CN113089082A

CN113089082A - Automatic regulating device for circuit silicon wafer manufacturing

Info

Publication number: CN113089082A
Application number: CN202110321694.9A
Authority: CN
Inventors: 杨伟洛
Original assignee: Individual
Current assignee: Individual
Priority date: 2021-03-25
Filing date: 2021-03-25
Publication date: 2021-07-09

Abstract

An automatic adjusting device for manufacturing circuit silicon wafers comprises a silicon rod manufacturing unit, wherein the silicon rod manufacturing unit comprises a quartz crucible, the device further comprises a storage unit which is used for providing raw materials for the silicon rod manufacturing unit in turn through rotation, and the storage unit comprises a support, a first box body, a second box body, a fluted disc, a first sun wheel, a first planet wheel and a first planet carrier, wherein the support is positioned on the side edge of the silicon rod manufacturing unit; the silicon rod manufacturing unit can be supplied with materials at any time, the material formula can be conveniently replaced in actual production, the silicon rod manufacturing unit is used for manufacturing silicon rods with different purposes, the silicon rod manufacturing unit does not need to be opened, the efficiency is improved, and the cost is reduced.

Description

Automatic regulating device for circuit silicon wafer manufacturing

Technical Field

The invention relates to the technical field of semiconductors, in particular to an automatic adjusting device for manufacturing a circuit silicon wafer.

Background

Single crystal silicon is a form of elemental silicon. When the molten elemental silicon solidifies, the silicon atoms are arranged in a diamond lattice as many crystal nuclei, and if these crystal nuclei grow into crystal grains having the same crystal plane orientation, these crystal grains are combined in parallel to crystallize into single crystal silicon.

Depending on these characteristics, single crystal silicon is generally produced in two ways, the Czochralski method and the float zone method. The Czochralski method is characterized in that after vacuum pumping and inert gas injection are carried out in a straight-tube type thermal system, graphite resistance heating is carried out, polycrystalline silicon filled in a high-purity quartz crucible is melted, then seed crystals (seed crystals) are inserted into the surface of a melt for fusion welding, the silicon melt rises along with the pulling of the seed crystals to grow a silicon single crystal rod according to the crystal phase of the seed crystals, the silicon single crystal rod is gradually lifted, and the pulling of products is completed through the steps of neck leading, necking, shouldering, diameter equalizing control, ending and the like. And the finished product of the silicon single crystal rod is obtained after drawing, and parameters such as internal temperature, thermal field, drawing speed and rotating speed, jar increasing rotating speed and lifting speed, gas type and pressure in the furnace and the like are strictly controlled in the product drawing process.

In the field of microelectronics, silicon wafers are the starting material for the fabrication of transistors and integrated circuits. Various electronic components can be manufactured by performing photolithography, ion implantation, or the like on a silicon wafer. The silicon wafer is a slice of monocrystalline silicon, that is, the silicon wafer is cut from a manufactured silicon rod, because application scenes are different, different chemical elements need to be added into the silicon melt during manufacturing to obtain semiconductor silicon rods with different performances, and the silicon wafer is used for manufacturing electronic components with different functions, such as a P-type semiconductor and an N-type semiconductor. Wherein elements such as phosphorus, arsenic, antimony, etc. may be added.

In the prior art, parameters and elements to be added need to be set in advance for silicon rods of different types, the functions of replacing and automatically switching the elements to be added are not provided, the practical application is not flexible, continuous drawing cannot be realized, and the efficiency is low.

Disclosure of Invention

The invention aims to provide an automatic adjusting device for manufacturing a circuit silicon wafer.

The silicon rod manufacturing device comprises a silicon rod manufacturing unit, a storage unit and a control unit, wherein the silicon rod manufacturing unit comprises a quartz crucible, and the storage unit is used for providing raw materials for the silicon rod manufacturing unit in turn through rotation;

the storage unit comprises a support positioned on the side edge of the silicon rod manufacturing unit, a first box body and a second box body, the first box body is arranged on the support, the second box body is arranged on the first box body, and a first opening communicated with the first box body is formed in the bottom surface of the second box body;

the material storage unit also comprises a fluted disc, a first sun gear, a first planet gear and a first planet carrier; the inner side and the outer side of the annular edge of the fluted disc are fixedly connected with first transmission teeth, the fluted disc is rotatably arranged at a first opening through a bearing, the first sun gear is rotatably arranged at the central position of the fluted disc, the first planet gears are distributed in the fluted disc at equal intervals and are respectively meshed with the fluted disc and the first sun gear, the axle center position of the upper end surface of each first planet gear is fixedly connected with a first boss, a first planet carrier is fixedly connected with first sleeves which are in one-to-one correspondence with the first bosses, the first bosses are rotatably arranged in the first sleeves through bearings, a storage tank is fixedly connected above each first sleeve, and one end of each first boss penetrates through the bottom end surface of the storage tank and extends into the storage tank and is fixedly connected with a stirring blade;

the first motor is installed in the first box body, an output shaft of the first motor penetrates through the bottom surface of the fluted disc to be fixedly connected with the axle center of the bottom surface of the first sun wheel, and the output shaft of the first motor is rotatably connected with the fluted disc through a bearing.

