CN113185314A - 一种氮化硼基陶瓷焊接密封元器件及其制备方法 - Google Patents
一种氮化硼基陶瓷焊接密封元器件及其制备方法 Download PDFInfo
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- CN113185314A CN113185314A CN202110607169.3A CN202110607169A CN113185314A CN 113185314 A CN113185314 A CN 113185314A CN 202110607169 A CN202110607169 A CN 202110607169A CN 113185314 A CN113185314 A CN 113185314A
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- 229910052582 BN Inorganic materials 0.000 title claims abstract description 93
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims abstract description 88
- 238000007789 sealing Methods 0.000 title claims abstract description 64
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- 238000005245 sintering Methods 0.000 claims abstract description 39
- 239000000758 substrate Substances 0.000 claims abstract description 23
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 22
- 238000002156 mixing Methods 0.000 claims abstract description 19
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 19
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000011230 binding agent Substances 0.000 claims abstract description 16
- 229910052810 boron oxide Inorganic materials 0.000 claims abstract description 16
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims abstract description 16
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- 239000002994 raw material Substances 0.000 claims abstract description 13
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- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims abstract description 12
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 12
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- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
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- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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- C04B35/583—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
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- C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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Abstract
Description
C1 | C2 | C3 | C4 | 对比项 | |
抗拉强度(MPa) | 182 | 195 | 192 | 190 | 162 |
实施例1 | 实施例2 | 实施例3 | 实施例4 | 对比项 | |
致密度(%) | 92.3 | 95.1 | 96.4 | 93.7 | 88.2 |
弯曲强度(MPa) | 208 | 220 | 235 | 219 | 172 |
断裂韧性(MPa.m<sup>1/2</sup>) | 1.8 | 1.9 | 2.1 | 1.9 | 1.5 |
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