CN114318532B - Auxiliary furnace chamber leveling mechanism and leveling method for single crystal furnace - Google Patents
Auxiliary furnace chamber leveling mechanism and leveling method for single crystal furnace Download PDFInfo
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- CN114318532B CN114318532B CN202210131827.0A CN202210131827A CN114318532B CN 114318532 B CN114318532 B CN 114318532B CN 202210131827 A CN202210131827 A CN 202210131827A CN 114318532 B CN114318532 B CN 114318532B
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- 239000013078 crystal Substances 0.000 title claims abstract description 29
- 230000007246 mechanism Effects 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000012544 monitoring process Methods 0.000 claims abstract description 28
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 13
- 230000008569 process Effects 0.000 claims abstract description 6
- 238000004891 communication Methods 0.000 claims description 11
- 230000003044 adaptive effect Effects 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000012937 correction Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Abstract
The invention relates to a leveling mechanism and a leveling method for an auxiliary furnace chamber of a single crystal furnace, wherein the leveling mechanism comprises a fixed part, a horizontal monitoring part, a control part and a self-adaptive leveling part. The auxiliary furnace chamber moves up and down to incline, the horizontal monitoring component monitors the inclination angle and compares the inclination angle with zero position, and the result is fed back to the control component. After the control part collects the signals sent by the level monitoring part, the control part processes and generates control data, and sends control instructions to the self-adaptive leveling part. In the self-adaptive leveling component, the motor generates driving force after receiving a control instruction, the motor drives the screw rod to rotate after being decelerated by the speed reducer, and the screw rod drives the tension arm fixed with the screw rod nut to move back and forth along the linear guide rail, so that the connecting block at the upper end of the auxiliary furnace chamber is driven to move along with the tension arm, and the inclination of the auxiliary furnace chamber is corrected. The invention has simple operation and less time consumption, can monitor the inclination amplitude of the auxiliary furnace chamber in real time under the working state and quickly carry out self-adaptive adjustment, and effectively ensures the flange surface level of the auxiliary furnace chamber under each stage and each working state.
Description
Technical Field
The invention belongs to the technical field of single crystal furnace components, and particularly relates to a leveling mechanism and a leveling method for a secondary furnace chamber of a single crystal furnace.
Background
The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas environment by melting polycrystalline materials such as polysilicon and the like by using a graphite heater. In the process of debugging and working of the single crystal furnace, the auxiliary furnace chamber is required to be lifted and rotated frequently. In the lifting and rotating process, the auxiliary furnace chamber needs to bear the dead weight and the weight of the crystal bar, so that the auxiliary furnace chamber is inclined, the crystal bar collides with the inner wall of the auxiliary furnace chamber, and the problem of bar falling occurs in severe cases. In addition, crystal bars with different sizes and weights are drawn or the inclination amplitude of the auxiliary furnace chamber is different under different heights, so that the development of a mechanism capable of automatically leveling the auxiliary furnace chamber according to different inclination amplitudes is particularly important.
The existing auxiliary furnace chamber of the single crystal furnace is generally positioned and regulated through screws, such as a corrugated pipe extension mechanism (CN 207227586U) of the lifting auxiliary furnace chamber of the single crystal furnace disclosed in the invention patent of 2018, 4 and 13, and a horizontal regulating frame is disclosed, wherein the horizontal regulating frame comprises a supporting column, a supporting seat, regulating screws and the like, the upper plane level of the supporting seat is realized through the regulating screws, the operation is complicated and long, the inclination amplitude of the auxiliary furnace chamber under one working state can only be adapted, and the inclination of the auxiliary furnace chamber under different working states can not be met.
Disclosure of Invention
In view of the above, the invention aims to provide a leveling mechanism and a leveling method for an auxiliary furnace chamber of a single crystal furnace, which are used for solving the problems that in the prior art, the horizontal adjustment operation of the auxiliary furnace chamber of the single crystal furnace is complicated and long, and the auxiliary furnace chamber in different working states cannot be inclined.