Preferably, the storage tank is provided with a second discharge pipe, the second discharge pipe can be communicated with the silicon rod manufacturing units in turn, a butterfly valve is arranged on the second discharge pipe and comprises a valve body, a valve rod is rotatably arranged on two inner side walls of the valve body and fixedly connected with a valve plate, one end of the valve rod extends out of the valve body and fixedly connected with a butterfly valve handle, a torsion spring is further sleeved on the valve rod extending out of the valve body, one end of the torsion spring is fixedly connected to the butterfly valve handle, and the other end of the torsion spring is fixedly connected to; the lateral wall of the storage tank is fixedly connected with a first lug, and the discharging direction of the first lug is consistent with that of the second discharging pipe.

Preferably, a first cavity is further fixedly connected to the side wall of the second box body, the middle of the first hinge rod is rotatably hinged to the side wall of the first cavity, one end of the first hinge rod is hinged to one end of the second hinge rod, the other end of the second hinge rod slidably penetrates through the side wall of the first cavity and extends into the second box body, a second convex block capable of being matched with the butterfly valve handle is fixedly connected to the other end of the second hinge rod, and a first groove capable of being matched with the first convex block is formed in the second convex block; the other end of the first hinge rod is hinged with one end of a third hinge rod, and the other end of the third hinge rod can slidably penetrate through the side wall of the first cavity and extend into the second box body and can be inserted between the first transmission teeth on the outer side of the fluted disc;

the side wall of the first chamber is further fixedly connected with a first electric telescopic rod, and a first push rod of the first electric telescopic rod is hinged with one end of a first hinge rod.

Preferably, the silicon rod manufacturing unit further comprises a vacuum cylinder, a rotatable quartz crucible for storing liquid silicon and a plurality of electric control mechanical claws for clamping seed crystals, wherein the bottom end surface of the vacuum cylinder is fixedly connected to the top surface of the first mounting frame, the vacuum cylinder is divided into an upper cylinder and a lower cylinder by a first partition plate, the first partition plate is provided with a second opening communicated with the upper cylinder and the lower cylinder, the top end surface of the upper cylinder is provided with a third opening, and the mounting cylinder with an opening at one end is fixedly connected to the third opening and is integrally formed with the upper cylinder;

the ring gear passes through the rotatable installation of bearing at the second opening part, the equal rigid coupling of the interior lateral wall of ring gear has the second driving tooth, the second motor is installed in the installation section of thick bamboo, the output shaft of second motor passes installation section of thick bamboo bottom face and stretches into ring gear center department and the rigid coupling has the second sun gear, the second planet carrier passes through the rotatable installation of bearing at installation section of thick bamboo outer wall, a plurality of second planet wheels pass through the rotatable installation of bearing on the second planet carrier, second planet wheel evenly distributed just intermeshing between second sun gear and ring gear, the equal threaded connection in second planet wheel center has a threaded rod, the threaded rod is coaxial with second planet wheel, threaded rod one end stretches into last barrel rigid coupling and has first slider, the other end stretches into down the barrel rigid coupling and has automatically.

Preferably, the side wall of the upper barrel body is further fixedly connected with a second cavity, the second cavity is fixedly connected to the outer side wall of the upper barrel body, the middle part of a fourth hinge rod is rotatably hinged to the side wall of the second cavity, one end of the fourth hinge rod is hinged to one end of a fifth hinge rod, the other end of the fifth hinge rod slidably penetrates through the side wall of the second cavity and extends into the upper barrel body, a first vertical block is fixedly connected to the fifth hinge rod, and a first sliding chute matched with the first sliding block is formed in the first vertical block; the other end of the fourth hinge rod is hinged with one end of a sixth hinge rod, and the other end of the sixth hinge rod can slidably penetrate through the side wall of the second cavity to extend into the upper cylinder and can be inserted between second transmission teeth on the outer side of the gear ring;

a second electric telescopic rod is further fixedly connected to the side wall of the second chamber, and a second push rod of the second electric telescopic rod is hinged to one end of a fourth hinge rod.

