CN113061976A

CN113061976A - Monocrystalline silicon drawing device based on Czochralski method

Info

Publication number: CN113061976A
Application number: CN202110321689.8A
Authority: CN
Inventors: 杨伟洛
Original assignee: Individual
Current assignee: Individual
Priority date: 2021-03-25
Filing date: 2021-03-25
Publication date: 2021-07-02

Abstract

A monocrystalline silicon drawing device based on a Czochralski method comprises a vacuum cylinder, a rotatable quartz crucible for storing liquid silicon, an electric control mechanical claw for grabbing seed crystals, a rotating unit for rotating and lifting the electric control mechanical claw, a switching unit for switching the rotating and lifting functions of the rotating unit, a seed crystal unit for providing the seed crystals for the electric control mechanical claw and a discharging unit. When the silicon single crystal silicon rod growing device works, the vacuum cylinder does not need to be opened frequently for seed crystal replacement, the silicon single crystal silicon rod growing work can be continuously carried out, the working efficiency is increased, the vacuum cylinder is prevented from being opened and closed frequently, and the working cost is reduced.

Description

Monocrystalline silicon drawing device based on Czochralski method

Technical Field

The invention relates to the technical field of semiconductors, in particular to a monocrystalline silicon drawing device based on a Czochralski method.

Background

Single crystal silicon is a form of elemental silicon. When the molten elemental silicon solidifies, the silicon atoms are arranged in a diamond lattice as many crystal nuclei, and if these crystal nuclei grow into crystal grains having the same crystal plane orientation, these crystal grains are combined in parallel to crystallize into single crystal silicon.

Depending on these characteristics, single crystal silicon is generally produced in two ways, the Czochralski method and the float zone method. The czochralski method, also known as the czochralski method, involves evacuating a cylinder and injecting an inert gas, heating with a graphite resistor, melting the polycrystalline silicon contained in a high-purity quartz crucible, inserting a seed crystal (seed crystal) into the surface of the melt to melt, growing a single crystal silicon rod from the silicon melt according to the crystal phase of the seed crystal as the seed crystal is pulled up, gradually raising the silicon rod, and performing the steps of neck drawing, necking, shouldering, diameter control, ending and the like or pulling the silicon rod. And the finished product of the silicon single crystal rod is obtained after drawing, and parameters such as internal temperature, thermal field, drawing speed and rotating speed, jar increasing rotating speed and lifting speed, gas type and pressure in the furnace and the like are strictly controlled in the product drawing process.

The existing Czochralski method is usually single independent production during manufacturing, has no continuous working capability, evacuates a vacuum cylinder again after each drawing is finished, injects inert gas, has low efficiency, and because of segregation coefficient, impurities in the single crystal obtained by the Czochralski method change along the longitudinal direction, and the concentration of the impurities in the crystal is increased continuously, so that the resistivity changes along the whole crystal bar, and the single crystal with uniform resistivity can not be produced, and the front and back resistivity span of the whole crystal bar is large, thereby being not beneficial to subsequent processing.

CN111826709A discloses a patent named "a czochralski method single crystal silicon growth furnace", which discloses a structure of quartz crucible, rotary unit, etc., and its disadvantage is that its rotary structure does not have a free switching function nor an independent lifting function;

the silicon rod pulling system has the advantages that the silicon rods can be manufactured by the good thermal field, the energy consumption is increased due to uneven thermal field, even the silicon rod defects or polycrystals are caused, the temperature in the longitudinal temperature distribution of the thermal field is the highest, the temperature is gradually reduced upwards and downwards, the temperature in the middle of the radial temperature distribution is the lowest, the edge temperature is gradually increased, the temperature is changed in a gradient mode, the condition for manufacturing the silicon rods at the same time is not met in a single thermal field, and the quality of the silicon rods can be greatly reduced.

Disclosure of Invention

The invention aims to provide a monocrystalline silicon drawing device based on a Czochralski method.

