CN202202013U - Externally continuous feeding mechanism for single crystal furnace - Google Patents
Externally continuous feeding mechanism for single crystal furnace Download PDFInfo
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- CN202202013U CN202202013U CN2011202338601U CN201120233860U CN202202013U CN 202202013 U CN202202013 U CN 202202013U CN 2011202338601 U CN2011202338601 U CN 2011202338601U CN 201120233860 U CN201120233860 U CN 201120233860U CN 202202013 U CN202202013 U CN 202202013U
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- crystal growing
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Abstract
The utility model relates to a piece of assistant equipment for a piece of czochralski silicon single crystal growth equipment, aimed at providing an externally continuous feeding mechanism for a single crystal furnace. The feeding mechanism comprises a storage bin with a sealing cover, wherein a discharge valve is disposed on the bottom of the storage bin; the discharge valve is connected to a discharge inner tube, and a discharge outer tube is sleeved outside the discharge inner tube; the discharge outer tube is connected with a transmission mechanism for realizing the stretching of the discharge outer tube along the extension direction of the discharge inner tube, and the discharge inner tube, the discharge outer tube and the transmission mechanism are disposed in an airtight barrel; and a ball valve or a flap valve is disposed at the bottom end of the airtight barrel, a pouring hole is disposed on the upper part of the main furnace chamber of the single crystal furnace, and the pouring hole is airtightly connected with the ball valve or the flap valve. The externally continuous feeding mechanism for a single crystal furnace provided by the utility model can realize a charging in case of no need to stop the furnace, so as to continuously growing a plurality of crystals, thereby saving the time needed by the steps of stopping the furnace and cooling, wiping the furnace, charging, vacuumizing, melting materials and the like, greatly increasing the production efficiency, increasing the utilization rate of a quartz crucible, and efficiently decreasing the cost.
Description
Technical field
The utility model relates to the utility appliance of czochralski silicon monocrystal growth apparatus, particularly a kind of outside continuous dosing mechanism that is used for single crystal growing furnace.
Background technology
Traditional straight pulling silicon single crystal furnace is required to be the production of preparing a new stove and does a lot of numerous and diverse previous works after accomplishing a stove raw material crystal pulling and producing, and comprises the blowing out cooling, wipes stove, feeds, vacuumizes, changes operation such as material.A lot of times have been wasted in the previous work that these are numerous and diverse.Because each production cycle charging capacity is many more, it is heavy more to draw crystal, and unit source is more little, and efficient is also high more.Since the crystal for straight drawing monocrystal growth stove comes into operation, existing 93 years so far, but such situation fails effectively to be improved all the time.In addition, self has work-ing life quartz crucible, how to improve single stove charging capacity to greatest extent in its length of life, improves the quartz crucible utilization ratio, brings serious puzzlement for related production enterprise always.
The utility model content
The technical problem that the utility model will solve is, overcomes deficiency of the prior art, and a kind of outside continuous dosing mechanism that is used for single crystal growing furnace is provided.
Be the technical solution problem; The scheme of the utility model is: use small one and large one two silica tubes as feeding channel, big silica tube is enclosed within outside the little silica tube, through stretching of the big silica tube of transmission mechanism control; Ball valve or flap valve are used for isolating main stove and batch charging mechanism; Can accomplish vacuumizing and applying argon gas batch charging mechanism separately, dispensing valve is used for throwing in polycrystalline silicon material, through control dispensing valve aperture control polycrystalline silicon material dispensing speed.
The utility model provides a kind of outside continuous dosing mechanism that is used for single crystal growing furnace, comprises the feed bin of a with closure, and dispensing valve is established in the feed bin bottom; Dispensing valve is connected to pipe in the blowing, the sheathed blowing outer tube in outside of pipe in the blowing; The blowing outer tube is used to realize that with one the blowing outer tube is connected along the flexible transmission rig of pipe extending direction in the blowing, and pipe, blowing outer tube and transmission rig all are located in the airtight tube in the blowing; A ball valve or flap valve are established in airtight tube bottom, and the main furnace chamber top of single crystal growing furnace is provided with a dog-house, and dog-house and ball valve or flap valve are tightly connected.
As a kind of improvement, said sealing cover is realized sealing through O type circle and feed bin.
As a kind of improvement, pipe or blowing outer tube are silica tube in the said blowing.
As a kind of improvement, said dispensing valve, ball valve or flap valve are realized valve opening and closing control by pneumatics.
As a kind of improvement, said transmission rig comprises trip switch, stepper-motor and transmission rope.
As a kind of improvement, the interface of at least one band valve is set on the wall of said airtight tube.
As a kind of improvement, the dog-house on said main furnace chamber top is oblique offering, and makes interior pipe of blowing and blowing outer tube and vertical direction be an angle.