Preferably, the quartz crucible is fixedly connected in a graphite crucible, the graphite crucible is rotatably arranged on the bottom end face of the lower cylinder and is positioned in a heat insulation cylinder with an opening on the top surface, the heat insulation cylinder is fixedly connected on the bottom end face of the lower cylinder, the outer wall of the graphite crucible is provided with a heater, the third motor is arranged on the first mounting frame, and an output shaft of the third motor rotatably penetrates through the bottom end face of the lower cylinder and is fixedly connected with the bottom surface of the graphite crucible;

the bottom surface of the second box body is fixedly connected with a third pipeline, the discharge pipe can be alternately positioned above the third pipeline and communicated with the third pipeline, and the other end of the third pipeline () penetrates through the side wall of the lower barrel body and the side wall of the heat insulation barrel body and extends into the quartz crucible.

Preferably, the bottom end face of the lower barrel is further fixedly connected with a first discharging pipe, one end of the first discharging pipe extends into the lower barrel and vertically corresponds to the rotary electric control mechanical claw, the other end of the first discharging pipe extends out of the lower barrel to be communicated with a third chamber, an isolation valve is fixedly connected to the communicated position of the third chamber and the lower barrel, a discharging port and a second pipeline are arranged on the side wall of the third chamber, and a second vacuum pump is arranged on the second pipeline.

Preferably, the side wall of the lower cylinder is further provided with an inert gas input pipeline and a first pipeline, and the first pipeline is provided with a first vacuum pump.

Due to the adoption of the technical scheme, the invention has the following advantages:

1. the storage unit can store silicon raw materials and various elements, can automatically switch storage tanks of different elements, automatically adjust the added elements, is used for manufacturing monocrystalline silicon rods with different purposes, can replace the elements in time for experiment or manufacturing, has continuous working capacity, does not need to frequently open the silicon rod manufacturing unit, avoids repeated vacuum pumping and inert gas injection, increases the working efficiency and reduces the cost.

2. The planetary gear corotation, the threaded rod descends, the planetary gear reverses, the threaded rod ascends, the structure is simple, the threaded rod is controlled to ascend and descend through the rotation of the planetary gear, the failure rate is low, the influence of a high-temperature environment is avoided, the lifting speed is controllable, and the growth quality of the single crystal silicon rod is guaranteed.

3. The switching of different modes is realized through the hinge rod structure, the use is convenient, and the stirring blades are used for stirring the materials in the material storage tank all the time in the movement of the material storage unit, so that the adhesion or the settlement is avoided; when needing storage tank stop motion, when adding the material to silicon rod manufacture unit, the butterfly valve is opened, and the material motion range can also be accelerated to rotatory stirring leaf, makes the action that the material flowed from the pipeline more swift, and is more smooth.

Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof.

Drawings

The drawings of the present invention are described below.

Fig. 1 is an overall schematic view of the present invention.

Fig. 2 is a schematic view of a storage unit of the present invention.

Fig. 3 is a schematic view of a second case of the present invention.

FIG. 4 is an exploded view of a toothed disc according to the present invention.

FIG. 5 is a schematic view of a storage tank of the present invention.

Fig. 6 is a schematic view of a butterfly valve of the present invention.

Fig. 7 is a schematic view of a silicon rod manufacturing unit according to the present invention.

Fig. 8 is a schematic view of a vacuum cylinder of the present invention.

Fig. 9 is an exploded view of a ring gear of the present invention.

FIG. 10 is a schematic view of a quartz crucible of the present invention.

In the figure: 1. a quartz crucible; 2. a support; 3. a first case; 4. a second case; 5. a first opening; 6. a fluted disc; 7. a first sun gear; 8. a first planet gear; 9. a first carrier; 10. a first drive tooth; 11. a first boss; 12. a first sleeve; 13. a material storage tank; 14. stirring blades; 15. a first motor; 16. a discharge pipe; 17. a valve body; 18. a valve stem; 19. a valve plate; 20. a butterfly valve handle; 21. a torsion spring; 22. a first bump; 23. a first chamber; 24. a first hinge rod; 25. a second hinge rod; 26. a second bump; 27. a first groove; 28. a third hinge rod; 29. a first electric telescopic rod; 30. a first push rod; 31. a vacuum cylinder; 32. an electric control mechanical claw; 33. a first mounting bracket; 34. a first partition plate; 35. an upper cylinder body; 36. a lower cylinder body; 37. a second opening; 38. a third opening; 39. mounting the cylinder; 40. a ring gear; 41. a second gear; 42. a second motor; 43. a second sun gear; 44. a second planet carrier; 45. a second planet wheel; 46. a threaded rod; 47. a first slider; 48. a second chamber; 49. a fourth hinge rod; 50. a fifth hinge bar; 51. a first vertical block; 52. a first chute; 53. a sixth hinge rod; 54. a second electric telescopic rod; 55. a second push rod; 56. a graphite crucible; 57. a heat-insulating cylinder; 58. a heater; 59. a third motor; 60. a third pipeline; 61. a first discharge pipe; 62. a third chamber; 63. an isolation valve; 64. a discharge port; 65. a second conduit; 66. a second vacuum pump; 67. an inert gas input pipe; 68. a first conduit; 69. a first vacuum pump.

