CN101892519A - Silicon core furnace repeatedly pulling multiple silicon cores in one heat - Google Patents
Silicon core furnace repeatedly pulling multiple silicon cores in one heat Download PDFInfo
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- CN101892519A CN101892519A CN 201010230525 CN201010230525A CN101892519A CN 101892519 A CN101892519 A CN 101892519A CN 201010230525 CN201010230525 CN 201010230525 CN 201010230525 A CN201010230525 A CN 201010230525A CN 101892519 A CN101892519 A CN 101892519A
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Abstract
The invention discloses a silicon core furnace repeatedly pulling multiple silicon cores in one heat. A lower transmission device and a water cooling device are arranged in a rack, a lower furnace chamber and a slot way pulley are arranged on the rack, the slot way pulley is provided with a high frequency slot way, the lower furnace chamber is internally provided with an air charging device, a high frequency electrode and induction heating assembly and an evacuator, and the high frequency electrode and induction heating assembly is connected with the high frequency slot way; and the lower furnace chamber is communicated with the upper furnace chamber, guide steel wires are arranged in the lower furnace chamber and the upper furnace chamber and run through the lower furnace chamber and the upper furnace chamber from top to bottom, a guide frame is arranged on the guide steel wire and is provided with a seed card head seat and a seed card head, the upper end of the upper furnace chamber is provided with a seed unloading and turnplate dividing device, an upper transmission device is arranged above the upper furnace chamber, a transition assistant chamber is arranged between the upper furnace chamber and the upper transmission device, and the upper transmission device is connected with the seed card head seat by a flexible shaft. The silicon core furnace in the invention can realize broaching of 15-18 silicon cores in one heat, improves production efficiency of silicon cores, and lowers cost for producing polysilicon.
Description
Technical field
The invention belongs to the photovoltaic industry technical field, relate to and adopt the improvement Siemens Method to produce in the polysilicon process, the device of the carrier-silicon core of growing polycrystalline silicon in the reduction furnace is specifically related to the silicon core stove of many silicon cores of repeatedly pulling in a kind of heat.
Background technology
Along with the common recognition of the whole world to green energy resource, photovoltaic industry is able to fast development, as the upstream product in the photovoltaic industry chain, supply falls short of demand for polysilicon, strong business magnate drops into huge fund one after another and gets involved the polysilicon industry both at home and abroad, development scale is increasing, and silicon core stove is an important step on the production of polysilicon chain, and demand is also increasing.
A large amount of at present silicon core stoves that use once can only draw a silicon core, and a heat can only draw 4-6 root silicon core, the market requirement in the face of flood tide, need to drop into a large amount of silicon core stoves and produce, occupation area of equipment is increasing, and people's power ﹑ material resources and energy consumption are huge, and energy consumption also become production of polysilicon producer consider one of index, therefore, from improving plant efficiency, energy-saving and cost-reducing, save the cost aspect and consider the silicon core equipment that necessary research and development performance is more remarkable.
Summary of the invention
The silicon core stove that the purpose of this invention is to provide many silicon cores of repeatedly pulling in a kind of heat has solved existing silicon core stove list heat and has yielded poorly Ren Li ﹑ material resources and the huge problem of energy consumption.
The technical solution adopted in the present invention is, the silicon core stove of many silicon cores of repeatedly pulling in a kind of heat, furnace chamber and tank circuit coaster are installed down on the frame, tank circuit coaster is provided with the high frequency tank circuit that is connected with high frequency electric source, following furnace chamber inside is provided with inflation mechanism, high-frequency electrode and induction heating assembly, evacuator device, inflation mechanism wherein is connected with supplying the argon gas device, high-frequency electrode and induction heating assembly are connected with the high frequency tank circuit, high-frequency electrode and induction heating assembly comprise high frequency induction heater and high-frequency electrode assembly, and evacuator device is connected with vacuum pump; Following furnace chamber upwards is communicated with last furnace chamber, be provided with in following furnace chamber and the last furnace chamber and connect guiding steel wire up and down, the guiding steel wire is provided with the seed crystal dop seat that can slide up and down, the upper end of last furnace chamber is provided with seed crystal and grabs and unload and the rotating disk dividing apparatus, the upper surface of last furnace chamber is provided with the transition concubine, the top of transition concubine is provided with transmission mechanism, last transmission mechanism is connected with seed crystal dop seat by flexible axle, seed crystal dop seat and seed crystal dop articulate, and the seed crystal head on the seed crystal dop is vertical corresponding with the silicon core drawing hole in the high frequency induction heater; In frame, also be provided with the underdrive device and the water-chilling plant that are connected with following furnace chamber.
