CN207227586U - Single crystal growing furnace liftable pair furnace chamber bellows extension mechanism - Google Patents
Single crystal growing furnace liftable pair furnace chamber bellows extension mechanism Download PDFInfo
- Publication number
- CN207227586U CN207227586U CN201721018810.5U CN201721018810U CN207227586U CN 207227586 U CN207227586 U CN 207227586U CN 201721018810 U CN201721018810 U CN 201721018810U CN 207227586 U CN207227586 U CN 207227586U
- Authority
- CN
- China
- Prior art keywords
- lifting
- screw
- single crystal
- furnace chamber
- bellows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
It the utility model is related to silicon single crystal manufacturing apparatus, it is desirable to provide a kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism.This kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism includes horizontal adjustment frames, motor, bellows, screw, feed screw nut, optical axis, linear bearing, lifting upper plate, fixed plate and lifting lower plate, among secondary furnace chamber and lifting head.Original horizontal adjustment is replaced using the utility model, crystal pulling position remains unchanged, and whole lifting head is just lifted after the completion of crystal pulling, without changing flexible shaft steel wire rope length degree.
Description
Technical field
The utility model is prolonged on silicon single crystal manufacturing apparatus field, more particularly to single crystal growing furnace liftable pair furnace chamber bellows
Stretch mechanism.
Background technology
Photovoltaic industry is one of sub-industry with fastest developing speed in New Energy Industry.The development of whole New Energy Industry comes from biography
The continuous consumption of industry of uniting and its price it is continuous high, and the mankind are to the continuous of greenhouse effects and environmental change attention degree
Deepen.The whole world all constantly puts into manpower and materials to can develop New Energy Industry, places hope on various reproducible, environmentally friendly new
The energy basis of energy remodeling human social development, maintains sustainable development.In various new energy solutions, photovoltaic industry hair
Speed is opened up far faster than other conventional industries.
Efficiently with it is energy saving be the important development trend of equipment, meet China's style of economic increase from extensive style to intensive style turn
The target of change.Wherein efficiently comprising two aspect implication, improve production efficiency and improve yield rate, using monocrystalline silicon growing furnace as
Example, improve production efficiency mainly can realize that increase inventory can pull out more by increasing inventory and improving long brilliant speed
Long crystal bar, routinely needs to draw long crystal bar and just extends secondary furnace chamber length, but to its lifting head flexible axle after secondary furnace chamber extended height
Rock in the presence of influence, the lifting head rotating speed of equipment crystal growing technology can be made to be intended near resonant belt, crystal can be made to rock and break rib,
Crystal pulling yield rate is impacted.
Energy saving mainly to reduce production cost, technique has more an of stove at present, reduces the production costs such as silica crucible.Due to for
Raising production capacity and energy consumption is reduced, the technique for generally using more an of stove now, such as 26 inches of silica crucibles can feed
300kg, but due to being taken rod crystal bar can only be in 200kg, if increase pair stove simply by secondary furnace chamber height limitation, 8 inches of isolation
Room length, lifting head relative position is higher, and flexible axle, which rotates, to be occurred and rocks larger phenomenon, it is meant that crystal pulling rotating speed already close to
Resonance zone.How production capacity can be improved and in place of its stability is exactly the bright spot of the utility model.
Under such a background, a kind of single crystal growing furnace liftable that can guarantee that stabilization of equipment performance and can fully lift production capacity is proposed
Secondary furnace chamber bellows extension mechanism, market prospects are had an optimistic view of.
