CN202671709U - Chunk polysilicon feeding device for Czochralski silicon single crystal furnace - Google Patents
Chunk polysilicon feeding device for Czochralski silicon single crystal furnace Download PDFInfo
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- CN202671709U CN202671709U CN 201220272138 CN201220272138U CN202671709U CN 202671709 U CN202671709 U CN 202671709U CN 201220272138 CN201220272138 CN 201220272138 CN 201220272138 U CN201220272138 U CN 201220272138U CN 202671709 U CN202671709 U CN 202671709U
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Abstract
The utility model discloses a chunk polysilicon feeding device for a Czochralski silicon single crystal furnace. Stop balls serve as barriers for polysilicon. A guide pipe serves as a guide device for feeding polysilicon through a gate valve or a flap valve. The gate valve or flap valve serves as a device for isolating vacuum for the Czochralski silicon single crystal furnace. The size of the devices is far larger than particle size of chunk polysilicon. Therefore, the chunk polysilicon feeding device can be used to feed the chunk polysilicon smaller than 50mm in particle size and particular polysilicon smaller than 5mm in particle size into the Czochralski silicon single crystal furnace, and the problem that the existing polysilicon feeding chamber can only be used to feed the particular polysilicon smaller than 5mm in particle size into the Czochralski silicon single crystal furnace and cannot be used to feed the chunk polysilicon is solved.
Description
Technical field
The utility model relates to a kind of chunk polysilicon feeding device for straight pulling silicon single crystal furnace.
Background technology
Make silicon single-crystal and mainly adopt vertical pulling method (Czochralski method), being grown in the straight pulling silicon single crystal furnace of silicon single-crystal finished.When using straight pulling silicon single crystal furnace growing silicon single crystal now commonly used in order to reduce energy consumption, improve single furnace output and quality and generally use again feeding technique, concrete working method is: will fill bulk or granulated polycrystalline silicon in the used crucible first, again through vacuumizing, polysilicon melts, melt temperature is stable, crystal seed and melt welding, thin neck growth, the shoulder growth, isodiametric growth, the steps such as ending grow first silicon single-crystal, the silicon melt of residue about 1/3 in the crucible, silicon single-crystal is lifted with the pulling rate of setting is cooled to 200-300oC when entering secondary furnace chamber, in silicon single-crystal rising process of cooling, from the feeding chamber that is arranged on bell one side, the granular polycrystalline silicon material is added in the quartz crucible, begin second polysilicon thaw process, after the temperature of silicon single-crystal is cooled to set(ting)value, take out monocrystalline, after the polysilicon that adds melts fully, the process of growth of second silicon single-crystal of beginning.Repeat the process of front and can use a quartz crucible growth 5-10 root silicon single-crystal.
Now straight pulling silicon single crystal furnace commonly used in use, the growth of the adding of polysilicon, the fusing of polysilicon, silicon single-crystal is finished in same crucible sequentially.The continuously straight pulling silicon single crystal furnace of filling of a kind of silicon melt has appearred now, crystal is grown in the quartz crucible and finishes, being melted in the ad hoc melting area of polysilicon finished, granular polycrystalline silicon is added into the unmelted polycrystalline silicon district from feeding chamber in silicon monocrystal growth, is arrived in the quartz crucible of silicon monocrystal growth by continuous supplementation after the melting area is converted to silicon melt.
Two kinds of straight pulling silicon single crystal furnaces all will be used the polysilicon feeding chamber, the polysilicon feeding chamber of seeing the at present granular polycrystalline silicon of all can only annotating in the single crystal growing furnace, the chunk polysilicon of can not annotating.Granular polycrystalline silicon is of a size of diameter less than the spheroid of 5mm.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, and a kind of chunk polysilicon feeding device for straight pulling silicon single crystal furnace is provided.