The invention aims to realize the technical scheme, which comprises a vacuum cylinder, a rotatable quartz crucible for storing liquid silicon and an electric control mechanical claw for grabbing seed crystals, wherein the bottom end surface of the vacuum cylinder is fixedly connected to the top surface of a mounting frame, the vacuum cylinder is divided into an upper cylinder and a lower cylinder by a first partition plate, the first partition plate is provided with a first opening communicated with the upper cylinder and the lower cylinder, and more than two electric control mechanical claws can grab the seed crystals in turn;

the device also comprises a rotating unit for rotating and lifting the electric control mechanical claw, a switching unit for switching the rotating and lifting functions of the rotating unit, a seed crystal unit for providing seed crystals for the electric control mechanical claw and a discharging unit; the rotary unit is installed in first open position department, every automatically controlled gripper all installs and holds and be located barrel down at a lift of rotary unit, every automatically controlled gripper all can be along installing the quartz crucible in barrel down and go up and down, the quartz crucible is rotatable to be installed in barrel down, the seed crystal unit is installed terminal surface under first division board and is located barrel down, can cooperate with every rotatory automatically controlled gripper wheel flow and snatch, discharge unit stretches into in the barrel down by the vacuum barrel outside, cooperate the ejection of compact with every rotatory automatically controlled gripper.

Preferably, the rotating unit comprises gear rings, the inner side wall and the outer side wall of each gear ring are fixedly connected with transmission teeth, the gear rings are rotatably installed at the first opening through bearings, a second opening is formed in the top end face of the upper cylinder, and an installation cylinder with an opening at one end is fixedly connected at the second opening and is integrally formed with the upper cylinder;

first motor is installed in the installation section of thick bamboo, the output shaft of first motor passes installation section of thick bamboo bottom face and stretches into ring gear center department and rigid coupling has the sun gear, the planet carrier passes through the rotatable installation of bearing at installation section of thick bamboo outer wall, a plurality of planet wheels pass through the rotatable installation of bearing on the planet carrier, planet wheel evenly distributed is between sun gear and ring gear and intermeshing, the equal threaded connection in planet wheel center has a threaded rod, the threaded rod is coaxial with the planet wheel, barrel rigid coupling has first slider on stretching into threaded rod one end, the barrel rigid coupling has automatically controlled gripper under the other end stretches into.

Preferably, the switching unit comprises a first cavity, the first cavity is fixedly connected to the outer side wall of the upper barrel, the middle part of the first hinge rod is rotatably hinged to the side wall of the first cavity, one end of the first hinge rod is hinged to one end of the second hinge rod, the other end of the second hinge rod slidably penetrates through the side wall of the first cavity and extends into the upper barrel and is fixedly connected with a first vertical block, and a first sliding chute matched with the first sliding block is formed in the first vertical block; the other end of the first hinge rod is hinged with one end of a third hinge rod, and the other end of the third hinge rod can slidably penetrate through the side wall of the first cavity, extend into the upper cylinder body and can be inserted between the outer side transmission teeth of the gear ring;

the side wall of the first chamber is further fixedly connected with a first electric telescopic rod, and a first push rod of the first electric telescopic rod is hinged with one end of a first hinge rod.

Preferably, the seed crystal unit comprises a first box body and a second box body, a second chute which can be used for storing the seed crystal is arranged in the first box body along the length direction, a third opening is formed in the first box body at the end part of the second chute, and a first spring which can push the seed crystal out of the third opening is arranged in the second chute along the length direction; the first box body is arranged on the lower end face of the first partition plate;

the second box body is provided with a third sliding groove along the length direction, the side wall of the second box body is provided with a fourth opening, the second box body is arranged on the side wall of the lower box body, the length direction of the second box body and the length direction of the first box body form an angle, and the first box body and the second box body are communicated with the fourth opening through the third opening; a second electric telescopic rod is mounted at one end in the third sliding chute, a second sliding block is fixedly connected with a second push rod of the second electric telescopic rod, and a groove which can be used for receiving seed crystals is formed in the side wall of the second sliding block; the side wall of the other end of the third sliding chute is also provided with a fifth opening communicated with the inside and the outside of the second box body.