The invention has the beneficial effects as follows that once can draw 5-6 root silicon core, a heat can draw 15-18 root silicon core, improve the production efficiency of silicon core greatly, reduced the energy consumption of single silicon core, reduced manpower, the input of material resources, thus the cost of polysilicon production process reduced.
Description of drawings
Fig. 1 is a silicon core furnace main body structural representation of the present invention;
Fig. 2 is guide frame, seed crystal dop, induction heater and the local connection diagram of guiding steel wire assembly in apparatus of the present invention;
Fig. 3 is that the seed crystal in apparatus of the present invention is grabbed and unloaded and rotating disk dividing apparatus synoptic diagram;
Fig. 4 is guide frame and the seed crystal dop structure partial enlarged diagram among Fig. 2;
Fig. 5 is the calibration turntable structure synoptic diagram in apparatus of the present invention;
Fig. 6 is high-frequency electrode and the induction heating assembly schematic top plan view in apparatus of the present invention
Fig. 7 is five silicon core high frequency induction heater embodiment synoptic diagram in apparatus of the present invention;
Fig. 8 is the six roots of sensation silicon core high frequency induction heater embodiment synoptic diagram in apparatus of the present invention.
Among the figure, 1. go up transmission mechanism; 2. transition concubine; 3. seed crystal is grabbed and is unloaded and the rotating disk dividing apparatus; 4. go up furnace chamber; 5. descend furnace chamber; 6. inflation mechanism; 7. high-frequency electrode and induction heating assembly; 8. evacuator device; 9. underdrive device; 10. frame; 11. water-chilling plant; 12. tank circuit coaster; 13. the high frequency tank circuit; 14. vacuum pump; 15. last fixture block; 16. ceramic jacket; 17. following fixture block; 18. guiding steel wire; 19. rotating disk calibration control device; 20. seed crystal dop seat; 21. seed crystal dop; 22. calibration rotating disk; 23. adjustable nut and nut seat; 24. high-frequency electrode assembly; 25. high frequency induction heater; 26. the silicon core draws the position; 27. the seed crystal dop is placed the position; 28. calibration rotating disk position; 29. the silicon core is placed the position; 30. frustum; 31. the silicon core draws the hole; 32. splitter box; 33. centre hole; 37. flexible axle; 38. coupling shaft; 39. guide frame; 41. press female; 43. bearing pin; 44. connection termination; 45. shaft collar; 46. seed crystal head.
Embodiment
The present invention is described in detail below in conjunction with the drawings and specific embodiments.
As Fig. 1, Fig. 2, the silicon core furnace structure of apparatus of the present invention is, in frame 10, be provided with underdrive device 9 and water-chilling plant 11, on the table top of frame 10 and rear portion is equipped with down furnace chamber 5 and tank circuit coaster 12, tank circuit coaster 12 is provided with the high frequency tank circuit 13 that is connected with high frequency electric source, following furnace chamber 5 inside are provided with inflation mechanism 6, high-frequency electrode and induction heating assembly 7, evacuator device 8, inflation mechanism 6 wherein and extraneous being connected for the argon gas device, high-frequency electrode and induction heating assembly 7 are connected with the high frequency tank circuit 13, and evacuator device 8 is connected with the vacuum pump 14 in the external world; Following furnace chamber 5 upwards is communicated with last furnace chamber 4, be provided with in following furnace chamber 5 and the last furnace chamber 4 and connect guiding steel wire 18 up and down, guiding steel wire 18 is provided with the seed crystal dop seat 20 that can slide up and down, the upper end of last furnace chamber 4 is provided with seed crystal and grabs and unload and rotating disk dividing apparatus 3, the upper surface of last furnace chamber 4 is provided with transition concubine 2, and the top of transition concubine 2 is provided with transmission mechanism 1.
