CN114411241B - Single crystal furnace feeding device - Google Patents
Single crystal furnace feeding device Download PDFInfo
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- CN114411241B CN114411241B CN202210245069.5A CN202210245069A CN114411241B CN 114411241 B CN114411241 B CN 114411241B CN 202210245069 A CN202210245069 A CN 202210245069A CN 114411241 B CN114411241 B CN 114411241B
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- quartz glass
- single crystal
- glass tube
- furnace
- crystal furnace
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- 239000013078 crystal Substances 0.000 title claims abstract description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 38
- 230000005540 biological transmission Effects 0.000 claims abstract description 20
- 239000004677 Nylon Substances 0.000 claims abstract description 9
- 229920001778 nylon Polymers 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 7
- 238000007789 sealing Methods 0.000 claims description 33
- 239000011553 magnetic fluid Substances 0.000 claims description 22
- 230000002457 bidirectional effect Effects 0.000 claims description 19
- 230000007246 mechanism Effects 0.000 claims description 12
- 229910052755 nonmetal Inorganic materials 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 230000000007 visual effect Effects 0.000 claims description 3
- 239000002210 silicon-based material Substances 0.000 abstract description 11
- 238000005265 energy consumption Methods 0.000 abstract description 5
- 238000001816 cooling Methods 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 239000000047 product Substances 0.000 abstract 1
- 239000013589 supplement Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to a single crystal furnace charging device, which is characterized in that a quartz glass tube is positioned at a proper position in a furnace body by controlling a linear module, a vertical corrugated tube is connected with a charging unit, the charging unit is vacuumized, a vacuum gate valve is opened, a nylon sleeve is moved to a lower position by controlling a cylinder, silicon materials in the charging unit fall into the quartz glass tube with a certain inclination angle after passing through a telescopic nonmetallic tube, the nylon sleeve and a nylon elbow, the quartz glass tube is driven to rotate by controlling a transmission device through a motor, and the spiral surface or the grooved rib surface of the inner wall of the quartz glass tube can push the silicon materials to smoothly enter the furnace body. The invention realizes the supplement of the silicon material in the furnace under the condition that the furnace body is not cooled, reduces the energy consumption in the cooling and heating processes of the furnace and saves the time cost; the transmission device is adopted to drive the quartz glass tube with the rough inner wall to rotate so as to push the material, thereby avoiding the influence on the thermal field environment in the single crystal furnace and improving the product quality.
Description
Technical Field
The invention belongs to the technical field of monocrystalline silicon production equipment, and particularly relates to a feeding device of a monocrystalline furnace.
Background
Solar photovoltaic is a green clean energy driven by the emphasis of China, and the demand of the solar photovoltaic is continuously increased in recent years, so that the demand of monocrystalline silicon is greatly increased. In the existing single crystal furnace production process, the primary feeding amount is limited due to limited furnace body capacity and the like. In the past, the feeding is carried out after the furnace body is cooled, and the furnace body is heated after the feeding is finished so as to continue production after the furnace body is heated. This process wastes a lot of time and energy consumption, greatly reducing production efficiency. In the prior art, a device for directly feeding materials on the side surface of the furnace body without waiting for the temperature reduction of the furnace body is arranged, for example, an external feeder is provided by a single crystal feeding method (publication No. 113046823A) of China patent publication No. 6 and 29 of 2021, and the vibration generator is used as power for feeding materials, so that the time and the energy consumption are saved. However, the vibration feeding mode easily causes severe change of the thermal field inside the single crystal furnace, and influences the product quality.
Disclosure of Invention
In view of the above, the invention aims to provide a single crystal furnace charging device, which solves the problems that in the prior art, the internal thermal field is influenced by a vibration charging mode in the external charging process of the single crystal furnace, and the product quality is reduced.