As a kind of improvement, said blowing outer tube is along after the pipe extending direction stretches out and arrives spacing point in the blowing, and blowing outer tube end-to-end distance is from the inner bath surface 50mm～200mm of main furnace chamber.
As a kind of improvement; The structure of said flap valve is: a side of the inner valve plate of flap valve is movably connected on rotation axis; Valve plate is realized action by pneumatics control: airtight tube is communicated with main furnace chamber during open mode, realizes sealing through the O type circle on the valve plate during closing condition.
The beneficial effect of the utility model is:
The utility model can be realized charging under the situation that does not need blowing out, so that many crystal of continuous growth, saved the blowing out cooling, wipe stove, feeded, vacuumize, change the required time of step such as material, has significantly improved production efficiency, improves the quartz crucible utilization ratio.Through test, behind employing the utility model, can realize that single stove draws 3 above monocrystalline, the separate unit single crystal growing furnace is annual, and therefore increasing effective run time can reach 500 hours, and therefore can enhance productivity at least reaches more than 8%.Single stove monocrystalline output is brought up to more than the 180kg by 80kg, and the plumbago crucible effective storage life increases by 80%, and the quartz crucible service efficiency improves more than 200%, and unit production capacity power consumption is saved and surpassed 30%, effectively reduces cost.
Description of drawings
Fig. 1 is the synoptic diagram that possesses the single crystal growing furnace of outside continuous dosing mechanism;
Synoptic diagram when Fig. 2 is single crystal growing furnace among Fig. 1 reinforced;
Reference numeral: 1 feed bin, pipe in 2 dispensing valves, 3 blowings, 4 transmission rigs, 5 airtight tubes, 6 blowing outer tubes, 7 pneumatics, two, 8 interfaces, 9 flap valves, 10 O type circles, one, 11 main furnace chamber, 12 pneumatics, one, 13 sealing cover, 14 O type circles two
Embodiment
Below in conjunction with accompanying drawing the embodiment of the utility model is carried out detailed presentations.
The outside continuous dosing mechanism that is used for single crystal growing furnace in the utility model comprises the feed bin 1 of a with closure 13, middlely is connected and sealed with O type circle 2 14, and dispensing valve 2 is established in the bottom; Feed bin 1 is used to take up polycrystalline silicon material, and single takes up the polycrystalline silicon material gross weight and is not less than 30kg.
Dispensing valve 2 is through pneumatics one 12 control blowing amounts, the blowing outer tube 6 of the sheathed quartzy material in outside of pipe 3 in the blowing; Blowing outer tube 6 is used to realize that with one blowing outer tube 6 is connected along the flexible transmission rig 4 of pipe 3 extending directions in the blowing.Transmission rig 4 comprises trip switch, stepper-motor and transmission rope, can adopt conventional techniques to realize.Pipe 3, blowing outer tube 6 and transmission rig 4 all are located in the airtight tube 5 in the blowing, and a flap valve 9 is established in airtight tube 5 bottoms, have O type circle 1 to realize being tightly connected between airtight tube 5 and the main furnace chamber 11 on the flap valve; The interface 8 of band valve is set on the wall of airtight tube 5, is used to vacuumize and applying argon gas.
The single crystal growing furnace that matches with it, its main furnace chamber top is provided with a dog-house, and the flap valve 9 of dog-house and airtight tube 5 bottoms is tightly connected.Because dog-house is oblique offering, make interior pipe 3 of blowing and blowing outer tube 6 be an angle with vertical direction.
The method of use of the outside continuous dosing of single crystal growing furnace mechanism comprises:
Silicon liquid is discontented with in the time of need feeding in raw material in the quartz crucible, at first airtight tube 5 is repeated to vacuumize and applying argon gas operation twice, regulates gaseous tension in the airtight tube 5, makes it identical with main furnace chamber 11 gaseous tensions.Come the flap valve 9 of the airtight tube of controlled opening 5 bottoms through pneumatics 27; Start transmission rig 4 make blowing outer tube 6 in blowing, manage end-to-end distance that 3 extending directions extend out to main furnace chamber 11 blowing outer tubes 6 from bath surface 50mm～200mm apart from the time, close transmission rig 4 and make blowing outer tube 6 stop decline.Open dispensing valve 2, and control the rate of feeding of polycrystalline silicon material through the aperture of pneumatics one 12 control dispensing valves 2.Feed intake reach plan weight after, close dispensing valve 2, start transmission rig 4 with in the airtight tube 5 of blowing outer tube 6 withdrawals, close flap valve 9, accomplish the process that feeds intake.