Last transmission mechanism 1 comprises the flexible axle hoisting mechanism that two nested structures are identical, in the process that draws long silicon core (2100-3000mm), effectively reduces device height; Each flexible axle hoisting mechanism adopts the elaborate servo electric motor driving, realize that through turbine and worm transmission rear drive splined shaft the flexible axle elevator promotes, two cover lifting mechanisms are according to soon, separately at a slow speed, be connected respectively with Controlling System, accept the time variable control of Controlling System, thereby satisfy the silicon core in the accuracy requirement of pulling process to friction-motion speed; Also be provided with the upper and lower limit bit switch that cooperates silicon core process of growth in the flexible axle hoisting mechanism, so that the action of Controlling System operation flexible axle hoisting mechanism; Whole hoisting mechanism is arranged in the airtight rolling wheel casing, and flexible axle 17 stretches in the furnace chamber 4 by transition concubine 2, and the flexible axle hoisting mechanism is connected with seed crystal dop seat 20 by flexible axle 17, has guaranteed the requirement of silicon core growth technique.
Transition concubine 2 is the transition of going up between transmission mechanism 1 and the last furnace chamber 4, communicate with vacuum container and flexible axle hoisting mechanism casing, be provided with the second road mechanical position limitation, after last transmission mechanism 1 spacing inefficacy, second road is spacing to work, and prevents to fall under seed crystal dop seat 20 accidents.
Last furnace chamber 4 is to go up the working chamber part, is provided with to the doorstep, can open to the doorstep, and the silicon core can have circular viewing window to the doorstep from taking out to the doorstep, is convenient to observe the rotating disk situation; Last furnace chamber is provided with camera near the rotating disk height, be convenient to that unloading of when the housing watch-dog is observed dial rotation silicon core put and the extracting situation of seed crystal dop; Near the direction that departs from 45 ° the camera be provided be used on the furnace chamber lamp.
Following furnace chamber 5 is following working chamber parts, be fixed on the frame 10, upwards pass through bolting with last furnace chamber 4, downward and frame 10 is passed through screw retention, 5 times rear portions of following furnace chamber are provided with the high frequency interface, and high-frequency electrode and induction heating assembly 7 are connected by this interface with the high frequency tank circuit 13, are the operation of entire equipment districts, the contour portion of this interface each side is provided with a spy hole, and be provided with down that inflation is chewed, tensimeter is chewed, following furnace chamber lamp hole; The lower furnace door of following furnace chamber 5 links to each other with hinge by bolt with following furnace chamber 5, has the rectangle observation window on the lower furnace door, and following furnace chamber 5 has left and right form, is convenient to observe each situation of melting zone.
As Fig. 2; be provided with guiding steel wire anti-tamper assembly in the following furnace chamber 5; be included on the guiding steel wire 18 with high-frequency electrode and induction heating assembly 7 height corresponding positions and be set with ceramic jacket 16; the upper and lower ends of ceramic jacket 16 is respectively installed with fixture block 15, following fixture block 17; prevent the thermal radiation temperatures involved of high frequency induction heater 25, play the purpose of protection guiding steel wire 18, in addition; last fixture block 15 stoppable seed crystal dop seats fall for 20 times, and protection high frequency induction heater 7 is not damaged under unexpected situation.