Detailed Description

The invention is further illustrated by the following figures and examples.

In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the embodiments of the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the embodiments of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. Specific meanings of the above terms in the embodiments of the present invention can be understood in specific cases by those of ordinary skill in the art.

As shown in fig. 1 to 4, an automatic adjusting device for manufacturing circuit silicon wafers comprises a silicon rod manufacturing unit, wherein the silicon rod manufacturing unit comprises a quartz crucible 1, and the device further comprises a storage unit which supplies raw materials to the silicon rod manufacturing unit in turn through rotation;

the storage unit comprises a support 2, a first box body 3 and a second box body 4, wherein the support 2, the first box body 3 and the second box body 4 are positioned on the side edge of the silicon rod manufacturing unit, the first box body 3 is installed on the support 2, the second box body 4 is installed on the first box body 3, and a first opening 5 communicated with the first box body 3 is formed in the bottom surface of the second box body 4;

the material storage unit further comprises a fluted disc 6, a first sun gear 7, a first planet gear 8 and a first planet carrier 9; the inner side and the outer side of the annular edge of the fluted disc 6 are fixedly connected with first transmission teeth 10, the fluted disc 6 is rotatably installed at the first opening 5 through a bearing, the first sun gear 7 is rotatably arranged at the central position of the fluted disc 6, the first planet gears 8 are distributed in the fluted disc 6 at equal intervals and are meshed with the fluted disc 6 and the first sun gear 7, the axle center position of the upper end surface of the first planet gear 8 is fixedly connected with a first boss 11, the first planet carrier 9 is fixedly connected with first sleeves 12 which correspond to the first bosses 11 one by one, the first bosses 11 are rotatably installed in the first sleeves 12 through bearings, a storage tank 13 is fixedly connected above the first sleeves 12, and one end of the first boss 11 penetrates through the bottom end surface of the storage tank 13 and extends into the storage tank 13 and is fixedly connected with a stirring blade 14;

the first motor 15 is installed in the first box body 3, an output shaft of the first motor 15 penetrates through the bottom surface of the fluted disc 6 to be fixedly connected with the bottom surface axis position of the first sun gear 7, and the output shaft of the first motor 15 is rotatably connected with the fluted disc 6 through a bearing.

In this embodiment, after the silicon rod manufacturing unit starts to operate, the storage unit is optionally controlled, when the fluted disc is restricted from moving and the first planet carrier is not restricted, the first motor rotates to drive the sun gear, the first sun gear drives the first planet gear to revolve and rotate along the inner ring of the fluted disc, and the first planet gear drives the storage tank to move together and simultaneously stir elements in the storage tank, so that the storage tank is switched without feeding;

when the fluted disc does not limit movement and the first planet carrier is limited, the first motor rotates, the first planet wheel can only rotate due to the limitation of the first planet carrier, any one storage tank is communicated with the silicon rod manufacturing unit, the stirring blades stir and accelerate the movement speed of materials in the storage tank, so that the materials flow out more smoothly, and the efficiency is increased.

As shown in fig. 5, the storage tank 13 is provided with a second discharge pipe 16, the second discharge pipe 16 can be communicated with the silicon rod manufacturing units in turn, the second discharge pipe 16 is provided with a butterfly valve, the butterfly valve comprises a valve body 17, a valve rod 18 is rotatably arranged on two inner side walls of the valve body 17 and fixedly connected with a valve plate 19, one end of the valve rod 18 extends out of the valve body 17 and fixedly connected with a butterfly valve handle 20, the valve rod 18 extending out of the valve body 17 is further sleeved with a torsion spring 21, one end of the torsion spring 21 is fixedly connected to the butterfly valve handle 20, and the other end of the torsion; the side wall of the material storage tank 13 is further fixedly connected with a first projection 22, and the discharge direction of the first projection 22 is consistent with that of the second discharge pipe 16.

In the embodiment, the butterfly valve handle is pushed, the butterfly valve is opened, the second discharge pipe is communicated with the silicon rod manufacturing unit, when the external force disappears, the torsion spring resets the butterfly valve handle, and the butterfly valve is closed.

