CN117926392A - Device for cooling crystal bars in multiple circles in layering mode - Google Patents
Device for cooling crystal bars in multiple circles in layering mode Download PDFInfo
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- CN117926392A CN117926392A CN202410323007.0A CN202410323007A CN117926392A CN 117926392 A CN117926392 A CN 117926392A CN 202410323007 A CN202410323007 A CN 202410323007A CN 117926392 A CN117926392 A CN 117926392A
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- cooling
- water
- inner ring
- screen
- channel
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- 238000001816 cooling Methods 0.000 title claims abstract description 129
- 239000013078 crystal Substances 0.000 title claims abstract description 74
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 96
- 238000000034 method Methods 0.000 claims abstract description 20
- 238000005728 strengthening Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 239000002994 raw material Substances 0.000 abstract description 6
- 239000007788 liquid Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 238000002360 preparation method Methods 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000004857 zone melting Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the technical field of semiconductor material production equipment, and discloses a device for cooling a crystal bar in multiple circles in a layering way, which comprises a joint, wherein the bottom of the joint is fixedly connected with a connecting rod, one side of the connecting rod is fixedly connected with a positioning block, the bottom of the positioning block is fixedly connected with a fixing rod, a fixing ring is fixedly sleeved on the fixing rod, and the bottom of the fixing rod is fixedly connected with a cooling assembly; the cooling assembly is used for cooling the crystal bar produced by processing, in the use process, the whole cooling device is installed and positioned through the positioning block, the bottom surface of the water cooling screen is located at a proper distance from the liquid level of the raw material, and the cooling assembly in the cooling device is used for circulating water so as to realize cooling the crystal bar in the production process, and meanwhile, different layering forms of the water cooling screen are used for meeting the use requirements of different use environments, different working conditions and different processes, so that the effect of uniformly cooling the crystal bar under various conditions is realized.
Description
Technical Field
The invention relates to the technical field of semiconductor material production equipment, in particular to a device for cooling a crystal bar in multiple circles in a layered mode.
Background
With the development of the photovoltaic industry, the phenomenon of short supply appears in many and monocrystalline silicon markets, in the process of producing many and monocrystalline silicon, the use amount of silicon cores is very large, the traditional silicon core preparation generally adopts a zone melting method or a cutting method, wherein the zone melting method is to heat raw materials by using a high-frequency coil to melt and recrystallize the raw materials to obtain a required product, the cutting method is to cut a large crystal bar into silicon cores with required size by using equipment special for cutting the silicon cores, and the two methods have high production cost and low production efficiency, so that the current more advanced silicon core preparation is to directly draw a plurality of silicon cores by using a Czochralski crystal growing furnace, and the principle is to heat and melt the raw materials into a liquid state, and then to recrystallize the liquid raw materials by using seed crystals.
In the prior art, in the process of directly drawing a plurality of silicon cores to prepare the silicon cores by using a Czochralski crystal growing furnace, the grown crystal rod needs to be cooled to ensure that the crystallization process is smoothly and rapidly carried out, and simultaneously, the diameter and the size of the grown crystal rod are uniform. Therefore, the application discloses a device for cooling a crystal bar in multiple circles in a layered manner, which is used for meeting the fixed-point cooling of different height points of the crystal bar and realizing the requirements of rapid, stable and uniform production and preparation of multiple silicon cores.
Disclosure of Invention
The technical problems to be solved are as follows: aiming at the defects of the prior art, the invention provides a device for cooling a crystal bar in multiple circles in a layered manner, which has the advantage of constant-point cooling of different height points of the crystal bar, and solves the series of problems that a plurality of silicon cores cannot be simultaneously and rapidly produced and prepared into the crystal bar and the like.
(II) technical scheme: in order to achieve the above purpose, the present invention provides the following technical solutions: the device for cooling the crystal bar in multiple circles in a layering way comprises a connector, wherein the bottom of the connector is fixedly connected with a connecting rod, one side of the connecting rod is fixedly connected with a positioning block, the bottom of the positioning block is fixedly connected with a fixing rod, a fixing ring is fixedly sleeved on the fixing rod, and the bottom of the fixing rod is fixedly connected with a cooling assembly; the cooling component is used for cooling the crystal bar generated by processing.