A kind of chunk polysilicon feeding device for straight pulling silicon single crystal furnace: be provided with in turn from top to bottom Cang Gai, warehouse, the turnover panel valve body, the side of covering, storehouse from left to right is provided with backgauge ball lifting assembly in turn, the material guiding pipe lifting assembly, charging opening, backgauge ball lifting assembly is provided with motor from top to bottom in turn, step-down gear, anchor, the guiding slide bar, screw mandrel, the corrugated tube lifting member, corrugated tube, lifting rod, motor, step-down gear, the guiding slide bar, screw mandrel is installed on the anchor, the corrugated tube lifting member is connected on the screw mandrel by internal thread and can slides up and down along the guiding slide bar, corrugated tube, lifting rod is installed in the below of corrugated tube lifting member, the material guiding pipe lifting assembly is provided with motor from top to bottom in turn, step-down gear, anchor, the guiding slide bar, screw mandrel, the corrugated tube lifting member, corrugated tube, lifting rod, motor, step-down gear, the guiding slide bar, screw mandrel is installed on the anchor, the corrugated tube lifting member is connected on the screw mandrel by internal thread and can slides up and down along the guiding slide bar, corrugated tube, lifting rod is installed in the below of corrugated tube lifting member, be provided with in turn from outside to inside the silica glass inner sleeve in the warehouse top, the backgauge ball, backgauge ball elevating lever, the material guiding pipe elevating lever, warehouse is provided with material guiding pipe in the bottom, material guiding pipe is suspended on the lower end of material guiding pipe elevating lever by the material guiding pipe hook, the material guiding pipe hook is by interior ring, pull bar, set screw, the annular holder consists of, the bottom shape of annular holder is annular and closely links to each other with the bottom of material guiding pipe, the material guiding pipe elevating lever passes interior ring and installs, warehouse lower outside wall is provided with vacuum pumping opening, vacuum valve, observation window, inlet mouth, the turnover panel valve body comprises sealing-ring, division board, magnetic fluid seal, rocking bar, turnover panel valve body bottom is provided with sealing-ring, the lower end of turnover panel valve body is provided with lower flange, the external sidewall of flap valve is provided with magnetic fluid seal, rocking bar, rocking bar links to each other with division board by magnetic fluid seal.
Described silica glass inner sleeve epimere is right cylinder, the right cylinder inside diameter D
1Be 400-800mm, silica glass inner sleeve stage casing is cone, the half-angle α of cone
1Be 15-45o, overall height H and the D of warehouse epimere barrel portion and stage casing cone part
1Ratio be 1.2-2:1, the diameter D of backgauge ball
2Be 110-200mm, the backgauge ball has through hole along diametric(al), through-hole diameter D
3Be 15-25mm, the cylindrical height H of silica glass inner sleeve hypomere
1Height h with material guiding pipe
3Ratio be about 1:1, the cylindrical height H of silica glass inner sleeve hypomere
1Height H with the turnover panel valve body
2Ratio be 1-1.5:1, silica glass inner sleeve hypomere right cylinder inside diameter D
4Be 100-160mm, the diameter D of division board
5Be 140-200mm, the internal diameter of sealing-ring is 130-190mm, and the wall thickness of silica glass inner sleeve is 5-10mm.
The another kind of chunk polysilicon feeding device that is used for straight pulling silicon single crystal furnace: be provided with in turn from top to bottom Cang Gai, warehouse, the turnover panel valve body, the side of covering, storehouse from left to right is provided with backgauge ball lifting assembly in turn, the material guiding pipe lifting assembly, charging opening, backgauge ball lifting assembly is provided with motor from top to bottom in turn, step-down gear, anchor, the guiding slide bar, screw mandrel, the corrugated tube lifting member, corrugated tube, lifting rod, motor, step-down gear, the guiding slide bar, screw mandrel is installed on the anchor, the corrugated tube lifting member is connected on the screw mandrel by internal thread and can slides up and down along the guiding slide bar, corrugated tube, lifting rod is installed in the below of corrugated tube lifting member, the material guiding pipe lifting assembly is provided with motor from top to bottom in turn, step-down gear, anchor, the guiding slide bar, screw mandrel, the corrugated tube lifting member, corrugated tube, lifting rod, motor, step-down gear, the guiding slide bar, screw mandrel is installed on the anchor, the corrugated tube lifting member is connected on the screw mandrel by internal thread and can slides up and down along the guiding slide bar, corrugated tube, lifting rod is installed in the below of corrugated tube lifting member, be provided with in turn from outside to inside the silica glass inner sleeve in the warehouse top, the backgauge ball, backgauge ball elevating lever, the material guiding pipe elevating lever, warehouse is provided with material guiding pipe in the bottom, material guiding pipe is suspended on the lower end of material guiding pipe elevating lever by the material guiding pipe hook, the material guiding pipe hook is by interior ring, pull bar, set screw, the annular holder consists of, the bottom shape of annular holder is annular and closely links to each other with the bottom of material guiding pipe, the material guiding pipe elevating lever passes interior ring and installs, warehouse lower outside wall is provided with vacuum pumping opening, vacuum valve, observation window, inlet mouth, the flashboard valve body comprises sealing-ring, division board, screw mandrel, shake wheel, magnetic fluid seal, the division board moving member, lower flange, the lower flange upper end is provided with sealing-ring, flashboard valve body body outer side wall is provided with magnetic fluid seal, shake wheel, be provided with screw mandrel in the flashboard valve body body, division board, the division board moving member, screw mandrel one end links to each other with division board by the division board moving member, the screw mandrel the other end by magnetic fluid seal with shake the wheel link to each other, division board along continuous straight runs under the drive of screw mandrel moves.