Claims (9)
1. the outside continuous dosing mechanism that is used for single crystal growing furnace comprises the feed bin of a with closure, and dispensing valve is established in the feed bin bottom; It is characterized in that dispensing valve is connected to pipe in the blowing, the sheathed blowing outer tube in outside of pipe in the blowing; The blowing outer tube is used to realize that with one the blowing outer tube is connected along the flexible transmission rig of pipe extending direction in the blowing, and pipe, blowing outer tube and transmission rig all are located in the airtight tube in the blowing; A ball valve or flap valve are established in airtight tube bottom, and the main furnace chamber top of single crystal growing furnace is provided with a dog-house, and dog-house and ball valve or flap valve are tightly connected.
2. the outside continuous dosing mechanism that is used for single crystal growing furnace according to claim 1 is characterized in that said sealing cover is realized sealing through O type circle and feed bin.
3. the outside continuous dosing mechanism that is used for single crystal growing furnace according to claim 1 is characterized in that pipe or blowing outer tube are silica tube in the said blowing.
4. the outside continuous dosing mechanism that is used for single crystal growing furnace according to claim 1 is characterized in that said dispensing valve, ball valve or flap valve are realized valve opening and closing control by pneumatics.
5. the outside continuous dosing mechanism that is used for single crystal growing furnace according to claim 1 is characterized in that said transmission rig comprises trip switch, stepper-motor and transmission rope.
6. the outside continuous dosing mechanism that is used for single crystal growing furnace according to claim 1 is characterized in that, the interface of at least one band valve is set on the wall of said airtight tube.
7. the outside continuous dosing mechanism that is used for single crystal growing furnace according to claim 1 is characterized in that the dog-house on said main furnace chamber top is oblique offering, and makes that pipe and blowing outer tube and vertical direction are an angle in the blowing.
8. the outside continuous dosing mechanism that is used for single crystal growing furnace according to claim 1 is characterized in that, after said blowing outer tube stretched out and arrives spacing point along pipe extending direction in the blowing, blowing outer tube end-to-end distance was from the inner bath surface 50mm～200mm of main furnace chamber.
9. the outside continuous dosing mechanism that is used for single crystal growing furnace according to claim 1; It is characterized in that; The structure of said flap valve is: a side of the inner valve plate of flap valve is movably connected on rotation axis; Valve plate is realized action by pneumatics control: airtight tube is communicated with main furnace chamber during open mode, realizes sealing through the O type circle on the valve plate during closing condition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202338601U CN202202013U (en) | 2011-07-04 | 2011-07-04 | Externally continuous feeding mechanism for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202338601U CN202202013U (en) | 2011-07-04 | 2011-07-04 | Externally continuous feeding mechanism for single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202202013U true CN202202013U (en) | 2012-04-25 |
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ID=45966145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202338601U Expired - Fee Related CN202202013U (en) | 2011-07-04 | 2011-07-04 | Externally continuous feeding mechanism for single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202202013U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102312285A (en) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | External continuous feeding mechanism for monocrystal furnace |
| CN103451722A (en) * | 2013-08-06 | 2013-12-18 | 浙江晶盛机电股份有限公司 | External continuous feeder capable of being shared by multiple coil bases |
| CN106591945A (en) * | 2016-11-30 | 2017-04-26 | 安徽电气集团股份有限公司 | Polycrystalline silicon re-feeding method |
| CN106757309A (en) * | 2016-11-11 | 2017-05-31 | 宝鸡市宏佳有色金属加工有限公司 | A kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling |
-
2011
- 2011-07-04 CN CN2011202338601U patent/CN202202013U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102312285A (en) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | External continuous feeding mechanism for monocrystal furnace |
| CN102312285B (en) * | 2011-07-04 | 2014-02-19 | 浙江晶盛机电股份有限公司 | External continuous feeding mechanism for monocrystal furnace |
| CN103451722A (en) * | 2013-08-06 | 2013-12-18 | 浙江晶盛机电股份有限公司 | External continuous feeder capable of being shared by multiple coil bases |
| CN106757309A (en) * | 2016-11-11 | 2017-05-31 | 宝鸡市宏佳有色金属加工有限公司 | A kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling |
| CN106757309B (en) * | 2016-11-11 | 2020-01-14 | 宝鸡市宏佳有色金属加工有限公司 | Continuous crystal pulling multiple feeding mechanism of single crystal furnace |
| CN106591945A (en) * | 2016-11-30 | 2017-04-26 | 安徽电气集团股份有限公司 | Polycrystalline silicon re-feeding method |
| CN106591945B (en) * | 2016-11-30 | 2019-03-19 | 安徽电气集团股份有限公司 | A kind of polysilicon throws method again |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120425 Termination date: 20180704 |