Utility model content
The main purpose of the utility model is that overcome deficiency of the prior art, there is provided one kind both can guarantee that equipment was stablized
Property and it can fully lift the single crystal growing furnace liftable pair furnace chamber bellows extension mechanism of production capacity.In order to solve the above technical problems, this reality
It is with new solution：
A kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism is provided, in secondary furnace chamber and lifting head
Between, the single crystal growing furnace liftable pair furnace chamber bellows extension mechanism includes horizontal adjustment frames, motor, bellows, screw, screw
Nut, optical axis, linear bearing, lifting upper plate, fixed plate and lifting lower plate；
The fixed plate is installed on secondary furnace chamber upper flange, and feed screw nut, linear bearing are separately mounted in fixed plate, silk
Bar, optical axis are respectively provided with two, and two screws are connected using feed screw nut and fixed plate installation, two optical axises using linear bearing with
Fixed plate installation connection；Upper end, the upper end of optical axis of the lifting upper plate and screw are fixedly mounted, and the motor is equipped with two,
It is separately mounted on lifting upper plate, and two motors are connected with corresponding screw respectively, lifting upper plate can utilize two motors same
When drive screw move realize lift；The lower end of the lifting lower plate and screw, the lower end of optical axis are fixedly mounted, lifting
Lower plate is used to screw and optical axis are positioned and fixed；
The horizontal adjustment frames include support column, support base, adjusting screw, on lifting upper plate；Support base leads to
Cross adjusting screw and at least two support columns are installed, (several) support column is installed on lifting upper plate, and can be by adjusting screw
To realize the upper planar horizontal of support base；
Described bellows one end is installed in fixed plate, and the other end is installed on the lower flange of horizontal adjustment frames, is used for
Carry out sealing linking；
The motor also meets formula：F=△ p × π r2、Wη≥(F+G)×v；
Wherein, W is the power of motor, and η is transformation efficiency, and F is the suction that pressure differential produces, and △ p are single crystal growing furnace when being lifted
External and internal pressure is poor, and r is bellows internal bore radius, and G is lifting self gravitation, and v is lifting speed.
As a further improvement, the internal diameter of the bellows is bigger 60mm than the diameter of crystal bar (can be according to the type of furnace and crystal bar
Size selects ripple pipe size, general inside diameter of bel=crystal bar size+60mm).
As a further improvement, the motor uses AC servo motor (can carry out speed governing and feedback position signal).
The operation principle of the utility model：Secondary furnace chamber bellows extension mechanism operation principle is lifted with crucible of single crystal furnace system
Structure, crucible system control bushing position height by bellows compression stretching, and secondary furnace chamber bellows extension mechanism, passes through ripple
The leakproofness and ductility of line pipe carry out pulling down grease head highness, to meet that secondary furnace chamber can accommodate the suitable length of crystal bar.
Compared with prior art, the beneficial effects of the utility model are：
Existing equipment will increase isolation and take rod length, it is necessary to the secondary furnace chamber extension of increase, but corresponding flexible shaft steel wire rope
Stroke needs corresponding increase；And original horizontal adjustment is replaced using the utility model, crystal pulling position remains unchanged, and crystal pulling is completed
Whole lifting head is just lifted afterwards, without changing flexible shaft steel wire rope length degree.
Brief description of the drawings
Fig. 1 is the structure diagram of the utility model.
Fig. 2 is the utility model and rarely has the use comparison diagram using the equipment of horizontal adjustment.
Reference numeral in figure is：1 horizontal adjustment frames；2 motors；3 lifting upper plates；4 bellowss；5 screws and screw spiral shell
It is female；6 fixed plates；7 optical axises and linear bearing；8 lifting lower plates；9 lifting heads；10 horizontal adjustments；11 secondary furnace chambers；12 crystal bars；13 every
From valve；14 single crystal growing furnace liftable pair furnace chamber bellows extension mechanisms.
Embodiment
The utility model is described in further detail with embodiment below in conjunction with the accompanying drawings：
A kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism 14 as shown in Figure 1 includes horizontal adjustment frames 1, electricity
Machine 2, bellows 4, screw, feed screw nut, optical axis, linear bearing, lifting upper plate 3, fixed plate 6, lifting lower plate 8, can pass in original
Transformation use is carried out in the single crystal furnace equipment of system, original horizontal adjustment 10 is substituted and is installed among secondary furnace chamber 11 and lifting head 9,
Highly it is in after compression under unanimous circumstances, crystal pulling resonance region is unchanged.
The feed screw nut, linear bearing are separately mounted in fixed plate 6, and screw, optical axis are respectively provided with two, and profit respectively
Installed and connected with feed screw nut, linear bearing and fixed plate 6.The lifting upper plate 3 and lifting lower plate 8 are consolidated by screw and optical axis
Dingan County fills；The motor 2 is equipped with two, is separately mounted on lifting upper plate 3, and two motors 2 connect with corresponding screw respectively
Connect, lifting upper plate 3 can drive screw to be moved to realize lifting at the same time using two motors 2；Lower plate 8 is lifted to be used for screw
Positioned and fixed with optical axis, ensure its stability.Its main installation steps is installed on admittedly for feed screw nut and linear bearing
It is fixed on again after on fixed board 6 on secondary 11 upper flange of furnace chamber, good lifting upper plate 3 and lifting lower plate is fixedly mounted by screw and optical axis
8。
The motor 2 also meets formula：F=△ p × π r2、Wη≥(F+G)×v；
Wherein, W is the power of motor 2, and η is transformation efficiency, and F is the suction that pressure differential produces, and △ p are single crystal growing furnace when being lifted
External and internal pressure is poor, and r is bellows internal bore radius, and G is lifting self gravitation, and v is lifting speed.