Preferably, the cooling assembly comprises a water cooling screen connected to the bottom of the fixing rod, an inner ring water channel and an outer ring water channel are arranged in the water cooling screen through threads, a water inlet is formed in one end of the inner ring water channel and one end of the outer ring water channel, a water outlet is formed in the other end of the inner ring water channel and the outer ring water channel are in the water cooling screen, and a recyclable waterway is formed in the water cooling screen.
Preferably, the joint is provided with an internal thread and an external thread, the internal thread is used for connecting a water outlet pipe, and the external thread is used for fixing the whole cooling device.
Preferably, an inner ring crystal pulling hole and an outer ring crystal pulling hole are formed in the water cooling screen, the number of turns of the inner ring crystal pulling hole and the outer ring crystal pulling hole is greater than or equal to one, the inner ring water channel and the outer ring water channel are uniformly distributed around the inner ring crystal pulling hole and the outer ring crystal pulling hole, and layered water cooling is arranged at the bottom of the water cooling screen.
Preferably, the fixing ring is used for reinforcing and fixing the stability of the whole cooled device.
Preferably, the joint, the connecting rod and the positioning block are hollow to form a water outlet passage.
Preferably, one or more channels can be formed in the water cooling screen through the water inlet between the inner ring channel and the outer ring channel, and the inner ring channel and the outer ring channel are converged at the water outlet.
Preferably, an adjusting rod is arranged in the water cooling screen and used for adjusting the distance between the water cooling screens.
Preferably, an insulating layer is arranged at the central position of the water cooling screen, and the thickness of the insulating layer can be matched according to different process conditions.
(III) beneficial effects: compared with the prior art, the invention provides a device for cooling a crystal bar in multiple circles in a layering way, which has the following beneficial effects:
1. According to the method and the device for cooling the crystal bar in the multi-ring layered mode, when the crystal bar is cooled, firstly, the water inlets are formed in one end of the inner ring water channel and one end of the outer ring water channel, so that a recyclable water channel is formed in the water cooling screen, meanwhile, one or more water channels are formed in the water cooling screen through the water inlets between the inner ring water channel and the outer ring water channel, the inner ring water channel and the outer ring water channel are converged at the water outlets, the crystal bar can be uniformly cooled under various conditions, meanwhile, different cooling positions can be changed under different conditions, and therefore the cooling effect of the crystal bar is adjusted.
2. According to the method and the device for cooling the crystal bar in multiple circles in a layered manner, the water cooling screen is provided with multiple circles of inner circle crystal pulling holes and outer circle crystal pulling holes which are distributed in multiple circles and have different or same numbers, and the inner circle water channels and the outer circle water channels are uniformly distributed around the inner circle crystal pulling holes and the outer circle crystal pulling holes, so that the cooling of each inner circle crystal pulling hole and each outer circle crystal pulling hole is realized, and the purpose of rapidly and stably drawing multiple silicon cores at one time is achieved; meanwhile, the use requirements of different use environments, different working conditions and different processes are met through different layering forms, and the crystal bar can be uniformly cooled under various conditions.
3. The multi-turn layered crystal bar cooling method and device further comprises layered water cooling in different layered modes, including but not limited to an inner-thick outer-thin stepped mode, an inner-high outer-low stepped mode, an inner-low outer-high inclined plane mode, an inner-thin outer-thick stepped mode, an inner-high outer-low inclined plane mode, a double-screen or multi-screen layered mode, wherein each water cooling screen is connected by a hose or other modes to form water circulation, bolts or other structures are used for fixedly connecting the water cooling screens, and meanwhile, the height distance between the water cooling screens is adjusted through an adjusting rod, so that fixed-point cooling of different height points of the crystal bar is realized, rapid stable and uniform production and preparation of a plurality of silicon cores are realized, and meanwhile, the diameter size of the grown crystal bar is ensured to be uniform.