Preferably, the quartz crucible is fixedly connected in a graphite crucible, the graphite crucible is rotatably mounted on the bottom end face of the lower cylinder and is positioned in a heat insulation cylinder with an opening on the top surface, the heat insulation cylinder is fixedly connected on the bottom end face of the lower cylinder, the outer wall of the graphite crucible is provided with a heater, the second motor is mounted on the mounting frame, and an output shaft of the second motor rotatably penetrates through the bottom end face of the lower cylinder and is fixedly connected with the bottom surface of the graphite crucible.

Preferably, the discharging unit comprises a first discharging pipe, the first discharging pipe is installed on the bottom end face of the lower barrel, one end of the first discharging pipe extends into the lower barrel and vertically corresponds to the rotary electric control mechanical claw, the other end of the first discharging pipe extends out of the lower barrel to be communicated with a second cavity, an isolating valve is fixedly connected to the position where the second cavity is communicated with the lower barrel, a discharging port and a second pipeline communicated with the inside and the outside of the second cavity are formed in the side wall of the second cavity, and a second vacuum pump is arranged on the second pipeline.

Preferably, the side wall of the lower cylinder is further provided with an inert gas input pipeline and a first pipeline which are communicated with the inside and the outside of the lower cylinder, and the first pipeline is provided with a first vacuum pump.

Due to the adoption of the technical scheme, the invention has the following advantages:

1. the silicon rod pulling device has the function of automatic continuous work, the vacuum cylinder does not need to be opened for seed crystal replacement after each pulling, the silicon rod pulling efficiency is higher, the speed is higher, the silicon rod is sent out of the vacuum cylinder through the second chamber in a transition mode after the pulling is finished, the loss of a vacuum environment and the leakage of inert gas caused by the fact that the vacuum cylinder is directly opened and closed are avoided, and the production cost is reduced.

2. The rotary unit has an automatic switching function, different electric control mechanical claws can be switched when the rotary unit uses a rotating function, and crystal seeds can be dropped into the quartz crucible to grow monocrystalline silicon when the lifting function is used.

3. The planetary gear corotation, the threaded rod descends, the planetary gear reverses, the threaded rod ascends, the structure is simple, the failure rate is low, the threaded rod is controlled to ascend and descend through the rotation of the planetary gear, the influence of a high-temperature environment is avoided, the lifting speed is controllable, and the growth quality of the single crystal silicon rod is guaranteed.

4. The seed crystal unit realizes periodic feeding action through the reciprocating motion of the electric telescopic rod, is matched with the electric control mechanical claw, has simple structure and high working efficiency, and does not need to frequently open the vacuum cylinder body to replace the seed crystal.

Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof.

Drawings

The drawings of the present invention are described below.

FIG. 1 is an external schematic view of the present invention.

FIG. 2 is an internal schematic view of the present invention.

Fig. 3 is a schematic view of a vacuum cylinder of the present invention.

Fig. 4 is an exploded view of the rotary unit of the present invention.

FIG. 5 is a schematic view of a quartz crucible of the present invention.

Fig. 6 is an exploded view of a seed crystal unit of the present invention.