Described silica glass inner sleeve epimere right cylinder, the right cylinder inner diameter d
1Be 400-800mm, silica glass inner sleeve stage casing is cone, the half-angle α of cone
2Be 15-45o, total height h and the d of warehouse epimere barrel portion and stage casing cone part
1Ratio be 1.2-2:1, the diameter d of backgauge ball
2Be 110-200mm, the backgauge ball has through hole along diametric(al), through-hole diameter d
3Be 15-25mm, the cylindrical height h of silica glass inner sleeve hypomere
1Height h with material guiding pipe
3Ratio be about 1:1, the cylindrical height h of silica glass inner sleeve hypomere
1Height h with the flashboard valve body
2Ratio be 1-1.5:1, silica glass inner sleeve hypomere right cylinder inner diameter d
4Be 100-160mm, the internal diameter of sealing-ring 33 is 130-190mm, and the wall thickness of silica glass inner sleeve is 5-10mm.
Described material guiding pipe elevating lever and the coaxial installation of backgauge ball elevating lever, backgauge ball elevating lever is a hollow tubular structure, inner diameter d
6Be 12-18mm, wall thickness is 1-3mm, the outside diameter d of material guiding pipe elevating lever
5Be 8-16mm.
The material of described silica glass inner sleeve, backgauge ball, material guiding pipe is silica glass, and the material of described material guiding pipe hook, material guiding pipe elevating lever, backgauge ball elevating lever is metal molybdenum, and the material of the other parts of described feeding device is steel.
The utility model is by using the backgauge ball as the disrupter of polysilicon, use material guiding pipe as the material guiding device that passes through slide valve or flap valve that injects polysilicon, use slide valve or flap valve as the device of isolation straight pulling silicon single crystal furnace vacuum, the yardstick of these devices is much larger than the granularity of chunk polysilicon, make a kind of chunk polysilicon feeding device for straight pulling silicon single crystal furnace of the present utility model can be to filling granularity in the straight pulling silicon single crystal furnace less than the chunk polysilicon of 50mm and the granularity granular polycrystalline silicon less than 5mm, having solved existing polysilicon feeding chamber can only be to filling granularity in the straight pulling silicon single crystal furnace less than the granular polycrystalline silicon of 5mm, the difficult problem of the chunk polysilicon of can not annotating.
Description of drawings
Fig. 1 is the chunk polysilicon feeding device I type structural representation for straight pulling silicon single crystal furnace;
Fig. 2 uses synoptic diagram for the chunk polysilicon feeding device I type of straight pulling silicon single crystal furnace;
Fig. 3 is the chunk polysilicon feeding device II type structural representation for straight pulling silicon single crystal furnace;
Fig. 4 uses synoptic diagram for the chunk polysilicon feeding device II type of straight pulling silicon single crystal furnace;
Fig. 5 is material guiding pipe and hook structure front view thereof;
Fig. 6 is material guiding pipe and hook structure vertical view thereof;
Fig. 7 is material guiding pipe elevating lever and backgauge ball lifting rod structure synoptic diagram;
Among the figure: motor 1, step-down gear 2, corrugated tube lifting member 3, screw mandrel 4, guiding slide bar 5, anchor 6, corrugated tube 7, lifting rod 8, motor 9, step-down gear 10, anchor 11, screw mandrel 12, guiding slide bar 13, corrugated tube lifting member 14, corrugated tube 15, lifting rod 16, charging opening 17, storehouse lid 18, warehouse 19, silica glass inner sleeve 20, material guiding pipe elevating lever 21, backgauge ball elevating lever 22, backgauge ball 23, inlet mouth 24, material guiding pipe 25, observation window 26, vacuum valve 27, bleeding point 28, material guiding pipe hook 29, turnover panel valve body 30, division board 31, rocking bar 32, sealing-ring 33, lower flange 34, mounting flange 35, unmelted polycrystalline silicon pipe 36, temperature-stable pipe 37, ring 38 in the crucible, crucible 39, monocrystalline 40, stay-warm case 41, secondary furnace chamber 42, flashboard valve body 43, division board 44, screw mandrel 45, shake wheel 46, lower flange 47, interior ring 48, pull bar 49, set screw 50, annular holder 51, magnetic fluid seal 52, division board moving member 53.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is described.