In order to achieve the above purpose, the technical scheme of the invention is realized as follows:
the utility model provides a single crystal furnace feeding device, including charging unit, feeding unit and power unit, charging unit pass through vertical bellows with the feeding unit links to each other, feeding unit and furnace body sealing connection, the inside scalable nonmetallic tube that is equipped with of vertical bellows, the feeding unit includes vacuum gate valve, connecting pipe, connection elbow, a two-way sealed magnetic fluid, transmission, horizontal bellows, quartz glass pipe and sharp module, vacuum gate valve upper end with vertical bellows connects, and the lower extreme passes behind the connecting pipe top opening, links to each other with the connecting elbow that is located the connecting pipe inside, be equipped with the nonmetallic cover that can reciprocate in the vacuum gate valve; the left end of the connecting pipe is a sealing end, and the right end of the connecting pipe is provided with an opening for connecting the connecting elbow with the quartz glass pipe; one end of the bidirectional sealing magnetic fluid is connected with the right end of the connecting pipe, the other end of the bidirectional sealing magnetic fluid is connected with the left end of the transverse bellows, and the right end of the transverse bellows is connected with the furnace body in a sealing manner. The linear module is connected with the bidirectional sealing magnetic fluid, and the top end of the base is fixed on the furnace body.
The quartz glass tube is obliquely arranged relative to the horizontal direction, one end of the quartz glass tube is positioned in the right end of the transverse corrugated tube, and the other end of the quartz glass tube sequentially penetrates through the interior of the transverse corrugated tube and the interior of the bidirectional sealing magnetic fluid and then is connected with the connecting elbow, and the inner wall of the quartz glass tube is a spiral surface or a grooved rib surface; the transmission device passes through the bidirectional sealing magnetic fluid and is in transmission connection with the quartz glass tube.
Further, the power unit comprises a motor and a cylinder, and the motor is respectively and electrically connected with the transmission device and the linear module; the cylinder is electrically connected with the vacuum gate valve, and the nonmetallic sleeve in the vacuum gate valve can be controlled to move up and down.
Further, the charging unit comprises a charging container and a supporting frame which are connected with each other; the top opening of the charging container is provided with a cover, the bottom opening of the charging container is provided with a PVC ball valve, and the PVC ball valve is connected with the vertical bellows.
Further, the charging container is of a funnel-shaped structure, and a nylon coating is attached to the inner surface of the charging container.
Further, the number of the supporting frames is at least two, and a fixing mechanism or a sliding mechanism is arranged at the bottom of the supporting frames.
Further, the fixing mechanism is a height-adjustable fixing base.
Further, the sliding mechanism comprises a sliding module and a locking device, and the sliding module is a pulley or a sliding rail.
Further, the quartz glass tube is inclined at an angle of 10 to 90 degrees with respect to the horizontal direction.
Furthermore, the nonmetallic sleeve and the connecting elbow are both made of nylon materials.
Further, the sealing end of the connecting pipe is provided with a visual window.
The beneficial effects of the invention are as follows:
1. under the condition that the furnace body is not cooled, the silicon material in the furnace is supplemented, the energy consumption in the cooling and heating processes of the furnace is reduced, and the time cost is saved.
2. The structure of splicing two bidirectional sealing magnetic fluid and a transmission device in the prior art is changed, and the embedded splicing of the bidirectional sealing magnetic fluid and the transmission device is adopted, so that the structure is simple and the cost is saved.
3. The feeding mode of the vibration device in the prior art is changed, the transmission device is utilized to drive the quartz glass tube with a certain inclination angle, the inner wall of the quartz glass tube is provided with a spiral or groove rib to push materials, the thermal field environment in the single crystal furnace is prevented from being influenced, and the quality of single crystal products is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:
FIG. 1 is a cross-sectional view of a single crystal furnace charging apparatus;
FIG. 2 is a schematic structural view of a charging device of a single crystal furnace
Reference numerals illustrate:
1-silicon material; 2-a cover; 3-a charging vessel; 4-PVC ball valve; 5-vertical bellows; 6-a telescopic nonmetallic tube; 7-a non-metal sleeve; 8-a vacuum gate valve; 9-a transmission; 10-an electric motor; 11-connecting pipes; 12-a linear module; 13-supporting frames; 14-bidirectionally sealing magnetic fluid; 15 transverse bellows; 16-quartz glass tube; 17-connecting elbow; 18-a furnace body; 19-cylinder
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art in a specific case.
The invention will be described in detail below with reference to the drawings in connection with embodiments.