In the figure: 1. a vacuum cylinder; 2. a quartz crucible; 3. an electric control mechanical claw; 4. a mounting frame; 5. a first partition plate; 6. an upper cylinder body; 7. a lower cylinder body; 8. a first opening; 9. a transmission gear; 10. a ring gear; 11. a second opening; 12. mounting the cylinder; 13. a first motor; 14. a sun gear; 15. a planet carrier; 16. a planet wheel; 17. a threaded rod; 18. a first slider; 19. a first chamber; 20. a first hinge rod; 21. a second hinge rod; 22. a first vertical block; 23. a first chute; 24. a third hinge rod; 25. a first electric telescopic rod; 26. a first push rod; 27. a first case; 28. a second box body; 29. a second chute; 30. a third opening; 31. a first spring; 32. a third chute; 33. four openings; 34. a second electric telescopic rod; 35. a second push rod; 36. a second slider; 37. a groove; 38. a fifth opening; 39. a graphite crucible; 40. a heat-insulating cylinder; 41. a heater; 42. a second motor; 43. a first discharge pipe; 44. a second chamber; 45. an isolation valve; 46. a discharge port; 47. a second conduit; 48. a second vacuum pump; 49. an inert gas input pipe; 50. a first conduit; 51. a first vacuum pump.

Detailed Description

The invention is further illustrated by the following figures and examples.

In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the embodiments of the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the embodiments of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. Specific meanings of the above terms in the embodiments of the present invention can be understood in specific cases by those of ordinary skill in the art.

As shown in fig. 1 to 6, a single crystal silicon drawing device based on the czochralski method comprises a vacuum cylinder 1, a rotatable quartz crucible 2 for storing liquid silicon, and an electrically controlled gripper 3 for grasping seed crystals, wherein the bottom end surface of the vacuum cylinder 1 is fixedly connected to the top surface of a mounting frame 4, the vacuum cylinder 1 is divided into an upper cylinder 6 and a lower cylinder 7 by a first partition plate 5, the first partition plate 5 is provided with a first opening 8 communicating the upper cylinder with the lower cylinder, and the electrically controlled gripper 3 is more than two and can grasp the seed crystals in turn;

the device also comprises a rotating unit for rotating and lifting the electric control mechanical claw 3, a switching unit for switching the rotating and lifting functions of the rotating unit, a seed crystal unit for providing seed crystals for the electric control mechanical claw 3 and a discharging unit; the rotary unit is installed in 8 positions of first opening, every automatically controlled gripper 3 all installs in a lift end of rotary unit and is located barrel 7 down, every automatically controlled gripper 3 all can go up and down along installing the quartz crucible 2 in barrel 7 down, the rotatable installation of quartz crucible 2 is in barrel 7 down, the seed crystal unit is installed terminal surface and is located barrel 7 down under first division board 5, can snatch with every rotatory automatically controlled gripper 3 cooperation in turn, the discharge unit is stretched into down in the barrel 7 by vacuum barrel 1 outside, cooperate the ejection of compact with every rotatory automatically controlled gripper 3.

In the embodiment, after the vacuum cylinder is vacuumized, inert gas is injected again, the rotating unit drives the electric control mechanical claw to rotate, when the electric control mechanical claw rotates to the seed crystal unit, the electric control mechanical claw grabs the seed crystal from the seed crystal unit, when the electric control mechanical claw rotates to the position above the quartz crucible, the switching unit is started, the rotating motion of the rotating unit is switched to lifting motion, the limited electric control mechanical claw becomes descending motion, other electric control mechanical claws rotate in place, when the seed crystal extends into the quartz crucible to contact with silicon solution, the rotating unit rotates reversely, the electric control mechanical claw ascends, the pulling work of the monocrystalline silicon starts, after the pulling is finished, the switching unit switches again, the rotating unit changes from lifting motion to rotating motion, the electric control mechanical claw which finishes the pulling leaves the quartz crucible, rotates to the discharging unit, the next electric control mechanical claw which clamps the seed crystal rotates to the position above the quartz crucible, the switching unit is switched to the lifting movement again, and a new drawing round is started. The mode automatic switch, and need not open the vacuum barrel and carry out the crystal seed and change, increase work efficiency, avoid frequently switching on and off the vacuum barrel, reduced manufacturing cost.