Shown in Fig. 1, a kind of chunk polysilicon feeding device for straight pulling silicon single crystal furnace: be provided with in turn from top to bottom storehouse lid 18, warehouse 19, turnover panel valve body 30, the storehouse is covered 18 tops and from left to right is provided with in turn backgauge ball lifting assembly, the material guiding pipe lifting assembly, charging opening 17, backgauge ball lifting assembly is provided with motor 9 from top to bottom in turn, step-down gear 10, anchor 11, guiding slide bar 13, screw mandrel 12, corrugated tube lifting member 14, corrugated tube 15, lifting rod 16, motor 9, step-down gear 10, guiding slide bar 13, screw mandrel 12 is installed on the anchor 11, corrugated tube lifting member 14 is connected on the screw mandrel 12 by internal thread and can slides up and down along guiding slide bar 13, corrugated tube 15, lifting rod 16 is installed in the below of corrugated tube lifting member 14, the material guiding pipe lifting assembly is provided with motor 1 from top to bottom in turn, step-down gear 2, anchor 6, guiding slide bar 5, screw mandrel 4, corrugated tube lifting member 3, corrugated tube 7, lifting rod 8, motor 1, step-down gear 2, guiding slide bar 5, screw mandrel 4 grades are installed on the anchor 6, corrugated tube lifting member 3 is connected on the screw mandrel 4 by internal thread and can slides up and down along guiding slide bar 5, corrugated tube 7, lifting rod 8 is installed in the below of corrugated tube lifting member 3, be provided with in turn from outside to inside silica glass inner sleeve 20 in warehouse 19 tops, backgauge ball 23, backgauge ball elevating lever 22, material guiding pipe elevating lever 21, warehouse is provided with material guiding pipe 25 in 19 bottoms, material guiding pipe 25 is suspended on the lower end of material guiding pipe elevating lever 21 by material guiding pipe hook 29, material guiding pipe hook 29 is by interior ring 48, pull bar 49, set screw 50, annular holder 51 consists of, the bottom shape of annular holder 51 is annular and closely links to each other with the bottom of material guiding pipe 25, material guiding pipe elevating lever 21 passes interior ring 48 and installs, warehouse 19 lower outside walls are provided with vacuum pumping opening 28, vacuum valve 27, observation window 26, inlet mouth 24, turnover panel valve body 30 comprises sealing-ring 33, division board 31, magnetic fluid seal 52, rocking bar 32, turnover panel valve body 30 bottoms are provided with sealing-ring 33, the lower end of turnover panel valve body 30 is provided with lower flange 34, turnover panel valve body 30 outer side walls are provided with magnetic fluid seal 52, rocking bar 32, rocking bar 32 links to each other with division board 31 by magnetic fluid seal 52.
Described silica glass inner sleeve 20 epimeres are right cylinder, the right cylinder inside diameter D
1Be 400-800mm, silica glass inner sleeve 20 stage casings are cone, the half-angle α of cone
1Be 15-45o, overall height H and the D of warehouse 19 epimere barrel portions and stage casing cone part
1Ratio be 1.2-2:1, the diameter D of backgauge ball 23
2Be 110-200mm, backgauge ball 23 has through hole, through-hole diameter D along diametric(al)
3Be 15-25mm, the cylindrical height H of silica glass inner sleeve 20 hypomeres
1Height h with material guiding pipe 25
3Ratio be about 1:1, the cylindrical height H of silica glass inner sleeve 20 hypomeres
1Height H with turnover panel valve body 30
2Ratio be 1-1.5:1, silica glass inner sleeve 20 hypomere right cylinder inside diameter D
4Be 100-160mm, the diameter D of division board 31
5Be 140-200mm, the internal diameter of sealing-ring 33 is 130-190mm, and the wall thickness of silica glass inner sleeve 20 is 5-10mm.
As shown in Figure 2, a kind of chunk polysilicon feeding device I type for straight pulling silicon single crystal furnace use synoptic diagram comprise of the present utility model a kind of for straight pulling silicon single crystal furnace chunk polysilicon feeding device I type and mounting flange 35, unmelted polycrystalline silicon pipe 36, temperature-stable pipe 37, crucible in encircle 38, crucible 39, monocrystalline 40, stay-warm case 41, secondary furnace chamber 42.
