT国内申请,说明书已公开。
Claims (26)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2019/079505 WO2020191576A1 (zh) | 2019-03-25 | 2019-03-25 | 一种传感器 |
Publications (2)
Publication Number | Publication Date |
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CN113382953A true CN113382953A (zh) | 2021-09-10 |
CN113382953B CN113382953B (zh) | 2022-10-25 |
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CN201980069540.6A Active CN113382953B (zh) | 2019-03-25 | 2019-03-25 | 一种传感器 |
CN201911303955.3A Active CN110726422B (zh) | 2019-03-25 | 2019-12-17 | 一种传感器 |
CN202020198823.0U Active CN210464558U (zh) | 2019-03-25 | 2020-02-24 | 一种传感器 |
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CN201911303955.3A Active CN110726422B (zh) | 2019-03-25 | 2019-12-17 | 一种传感器 |
CN202020198823.0U Active CN210464558U (zh) | 2019-03-25 | 2020-02-24 | 一种传感器 |
Country Status (3)
Country | Link |
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US (1) | US11796411B2 (zh) |
CN (3) | CN113382953B (zh) |
WO (1) | WO2020191576A1 (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020206628A1 (en) * | 2019-04-10 | 2020-10-15 | Knowles Electronics, Llc | Rf immune microphone |
TWI732617B (zh) * | 2020-03-25 | 2021-07-01 | 美律實業股份有限公司 | 振動感測器 |
CN213342679U (zh) * | 2020-09-25 | 2021-06-01 | 瑞声声学科技(深圳)有限公司 | 一种骨传导麦克风 |
CN213694145U (zh) * | 2020-10-27 | 2021-07-13 | 歌尔微电子有限公司 | 骨声纹传感器模组和电子设备 |
TWI773389B (zh) * | 2021-06-18 | 2022-08-01 | 大陸商美律電子(深圳)有限公司 | 振動感測組件 |
CN113905317B (zh) * | 2021-08-04 | 2023-07-04 | 钰太芯微电子科技(上海)有限公司 | 抗射频干扰的麦克风 |
CN116481700B (zh) * | 2023-06-05 | 2024-03-08 | 山东慧点智能技术有限公司 | 一种压力传感器及压力传感系统 |
Citations (4)
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CN104671186A (zh) * | 2013-11-27 | 2015-06-03 | 英飞凌科技股份有限公司 | Mems器件 |
CN206640794U (zh) * | 2016-05-18 | 2017-11-14 | 意法半导体股份有限公司 | Mems声换能器及电子设备 |
CN108225203A (zh) * | 2017-11-29 | 2018-06-29 | 全球能源互联网研究院有限公司 | 一种两维物理量并行检测的mems传感器 |
CN208488162U (zh) * | 2017-05-01 | 2019-02-12 | 苹果公司 | 微机电系统mems环境压力和声学传感器 |
Family Cites Families (14)
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CN2234612Y (zh) * | 1995-08-29 | 1996-09-04 | 李育森 | 压力传感器 |
DE102005053861A1 (de) * | 2005-11-11 | 2007-05-16 | Bosch Gmbh Robert | Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung |
CN200989838Y (zh) * | 2006-03-03 | 2007-12-12 | 王国庆 | 压力传感器 |
CN102530832B (zh) * | 2010-12-27 | 2014-06-18 | 上海丽恒光微电子科技有限公司 | 惯性微机电传感器及其制作方法 |
US9432759B2 (en) * | 2013-07-22 | 2016-08-30 | Infineon Technologies Ag | Surface mountable microphone package, a microphone arrangement, a mobile phone and a method for recording microphone signals |
CN205066978U (zh) * | 2015-10-16 | 2016-03-02 | 瑞声声学科技(深圳)有限公司 | 按压式压力传感器 |
KR20170112567A (ko) * | 2016-03-31 | 2017-10-12 | 엘지이노텍 주식회사 | 복합 센서 패키지 |
US9975760B2 (en) * | 2016-06-28 | 2018-05-22 | Robert Bosch Gmbh | MEMS sensor device package housing with an embedded controllable device |
CN206164826U (zh) * | 2016-08-31 | 2017-05-10 | 歌尔股份有限公司 | 一种敏感膜及mems 麦克风 |
IT201600121223A1 (it) * | 2016-11-30 | 2018-05-30 | St Microelectronics Srl | Modulo multi-trasduttore, apparecchiatura elettronica includente il modulo multi-trasduttore e metodo di fabbricazione del modulo multi-trasduttore |
IT201600121210A1 (it) * | 2016-11-30 | 2018-05-30 | St Microelectronics Srl | Modulo di trasduzione multi-dispositivo, apparecchiatura elettronica includente il modulo di trasduzione e metodo di fabbricazione del modulo di trasduzione |
CN108344530A (zh) * | 2017-01-24 | 2018-07-31 | 英属开曼群岛商智动全球股份有限公司 | 力量传感器 |
CN107907262A (zh) * | 2017-12-20 | 2018-04-13 | 深圳瑞德感知科技有限公司 | 一种用于负压测量的mems充油压力传感器 |
CN208300024U (zh) * | 2018-06-25 | 2018-12-28 | 歌尔股份有限公司 | Mems麦克风 |
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2019
- 2019-03-25 US US17/280,197 patent/US11796411B2/en active Active
- 2019-03-25 WO PCT/CN2019/079505 patent/WO2020191576A1/zh active Application Filing
- 2019-03-25 CN CN201980069540.6A patent/CN113382953B/zh active Active
- 2019-12-17 CN CN201911303955.3A patent/CN110726422B/zh active Active
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2020
- 2020-02-24 CN CN202020198823.0U patent/CN210464558U/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104671186A (zh) * | 2013-11-27 | 2015-06-03 | 英飞凌科技股份有限公司 | Mems器件 |
CN206640794U (zh) * | 2016-05-18 | 2017-11-14 | 意法半导体股份有限公司 | Mems声换能器及电子设备 |
CN208488162U (zh) * | 2017-05-01 | 2019-02-12 | 苹果公司 | 微机电系统mems环境压力和声学传感器 |
CN108225203A (zh) * | 2017-11-29 | 2018-06-29 | 全球能源互联网研究院有限公司 | 一种两维物理量并行检测的mems传感器 |
Also Published As
Publication number | Publication date |
---|---|
US20220034740A1 (en) | 2022-02-03 |
CN110726422B (zh) | 2020-06-09 |
US11796411B2 (en) | 2023-10-24 |
CN210464558U (zh) | 2020-05-05 |
WO2020191576A1 (zh) | 2020-10-01 |
CN113382953B (zh) | 2022-10-25 |
CN110726422A (zh) | 2020-01-24 |
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