As shown in fig. 2 to 4, the rotating unit includes a gear ring 10 having inner and outer sidewalls both fixedly connected with a transmission gear 9, the gear ring 10 is rotatably installed at the first opening 8 through a bearing, a second opening 11 is opened on a top end surface of the upper cylinder 6, and an installation cylinder 12 having an opening at one end is fixedly connected at the second opening 11 and integrally formed with the upper cylinder 6;

first motor 13 is installed in installation section of thick bamboo 12, the output shaft of first motor 13 passes installation section of thick bamboo 12 bottom face and stretches into ring gear 10 center department and rigid coupling has sun gear 14, planet carrier 15 passes through the rotatable installation in installation section of thick bamboo 12 outer wall of bearing, a plurality of planet wheel 16 pass through the rotatable installation on planet carrier 15 of bearing, planet wheel 16 evenly distributed is between sun gear 14 and ring gear 10 and intermeshing, the equal threaded connection in planet wheel 16 center has a threaded rod 17, threaded rod 17 is coaxial with planet wheel 16, threaded rod 17 one end is stretched into barrel 6 rigid coupling and is had first slider 18, the other end stretches into barrel 7 rigid coupling down and has automatically controlled gripper 3.

In the embodiment, when the gear ring is fixed and the planet carrier can rotate, the first motor rotates to drive the sun gear to rotate, the sun gear drives the planet gear, and the planet gear drives the planet carrier to revolve and rotate along the gear ring because the gear ring is fixed, so that the switching of the electric control mechanical claw is realized;

when the first slider of switching unit card threaded rod, and the ring gear is rotatable, because the threaded rod is blocked, lead to the planet wheel also to be restricted, can't follow the ring gear revolution, can only the rotation, the rotation drives the ring gear motion, simultaneously, the planet wheel rotation can't be followed to that the threaded rod that is blocked to the realization carries out elevating movement along the planet wheel axial. The lifting of the threaded rod is controlled by the rotation of the planet wheel, the threaded rod is not influenced by a high-temperature environment, the lifting speed is controllable, and the growth quality of the silicon single crystal rod is ensured.

As shown in fig. 2 to 3, the switching unit includes a first cavity 19, the first cavity 19 is fixedly connected to the outer side wall of the upper cylinder 6, the middle of a first hinge rod 20 is rotatably hinged to the side wall of the first cavity 19, one end of the first hinge rod 20 is hinged to one end of a second hinge rod 21, the other end of the second hinge rod 21 slidably penetrates through the side wall of the first cavity 19 and extends into the upper cylinder 6, and is fixedly connected to a first vertical block 22, and a first sliding slot 23 capable of being matched with the first sliding block 18 is formed in the first vertical block 22; the other end of the first hinge rod 20 is hinged with one end of a third hinge rod 24, and the other end of the third hinge rod 24 can slidably penetrate through the side wall of the first cavity 19 to extend into the upper barrel 6 and can be inserted between the outer driving teeth 9 of the gear ring 10;

a first electric telescopic rod 25 is further fixedly connected to the side wall of the first chamber 19, and a first push rod 26 of the first electric telescopic rod 25 is hinged to one end of the first hinge rod 20.

In this embodiment, when the first electric telescopic rod is pushed forward, the first hinge rod moves, the first hinge rod drives the second hinge rod to move, the second hinge rod drives the first vertical block, the first sliding groove on the first vertical block clamps the first sliding block on the threaded rod, the first sliding block can only slide in the first sliding groove, the rotation of the rotating unit is limited, and the rotation is converted into the up-and-down movement of the clamped threaded rod, the third hinge rod is driven to move while the first hinge rod moves, the third hinge rod is separated from the transmission teeth of the gear ring, and the gear ring can freely rotate;

when first electric telescopic handle backward motion, first hinge rod motion drives the motion of second hinge rod, and the second hinge rod drives first perpendicular piece, and first spout on the first perpendicular piece breaks away from the first slider on the threaded rod, and the rotary unit is not restricted yet, and the up-and-down motion of threaded rod becomes rotary motion, and in the time of the motion of first hinge rod, drive the motion of third hinge rod, and the third hinge rod inserts in the driving tooth of ring gear, and the ring gear is unable to be rotated, realizes rotary unit's rotation and switches.