As shown in fig. 1 and 2, the invention comprises a charging unit, a feeding unit and a power unit, wherein the charging unit is connected with the feeding unit through a vertical corrugated pipe 5, the feeding unit is in sealing connection with a furnace body 18, a telescopic nonmetal pipe 6 is arranged in the vertical corrugated pipe 5, the feeding unit comprises a vacuum gate valve 8, a connecting pipe 11, a connecting elbow 17, a bidirectional sealing magnetic fluid 14, a transmission device 9, a transverse corrugated pipe 15, a quartz glass pipe 16 and a linear module 12, the upper end of the vacuum gate valve 8 is connected with the vertical corrugated pipe 5, the lower end of the vacuum gate valve passes through the top opening of the connecting pipe 11 and then is connected with the connecting elbow 17 positioned in the connecting pipe 11, and a nonmetal sleeve 7 capable of moving up and down is arranged in the vacuum gate valve 8. The left end of the connecting pipe 11 is a sealing end, and the right end is provided with an opening for connecting the connecting elbow 17 with the quartz glass pipe 16; one end of the bidirectional sealing magnetic fluid 14 is connected with the right end of the connecting pipe 11, the other end of the bidirectional sealing magnetic fluid is connected with the left end of the transverse bellows 15, and the right end of the transverse bellows 15 is connected with the furnace body 18 in a sealing manner; the linear module 12 is connected with the two-way sealing magnetic fluid 14, and the top end of the base is fixed on the furnace body 18.
The quartz glass tube 16 is obliquely arranged relative to the horizontal direction, one end of the quartz glass tube 16 is positioned in the right end of the transverse corrugated tube 15, and the other end of the quartz glass tube sequentially passes through the interior of the transverse corrugated tube 15 and the interior of the bidirectional sealing magnetic fluid 14 and then is connected with the connecting elbow 17, and the inner wall of the quartz glass tube 16 is a spiral surface or a groove rib surface. The transmission device 9 penetrates through the bidirectional sealing magnetic fluid 14 and is in transmission connection with the quartz glass tube 16.
The power unit comprises a motor 10 and a cylinder 19, wherein the motor 10 is respectively and electrically connected with the transmission device 9 and the linear module 12. The cylinder 19 is electrically connected to the vacuum gate valve 8.
The working process of the invention comprises the following steps: in the non-working state, the whole feeding unit is kept in a vacuum state, the vacuum gate valve 8 is in a closed state, the non-metal sleeve 7 is in an upper position, and the quartz glass tube 16 is positioned outside the furnace body 18. When the furnace body 18 needs to be charged, the motor 10 controls the linear module 12 to push towards the furnace body 18, the bidirectional sealing magnetic fluid 14 connected with the linear module drives the quartz glass tube 16 to push towards the furnace body 18, the transverse corrugated tube 15 is extruded to shrink, and one end of the quartz glass tube 16 penetrates out of the transverse corrugated tube 15 and enters a proper position in the furnace body. The worker connects the vertical corrugated pipe 5 with the charging unit, opens the vacuum gate valve 8 after vacuumizing in the charging unit, and controls the cylinder 19 to move the nonmetallic sleeve 7 which can move up and down to the lower position, and opens the charging unit, so that the silicon material 1 finally falls into the quartz glass tube after passing through the telescopic nonmetallic tube 6, the nonmetallic sleeve 7 and the connecting elbow 17 due to a certain inclination angle of the quartz glass tube 16 relative to the horizontal direction. The motor 10 controls the transmission device 9 to drive the quartz glass tube 16 to rotate, the spiral surface or the grooved rib surface of the inner wall of the quartz glass tube 16 can push the silicon material 1 to smoothly enter the furnace body 18, after all the silicon material 1 enters the furnace body 18, the reverse operation of the process is completed, the feeding is stopped, and the furnace body 18 continues to normally work, so that the silicon material in the furnace is supplemented under the condition that the furnace body is not cooled, the energy consumption in the furnace cooling and heating processes is reduced, and the time cost is saved. The transmission device is adopted to drive the quartz glass tube with the rough inner wall to rotate so as to push the material, thereby avoiding the influence on the thermal field environment in the single crystal furnace and improving the product quality.