As shown in fig. 2 to 4, a first chamber 23 is further fixedly connected to a side wall of the second box 4, a middle portion of the first hinge rod 24 is rotatably hinged to a side wall of the first chamber 23, one end of the first hinge rod 24 is hinged to one end of the second hinge rod 25, the other end of the second hinge rod 25 slidably penetrates through the side wall of the first chamber 23 and extends into the second box 4, a second protrusion 26 capable of being matched with the butterfly valve handle 20 is fixedly connected to the second hinge rod, and a first groove 27 capable of being matched with the first protrusion 22 is formed in the second protrusion 26; the other end of the first hinge rod 24 is hinged with one end of a third hinge rod 28, and the other end of the third hinge rod 28 can slidably penetrate through the side wall of the first chamber 23 to extend into the second box body 4 and can be inserted between the first transmission teeth 10 on the outer side of the fluted disc 6;

a first electric telescopic rod 29 is further fixedly connected to the side wall of the first chamber 23, and a first push rod 30 of the first electric telescopic rod 29 is hinged to one end of the first hinge rod 24.

In this embodiment, when the first electric telescopic rod drives the first hinge rod to move, the first hinge rod drives the second hinge rod to move, the second hinge rod drives the second protrusion, the first groove on the second protrusion clamps the first protrusion on the storage tank, meanwhile, the second protrusion opens the butterfly valve, the storage tank is clamped and cannot rotate, the butterfly valve is opened to perform charging operation, the first hinge rod drives the third hinge rod to move, the third hinge rod does not limit the fluted disc any more, the rotation of the fluted disc is realized, kinetic energy is released, the first planet wheel rotates to stir in the storage tank to accelerate the discharge of materials;

when the first electric telescopic rod drives the first hinge rod to move, the first hinge rod drives the second hinge rod to move, the second hinge rod drives the second convex block, the first groove on the second convex block is separated from the first convex block on the storage tank, the first planet frame and the storage tank can rotate freely, the first hinge rod drives the third hinge rod to move, the third hinge rod stretches into the first transmission tooth of the fluted disc, the clamping fluted disc is fixed, the first planet wheel rotates to drive the first planet frame and the storage tank to rotate and revolve along the inner side of the fluted disc in the fluted disc, the switching of the storage tank is realized, and meanwhile, the stirring blades stir in the storage tank.

As shown in fig. 7 to 10, the silicon rod manufacturing unit further includes a vacuum cylinder 31, a rotatable quartz crucible 1 for storing liquid silicon, and a plurality of electrically controlled mechanical grippers 32 for holding seed crystals, wherein a bottom end surface of the vacuum cylinder 31 is fixedly connected to a top surface of the first mounting frame 33, the vacuum cylinder 31 is divided into an upper cylinder 35 and a lower cylinder 36 by a first partition plate 34, the first partition plate 34 is provided with a second opening 37 for communicating the upper cylinder with the lower cylinder, a top end surface of the upper cylinder 35 is provided with a third opening 38, and an installation cylinder 39 with an opening at one end is fixedly connected to the third opening 38 and is integrally formed with the upper cylinder 35;

the gear ring 40 is rotatably mounted at the second opening 37 through a bearing, second transmission teeth 41 are fixedly connected to the inner side wall and the outer side wall of the gear ring 40, a second motor 42 is mounted in the mounting cylinder 39, an output shaft of the second motor 42 penetrates through the bottom end face of the mounting cylinder 39 and extends into the center of the gear ring 40 and is fixedly connected with a second sun wheel 43, a second planet carrier 44 is rotatably mounted on the outer wall of the mounting cylinder 39 through a bearing, a plurality of second planet wheels 45 are rotatably mounted on the second planet carrier 44 through a bearing, the second planet wheels 45 are uniformly distributed between the second sun wheel 43 and the gear ring 40 and are meshed with each other, a threaded rod 46 is in threaded connection with the center of the second planet wheels 45, the threaded rod 46 is coaxial with the second planet wheels 45, one end of the threaded rod 46 extends into the upper cylinder 35 and is fixedly connected with a first sliding block 47.

In the embodiment, after the vacuum cylinder is vacuumized and inert gas is injected, the silicon rod is pulled, and each electrically controlled mechanical claw respectively clamps a seed crystal;

when the gear ring is fixed and the second planet carrier can rotate, the second planet gear revolves and rotates along the inner side of the gear ring, so that the switching of the electric control mechanical claws is realized, and any one electric control mechanical claw can be positioned above the quartz crucible;

when the gear ring is rotatable, the threaded rod cannot rotate when being fixed due to the first sliding block, the second planet wheel and the second planet carrier cannot rotate, the second planet wheel rotates in situ, the threaded rod converts rotary motion into linear motion, the electric control mechanical claw can move up and down in the quartz crucible, and the single crystal silicon rod drawing operation starts.

