CN209652473U - Single crystal growing furnace continuous dosing conveying mechanism - Google Patents
Single crystal growing furnace continuous dosing conveying mechanism Download PDFInfo
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- CN209652473U CN209652473U CN201822132690.2U CN201822132690U CN209652473U CN 209652473 U CN209652473 U CN 209652473U CN 201822132690 U CN201822132690 U CN 201822132690U CN 209652473 U CN209652473 U CN 209652473U
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- outer housing
- conveying pipeline
- furnace chamber
- rotating mechanism
- main furnace
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Abstract
The utility model relates to Czochralski silicon single crystal furnace equipment technical fields, more particularly, to a kind of single crystal growing furnace continuous dosing conveying mechanism.Including main furnace chamber, thermal field insulation barrel and silica crucible are equipped in main furnace chamber；Main furnace chamber and thermal field insulation barrel side wall are equipped with feeding port.Valve is equipped at main furnace chamber side wall feeding port；Batch charging mechanism includes cylindric outer housing, and outer housing front end is equipped with bellows and is used for connecting valve；Outer housing inner front side is equipped with conveying pipeline, is equipped with support device in the outer housing below conveying pipeline；Outer housing bottom rear is equipped with straight-line motion mechanism, and straight-line motion mechanism is equipped with rotating mechanism mounting plate；Rotating mechanism mounting plate is equipped with rotating mechanism and feeding device, and conveying pipeline rear end is connected with rotating mechanism, and backside port connects feeding device.The utility model saves the time, reduces the silicon liquid fluctuation evoked when polycrystalline silicon material is fallen into silica crucible, production efficiency greatly improved, improve silica crucible utilization rate and effectively reduce cost.
Description
Technical field
The utility model relates to Czochralski silicon single crystal furnace equipment technical fields, defeated more particularly, to a kind of single crystal growing furnace continuous dosing
Send mechanism.
Background technique
During single crystal growing furnace Grown by CZ Method, polycrystalline silicon raw material is put into progress melt, crystal pulling in silica crucible.Single crystal growing furnace is drawn
After the completion of crystalline substance, the production of the new furnace of preparation needs to do many many and diverse previous works, including blowing out cooling, prepurging, charging, pumping are very
The processes such as sky, material, these previous works waste a large amount of time and energy consumption.Silica crucible itself is that have using the longevity simultaneously
Life.External continuous dosing device can be used after the completion of a silicon single crystal is drawn in single crystal growing furnace, continues to put into polycrystalline silicon material,
Silica crucible utilization rate is improved, while drawing more crystal bars.
Utility model content
The technical problems to be solved in the utility model is to overcome deficiency in the prior art, and it is continuous to provide a kind of single crystal growing furnace
Charging conveyor structure.
In order to solve the above technical problems, the solution that the utility model uses is:
A kind of single crystal growing furnace continuous dosing conveying mechanism, including main furnace chamber are provided, are equipped with thermal field insulation barrel, thermal field in main furnace chamber
Silica crucible is installed in insulation barrel；It further include batch charging mechanism；
Main furnace chamber and thermal field insulation barrel side wall are equipped with feeding port, and feeding port feeds intake angle as horizontal or small angle inclination.
Valve is equipped at main furnace chamber side wall feeding port；
Batch charging mechanism includes cylindric outer housing, and outer housing front end is equipped with bellows and is used for connecting valve；In outer housing
It is equipped with conveying pipeline on front side of portion, is equipped with support device in the outer housing below conveying pipeline, is used to support conveying pipeline；Behind outer housing bottom
Side is equipped with straight-line motion mechanism, and straight-line motion mechanism is equipped with rotating mechanism mounting plate；Rotating mechanism mounting plate is equipped with rotation
Mechanism and feeding device, conveying pipeline rear end are connected with rotating mechanism, and backside port connects feeding device.
As an improvement valve is the cold pneumatic gate valve of vacuum water.
As an improvement support device includes the support base being set to below conveying pipeline and the support being set on conveying pipeline
Set.
As an improvement support sleeve is polytetrafluoroethylene (PTFE) support sleeve；Feeding device material is quartz or polytetrafluoroethylene (PTFE).
As an improvement straight-line motion mechanism includes screw rod, screw rod end is connect with transmission shaft one end, and transmission shaft is another
End passes through the output axis connection of bevel gear and motor, is additionally provided with magnetic fluid on transmission shaft.
As an improvement straight-line motion mechanism is set in outer housing by mounting plate.
As an improvement the intermeshing pinion gear of rotating mechanism and gear wheel, motor are connected with pinion gear, conveying pipeline
It is connected with gear wheel.