As shown in Figure 3, the another kind of chunk polysilicon feeding device that is used for straight pulling silicon single crystal furnace: be provided with in turn from top to bottom storehouse lid 18, warehouse 19, turnover panel valve body 30, the storehouse is covered 18 tops and from left to right is provided with in turn backgauge ball lifting assembly, the material guiding pipe lifting assembly, charging opening 17, backgauge ball lifting assembly is provided with motor 9 from top to bottom in turn, step-down gear 10, anchor 11, guiding slide bar 13, screw mandrel 12, corrugated tube lifting member 14, corrugated tube 15, lifting rod 16, motor 9, step-down gear 10, guiding slide bar 13, screw mandrel 12 is installed on the anchor 11, corrugated tube lifting member 14 is connected on the screw mandrel 12 by internal thread and can slides up and down along guiding slide bar 13, corrugated tube 15, lifting rod 16 is installed in the below of corrugated tube lifting member 14, the material guiding pipe lifting assembly is provided with motor 1 from top to bottom in turn, step-down gear 2, anchor 6, guiding slide bar 5, screw mandrel 4, corrugated tube lifting member 3, corrugated tube 7, lifting rod 8, motor 1, step-down gear 2, guiding slide bar 5, screw mandrel 4 grades are installed on the anchor 6, corrugated tube lifting member 3 is connected on the screw mandrel 4 by internal thread and can slides up and down along guiding slide bar 5, corrugated tube 7, lifting rod 8 is installed in the below of corrugated tube lifting member 3, be provided with in turn from outside to inside silica glass inner sleeve 20 in warehouse 19 tops, backgauge ball 23, backgauge ball elevating lever 22, material guiding pipe elevating lever 21, warehouse is provided with material guiding pipe 25 in 19 bottoms, material guiding pipe 25 is suspended on the lower end of material guiding pipe elevating lever 21 by material guiding pipe hook 29, material guiding pipe hook 29 is by interior ring 48, pull bar 49, set screw 50, annular holder 51 consists of, the bottom shape of annular holder 51 is annular and closely links to each other with the bottom of material guiding pipe 25, material guiding pipe elevating lever 21 passes interior ring 48 and installs, warehouse 19 lower outside walls are provided with vacuum pumping opening 28, vacuum valve 27, observation window 26, inlet mouth 24, flashboard valve body 43 comprises sealing-ring 33, division board 44, screw mandrel 45, shake wheel 46, magnetic fluid seal 52, division board moving member 53, lower flange 47, lower flange 47 upper ends are provided with sealing-ring 33, flashboard valve body 43 body outer side walls are provided with magnetic fluid seal 52, shake wheel 46, be provided with screw mandrel 45 in flashboard valve body 43 bodies, division board 44, division board moving member 53, screw mandrel 45 1 ends link to each other with division board 44 by division board moving member 53, screw mandrel 45 the other ends by magnetic fluid seal 52 with shake wheel and 46 link to each other, division board 44 along continuous straight runs under the drive of screw mandrel 45 moves.
Described silica glass inner sleeve 20 epimere right cylinders, the right cylinder inner diameter d
1Be 400-800mm, silica glass inner sleeve 20 stage casings are cone, the half-angle α of cone
2Be 15-45o, total height h and the d of warehouse 19 epimere barrel portions and stage casing cone part
1Ratio be 1.2-2:1, the diameter d of backgauge ball 23
2Be 110-200mm, backgauge ball 23 has through hole, through-hole diameter d along diametric(al)
3Be 15-25mm, the cylindrical height h of silica glass inner sleeve 20 hypomeres
1Height h with material guiding pipe 25
3Ratio be about 1:1, the cylindrical height h of silica glass inner sleeve 20 hypomeres
1Height h with flashboard valve body 43
2Ratio be 1-1.5:1, silica glass inner sleeve 20 hypomere right cylinder inner diameter d
4Be 100-160mm, the internal diameter of sealing-ring 33 is 130-190mm, and the wall thickness of silica glass inner sleeve 20 is 5-10mm.
Described material guiding pipe elevating lever 21 and the 22 coaxial installations of backgauge ball elevating lever, backgauge ball elevating lever 22 is a hollow tubular structure, inner diameter d
6Be 12-18mm, wall thickness is 1-3mm, the outside diameter d of material guiding pipe elevating lever 21
5Be 8-16mm.
The material of described silica glass inner sleeve 20, backgauge ball 23, material guiding pipe 25 is silica glass, the material of described material guiding pipe hook 29, material guiding pipe elevating lever 21, backgauge ball elevating lever 22 is metal molybdenum, and the material of the other parts of described feeding device is steel.
As shown in Figure 4, a kind of chunk polysilicon feeding device II type for straight pulling silicon single crystal furnace use synoptic diagram comprise of the present utility model a kind of for straight pulling silicon single crystal furnace chunk polysilicon feeding device II type and mounting flange 35, unmelted polycrystalline silicon pipe 36, temperature-stable pipe 37, crucible in encircle 38, crucible 39, monocrystalline 40, stay-warm case 41, secondary furnace chamber 42.
Such as Fig. 5, shown in Figure 6, material guiding pipe and hook structure front view thereof and vertical view comprise material guiding pipe 25, interior ring 48, pull bar 49, set screw 50, annular holder 51.
Shown in Fig. 7, material guiding pipe elevating lever and backgauge ball lifting rod structure synoptic diagram comprise material guiding pipe elevating lever 21, backgauge ball elevating lever 22.