The horizontal adjustment frames 1 include support column, support base, adjusting screw；Horizontal adjustment frames 1 pass through several supports
Column is installed on lifting upper plate 3, and support base can ensure planar horizontal on frame by adjusting screw thread.
Described 4 one end of bellows is installed in fixed plate 6, and the other end is installed on 1 lower flange of horizontal adjustment frames, plays close
Seal the effect of linking.Ripple pipe size can be selected according to the type of furnace and 12 size of crystal bar.
Whole mechanism height is controlled by motor 2, compression as raw water Heibei provincial opera it is whole it is highly consistent in the case of drawn
Crystalline substance production, ensures its stability；After the material in single crystal growing furnace silica crucible all pulls at present, motor 2 controls its rising, and isolation is brilliant
Rod 12.
Tested according to Magdeburg hemispheres, the power that motor 2 is lifted have to be larger than the suction and the gravity of itself of pressure differential generation.
F=△ p × π r2
Wη≥(F+G)×v；
Wherein W is the power of motor 2, and η is transformation efficiency, and F is the suction that pressure differential produces, and △ p are single crystal growing furnace when being lifted
External and internal pressure is poor, and r is bellows internal bore radius, and G is lifting self gravitation, and v represents lifting speed.
Suitable speed and power of motor are chosen according to result of calculation, and motor 2 uses two AC servo motors at the same time
Screw is controlled to rotate, to ensure to lift the level of upper plate 3.
This kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism 14, different from conventional secondary furnace chamber extension, upgrading
After need not increase by 9 flexible shaft steel wire rope length degree of lifting head.Screw length, bellows stroke, can carry out according to isolation crystal length
Selection；And under the premise of screw and optical axis are sufficiently long, required bar can be reached by increasing the liftable stroke of bellows
Part.
As shown in Fig. 2, by this kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism 14, can be in crystal pulling in pressure
Contracting bellows low level, isolation take during crystal bar 12, it is necessary to extend bellows 4 to sufficient length close isolating valve 13, that is, can guarantee that drawing
Brilliant stability, and isolation can be increased and take rod length and improving production efficiency.If by this kind of single crystal growing furnace liftable pair furnace chamber bellows
Extension mechanism 14 is substituted for the horizontal adjustment 10 of conventional single stove, is installed between lifting head 9 and secondary furnace chamber 11, for crystal bar one
More techniques of stove, before crystal bar 12 need the length isolated to depend on the height of secondary furnace chamber 11, it is necessary to the lower end of finishing up of crystal bar 12 exists
It could isolate above 13 flap valve movement locus of isolating valve and take rod.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new
Type is not limited to above example, can also there is many variations.Those of ordinary skill in the art can be from disclosed in the utility model
All deformations for directly exporting or associating in content, are considered as the scope of protection of the utility model.
Claims (3)
- A kind of 1. single crystal growing furnace liftable pair furnace chamber bellows extension mechanism, among secondary furnace chamber and lifting head, it to be special Sign is, the single crystal growing furnace liftable pair furnace chamber bellows extension mechanism include horizontal adjustment frames, motor, bellows, screw, Feed screw nut, optical axis, linear bearing, lifting upper plate, fixed plate and lifting lower plate；The fixed plate is installed on secondary furnace chamber upper flange, and feed screw nut, linear bearing are separately mounted in fixed plate, screw, Optical axis is respectively provided with two, and two screws utilize feed screw nut and fixed plate installation to connect, and two optical axises are using linear bearing and admittedly Fixed board installation connection；Upper end, the upper end of optical axis of the lifting upper plate and screw are fixedly mounted, and the motor is equipped with two, point It An Zhuan not lifted on upper plate, and two motors are connected with corresponding screw respectively, lifting upper plate can utilize two motors at the same time Screw is driven to be moved to realize lifting；The lower end of the lifting lower plate and screw, the lower end of optical axis are fixedly mounted, under lifting Plate is used to screw and optical axis are positioned and fixed；The horizontal adjustment frames include support column, support base, adjusting screw, on lifting upper plate；Support base passes through tune Whole screw is provided with least two support columns, and support column is installed on lifting upper plate, and can be supported by adjusting screw to realize The upper planar horizontal of seat；Described bellows one end is installed in fixed plate, and the other end is installed on the lower flange of horizontal adjustment frames, for carrying out Sealing linking；The motor also meets formula：F=△ p × π r2、Wη≥(F+G)×v；Wherein, W is the power of motor, and η is transformation efficiency, and F is the suction that pressure differential produces, when △ p is lift inside and outside single crystal growing furnace Pressure differential, r are bellows internal bore radius, and G is lifting self gravitation, and v is lifting speed.