As an improvement conveying pipeline is quartz ampoule, quartz ampoule interior surface is smooth or is equipped with helicla flute.
As an improvement feeding device includes feed pipe, it is provided with feed inlet on the outer housing right above rotating mechanism, into
Material mouth is connected with feed pipe one end, and the feed pipe other end connects feed bin.
As an improvement outer housing is equipped with window, for understanding the delivery situation of polycrystalline silicon material in conveying pipeline.
Compared with the prior art, the technical effects of the present invention are:
The utility model can realize that charging, crystal pulling save continuously to grow more crystal in the case where not needing blowing out
Saved blowing out is cooling, wipe furnace, charge, vacuumize, material and etc. needed for time, reduce polycrystalline silicon material and fall into silica crucible
Silicon liquid fluctuation in the silica crucible of Shi Jiqi, greatly improved production efficiency, improves silica crucible utilization rate and is effectively reduced into
This.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the continuous dosing conveying mechanism in the utility model.
Fig. 2 is the structural schematic diagram of the straight-line motion mechanism in the utility model.
Fig. 3 is the structural schematic diagram of the rotating mechanism in the utility model.
Fig. 4 is the structural schematic diagram of the support device in the utility model.
Appended drawing reference: the main furnace chamber of 1-, 2- thermal field insulation barrel, 3- silica crucible, 4- valve, 5- bellows, 6- conveying pipeline, 7-
Support device, 8- mounting plate, 9- rotating mechanism mounting plate, 10- straight-line motion mechanism, 11- outer housing, 12- feeding device, 13-
Feed bin, 14- rotating mechanism, 16- screw rod, 17- transmission shaft, 18- magnetic fluid, 19- bevel gear, 20,22- motor, 21- pinion gear,
23- gear wheel, 24- support sleeve, 25- support base.
Specific embodiment
With reference to the accompanying drawing, specific embodiment of the present utility model is described in detail.
As shown in Figure 1, a kind of single crystal growing furnace continuous dosing conveying mechanism, including main furnace chamber 1, the main interior thermal field that is equipped with of furnace chamber 1 are protected
Warm bucket 2 is installed with silica crucible 3 in thermal field insulation barrel 2.It further include batch charging mechanism.
Main furnace chamber 1 and 2 side wall of thermal field insulation barrel are equipped with feeding port, are equipped with valve 4 at main 1 side wall feeding port of furnace chamber.Valve
Door 4 is the cold pneumatic gate valve of vacuum water.
Batch charging mechanism includes cylindric outer housing 11, and 11 front end of outer housing is equipped with bellows 5 and is used for connecting valve 4.Outside
11 inner front side of shell is equipped with conveying pipeline 6, and conveying pipeline 6 is quartz ampoule, and quartz ampoule interior surface is smooth or is equipped with helicla flute.Conveying
It is equipped with support device 7 in the outer housing 11 of 6 lower section of pipe, is used to support conveying pipeline 6.As shown in figure 4, support device 7 includes being set to
The support base 25 of 6 lower section of conveying pipeline and the support sleeve 24 being set on conveying pipeline 6.Support sleeve 24 is polytetrafluoroethylene (PTFE) support sleeve
24.11 bottom rear of outer housing is equipped with straight-line motion mechanism 10, and straight-line motion mechanism 10 is set to outer housing 11 by mounting plate 8
It is interior.As shown in Fig. 2, straight-line motion mechanism 10 includes screw rod, screw rod end is connect with 17 one end of transmission shaft, 17 other end of transmission shaft
By the output axis connection of bevel gear 19 and motor 20, magnetic fluid 18 is additionally provided on transmission shaft 17.
Straight-line motion mechanism 10 is equipped with rotating mechanism mounting plate 9.Rotating mechanism mounting plate 9 is equipped with 14 He of rotating mechanism
Feeding device 12,6 rear end of conveying pipeline are connected with rotating mechanism 14, and backside port connects feeding device 12.As shown in figure 3, rotation
Mechanism 14 includes intermeshing pinion gear 21 and gear wheel 23, and motor 22 is connected with pinion gear 21, conveying pipeline 6 and gear wheel
23 are connected.Feeding device 12 includes feed pipe, is provided with feed inlet on the outer housing 11 right above rotating mechanism 14, feed inlet with into
Expects pipe one end is connected, and the feed pipe other end connects feed bin 13.
Outer housing 11 is equipped with window, for understanding the delivery situation of polycrystalline silicon material in conveying pipeline 6.