The adding of the utility model backgauge ball 23 control polysilicons, backgauge ball 23 can be realized moving up and down under the control of backgauge ball elevating lever 22, with the lifting height of the size of polysilicon control backgauge ball 23, make feeding device possess the filling granularity less than the chunk polysilicon of 50mm and the granularity ability less than the granular polycrystalline silicon of 5mm.Material guiding pipe 25 can move up and down under the control of material guiding pipe elevating lever 21, in the time of need to closing lock (turning over) plate valve isolated vacuum, material guiding pipe 25 rises to its extreme higher position, in the straight pulling silicon single crystal furnace during filling polysilicon, material guiding pipe 25 drops to its extreme lower position, the lower end of the upper end of material guiding pipe 25 and silica glass inner sleeve 20 is cross-linked, the upper end of the lower end of material guiding pipe 25 and unmelted polycrystalline silicon pipe 36 is cross-linked, this mode of connection guarantees that the polysilicon of annotating can not enter in lock (turning over) plate valve, can not hinder the folding of slide valve division board 44 and flap valve division board 31.
The chunk polysilicon feeding device that is used for straight pulling silicon single crystal furnace is installed in the continuously mounting flange 35 of the straight pulling silicon single crystal furnace of filling of silicon melt.In the silicon monocrystal growth process, the step that adds polysilicon in the straight pulling silicon single crystal furnace is: rise material guiding pipe elevating lever 21 and material guiding pipe 25 is raised to its extreme higher position, downshift pellet elevating lever 22 drops to backgauge ball 23 its extreme lower position, close division board 31 or the division board 44 of flap valve or slide valve, close vacuum valve 27, the argon gas valve is reached maximum value through inlet mouth 24 applying argon gas in the feeding device of the present utility model, stop argon gas after arriving normal pressure, open charging opening 17 and to chunk polysilicon or grain silicon that silicon single-crystal is required of the interior addings growth of warehouse 19, close charging opening 17, opening vacuum valve 27 vacuumizes, when the pressure in the feeding device of the present utility model is identical with pressure in the single crystal growing furnace, open division board 31 or the division board 44 of flap valve or slide valve, argon gas through inlet mouth 24 logical technique flows, fall material guiding pipe elevating lever 21 and material guiding pipe 25 is dropped to its extreme lower position, upshift pellet elevating lever 22 is raised to correct position with backgauge ball 23, to the unmelted polycrystalline silicon pipe 36 interior continuous filling polysilicons of straight pulling silicon single crystal furnace.Crystal is grown in the quartz crucible and finishes, being melted in the ad hoc melting area of polysilicon finished, polysilicon is added into unmelted polycrystalline silicon pipe 36 from feeding chamber in silicon monocrystal growth, polysilicon is changed into silicon melt continuously in the fusing pipe, silicon melt is arrived in the quartz crucible 39 of silicon monocrystal growth by continuous supplementation through temperature-stable pipe 37, and being grown in the quartz crucible 39 of silicon single-crystal finished.
The utility model is by using the backgauge ball as the disrupter of polysilicon, use material guiding pipe as the material guiding device that passes through slide valve or flap valve that injects polysilicon, use slide valve or flap valve as the device of isolation straight pulling silicon single crystal furnace vacuum, the yardstick of these devices is much larger than the granularity of chunk polysilicon, make a kind of chunk polysilicon feeding device for straight pulling silicon single crystal furnace of the present utility model can be to filling granularity in the straight pulling silicon single crystal furnace less than the chunk polysilicon of 50mm and the granularity granular polycrystalline silicon less than 5mm, having solved existing polysilicon feeding chamber can only be to filling granularity in the straight pulling silicon single crystal furnace less than the granular polycrystalline silicon of 5mm, the difficult problem of the chunk polysilicon of can not annotating.
The utility model can be used for the continuously straight pulling silicon single crystal furnace of filling of silicon melt, also can be used for common straight pulling silicon single crystal furnace now commonly used.