Drawings
FIG. 1 is a schematic view of a planar structure of a three-dimensional planar water-cooled screen according to the present invention;
FIG. 2 is a schematic plan view of a water-cooled screen according to the present invention;
FIG. 3 is a schematic view of the inner thick and outer thin stepped structure of the water-cooled screen;
FIG. 4 is a schematic view of the water-cooled screen with high and low steps inside and outside;
FIG. 5 is a schematic view of the water-cooled screen of the present invention with low inside and high outside;
FIG. 6 is a schematic view of the structure of the low-outside high-slope inside the water-cooled screen of the present invention;
FIG. 7 is a schematic view of the structure of the inner thin and outer thick inclined planes of the water-cooled screen;
FIG. 8 is a schematic view of a stepped structure of the water-cooled screen of the present invention with thin inside and thick outside;
FIG. 9 is a schematic view of the inner high and outer low inclined plane structure of the water cooling screen;
FIG. 10 is a schematic view of the inclined surface structure of the water-cooled screen with the inner part thick and the outer part thin;
FIG. 11 is a schematic view of the structure of the adjusting rod of the water-cooling screen.
In the figure: 1. a joint; 2. a connecting rod; 3. a positioning block; 4. a fixed rod; 5. a fixing ring; 6. a water cooling screen; 7. an inner ring water channel; 8. an outer ring water channel; 9. an inner ring crystal pulling hole; 10. an outer ring crystal pulling hole; 11. layering and water cooling; 12. and (5) adjusting the rod.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As described in the background art, the application provides a device for cooling a crystal bar in multiple circles in a layered manner in order to solve the technical problems.
As shown in fig. 1-11, a device for cooling a crystal bar in multiple circles in a layering manner comprises a joint 1, wherein the bottom of the joint 1 is fixedly connected with a connecting rod 2, one side of the connecting rod 2 is fixedly connected with a positioning block 3, the positioning block 3 is used for installing and positioning the whole cooling device, a water outlet passage is formed in the joint 1, the connecting rod 2 and the positioning block 3 in a hollow mode, the bottom of the positioning block 3 is fixedly connected with a fixing rod 4, the fixing rod 4 is fixedly sleeved with a fixing ring 5, and the bottom of the fixing rod 4 is fixedly connected with a cooling assembly; the cooling assembly is used for cooling the crystal bar produced by processing, in the use process, the bottom surface of the water cooling screen 6 and the liquid level of the raw material are located at proper distances, and the cooling assembly in the cooling device is used for circulating water so as to realize cooling the crystal bar in the production process, and meanwhile, the use requirements of different use environments, different working conditions and different processes are met through different layering forms of the water cooling screen 6, so that the effect of uniformly cooling the crystal bar under various conditions is realized.
As a preferred implementation manner in this embodiment, refer to fig. 1 and 2, the cooling component includes a water cooling screen 6 connected to the bottom of the fixing rod 4, an insulation layer is installed at the central position of the water cooling screen 6, the thickness of the insulation layer can be matched according to different process conditions, the insulation layer can be matched with materials such as solidified felt and graphite, an inner ring water channel 7 and an outer ring water channel 8 are installed on the internal thread of the water cooling screen 6, a water inlet is formed at one end of the inner ring water channel 7 and one end of the outer ring water channel 8, a water outlet is formed at the other end of the inner ring water channel 7, the inner ring water channel 7 and the outer ring water channel 8 form a recyclable water channel in the water cooling screen 6, one or multiple channels are formed in the water cooling screen 6 through the water inlet between the inner ring water channel 7 and the outer ring water channel 8, the inner ring water channel 7 and the outer ring water channel 8 are converged at the water outlet, internal threads and external threads are formed on the joint 1, the internal threads and the internal threads are used for connecting a water outlet pipe, the external threads are used for fixing the whole cooling device, when the crystal bar is cooled, firstly, the water inlet is formed at one end of the outer ring water channel 8 through the inner ring water channel 7, thereby forming a recyclable water channel in the water cooling screen 6, and simultaneously the water channel can be formed in the water cooling screen 6 through the water inlet 7 and the water inlet 6 and the water cooling channel 6 or the water cooling channel 6, and the water channel can not be uniformly and the same cooling condition.