As Fig. 3, seed crystal is grabbed and is unloaded and the structure of rotating disk dividing apparatus 3 is, comprise rotating disk calibration control device 19 that is arranged on furnace chamber 4 loam cake upper surfaces and the calibration rotating disk 22 that is positioned at furnace chamber 4 inside, rotating disk calibration control device 19 and calibration rotating disk 22 coaxial fixedlying connected, rotating disk calibration control device 19 drives accurate turbine and worm by stepper-motor and realizes accurate calibration, stepper-motor is connected with Controlling System, realize the angular turn of calibration rotating disk 22, rotating disk calibration control device 19 also is provided with calibration and returns control mechanism, can accurately be turned back to zero position.
With reference to Fig. 3, Fig. 4, the structure of seed crystal dop assembly is, seed crystal dop seat 20 comprises the guide frame 39 that is installed on the guiding steel wire 18, the axis of guide frame 39 vertically is installed with coupling shaft 38, coupling shaft 38 upper ends are connected with last transmission mechanism 1 after penetrating the rolling wheel casing by flexible axle 37, coupling shaft 38 lower ends adopt screw thread to link to each other with the upper plate of seed crystal dop seat 20, coupling shaft 38 terminations realize that by pressing mother 41 and seed crystal dop seat 20 insurance is fixing, the lower shoe of seed crystal dop seat 20 is provided with the center cone bayonet socket, and this circular cone bayonet socket has breach.
The structure of seed crystal dop 21 is, the obconic connection termination 44 that comprises coaxial setting, obconic frustum 30 and shaft collar 45, shaft collar 45 is connected with 5-6 seed crystal head 46 downwards, connect termination 44, frustum 30 and shaft collar 45 are provided with successively from top to bottom at interval, when the breach of seed crystal dop seat 20 forwards correct position to, connecting termination 44 locatees by the inverted cone surface hook with the circular cone bayonet socket of seed crystal dop seat 20, realize firm connection, the orientation that connects 5-6 seed crystal head 46 on direction and the following shaft collar 45 of 43, two bearing pins 43 of bearing pin that termination 44 both upper ends thereof are provided with two shrink-fit is corresponding.In the working process, the orientation of each seed crystal head 46 will draw hole 31 strict centerings with the silicon core on the high frequency induction heater 25, total system adopts frock centering adjustable, connects termination 44 and bearing pin 43 and seed crystal dop seat 20 and fixedly articulates by the conical surface, can realize automatic loading and unloading seed crystal dop 21.One frustum of seed crystal dish coupling shaft intermediary 30, an effect is after pulling one group of silicon core, one group of silicon core is unloaded when being placed on the calibration rotating disk 22, being placed on silicon core on the calibration rotating disk 22 unloads on the taper hole of putting on the position 29 and uses, another effect is seed crystal dop 21 to be placed on the seed crystal dop place usefulness on shape on the position 27 such as the taper hole, thereby realizes that seed crystal dop 21 and unloading automatically of silicon core put.During work, the guide frame 39 that is connected with seed crystal dop seat 20 and seed crystal dop 21 etc. moves up and down along guiding steel wire 18, guarantees the linearity of silicon core in pulling process.
As Fig. 5, calibration rotating disk 22 is provided with a silicon core and draws position 26, two seed crystal dops are placed position 27, two silicon cores are placed position 29, have five stations, the seed crystal dop places position 27 and silicon core placement position 29 is a tapered hole, realize supporting arrangement with frustum 30 clampings of seed crystal dop 21, two seed crystal dops are placed 27 and silicon cores drawings position, position 26 and are respectively placed 1 group of seed crystal dop 21, each seed crystal dop 21 comprises 5-6 seed crystal head, in the working process, seed crystal dop seat 20 is connected with one group of seed crystal dop 21 at every turn, calibration rotating disk 22 is subjected to time variable control to rotate corresponding angle, guarantees the appointment station that seed crystal dop 21 can hang on the calibration rotating disk 22 in order successively.When the 1st group of silicon core finish growth and draw finish after, just unload automatically and be placed on the rotating disk mechanism seed crystal position, grasp the 2nd group of seed crystal dop assembly again, begin new silicon core growth ... after the 3rd group of silicon core drawing finished, draw and finish, can realize that a heat draws the requirement of 3 groups of silicon cores, seed crystal is grabbed and is unloaded and rotating disk dividing apparatus 3 is accepted the time variable control of Controlling System, and whole seed crystal grasps and unloads to be put action and realize by the PLC time variable control.Seed crystal grab unload and rotating disk dividing apparatus 3 in automatic rotating disk on also be provided with manual switch, use in order to emergency situation.