Claims (6)
1. chunk polysilicon feeding device that is used for straight pulling silicon single crystal furnace, it is characterized in that: be provided with in turn from top to bottom Cang Gai (18), warehouse (19), turnover panel valve body (30), Cang Gai (18) top from left to right is provided with backgauge ball lifting assembly in turn, the material guiding pipe lifting assembly, charging opening (17), backgauge ball lifting assembly is provided with motor (9) from top to bottom in turn, step-down gear (10), anchor (11), guiding slide bar (13), screw mandrel (12), corrugated tube lifting member (14), corrugated tube (15), lifting rod (16), motor (9), step-down gear (10), guiding slide bar (13), screw mandrel (12) is installed on the anchor (11), corrugated tube lifting member (14) is connected to screw mandrel (12) upward by internal thread and can slides up and down along guiding slide bar (13), corrugated tube (15), lifting rod (16) is installed in the below of corrugated tube lifting member (14), the material guiding pipe lifting assembly is provided with motor (1) from top to bottom in turn, step-down gear (2), anchor (6), guiding slide bar (5), screw mandrel (4), corrugated tube lifting member (3), corrugated tube (7), lifting rod (8), motor (1), step-down gear (2), guiding slide bar (5), screw mandrel (4) is installed on the anchor (6), corrugated tube lifting member (3) is connected to screw mandrel (4) upward by internal thread and can slides up and down along guiding slide bar (5), corrugated tube (7), lifting rod (8) is installed in the below of corrugated tube lifting member (3), warehouse (19) is provided with silica glass inner sleeve (20) in the top from outside to inside in turn, backgauge ball (23), backgauge ball elevating lever (22), material guiding pipe elevating lever (21), warehouse (19) is provided with material guiding pipe (25) in the bottom, material guiding pipe (25) is suspended on the lower end of material guiding pipe elevating lever (21) by material guiding pipe hook (29), material guiding pipe hook (29) is by interior ring (48), pull bar (49), set screw (50), annular holder (51) consists of, the bottom shape of annular holder (51) is annular and closely links to each other with the bottom of material guiding pipe (25), material guiding pipe elevating lever (21) passes interior ring (48) and installs, warehouse (19) lower outside wall is provided with vacuum pumping opening (28), vacuum valve (27), observation window (26), inlet mouth (24), turnover panel valve body (30) comprises sealing-ring (33), division board (31), magnetic fluid seal (52), rocking bar (32), turnover panel valve body (30) bottom is provided with sealing-ring (33), the lower end of turnover panel valve body (30) is provided with lower flange (34), turnover panel valve body (30) outer side wall is provided with magnetic fluid seal (52), rocking bar (32), rocking bar (32) links to each other with division board (31) by magnetic fluid seal (52).
2. a kind of chunk polysilicon feeding device for straight pulling silicon single crystal furnace as claimed in claim 1, it is characterized in that: described silica glass inner sleeve (20) epimere is right cylinder, the right cylinder inside diameter D
1Be 400-800mm, silica glass inner sleeve (20) stage casing is cone, the half-angle α of cone
1Be 15-45o, overall height H and the D of warehouse (19) epimere barrel portion and stage casing cone part
1Ratio be 1.2-2:1, the diameter D of backgauge ball 23
2Be 110-200mm, (23 have through hole, through-hole diameter D along diametric(al) to the backgauge ball
3Be 15-25mm, the cylindrical height H of silica glass inner sleeve (20) hypomere
1Height h with material guiding pipe (25)
3Ratio be about 1:1, the cylindrical height H of silica glass inner sleeve (20) hypomere
1Height H with turnover panel valve body (30)
2Ratio be 1-1.5:1, silica glass inner sleeve (20) hypomere right cylinder inside diameter D
4Be 100-160mm, the diameter D of division board (31)
5Be 140-200mm, the internal diameter of sealing-ring (33) is 130-190mm, and the wall thickness of silica glass inner sleeve (20) is 5-10mm.
3. chunk polysilicon feeding device that is used for straight pulling silicon single crystal furnace, it is characterized in that: be provided with in turn from top to bottom Cang Gai (18), warehouse (19), turnover panel valve body (30), Cang Gai (18) top from left to right is provided with backgauge ball lifting assembly in turn, the material guiding pipe lifting assembly, charging opening (17), backgauge ball lifting assembly is provided with motor (9) from top to bottom in turn, step-down gear (10), anchor (11), guiding slide bar (13), screw mandrel (12), corrugated tube lifting member (14), corrugated tube (15), lifting rod (16), motor (9), step-down gear (10), guiding slide bar (13), screw mandrel (12) is installed on the anchor (11), corrugated tube lifting member (14) is connected to screw mandrel (12) upward by internal thread and can slides up and down along guiding slide bar (13), corrugated tube (15), lifting rod (16) is installed in the below of corrugated tube lifting member (14), the material guiding pipe lifting assembly is provided with motor (1) from top to bottom in turn, step-down gear (2), anchor (6), guiding slide bar (5), screw mandrel (4), corrugated tube lifting member (3), corrugated tube (7), lifting rod (8), motor (1), step-down gear (2), guiding slide bar (5), screw mandrel (4) is installed on the anchor (6), corrugated tube lifting member (3) is connected to screw mandrel (4) upward by internal thread and can slides up and down along guiding slide bar (5), corrugated tube (7), lifting rod (8) is installed in the below of corrugated tube lifting member (3), warehouse (19) is provided with silica glass inner sleeve (20) in the top from outside to inside in turn, backgauge ball (23), backgauge ball elevating lever (22), material guiding pipe elevating lever (21), warehouse (19) is provided with material guiding pipe (25) in the bottom, material guiding pipe (25) is suspended on the lower end of material guiding pipe elevating lever (21) by material guiding pipe hook (29), material guiding pipe hook (29) is by interior ring (48), pull bar (49), set screw (50), annular holder (51) consists of, the bottom shape of annular holder (51) is annular and closely links to each other with the bottom of material guiding pipe (25), material guiding pipe elevating lever (21) passes interior ring (48) and installs, warehouse (19) lower outside wall is provided with vacuum pumping opening (28), vacuum valve (27), observation window (26), inlet mouth (24), flashboard valve body (43) comprises sealing-ring (33), division board (44), screw mandrel (45), shake wheel (46), magnetic fluid seal (52), division board moving member (53), lower flange (47), lower flange (47) upper end is provided with sealing-ring (33), flashboard valve body (43) body outer side wall is provided with magnetic fluid seal (52), shake wheel (46), be provided with screw mandrel (45) in flashboard valve body (43) body, division board (44), division board moving member (53), screw mandrel (45) one ends link to each other with division board (44) by division board moving member (53), screw mandrel (45) the other end by magnetic fluid seal (52) with shake wheel (46) and link to each other, division board (44) along continuous straight runs under the drive of screw mandrel (45) moves.