- 2. a kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism according to claim 1, it is characterised in that described The internal diameter of bellows is bigger 60mm than the diameter of crystal bar.
- 3. a kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism according to claim 1, it is characterised in that described Motor uses AC servo motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721018810.5U CN207227586U (en) | 2017-08-15 | 2017-08-15 | Single crystal growing furnace liftable pair furnace chamber bellows extension mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721018810.5U CN207227586U (en) | 2017-08-15 | 2017-08-15 | Single crystal growing furnace liftable pair furnace chamber bellows extension mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207227586U true CN207227586U (en) | 2018-04-13 |
Family
ID=61858081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721018810.5U Withdrawn - After Issue CN207227586U (en) | 2017-08-15 | 2017-08-15 | Single crystal growing furnace liftable pair furnace chamber bellows extension mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207227586U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107354504A (en) * | 2017-08-15 | 2017-11-17 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism |
| CN114318532A (en) * | 2022-02-14 | 2022-04-12 | 浙江精功科技股份有限公司 | Leveling mechanism and leveling method for auxiliary furnace chamber of single crystal furnace |
-
2017
- 2017-08-15 CN CN201721018810.5U patent/CN207227586U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107354504A (en) * | 2017-08-15 | 2017-11-17 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism |
| CN107354504B (en) * | 2017-08-15 | 2023-07-28 | 浙江晶盛机电股份有限公司 | Lifting auxiliary furnace chamber corrugated pipe extension mechanism of single crystal furnace |
| CN114318532A (en) * | 2022-02-14 | 2022-04-12 | 浙江精功科技股份有限公司 | Leveling mechanism and leveling method for auxiliary furnace chamber of single crystal furnace |
| CN114318532B (en) * | 2022-02-14 | 2024-01-23 | 浙江精工集成科技股份有限公司 | Auxiliary furnace chamber leveling mechanism and leveling method for single crystal furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201918930U (en) | Concentrated photovoltaic automatic solar tracking power generating device capable of realizing point tracking at highest power | |
| CN207227586U (en) | Single crystal growing furnace liftable pair furnace chamber bellows extension mechanism | |
| CN102443845B (en) | Equipment for continuously producing single crystal | |
| CN201532963U (en) | Frame combining and angle device for solar battery assembly | |
| CN205356057U (en) | Energy -saving electrical machine | |
| CN107354504A (en) | A kind of single crystal growing furnace liftable pair furnace chamber bellows extension mechanism | |
| CN209114034U (en) | A kind of heat shield for single crystal furnace lifting device | |
| CN205218108U (en) | High efficiency rocking arm formula drilling machine | |
| CN206134154U (en) | Energy -conserving formula electronic screen of LED | |
| CN205893220U (en) | Rice steamer equipment in intelligence | |
| CN205209238U (en) | Aluminum melting furnace | |
| CN202450184U (en) | Device for continuous production of single crystals | |
| CN209528637U (en) | A kind of office appliance show stand | |
| CN203534191U (en) | Mechanism for lifting and overturning furnace cover of reacting furnace | |
| CN204816699U (en) | Adopt directly upright mill of formula of driving of synchronous variable frequency motor driven of permanent magnetism | |
| CN207514754U (en) | Led street lamp | |
| CN103418473A (en) | Left-and-right-swing-type block material automatic crushing device | |
| CN220250701U (en) | Cement kiln body waste heat recovery conversion device | |
| CN206843442U (en) | A kind of rotary lifting-type fermentation tank | |
| CN206811673U (en) | A kind of cast aluminium piston automatic polishing device | |
| CN202297847U (en) | Rotating mechanism for sealing valve plate of single crystal furnace | |
| CN206854859U (en) | A kind of dead axle cylinder machining tool | |
| CN206143747U (en) | Rice growth intelligence festival water control device | |
| CN208667894U (en) | Lifting device is led in a kind of water cooling | |
| CN204804782U (en) | Energy -saving beam -pumping unit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20180413 Effective date of abandoning: 20230728 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20180413 Effective date of abandoning: 20230728 |