As shown in fig. 7 to 9, a second cavity 48 is further fixedly connected to the side wall of the upper cylinder 35, the second cavity 48 is fixedly connected to the outer side wall of the upper cylinder 35, the middle of a fourth hinge rod 49 is rotatably hinged to the side wall of the second cavity 48, one end of the fourth hinge rod 49 is hinged to one end of a fifth hinge rod 50, the other end of the fifth hinge rod 50 slidably penetrates through the side wall of the second cavity 48 and extends into the upper cylinder 35 and is fixedly connected to a first vertical block 51, and a first sliding slot 52 which can be matched with the first sliding block 47 is formed in the first vertical block 51; the other end of the fourth hinge rod 49 is hinged with one end of a sixth hinge rod 53, and the other end of the sixth hinge rod 53 slidably penetrates through the side wall of the second cavity 48 to extend into the upper cylinder 35 and can be inserted between the outer second transmission teeth 41 of the gear ring 40;

a second electric telescopic rod 54 is further fixedly connected to the side wall of the second chamber 48, and a second push rod 55 of the second electric telescopic rod 54 is hinged to one end of the fourth hinge rod 49.

In this embodiment, when the second electric telescopic rod is pushed forward, the fourth hinge rod moves, the fourth hinge rod drives the fifth hinge rod to move, the fifth hinge rod drives the first vertical block, the first sliding groove on the first vertical block clamps the first sliding block on the threaded rod to limit the rotation of the threaded rod, the first sliding block can only slide in the first sliding groove, the threaded rod limits the movement of the second planet carrier, at this time, the second planet wheel rotates in place, the threaded rod changes the rotation movement into the lifting movement, meanwhile, the fourth hinge rod also drives the sixth hinge rod to move, the sixth hinge rod is separated from the second transmission tooth on the outer side of the gear ring, and the gear ring can rotate freely;

when the second electric telescopic rod moves backwards, the fourth hinge rod moves, the fourth hinge rod drives the fifth hinge rod to move, the fifth hinge rod drives the first vertical block, the first sliding groove in the first vertical block is separated from the first sliding block in the threaded rod, the movement of the threaded rod is not limited any more, the second planet carrier can rotate, meanwhile, the fourth hinge rod also drives the sixth hinge rod to move, the sixth hinge rod is inserted into the second transmission teeth on the outer side of the gear ring, and the gear ring stops rotating.

As shown in fig. 7 to 10, the quartz crucible 1 is fixedly connected in the graphite crucible 56, the graphite crucible 56 is rotatably mounted on the bottom end surface of the lower cylinder 36 and is located in the heat insulation cylinder 57 with an opening on the top surface, the heat insulation cylinder 57 is fixedly connected on the bottom end surface of the lower cylinder 36, the heater 58 is arranged on the outer wall of the graphite crucible 56, the third motor 59 is mounted on the first mounting frame 33, and the output shaft of the third motor 59 rotatably penetrates through the bottom end surface of the lower cylinder 36 and is fixedly connected with the bottom surface of the graphite crucible 56;

the bottom surface of the second box body 4 is fixedly connected with a third pipeline 60, the discharge pipe 16 can be alternately positioned above the third pipeline 60 and communicated with the third pipeline 60, and the other end of the third pipeline (60) penetrates through the side wall of the lower cylinder 36 and the side wall of the heat insulation cylinder 57 and extends into the quartz crucible 1.

In this embodiment, the heater heats graphite crucible, and graphite crucible is with heat transfer to quartz crucible, and the thermal-insulated barrel avoids the steam loss, and the second motor drives graphite crucible and rotates, makes solution also keep rotating, and the third pipeline can add the material to quartz crucible at any time.

As shown in fig. 7 to 8, a first discharging pipe 61 is further fixedly connected to the bottom end surface of the lower cylinder 36, one end of the first discharging pipe 61 extends into the lower cylinder 36 and vertically corresponds to the rotatable electric control gripper 32, the other end extends out of the lower cylinder 36 and communicates with a third chamber 62, an isolation valve 63 is fixedly connected to a position where the third chamber 62 communicates with the lower cylinder 36, a discharging port 64 and a second pipeline 65 are arranged on a side wall of the third chamber 62, and a second vacuum pump 66 is arranged on the second pipeline 65.

In this embodiment, the silicon rod that processing was accomplished falls into first discharging pipe, is blocked by the isolating valve, and the discharge gate is closed to the second cavity, carries out the evacuation back, opens the isolating valve again and communicates with the vacuum barrel, and the silicon rod falls into the second cavity, and the isolating valve is closed, breaks off the second cavity and is connected with the vacuum barrel after, opens the discharge gate ejection of compact again, avoids the vacuum environment of vacuum barrel to disappear.

As shown in fig. 7 to 8, an inert gas input pipe 67 and a first pipe 68 are further disposed on the side wall of the lower cylinder 36, and a first vacuum pump 69 is disposed on the first pipe 68.