As shown in fig. 6, the seed crystal unit includes a first box 27 and a second box 28, a second chute 29 for storing the seed crystal is arranged in the first box 27 along the length direction, a third opening 30 is opened on the first box 27 at the end of the second chute 29, and a first spring 31 for pushing the seed crystal out of the third opening 30 is arranged in the second chute 29 along the length direction; the first box body 27 is arranged on the lower end surface of the first partition plate 5;

the second box body 28 is provided with a third sliding chute 32 along the length direction, the side wall of the second box body 28 is provided with a fourth opening 33, the second box body 28 is arranged on the side wall of the lower cylinder body 7, the length direction of the second box body 28 and the length direction of the first box body 27 form an angle of 90 degrees, and the first box body 27 and the second box body 28 are communicated with the fourth opening 33 through a third opening 30; a second electric telescopic rod 34 is installed at one end in the third chute 32, a second sliding block 36 is fixedly connected to a second push rod 35 of the second electric telescopic rod 34, and a groove 37 which can be used for receiving seed crystals is formed in the side wall of the second sliding block 36; the other end of the third sliding chute 32 is further opened with a fifth opening 38 for communicating the inside and outside of the second box 28.

In this embodiment, the first spring always keeps thrust on the seed crystal in the second chute, but the third opening position is blocked by the side wall of the second slider, when the second electric telescopic rod drives the second slider to move backward to the third opening position, the first spring pushes the seed crystal into the groove to be clamped, the second electric telescopic rod moves forward again to drive the seed crystal to move to the fifth opening, and the electric control mechanical claw waits for grabbing.

As shown in fig. 5, the quartz crucible 2 is fixedly connected in a graphite crucible 39, the graphite crucible 39 is rotatably mounted on the bottom end surface of the lower cylinder 7 and is located in a heat insulation cylinder 40 with an open top surface, the heat insulation cylinder 40 is fixedly connected on the bottom end surface of the lower cylinder 7, a heater 41 is arranged on the outer wall of the graphite crucible 39, a second motor 42 is mounted on the mounting frame 4, and an output shaft of the second motor 42 rotatably penetrates through the bottom end surface of the lower cylinder 7 and is fixedly connected with the bottom surface of the graphite crucible 39.

In this embodiment, the heater heats graphite crucible, and graphite crucible is with heat transfer to quartz crucible, and the thermal-insulated barrel avoids steam too fast loss, and the second motor drives graphite crucible and rotates, makes solution also keep rotating at the uniform velocity, and pivoted speed has influenced the silicon rod quality.

As shown in fig. 2 to fig. 3, the discharging unit includes a first discharging pipe 43, the first discharging pipe 43 is installed on the bottom end surface of the lower cylinder 7, one end of the first discharging pipe 43 extends into the lower cylinder 7 and vertically corresponds to the rotary electric control gripper 3, the other end of the first discharging pipe extends out of the lower cylinder 7 and is communicated with a second chamber 44, an isolation valve 45 is fixedly connected to a communication position of the second chamber 44 and the lower cylinder 7, a discharging port 46 and a second pipeline 47 communicating the inside and the outside of the second chamber 44 are arranged on the side wall of the second chamber 44, and a second vacuum pump 48 is arranged on the second pipeline 47.

In this embodiment, the silicon rod that processing was accomplished falls into first discharging pipe, is blocked by the isolating valve, and the discharge gate is closed to the second cavity, and after the evacuation, the isolating valve and the vacuum barrel intercommunication are opened again, and the silicon rod falls into the second cavity, and the isolating valve is closed, and after not communicating with the vacuum barrel, the discharge gate ejection of compact is opened again, avoids the vacuum environment of vacuum barrel to reveal.