See Fig. 6, the structure of high-frequency electrode and induction heating assembly 7 is, comprises high frequency induction heater 25 and high-frequency electrode assembly 24, and high-frequency electrode assembly 24 is front and back and left and right sides adjustable structure, realize sealing and adjust by adjustable nut and nut seat 23, when guaranteeing that coil is installed and lower shaft centering.
As Fig. 7, Fig. 8, high frequency induction heater 25 is the circumference symmetry unitized construction of a 5-6 core, around centre hole 33, evenly be provided with 5-6 silicon core and draw hole 31 along circumference, each silicon core draws between the hole 31 and is provided with splitter box 32, all splitter boxs 32 entad are communicated with centre hole 33, can satisfy the requirement that once draws 5-6 root silicon core.During high frequency induction heater 25 work, centre hole 33 is earlier with after a seed crystal melts in the middle of the seed crystal head 46, molten drop drops on the fuel rod, fuel rod is under high frequency induction heater 25 effects, by molten drop fuel rod is heated, when fuel rod is rubescent draw to each silicon core 31 times each little melting zones, hole form full after, transmission mechanism 1 action is gone up in crawl control, makes the little melting zone of seed crystal head 46 contacts, after the fusion behind setting speed and the temperature parameter, carrying out the silicon core draws, the example structure that Fig. 7 shows is provided with five silicon cores and draws hole 31, and corresponding five seed crystal dops 46 once can draw five silicon cores, centre hole 33 is for changing material usefulness, and splitter box 32 plays the effect of distribution of current isostatic.One in five splitter boxs 32 connects, and will cut off between the two-stage, and all the other 4 splitter boxs for the certain size that matches are realized the equiblibrium mass distribution of electric current on high frequency induction heater 25, thereby realized the consistence of five silicon cores growths.The example structure that Fig. 8 shows is provided with six silicon cores and draws hole 31, corresponding six seed crystal dops 46, once can draw six roots of sensation silicon core, centre hole 33 is used for changing material, six splitter boxs 32 are arranged, and one of them connects, all the other five splitter boxs for the certain size that matches, realize the equiblibrium mass distribution of electric current on high frequency induction heater 25, thereby realize the consistence of six roots of sensation silicon core growth.
Inflation mechanism 6, equipment work during equipment work, vacuumize earlier under argon gas atmosphere, through the inflation mechanism fast aeration, fully after the displaced air, reach certain pressure in the stove then, close the fast aeration function, open the flow of aerating air meter, open extraction flow and take into account vent valve, equipment enters working process.Flow of aerating air meter, exhaust flow-meter all are connected with Controlling System, in time transfer data information.Whole process intake and exhaust flow is manually adjustable, and other action is undertaken by the action of time variable control magnetic valve.
Evacuator device 8 when equipment is started working, vacuumizes earlier, and vacuum system is made up of vacuum pump, vacuum pipe, electrical ball valve etc.
Underdrive device 9, be provided with soon, two cover transmission systems at a slow speed, assurance equipment is in the processing requirement of different working stages, every cover transmission system all adopts the elaborate servo motor to drive through the turbine and worm speed reduction unit, rolling guide and ball-screw transmission realize that accurate fuel rod moves, and control down in the Controlling System program and finish the supply of polycrystalline silicon raw material rod or withdraw from operation.
Water-chilling plant 11, the equipment that is included in always intakes, total backwater and each branch road all are provided with ball valve, be convenient to control each branch road current size, also be separately installed with temperature sensor on total water inlet, the total backwater, water-in also is equipped with flow and takes into account tensimeter, temperature sensor, flow are taken into account tensimeter and all are connected with Controlling System, in time transfer data information.