As a preferred implementation manner in this example, referring to fig. 3-11, an inner ring pull hole 9 and an outer ring pull hole 10 are formed in the water cooling screen 6, the number of turns of the inner ring pull hole 9 and the outer ring pull hole 10 is greater than or equal to one, the inner ring water channel 7 and the outer ring water channel 8 are uniformly distributed around the inner ring pull hole 9 and the outer ring pull hole 10, the bottom of the water cooling screen 6 is provided with a layered water cooling 11, the layered water cooling 11 preferentially contacts with the liquid level of the crystal bar, and the inner ring pull hole 9 and the outer ring pull hole 10 are distributed on the water cooling screen 6 in multiple turns, and the inner ring water channel 7 and the outer ring water channel 8 are uniformly distributed around the inner ring pull hole 9 and the outer ring pull hole 10, so that the purpose of rapidly and stably drawing multiple silicon cores at a time is achieved; meanwhile, the use requirements of different use environments, different working conditions and different processes are met through different layering modes, the crystal bars can be uniformly cooled under various conditions, in addition, the water cooling screen 6 further comprises layering water cooling 11 adopting different layering modes, the layering water cooling 11 comprises, but not limited to, an inner-thick outer-thin stepped mode, an inner-high outer-low stepped mode, an inner-low outer-high inclined plane mode, an inner-thin outer-thick stepped mode, an inner-high outer-low inclined plane mode, an inner-thick outer-thin inclined plane mode and a double-screen or multi-screen layering mode, meanwhile, each water cooling screen 6 is connected through a hose or other modes to form water circulation, meanwhile, bolts or other structures are used for fixedly connecting the water cooling screens 6, meanwhile, the height distance between the water cooling screens 6 is adjusted through an adjusting rod 12, fixed-point cooling of different height points of the crystal bars is achieved, rapid stable and uniform production and preparation of a plurality of silicon cores is achieved, and meanwhile, the diameter size of the grown crystal bars is uniform.
The working principle of the invention is as follows: when the crystal bar is cooled, firstly, a water inlet is formed in one end of the inner ring water channel 7 and one end of the outer ring water channel 8, so that a recyclable water channel is formed in the water cooling screen 6, meanwhile, one or more water channels are formed in the water cooling screen 6 through the water inlet between the inner ring water channel 7 and the outer ring water channel 8, and the inner ring water channel 7 and the outer ring water channel 8 are converged at a water outlet, so that the crystal bar can be uniformly cooled under various conditions, and meanwhile, different cooling positions can be changed under different conditions, so that the cooling effect of the crystal bar can be adjusted;
The inner ring crystal pulling holes 9 and the outer ring crystal pulling holes 10 are distributed on the water cooling screen 6 in a plurality of circles, and the inner ring water channels 7 and the outer ring water channels 8 are uniformly distributed around the inner ring crystal pulling holes 9 and the outer ring crystal pulling holes 10, so that the cooling of each inner ring crystal pulling hole 9 and each outer ring crystal pulling hole 10 is realized, and the aim of rapidly and stably drawing a plurality of silicon cores at one time is fulfilled; meanwhile, the use requirements of different use environments, different working conditions and different processes are met through different layering modes, the crystal bars can be uniformly cooled under various conditions, in addition, the water cooling screen 6 further comprises layering water cooling 11 adopting different layering modes, the layering water cooling 11 comprises, but not limited to, an inner-thick outer-thin stepped mode, an inner-high outer-low stepped mode, an inner-low outer-high inclined plane mode, an inner-thin outer-thick stepped mode, an inner-high outer-low inclined plane mode, an inner-thick outer-thin inclined plane mode and a double-screen or multi-screen layering mode, meanwhile, each water cooling screen 6 is connected through a hose or other modes to form water circulation, meanwhile, bolts or other structures are used for fixedly connecting the water cooling screens 6, meanwhile, the height distance between the water cooling screens 6 is adjusted through an adjusting rod 12, fixed-point cooling of different height points of the crystal bars is achieved, rapid stable and uniform production and preparation of a plurality of silicon cores is achieved, and meanwhile, the diameter size of the grown crystal bars is uniform.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The utility model provides a device of multiturn layering cooling crystal bar which characterized in that: the cooling device comprises a joint (1), wherein the bottom of the joint (1) is fixedly connected with a connecting rod (2), one side of the connecting rod (2) is fixedly connected with a positioning block (3), the bottom of the positioning block (3) is fixedly connected with a fixing rod (4), a fixing ring (5) is fixedly sleeved on the fixing rod (4), and the bottom of the fixing rod (4) is fixedly connected with a cooling assembly; the cooling component is used for cooling the crystal bar generated by processing.