As shown in fig. 1 to 6, an inert gas input pipeline 49 and a first pipeline 50 for communicating the inside and the outside of the lower cylinder 7 are further provided on the side wall of the lower cylinder 7, and a first vacuum pump 51 is provided on the first pipeline 50.

In this embodiment, the first vacuum pump first pumps air from the vacuum cylinder, and then injects inert gas into the vacuum cylinder through the inert gas input pipe.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that: modifications and equivalents may be made to the embodiments of the invention without departing from the spirit and scope of the invention, which is to be covered by the claims.

Claims

1. A monocrystalline silicon drawing device based on a Czochralski method comprises a vacuum cylinder (1), a rotatable quartz crucible (2) for storing liquid silicon and an electric control mechanical claw (3) for grabbing seed crystals, wherein the bottom end surface of the vacuum cylinder (1) is fixedly connected to the top surface of a mounting rack (4), the vacuum cylinder (1) is internally divided into an upper cylinder (6) and a lower cylinder (7) by a first partition plate (5), and the first partition plate (5) is provided with a first opening (8) communicated with the upper cylinder and the lower cylinder, and is characterized in that the electric control mechanical claw (3) is more than two and can grab the seed crystals in turn;

the device also comprises a rotating unit for rotating and lifting the electric control mechanical claw (3), a switching unit for switching the rotating and lifting functions of the rotating unit, a seed crystal unit for providing seed crystals for the electric control mechanical claw (3) and a discharging unit; the rotary unit is arranged at the position of the first opening (8), each electric control mechanical claw (3) is arranged at one lifting end of the rotary unit and positioned in the lower barrel body (7), each electric control mechanical claw (3) can lift along the quartz crucible (2) arranged in the lower barrel body (7), the quartz crucible (2) can be rotatably arranged in the lower barrel body (7), the seed crystal unit is arranged on the lower end face of the first partition plate (5) and positioned in the lower barrel body (7), the seed crystal unit can be matched with each rotary electric control mechanical claw (3) to grab in turn, the discharging unit extends into the lower barrel body (7) from the outside of the vacuum barrel body (1) and is matched with each rotary electric control mechanical claw (3) to discharge.

2. The czochralski-method-based monocrystalline silicon drawing device according to claim 1, wherein the rotating unit comprises a gear ring (10) having inner and outer side walls fixedly connected with a transmission gear (9), the gear ring (10) is rotatably mounted at the first opening (8) through a bearing, a second opening (11) is formed in the top end surface of the upper cylinder (6), and a mounting cylinder (12) having an opening at one end is fixedly connected at the second opening (11) and is integrally formed with the upper cylinder (6);

first motor (13) are installed in installation section of thick bamboo (12), the output shaft of first motor (13) passes installation section of thick bamboo (12) bottom face and stretches into ring gear (10) center department and rigid coupling has sun gear (14), rotatable the installing in installation section of thick bamboo (12) outer wall through the bearing in planet carrier (15), a plurality of planet wheel (16) are rotatable to be installed on planet carrier (15) through the bearing, planet wheel (16) evenly distributed just intermeshing between sun gear (14) and ring gear (10), the equal threaded connection in planet wheel (16) center has a threaded rod (17), threaded rod (17) are coaxial with planet wheel (16), barrel (6) rigid coupling has first slider (18) in threaded rod (17) one end stretches into, barrel (7) rigid coupling has automatically controlled gripper (3) under the other end stretches into.