4. a kind of chunk polysilicon feeding device for straight pulling silicon single crystal furnace as claimed in claim 3 is characterized in that: described silica glass inner sleeve (20) epimere right cylinder, right cylinder inner diameter d
1Be 400-800mm, silica glass inner sleeve (20) stage casing is cone, the half-angle α of cone
2Be 15-45o, total height h and the d of warehouse (19) epimere barrel portion and stage casing cone part
1Ratio be 1.2-2:1, the diameter d of backgauge ball (23)
2Be 110-200mm, backgauge ball (23) has through hole along diametric(al), through-hole diameter d
3Be 15-25mm, the cylindrical height h of silica glass inner sleeve (20) hypomere
1Height h with material guiding pipe (25)
3Ratio be about 1:1, the cylindrical height h of silica glass inner sleeve (20) hypomere
1With flashboard valve body (43 height h
2Ratio be 1-1.5:1, silica glass inner sleeve (20) hypomere right cylinder inner diameter d
4Be 100-160mm, the internal diameter of sealing-ring (33) is 130-190mm, and the wall thickness of silica glass inner sleeve (20) is 5-10mm.
5. such as claim 1 or 3 described a kind of chunk polysilicon feeding devices for straight pulling silicon single crystal furnace, it is characterized in that: described material guiding pipe elevating lever (21) and the coaxial installation of backgauge ball elevating lever (22), (22 is a hollow tubular structure to backgauge ball elevating lever, inner diameter d
6Be 12-18mm, wall thickness is 1-3mm, the outside diameter d of material guiding pipe elevating lever (21)
5Be 8-16mm.
6. claim 1 or 3 described a kind of chunk polysilicon feeding devices for straight pulling silicon single crystal furnace, it is characterized in that: the material of described silica glass inner sleeve (20), backgauge ball (23), material guiding pipe (25) is silica glass, the material of described material guiding pipe hook (29), material guiding pipe elevating lever (21), backgauge ball elevating lever (22) is metal molybdenum, and the material of the other parts of described feeding device is steel.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220272138 CN202671709U (en) | 2012-06-11 | 2012-06-11 | Chunk polysilicon feeding device for Czochralski silicon single crystal furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220272138 CN202671709U (en) | 2012-06-11 | 2012-06-11 | Chunk polysilicon feeding device for Czochralski silicon single crystal furnace |
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| CN202671709U true CN202671709U (en) | 2013-01-16 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102677156A (en) * | 2012-06-11 | 2012-09-19 | 曾泽斌 | Massive polycrystalline silicon charging device for Czochralski silicon single crystal furnace |
| CN114411241A (en) * | 2022-03-11 | 2022-04-29 | 浙江精功科技股份有限公司 | Single crystal furnace feeding device |
| CN116145234A (en) * | 2015-08-20 | 2023-05-23 | 环球晶圆股份有限公司 | System for selectively feeding chunk or granular polycrystalline silicon in a crystal growth chamber |
-
2012
- 2012-06-11 CN CN 201220272138 patent/CN202671709U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102677156A (en) * | 2012-06-11 | 2012-09-19 | 曾泽斌 | Massive polycrystalline silicon charging device for Czochralski silicon single crystal furnace |
| CN102677156B (en) * | 2012-06-11 | 2015-07-15 | 曾泽斌 | Massive polycrystalline silicon charging device for Czochralski silicon single crystal furnace |
| CN116145234A (en) * | 2015-08-20 | 2023-05-23 | 环球晶圆股份有限公司 | System for selectively feeding chunk or granular polycrystalline silicon in a crystal growth chamber |
| CN114411241A (en) * | 2022-03-11 | 2022-04-29 | 浙江精功科技股份有限公司 | Single crystal furnace feeding device |
| CN114411241B (en) * | 2022-03-11 | 2023-12-22 | 浙江精工集成科技股份有限公司 | Single crystal furnace feeding device |
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