The charging unit comprises a charging container 3 and a supporting frame 13, which are connected to each other. The top opening of the charging container 3 is provided with a cover 2, the bottom opening of the charging container 3 is provided with a PVC ball valve 4, and the PVC ball valve 4 is connected with a vertical bellows 5. The charging container 3 is of a funnel-shaped structure, and a nylon coating is attached to the inner surface of the charging container, so that silicon materials are prevented from being polluted by metal.
The number of the supporting frames 13 is at least two, a fixing mechanism or a sliding mechanism is arranged at the bottom of the supporting frames 13, and the fixing mechanism is a height-adjustable fixing base, so that the device can be ensured to be applicable to furnace bodies with different heights. The sliding mechanism comprises a sliding module and a locking device, wherein the sliding module is a pulley or a sliding rail, and equipment is convenient to move and place.
The nonmetal sleeve 7 and the connecting elbow 17 are both made of nylon, so that the silicon material is ensured not to be polluted by metal in the process of throwing.
The sealing end of the connecting pipe 11 is provided with a visual window, so that real-time observation in the feeding process is facilitated.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.
Claims (10)
1. The utility model provides a single crystal growing furnace feeding device, includes charging unit, feeding unit and power unit, the charging unit pass through perpendicular bellows (5) with the feeding unit links to each other, feeding unit and furnace body (18) sealing connection, its characterized in that: the vertical corrugated pipe (5) is internally provided with a telescopic nonmetal pipe (6), the feeding unit comprises a vacuum gate valve (8), a connecting pipe (11), a connecting elbow (17), a bidirectional sealing magnetic fluid (14), a transmission device (9), a transverse corrugated pipe (15), a quartz glass pipe (16) and a linear module (12), the upper end of the vacuum gate valve (8) is connected with the vertical corrugated pipe (5), the lower end of the vacuum gate valve passes through the top opening of the connecting pipe (11) and then is connected with the connecting elbow (17) positioned in the connecting pipe (11), and a nonmetal sleeve (7) capable of moving up and down is arranged in the vacuum gate valve (8); the left end of the connecting pipe (11) is a sealing end, and the right end of the connecting pipe is provided with an opening for connecting the connecting elbow (17) with the quartz glass pipe (16); one end of the bidirectional sealing magnetic fluid (14) is connected with the right end of the connecting pipe (11), the other end of the bidirectional sealing magnetic fluid is connected with the left end of the transverse bellows (15), and the right end of the transverse bellows (15) is connected with the furnace body (18) in a sealing way; the linear module (12) is connected with the bidirectional sealing magnetic fluid (14), and the top end of the base is fixed on the furnace body (18);
the quartz glass tube (16) is obliquely arranged relative to the horizontal direction, one end of the quartz glass tube is positioned in the right end of the transverse corrugated tube (15), the other end of the quartz glass tube sequentially penetrates through the interior of the transverse corrugated tube (15) and the interior of the bidirectional sealing magnetic fluid (14) and then is connected with the connecting elbow (17), and the inner wall of the quartz glass tube (16) is a spiral surface or a groove rib surface; the transmission device (9) penetrates through the bidirectional sealing magnetic fluid (14) and is in transmission connection with the quartz glass tube (16).
2. The single crystal furnace charging apparatus of claim 1, wherein: the power unit comprises a motor (10) and a cylinder (19), and the motor (10) is electrically connected with the transmission device (9) and the linear module (12) respectively; the cylinder (19) is electrically connected with the vacuum gate valve (8) and can control the nonmetal sleeve (7) in the vacuum gate valve (8) to move up and down.
3. The single crystal furnace charging apparatus according to claim 1 or 2, wherein: the charging unit comprises a charging container (3) and a supporting frame (13) which are connected with each other; the PVC ball valve is characterized in that a cover (2) is arranged at the top opening of the charging container (3), a PVC ball valve (4) is arranged at the bottom opening of the charging container (3), and the PVC ball valve (4) is connected with the vertical bellows (5).
4. A single crystal furnace charging apparatus according to claim 3, wherein: the charging container (3) is of a funnel-shaped structure, and a nylon coating is attached to the inner surface of the charging container.