Tank circuit coaster 12 adopts guide rail and screw structure, and the high frequency tank circuit 13 is installed on the tank circuit coaster 12, is convenient to realize when Installation and Debugging and replacing high-frequency electrode assembly 24 moving forward and backward of the high frequency tank circuit 13; Be provided with 4 adjustable bolts up and down between the tank circuit coaster 12 and the high frequency tank circuit 13, be convenient to realize the upper-lower position adjustment of the high frequency tank circuit 13.
Apparatus of the present invention can be divided into host machine part, electric control system and supplying unit three parts according to function and form.
Comprise transmission mechanism 1, transition concubine 2, seed crystal grasp unload put and rotating disk mechanism 3, go up furnace chamber 4, furnace chamber 5, inflation mechanism 6, high-frequency electrode and induction heating assembly 7, evacuator device 8, underdrive device 9, water-chilling plant 11, vacuum pump 14 are formed host machine part down.
Constitute electric control system by speed system, temperature controlling system and detection alarm system, speed system comprises the control to last transmission mechanism 1, underdrive device 9, temperature controlling system comprises the control to inflation mechanism 6, evacuator device 8, water-chilling plant 11, vacuum pump 14, and the detection alarm system comprises the monitoring alarm to last furnace chamber 4, following furnace chamber 5.
Form supplying unit by high frequency electric source and the high frequency tank circuit 13, tank circuit coaster 12, comprise control to high-frequency electrode assembly 24 and high frequency induction heater 25, satisfying the fusing diameter is the requirement of φ 80-120mm polycrystalline silicon raw material rod, and the high frequency electric source frequency is 3 ± 0.2MHz, output rating 〉=60KW.
The working process of apparatus of the present invention is, in the vacuum furnace chamber, inflation mechanism 6, evacuator device 8 and vacuum pump 14 work, under argon gas atmosphere, last transmission mechanism 1 drives seed crystal dop seat 20 by flexible axle 17 and descends, 5-6 the polycrystalline silicon raw material rod of installing on the underdrive device 9 is heated under high-frequency electrode assembly 24 and high frequency induction heater 25 effects, thereby form little melting zone at polysilicon masterbatch upper surface, the quantity in little melting zone is according to the setting of high frequency induction heater 25, after little melting zone forms, the 5-6 of seed crystal dop 21 seed crystal moves downward and touches each corresponding little melting zone, behind each seed crystal penetration, under certain temperature and velocity conditions, last transmission mechanism 1 is with certain speed uniform motion drawing silicon core that makes progress, corresponding underdrive device 9 is with certain speed that is complementary with last transmission mechanism 1 uniform motion feed that makes progress, be drawn to the length of needs when one group of silicon core (5-6 root) after, break, one group of silicon core draws to be finished, according to program setting, 19 actions of rotating disk calibration control device, unload the one group of silicon core that has drawn from seed crystal dop seat 20, grasping next group seed crystal again delivers in the seed crystal dop seat 20, carry out the growth of next group silicon core, after three groups of silicon cores are all finished, the whole process end that complete silicon core draws.Through the subsequent operations of inflation mechanism 6, water-chilling plant 11, three groups of silicon cores that draw take out to the doorstep from last furnace chamber 4.
Advantage of the present invention is: the polycrystalline silicon raw material rod that 1) can melt diameter φ 80-120mm, just can directly in reduction furnace, obtain the polycrystalline silicon raw material rod, it is more a lot of than the fuel rod economy of thin diameter to obtain thick polycrystalline silicon raw material rod in the reduction furnace, has solved the fuel rod problem; 2) production capacity greatly improves, the 5-6 root/time, 15-18 root/heat, thus production efficiency significantly improved, reduced the cost of single silicon core, have good economic benefit; 3) adopt accurate actuated element and accurate driving element, running precision height; 4) adopt PLC control, man-machine interface close friend is convenient to automation control and manually combines operate.