The working process of the utility model is as follows:
Silicon liquid is discontented in silica crucible when being fed or when needing to feed intake in crystal pulling, first by bellows 5 in
Valve 4 on main furnace chamber 1 is attached, and is vacuumized to outer housing 11 and applying argon gas operates, internal environment, which reaches, properly to be wanted
When asking, is controlled by pneumatic device and open valve 4.Starting straight-line motion mechanism 10 stretches out conveying pipeline 6 and moves in main furnace chamber 1
Portion stops straight-line motion mechanism 10 when conveying pipeline 6 moves to main 1 place inside of furnace chamber.Start rotating mechanism 14, band
Dynamic conveying pipeline 6 carries out rotary work.Start feed bin 13, falls into polycrystalline silicon material finally into conveying pipeline 6 along feeding mechanism 12
In silica crucible 3, after the completion of feeding intake, stops feed bin 13 and work, observe polycrystalline silicon material by outer housing external windows and do not remain
After in conveying pipeline 6, mechanism of stopping rotating 14 while starting straight-line motion mechanism 10 conveying pipeline 6 is retracted in main casing 11
Portion.Valve 4 is closed, connection of the bellows 5 between valve 4 is unclamped, completes the process that feeds intake.
It is finally noted that listed above is only specific embodiment of the utility model.Obviously, the utility model
Above embodiments are not limited to, can also there is many variations.Those skilled in the art can be from content disclosed by the utility model
In all deformations for directly exporting or associate, be considered as the protection scope of the utility model.
Claims (9)
1. a kind of single crystal growing furnace continuous dosing conveying mechanism, including main furnace chamber, main furnace chamber is interior to be equipped with thermal field insulation barrel, thermal field insulation barrel
Inside it is installed with silica crucible；It is characterized in that, further including batch charging mechanism；
The main furnace chamber and thermal field insulation barrel side wall are equipped with feeding port, are equipped with valve at main furnace chamber side wall feeding port；
The batch charging mechanism includes cylindric outer housing, and outer housing front end is equipped with bellows and is used for connecting valve；In outer housing
It is equipped with conveying pipeline on front side of portion, is equipped with support device in the outer housing below conveying pipeline, is used to support conveying pipeline；Behind outer housing bottom
Side is equipped with straight-line motion mechanism, and straight-line motion mechanism is equipped with rotating mechanism mounting plate；Rotating mechanism mounting plate is equipped with rotation
Mechanism and feeding device, conveying pipeline rear end are connected with rotating mechanism, and backside port connects feeding device.
2. mechanism according to claim 1, which is characterized in that the valve is the cold pneumatic gate valve of vacuum water.
3. mechanism according to claim 1, which is characterized in that the support device includes the branch below conveying pipeline
Support seat and the support sleeve being set on conveying pipeline.
4. mechanism according to claim 3, which is characterized in that the support sleeve is polytetrafluoroethylene (PTFE) support sleeve.
5. mechanism according to claim 1, which is characterized in that the straight-line motion mechanism includes screw rod, screw rod end with
The connection of transmission shaft one end, the transmission shaft other end pass through the output axis connection of bevel gear and motor, are additionally provided with magnetic fluid on transmission shaft.
6. mechanism according to claim 1, which is characterized in that the rotating mechanism include intermeshing pinion gear, with
Gear wheel, motor are connected with pinion gear, and conveying pipeline is connected with gear wheel.
7. mechanism according to claim 1, which is characterized in that the conveying pipeline is quartz ampoule, quartz ampoule interior surface light
Slide or be equipped with helicla flute.
8. mechanism according to claim 1, which is characterized in that the feeding device includes feed pipe, rotating mechanism just on
It is provided with feed inlet on the outer housing of side, feed inlet is connected with feed pipe one end, and the feed pipe other end connects feed bin.
9. mechanism according to claim 1, which is characterized in that the outer housing is equipped with window, for understanding conveying pipeline
The delivery situation of interior polycrystalline silicon material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822132690.2U CN209652473U (en) | 2018-12-19 | 2018-12-19 | Single crystal growing furnace continuous dosing conveying mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822132690.2U CN209652473U (en) | 2018-12-19 | 2018-12-19 | Single crystal growing furnace continuous dosing conveying mechanism |
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| Publication Number | Publication Date |
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| CN209652473U true CN209652473U (en) | 2019-11-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201822132690.2U Active CN209652473U (en) | 2018-12-19 | 2018-12-19 | Single crystal growing furnace continuous dosing conveying mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109440184A (en) * | 2018-12-19 | 2019-03-08 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace continuous dosing conveying mechanism |
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2018
- 2018-12-19 CN CN201822132690.2U patent/CN209652473U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109440184A (en) * | 2018-12-19 | 2019-03-08 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace continuous dosing conveying mechanism |
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