5. The single crystal furnace charging apparatus of claim 4, wherein: the number of the supporting frames (13) is at least two, and a fixing mechanism or a sliding mechanism is arranged at the bottom of the supporting frames (13).
6. The single crystal furnace charging apparatus of claim 5, wherein: the fixing mechanism is a height-adjustable fixing base.
7. The single crystal furnace charging apparatus of claim 5, wherein: the sliding mechanism comprises a sliding module and a locking device, and the sliding module is a pulley or a sliding rail.
8. The single crystal furnace charging apparatus of claim 5, wherein: the quartz glass tube (16) is inclined at an angle of 10-90 DEG with respect to the horizontal direction.
9. The single crystal furnace charging apparatus of claim 8, wherein: the nonmetallic sleeve (7) and the connecting elbow (17) are both made of nylon materials.
10. The single crystal furnace charging apparatus of claim 9, wherein: the sealing end of the connecting pipe (11) is provided with a visual window.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210245069.5A CN114411241B (en) | 2022-03-11 | 2022-03-11 | Single crystal furnace feeding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210245069.5A CN114411241B (en) | 2022-03-11 | 2022-03-11 | Single crystal furnace feeding device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114411241A CN114411241A (en) | 2022-04-29 |
| CN114411241B true CN114411241B (en) | 2023-12-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210245069.5A Active CN114411241B (en) | 2022-03-11 | 2022-03-11 | Single crystal furnace feeding device |
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| Country | Link |
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| CN (1) | CN114411241B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102677156A (en) * | 2012-06-11 | 2012-09-19 | 曾泽斌 | Massive polycrystalline silicon charging device for Czochralski silicon single crystal furnace |
| CN202671709U (en) * | 2012-06-11 | 2013-01-16 | 曾泽斌 | Chunk polysilicon feeding device for Czochralski silicon single crystal furnace |
| CN109183140A (en) * | 2018-11-16 | 2019-01-11 | 江苏协鑫软控设备科技发展有限公司 | Single crystal growing furnace and its continuous feeding |
| CN109440184A (en) * | 2018-12-19 | 2019-03-08 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace continuous dosing conveying mechanism |
| CN113046823A (en) * | 2021-02-07 | 2021-06-29 | 宇泽半导体(云南)有限公司 | Single crystal feeding method |
| CN214881924U (en) * | 2021-02-23 | 2021-11-26 | 天津环博科技有限责任公司 | External feeding machine device of single crystal furnace |
| CN215163311U (en) * | 2021-02-07 | 2021-12-14 | 宇泽半导体(云南)有限公司 | Single crystal feeding device |
| CN217026135U (en) * | 2022-03-11 | 2022-07-22 | 浙江精功科技股份有限公司 | Single crystal furnace feeding device |
-
2022
- 2022-03-11 CN CN202210245069.5A patent/CN114411241B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102677156A (en) * | 2012-06-11 | 2012-09-19 | 曾泽斌 | Massive polycrystalline silicon charging device for Czochralski silicon single crystal furnace |
| CN202671709U (en) * | 2012-06-11 | 2013-01-16 | 曾泽斌 | Chunk polysilicon feeding device for Czochralski silicon single crystal furnace |
| CN109183140A (en) * | 2018-11-16 | 2019-01-11 | 江苏协鑫软控设备科技发展有限公司 | Single crystal growing furnace and its continuous feeding |
| CN109440184A (en) * | 2018-12-19 | 2019-03-08 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace continuous dosing conveying mechanism |
| CN113046823A (en) * | 2021-02-07 | 2021-06-29 | 宇泽半导体(云南)有限公司 | Single crystal feeding method |
| CN215163311U (en) * | 2021-02-07 | 2021-12-14 | 宇泽半导体(云南)有限公司 | Single crystal feeding device |
| CN214881924U (en) * | 2021-02-23 | 2021-11-26 | 天津环博科技有限责任公司 | External feeding machine device of single crystal furnace |
| CN217026135U (en) * | 2022-03-11 | 2022-07-22 | 浙江精功科技股份有限公司 | Single crystal furnace feeding device |
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