In this embodiment, the first vacuum pump pumps air from the vacuum cylinder and injects inert gas through the inert gas input pipe.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that: modifications and equivalents may be made to the embodiments of the invention without departing from the spirit and scope of the invention, which is to be covered by the claims.

Claims

1. An automatic adjusting device for manufacturing circuit silicon wafers comprises a silicon rod manufacturing unit, wherein the silicon rod manufacturing unit comprises a quartz crucible (1), and the automatic adjusting device is characterized by further comprising a storage unit which is used for providing raw materials for the silicon rod manufacturing unit in turn through rotation;

the storage unit comprises a support (2) positioned on the side edge of the silicon rod manufacturing unit, a first box body (3) and a second box body (4), the first box body (3) is installed on the support (2), the second box body (4) is installed on the first box body (3), and a first opening (5) communicated with the first box body (3) is formed in the bottom surface of the second box body (4);

the material storage unit further comprises a fluted disc (6), a first sun wheel (7), a first planet wheel (8) and a first planet carrier (9); the inner side and the outer side of the annular edge of the fluted disc (6) are fixedly connected with first transmission teeth (10), the fluted disc (6) is rotatably arranged at the first opening (5) through a bearing, the first sun wheel (7) is rotatably arranged at the central position of the fluted disc (6), the first planet gears (8) are distributed in the fluted disc (6) at equal intervals, the planet carrier is meshed with the fluted disc (6) and the first sun wheel (7), the axle center position of the upper end surface of the first planet wheel (8) is fixedly connected with a first boss (11), a first planet carrier (9) is fixedly connected with first sleeves (12) which correspond to the first bosses (11) one by one, the first bosses (11) are rotatably arranged in the first sleeves (12) through bearings, a material storage tank (13) is fixedly connected above the first sleeves (12), and one end of each first boss (11) penetrates through the bottom end surface of the material storage tank (13) to extend into the material storage tank (13) and is fixedly connected with a stirring blade (14);

the first motor (15) is installed in the first box body (3), an output shaft of the first motor (15) penetrates through the bottom surface of the fluted disc (6) to be fixedly connected with the axis position of the bottom surface of the first sun gear (7), and the output shaft of the first motor (15) is rotatably connected with the fluted disc (6) through a bearing.

2. The automatic adjusting device for manufacturing the circuit silicon wafer as claimed in claim 1, wherein the storage tank (13) is provided with a second discharge pipe (16), the second discharge pipe (16) can be communicated with the silicon rod manufacturing unit in turn, the second discharge pipe (16) is provided with a butterfly valve, the butterfly valve comprises a valve body (17), a valve rod (18) is rotatably arranged on two inner side walls of the valve body (17) and fixedly connected with a valve plate (19), one end of the valve rod (18) extends out of the valve body (17) and fixedly connected with a butterfly valve handle (20), the valve rod (18) extending out of the valve body (17) is further sleeved with a torsion spring (21), one end of the torsion spring (21) is fixedly connected to the butterfly valve handle (20), and the other end of the torsion spring is fixedly connected to the valve body (; the side wall of the material storage tank (13) is further fixedly connected with a first lug (22), and the discharging directions of the first lug (22) and the second discharging pipe (16) are consistent.

3. The automatic adjusting device for circuit silicon wafer manufacturing according to claim 2, wherein the side wall of the second box (4) is further fixedly connected with a first chamber (23), the middle part of a first hinge rod (24) is rotatably hinged on the side wall of the first chamber (23), one end of the first hinge rod (24) is hinged with one end of a second hinge rod (25), the other end of the second hinge rod (25) slidably penetrates through the side wall of the first chamber (23) and extends into the second box (4) and is fixedly connected with a second bump (26) capable of being matched with the butterfly valve handle (20), and a first groove (27) capable of being matched with the first bump (22) is formed in the second bump (26); the other end of the first hinge rod (24) is hinged with one end of a third hinge rod (28), and the other end of the third hinge rod (28) can slidably penetrate through the side wall of the first chamber (23) to extend into the second box body (4) and can be inserted between the first transmission teeth (10) on the outer side of the fluted disc (6);

a first electric telescopic rod (29) is further fixedly connected to the side wall of the first chamber (23), and a first push rod (30) of the first electric telescopic rod (29) is hinged to one end of the first hinge rod (24).