2. The apparatus for multi-turn, layered cooling of a boule of claim 1, wherein: the cooling assembly comprises a water cooling screen (6) connected to the bottom of the fixing rod (4), an inner ring water channel (7) and an outer ring water channel (8) are mounted on the water cooling screen (6) through internal threads, a water inlet is formed in one end of the inner ring water channel (7) and one end of the outer ring water channel (8), a water outlet is formed in the other end of the inner ring water channel, and a recyclable waterway is formed in the water cooling screen (6) through the inner ring water channel (7) and the outer ring water channel (8).
3. The apparatus for multi-turn, layered cooling of a boule of claim 1, wherein: the connector (1) is provided with an internal thread and an external thread, the internal thread is used for connecting a water outlet pipe, and the external thread is used for fixing the whole cooling device.
4. The apparatus for multi-turn, layered cooling of a boule of claim 2, wherein: the inner ring crystal pulling hole (9) and the outer ring crystal pulling hole (10) are formed in the water cooling screen (6), the number of turns of the inner ring crystal pulling hole (9) and the outer ring crystal pulling hole (10) is greater than or equal to one, the inner ring water channel (7) and the outer ring water channel (8) surround the inner ring crystal pulling hole (9) and the outer ring crystal pulling hole (10) and are uniformly distributed, and the bottom of the water cooling screen (6) is provided with layered water cooling (11).
5. The apparatus for multi-turn, layered cooling of a boule of claim 1, wherein: the fixing ring (5) is used for strengthening and fixing the stability of the whole cooling device.
6. The apparatus for multi-turn, layered cooling of a boule of claim 1, wherein: the connector (1), the connecting rod (2) and the positioning block (3) are hollow in the interior to form a water outlet passage.
7. The apparatus for multi-turn, layered cooling of a boule of claim 2, wherein: one or more channels can be formed in the water cooling screen (6) through a water inlet between the inner ring channel (7) and the outer ring channel (8), and the inner ring channel (7) and the outer ring channel (8) are converged at a water outlet.
8. The apparatus for multi-turn, layered cooling of a boule of claim 7, wherein: an adjusting rod (12) is arranged in the water cooling screen (6), and the adjusting rod (12) is used for adjusting the distance between the water cooling screens (6).
9. The apparatus for multi-turn, layered cooling of a boule of claim 7, wherein: the central position of the water cooling screen (6) is provided with an insulating layer, and the thickness of the insulating layer can be matched according to different process conditions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410323007.0A CN117926392A (en) | 2024-03-21 | 2024-03-21 | Device for cooling crystal bars in multiple circles in layering mode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410323007.0A CN117926392A (en) | 2024-03-21 | 2024-03-21 | Device for cooling crystal bars in multiple circles in layering mode |
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| Publication Number | Publication Date |
|---|---|
| CN117926392A true CN117926392A (en) | 2024-04-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410323007.0A Pending CN117926392A (en) | 2024-03-21 | 2024-03-21 | Device for cooling crystal bars in multiple circles in layering mode |
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| CN (1) | CN117926392A (en) |
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