3. The czochralski-method-based monocrystalline silicon drawing device according to claim 2, wherein the switching unit comprises a first chamber (19), the first chamber (19) is fixedly connected to the outer side wall of the upper cylinder (6), the middle part of a first hinge rod (20) is rotatably hinged to the side wall of the first chamber (19), one end of the first hinge rod (20) is hinged to one end of a second hinge rod (21), the other end of the second hinge rod (21) slidably penetrates through the side wall of the first chamber (19) and extends into the upper cylinder (6) and is fixedly connected with a first vertical block (22), and a first chute (23) matched with the first sliding block (18) is formed in the first vertical block (22); the other end of the first hinge rod (20) is hinged with one end of a third hinge rod (24), and the other end of the third hinge rod (24) can slidably penetrate through the side wall of the first cavity (19) to extend into the upper barrel body (6) and can be inserted between the outer side transmission teeth (9) of the gear ring (10);

a first electric telescopic rod (25) is further fixedly connected to the side wall of the first chamber (19), and a first push rod (26) of the first electric telescopic rod (25) is hinged to one end of the first hinge rod (20).

4. The czochralski-method-based monocrystalline silicon drawing device according to claim 3, wherein the seed crystal unit comprises a first box body (27) and a second box body (28), a second chute (29) for storing the seed crystal is arranged in the first box body (27) along the length direction, a third opening (30) is arranged at the end part of the second chute (29) on the first box body (27), and a first spring (31) capable of pushing the seed crystal out of the third opening (30) is arranged in the second chute (29) along the length direction; the first box body (27) is arranged on the lower end surface of the first partition plate (5);

a third sliding groove (32) is formed in the second box body (28) along the length direction, a fourth opening (33) is formed in the side wall of the second box body (28), the second box body (28) is installed on the side wall of the lower barrel body (7), the length direction of the second box body (28) and the length direction of the first box body (27) form an angle of 90 degrees, and the first box body (27) and the second box body (28) are communicated with the fourth opening (33) through a third opening (30); a second electric telescopic rod (34) is installed at one end in the third sliding chute (32), a second sliding block (36) is fixedly connected to a second push rod (35) of the second electric telescopic rod (34), and a groove (37) which can be used for receiving seed crystals is formed in the side wall of the second sliding block (36); the side wall of the other end of the third chute (32) is also provided with a fifth opening (38) for communicating the inside and the outside of the second box body (28).

5. The czochralski-method-based single crystal silicon drawing device according to claim 4, wherein the quartz crucible (2) is fixedly connected in a graphite crucible (39), the graphite crucible (39) is rotatably mounted on the bottom end surface of the lower cylinder (7) and is positioned in a heat insulation cylinder (40) with an open top surface, the heat insulation cylinder (40) is fixedly connected on the bottom end surface of the lower cylinder (7), a heater (41) is arranged on the outer wall of the graphite crucible (39), the second motor (42) is mounted on the mounting frame (4), and an output shaft of the second motor (42) rotatably penetrates through the bottom end surface of the lower cylinder (7) and is fixedly connected with the bottom surface of the graphite crucible (39).

6. The Czochralski-method-based monocrystalline silicon drawing device is characterized in that the discharging unit comprises a first discharging pipe (43), the first discharging pipe (43) is arranged on the bottom end face of the lower barrel (7), one end of the first discharging pipe (43) extends into the lower barrel (7) and vertically corresponds to the rotary electric control mechanical claw (3), the other end of the first discharging pipe extends out of the lower barrel (7) and is communicated with a second chamber (44), an isolating valve (45) is fixedly connected to the position where the second chamber (44) is communicated with the lower barrel (7), a discharging port (46) and a second pipeline (47) communicating the inside and the outside of the second chamber (44) are arranged on the side wall of the second chamber (44), and a second vacuum pump (48) is arranged on the second pipeline (47).

7. The czochralski-method-based single crystal silicon drawing device according to claim 6, wherein the side wall of the lower cylinder (7) is further provided with an inert gas input pipeline (49) and a first pipeline (50) which are communicated with the inside and the outside of the lower cylinder (7), and the first pipeline (50) is provided with a first vacuum pump (51).