4. The automatic adjusting device for manufacturing the circuit silicon wafer as claimed in claim 3, wherein the silicon rod manufacturing unit further comprises a vacuum cylinder (31), a rotatable quartz crucible (1) for storing liquid silicon, and a plurality of electrically controlled gripper (32) for holding a seed crystal, the bottom end surface of the vacuum cylinder (31) is fixedly connected to the top surface of the first mounting frame (33), the vacuum cylinder (31) is divided into an upper cylinder (35) and a lower cylinder (36) by a first partition plate (34), the first partition plate (34) is provided with a second opening (37) for communicating the upper cylinder and the lower cylinder, the top end surface of the upper cylinder (35) is provided with a third opening (38), and the mounting cylinder (39) with an opening at one end is fixedly connected to the third opening (38) and is integrally formed with the upper cylinder (35);

the gear ring (40) is rotatably arranged at the second opening (37) through a bearing, the inner side wall and the outer side wall of the gear ring (40) are fixedly connected with second transmission teeth (41), the second motor (42) is arranged in the mounting cylinder (39), an output shaft of the second motor (42) penetrates through the bottom end face of the mounting cylinder (39) and extends into the center of the gear ring (40) and is fixedly connected with a second sun wheel (43), a second planet carrier (44) is rotatably arranged on the outer wall of the mounting cylinder (39) through a bearing, a plurality of second planet wheels (45) are rotatably arranged on the second planet carrier (44) through a bearing, the second planet wheels (45) are uniformly distributed between the second sun wheel (43) and the gear ring (40) and are mutually meshed, the center of the second planet wheels (45) is in threaded connection with a threaded rod (46), the threaded rod (46) is coaxial with the second planet wheels (45), one end of the threaded rod (46) extends into the upper cylinder (35) and is fixedly, the other end of the electric control mechanical claw (32) extends into the lower cylinder body (36) and is fixedly connected with the electric control mechanical claw.

5. The automatic adjusting device for manufacturing the circuit silicon wafer as claimed in claim 4, wherein the side wall of the upper cylinder (35) is further fixedly connected with a second chamber (48), the second chamber (48) is fixedly connected to the outer side wall of the upper cylinder (35), the middle part of a fourth hinge rod (49) is rotatably hinged to the side wall of the second chamber (48), one end of the fourth hinge rod (49) is hinged to one end of a fifth hinge rod (50), the other end of the fifth hinge rod (50) slidably penetrates through the side wall of the second chamber (48) to extend into the upper cylinder (35) and is fixedly connected with a first vertical block (51), and a first sliding groove (52) which can be matched with the first sliding block (47) is formed in the first vertical block (51); the other end of the fourth hinge rod (49) is hinged with one end of a sixth hinge rod (53), and the other end of the sixth hinge rod (53) can slidably penetrate through the side wall of the second cavity (48) to extend into the upper barrel body (35) and can be inserted between second transmission teeth (41) on the outer side of the gear ring (40);

a second electric telescopic rod (54) is further fixedly connected to the side wall of the second chamber (48), and a second push rod (55) of the second electric telescopic rod (54) is hinged to one end of the fourth hinge rod (49).

6. The automatic adjusting device for manufacturing the circuit silicon wafer as claimed in claim 5, wherein the quartz crucible (1) is fixedly connected in the graphite crucible (56), the graphite crucible (56) is rotatably installed on the bottom end surface of the lower cylinder (36) and is positioned in the heat insulation cylinder (57) with the top surface opened, the heat insulation cylinder (57) is fixedly connected on the bottom end surface of the lower cylinder (36), the heater (58) is arranged on the outer wall of the graphite crucible (56), the third motor (59) is installed on the first mounting frame (33), and the output shaft of the third motor (59) rotatably penetrates through the bottom end surface of the lower cylinder (36) and is fixedly connected with the bottom surface of the graphite crucible (56);

the bottom surface of the second box body (4) is fixedly connected with a third pipeline (60), the discharge pipe (16) can be alternately positioned above the third pipeline (60) and communicated with the third pipeline (60), and the other end of the third pipeline (60) penetrates through the side wall of the lower cylinder body (36) and the side wall of the heat insulation cylinder body (57) and extends into the quartz crucible (1).

7. The automatic adjusting device for circuit silicon wafer manufacturing according to claim 6, wherein the bottom end face of the lower cylinder (36) is further fixedly connected with a first discharging pipe (61), one end of the first discharging pipe (61) extends into the lower cylinder (36) and vertically corresponds to the rotary electrically controlled gripper (32), the other end of the first discharging pipe extends out of the lower cylinder (36) and is communicated with a third chamber (62), an isolating valve (63) is fixedly connected at a position where the third chamber (62) is communicated with the lower cylinder (36), a discharging port (64) and a second pipeline (65) are arranged on the side wall of the third chamber (62), and a second vacuum pump (66) is arranged on the second pipeline (65).

8. The automatic adjusting apparatus for circuit silicon wafer fabrication as claimed in claim 7, wherein the side wall of the lower cylinder (36) is further provided with an inert gas input pipe (67) and a first pipe (68), and the first pipe (68) is provided with a first vacuum pump (69).