Claims (10)
1. the silicon core stove of many silicon cores of repeatedly pulling in the heat, it is characterized in that: furnace chamber (5) and tank circuit coaster (12) are installed down on the frame (10), tank circuit coaster (12) is provided with the high frequency tank circuit (13) that is connected with high frequency electric source, following furnace chamber (5) inside is provided with inflation mechanism (6), high-frequency electrode and induction heating assembly (7), evacuator device (8), inflation mechanism wherein (6) is connected with supplying the argon gas device, high-frequency electrode and induction heating assembly (7) are connected with the high frequency tank circuit (13), high-frequency electrode and induction heating assembly (7) comprise high frequency induction heater (25) and high-frequency electrode assembly (24), and evacuator device (8) is connected with vacuum pump (14); Following furnace chamber (5) upwards is communicated with last furnace chamber (4), be provided with in following furnace chamber (5) and the last furnace chamber (4) and connect guiding steel wire (18) up and down, guiding steel wire (18) is provided with the seed crystal dop seat (20) that can slide up and down, the upper end of last furnace chamber (4) is provided with seed crystal and grabs and unload and rotating disk dividing apparatus (3), the upper surface of last furnace chamber (4) is provided with transition concubine (2), the top of transition concubine (2) is provided with transmission mechanism (1), last transmission mechanism (1) is connected with seed crystal dop seat (20) by flexible axle (17), seed crystal dop seat (20) articulates with seed crystal dop (21), and the seed crystal head on the seed crystal dop (21) is vertical corresponding with the silicon core drawing hole (31) in the high frequency induction heater (25);
In frame (10), also be provided with the underdrive device (9) and the water-chilling plant (11) that are connected with following furnace chamber (5).
2. the silicon core stove of many silicon cores of repeatedly pulling in the heat according to claim 1, it is characterized in that: described seed crystal is grabbed and is unloaded and the structure of rotating disk dividing apparatus (3) is, comprise the rotating disk calibration control device (19) that is arranged on furnace chamber (4) loam cake upper surface, and the calibration rotating disk (22) that is positioned at furnace chamber (4) inside, rotating disk calibration control device (19) and coaxial the fixedlying connected of calibration rotating disk (22), the stepper-motor in the rotating disk calibration control device (19) is connected with Controlling System; Calibration rotating disk (22) upper edge circumference is provided with a silicon core and draws position (26), two seed crystal dops placement positions (27), two silicon cores placement positions (29), has five stations.
3. the silicon core stove of many silicon cores of repeatedly pulling in the heat according to claim 1, it is characterized in that: the described transmission mechanism (1) of going up comprises the flexible axle hoisting mechanism that two nested structures are identical, each flexible axle hoisting mechanism comprises a servomotor, servomotor is connected with flexible axle (17) by turbine and worm and splined shaft, two cover lifting mechanisms are connected respectively with Controlling System according to soon, separately at a slow speed; Also be provided with the upper and lower limit bit switch of flexible axle (17) in the flexible axle hoisting mechanism.
4. the silicon core stove of many silicon cores of repeatedly pulling in the heat according to claim 1, it is characterized in that: the structure of described underdrive device (9) is, be provided with soon, two cover transmission systems at a slow speed, every cover transmission system includes a servomotor, servomotor is connected successively with turbine and worm speed reduction unit, rolling guide, ball-screw, fuel rod, and two servomotors are connected respectively with Controlling System.
5. the silicon core stove of many silicon cores of repeatedly pulling in the heat according to claim 1 is characterized in that: the described furnace chamber (4) of going up is provided with to the doorstep, has viewing window to the doorstep, last furnace chamber the rotating disk height be provided with camera and supporting on the furnace chamber lamp.
6. the silicon core stove of many silicon cores of repeatedly pulling in the heat according to claim 1, it is characterized in that: described furnace chamber (5) down is provided with the high frequency interface and inflation is chewed, tensimeter is chewed down, following furnace chamber lamp hole, and high-frequency electrode and induction heating assembly (7) are connected by this high frequency interface with the high frequency tank circuit (13); Following furnace chamber (5) is provided with lower furnace door, has viewing window on the lower furnace door, and following furnace chamber (5) high frequency interface height is provided with viewing window about the place.
