CN113108599A - 清洁热处理装置 - Google Patents

清洁热处理装置 Download PDF

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Publication number
CN113108599A
CN113108599A CN202110022398.9A CN202110022398A CN113108599A CN 113108599 A CN113108599 A CN 113108599A CN 202110022398 A CN202110022398 A CN 202110022398A CN 113108599 A CN113108599 A CN 113108599A
Authority
CN
China
Prior art keywords
gas
unit
filter
cooling
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110022398.9A
Other languages
English (en)
Chinese (zh)
Inventor
新庄成昭
西尾勤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
Original Assignee
Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Publication of CN113108599A publication Critical patent/CN113108599A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/04—Circulating atmospheres by mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00—Cooling of furnaces or of charges therein
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0001—Heating elements or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/04—Circulating atmospheres by mechanical means
    • F27D2007/045—Fans
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00—Cooling of furnaces or of charges therein
    • F27D2009/007—Cooling of charges therein
    • F27D2009/0072—Cooling of charges therein the cooling medium being a gas
    • F27D2009/0075—Cooling of charges therein the cooling medium being a gas in direct contact with the charge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Duct Arrangements (AREA)
  • Air-Flow Control Members (AREA)
  • Ventilation (AREA)
  • Drying Of Solid Materials (AREA)
CN202110022398.9A 2020-01-10 2021-01-08 清洁热处理装置 Pending CN113108599A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020003052A JP7073016B2 (ja) 2020-01-10 2020-01-10 クリーン熱処理装置
JP2020-003052 2020-01-10

Publications (1)

Publication Number Publication Date
CN113108599A true CN113108599A (zh) 2021-07-13

Family

ID=76709197

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110022398.9A Pending CN113108599A (zh) 2020-01-10 2021-01-08 清洁热处理装置

Country Status (3)

Country Link
JP (1) JP7073016B2 (ja)
CN (1) CN113108599A (ja)
TW (1) TWI763012B (ja)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1618118A (zh) * 2002-02-28 2005-05-18 东京毅力科创株式会社 热处理装置
CN1691209A (zh) * 2004-04-28 2005-11-02 光洋热系统株式会社 显示用板冷却装置
CN1813163A (zh) * 2003-06-27 2006-08-02 石川岛播磨重工业株式会社 气体冷却式真空热处理炉及其冷却气体换向装置
CN106918228A (zh) * 2015-12-28 2017-07-04 中外炉工业株式会社 工业用炉
CN110331945A (zh) * 2019-03-27 2019-10-15 中国石油大学(华东) 极地钻井平台井架保温加热实验装置及实验方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3279727B2 (ja) * 1993-04-30 2002-04-30 東京エレクトロン株式会社 熱処理装置
JP3375294B2 (ja) * 1998-12-17 2003-02-10 東京エレクトロン株式会社 処理装置、処理システムおよび該装置における清浄エアの供給方法
AU6904700A (en) * 1999-08-12 2001-03-13 Asml Us, Inc. Hot wall rapid thermal processor
JP2004353928A (ja) * 2003-05-28 2004-12-16 Koyo Thermo System Kk クリーンオーブン
JP4376243B2 (ja) * 2006-03-30 2009-12-02 エスペック株式会社 クリーンオーブン
JP5401200B2 (ja) * 2009-08-03 2014-01-29 株式会社トクヤマ チャンバ内基体回転装置およびチャンバ内基体の回転方法
JP5553127B2 (ja) * 2011-02-25 2014-07-16 株式会社村田製作所 昇降式熱処理炉

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1618118A (zh) * 2002-02-28 2005-05-18 东京毅力科创株式会社 热处理装置
CN1813163A (zh) * 2003-06-27 2006-08-02 石川岛播磨重工业株式会社 气体冷却式真空热处理炉及其冷却气体换向装置
CN1691209A (zh) * 2004-04-28 2005-11-02 光洋热系统株式会社 显示用板冷却装置
CN106918228A (zh) * 2015-12-28 2017-07-04 中外炉工业株式会社 工业用炉
CN110331945A (zh) * 2019-03-27 2019-10-15 中国石油大学(华东) 极地钻井平台井架保温加热实验装置及实验方法

Also Published As

Publication number Publication date
JP7073016B2 (ja) 2022-05-23
JP2021110506A (ja) 2021-08-02
TW202126974A (zh) 2021-07-16
TWI763012B (zh) 2022-05-01

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RJ01 Rejection of invention patent application after publication

Application publication date: 20210713

RJ01 Rejection of invention patent application after publication