7. the silicon core stove of many silicon cores of repeatedly pulling in the heat according to claim 1, it is characterized in that: on the described guiding steel wire (18), be set with ceramic jacket (16) on the position highly accordingly with high-frequency electrode and induction heating assembly (7), the upper and lower ends of ceramic jacket (16) is respectively installed with fixture block (15), following fixture block (17).
8. the silicon core stove of many silicon cores of repeatedly pulling in the heat according to claim 1, it is characterized in that: the structure of described high frequency induction heater (25) is, comprise a centre hole (33), evenly be provided with 5-6 silicon core along circumference on every side at centre hole (33) and draw hole (31), each silicon core draws between the hole (31) and is provided with splitter box (32), and all splitter boxs (32) entad are communicated with centre hole (33).
9. the silicon core stove of many silicon cores of repeatedly pulling in the heat according to claim 1, it is characterized in that: described inflation mechanism (6) is provided with flow of aerating air meter, exhaust flow-meter, and flow of aerating air meter, exhaust flow-meter all are connected with Controlling System; Be separately installed with temperature sensor on total water inlet of described water-chilling plant (11), the total backwater, water-in also is equipped with flow and takes into account tensimeter, and all temperature sensors, flow are taken into account tensimeter and all be connected with Controlling System.
10. the silicon core stove of many silicon cores of repeatedly pulling in the heat according to claim 1, it is characterized in that: the structure of described seed crystal dop (21) is, comprise the obconic connection termination (44) of coaxial setting, obconic frustum (30) and shaft collar (45), shaft collar (45) is connected with 5-6 seed crystal head (46) downwards, connects termination (44), frustum (30) and shaft collar (45) and is provided with at interval from top to bottom successively.
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| CN2010102305256A CN101892519B (en) | 2010-07-20 | 2010-07-20 | Silicon core furnace repeatedly pulling multiple silicon cores in one heat |
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| CN2010102305256A CN101892519B (en) | 2010-07-20 | 2010-07-20 | Silicon core furnace repeatedly pulling multiple silicon cores in one heat |
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| CN101892519B CN101892519B (en) | 2012-02-08 |
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| CN107268072A (en) * | 2017-07-21 | 2017-10-20 | 洛阳金诺机械工程有限公司 | A kind of silicon core for silicon core furnace takes discharging device |
| CN111945223A (en) * | 2020-08-12 | 2020-11-17 | 亚洲硅业(青海)股份有限公司 | Silicon core furnace capable of realizing continuous production and use method |
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| CN113089082A (en) * | 2021-03-25 | 2021-07-09 | 杨伟洛 | Automatic regulating device for circuit silicon wafer manufacturing |
| CN117926392A (en) * | 2024-03-21 | 2024-04-26 | 浙江晶阳机电股份有限公司 | Device for cooling crystal bars in multiple circles in layering mode |
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| CN103553052B (en) * | 2013-10-30 | 2016-04-13 | 大连理工大学 | A kind of polysilicon reverse solidification device and method |
| CN104118879A (en) * | 2014-08-06 | 2014-10-29 | 四川永祥多晶硅有限公司 | Preparation method of silicon core master batch |
| CN104118879B (en) * | 2014-08-06 | 2016-06-22 | 四川永祥多晶硅有限公司 | A kind of preparation method of silicon core masterbatch |
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| CN106676622A (en) * | 2017-02-24 | 2017-05-17 | 洛阳金诺光电子材料有限公司 | Upper shaft lifting device for artificial crystal furnace |
| CN107268072A (en) * | 2017-07-21 | 2017-10-20 | 洛阳金诺机械工程有限公司 | A kind of silicon core for silicon core furnace takes discharging device |
| CN111945223A (en) * | 2020-08-12 | 2020-11-17 | 亚洲硅业(青海)股份有限公司 | Silicon core furnace capable of realizing continuous production and use method |
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