In order to achieve the above purpose, the technical scheme of the invention is realized as follows:
the auxiliary furnace chamber leveling mechanism of the single crystal furnace comprises a fixed part, a horizontal monitoring part, a control part and a self-adaptive leveling part. The fixing component comprises a clamping plate, a lower pin shaft and an upper pin shaft, wherein the lower end connecting block of the auxiliary furnace chamber and the lower end of the lifting swing arm are clamped by the clamping plate, and the lower pin shaft penetrates through a through hole of the clamping plate to be fixed with the lower end connecting block of the auxiliary furnace chamber. The upper end connecting block of the auxiliary furnace chamber is connected with the self-adaptive leveling component through an upper pin shaft. The horizontal monitoring component is positioned on the upper end face of the auxiliary furnace chamber, and the self-adaptive leveling component is positioned on the upper end face of the lifting swing arm.
Further, the self-adaptive leveling component comprises a motor, a speed reducer, a bearing, a screw rod nut, a tension arm, a bearing seat, a linear guide rail, a bottom plate and a guide clamping plate, wherein the motor generates a driving force after receiving an instruction sent by the control component, the motor drives the screw rod to rotate after being decelerated by the speed reducer, and the screw rod drives the tension arm fixed with the screw rod nut to move back and forth along the linear guide rail. The bearing is located the head end of lead screw, the bearing with the lead screw all is located in the bearing frame, the bearing frame with linear guide rail all is fixed in on the bottom plate, the direction splint is located the pulling force arm both sides, just the direction splint centre gripping is in the upper end of lift swing arm.
Further, the upper pin shaft penetrates through the through hole of the tension arm and is connected with the upper end connecting block of the auxiliary furnace chamber.
Further, the control component comprises a control component and a communication component, the communication component receives the signal sent by the level monitoring component and then transmits the signal to the control component, and the control component processes and generates control data and sends a control instruction to the motor through the communication component.
Further, the communication component is a PLC communication module.
Further, the horizontal monitoring component is any one of an inclinometer, a level gauge or an inclination sensor.
The leveling method of the auxiliary furnace chamber leveling mechanism of the single crystal furnace comprises the following steps:
s1: the auxiliary furnace chamber is placed on the main furnace chamber and the isolating valve, the horizontal monitoring component is arranged on the upper end surface of the auxiliary furnace chamber, and zero position is arranged on the horizontal monitoring component after horizontal adjustment;
s2: in the working state, the auxiliary furnace chamber moves up and down to incline; the horizontal monitoring component monitors the inclination angle and compares the inclination angle with a zero position; and feeding back the result to the control part;
s3: after the control part collects the signals sent by the horizontal monitoring part, processing and generating control data, and sending control instructions to the motor, wherein the control instructions comprise steering, rotating speed and rotating time;
s4: the motor generates driving force after receiving the control instruction, the motor drives the screw rod to rotate after being decelerated by the speed reducer, the screw rod drives the tension arm fixed with the screw rod nut to move back and forth along the linear guide rail, the lower end connecting block of the auxiliary furnace chamber is taken as a fulcrum, the upper end connecting block of the auxiliary furnace chamber is driven to move along with the tension arm, the inclination of the auxiliary furnace chamber is corrected, and the auxiliary furnace chamber leveling is realized.
The beneficial effects of the invention are as follows: the operation is simple and time-consuming, the actual inclination amplitude of the auxiliary furnace chamber in the working state can be monitored in real time, the self-adaptive adjustment can be performed quickly, and the flange surface level of the auxiliary furnace chamber in each stage and each working state can be effectively ensured.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:
FIG. 1 is a front view of a single crystal furnace secondary furnace chamber leveling mechanism;
FIG. 2 is a schematic structural view of an adaptive leveling component in a secondary furnace chamber leveling mechanism of a single crystal furnace;
FIG. 3 is a schematic diagram of the self-adaptive leveling process of the auxiliary furnace chamber leveling mechanism of the single crystal furnace
Reference numerals illustrate:
1-a motor; 2-a speed reducer; 3-bearing; 4-a screw rod; 5-a screw nut; 6-a tension arm; 7-bearing seats; 8-linear guide rails; 9-a bottom plate; 10-guiding clamping plates; 11-lifting swing arms; 12-auxiliary furnace chamber; 13-a lower pin shaft; 14-clamping plates; 15-upper pin shafts; 16-level monitoring component
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art in a specific case.
The invention will be described in detail below with reference to the drawings in connection with embodiments.
As shown in fig. 1, the auxiliary furnace chamber leveling mechanism of the single crystal furnace comprises a fixing component, a horizontal monitoring component 16, a control component and an adaptive leveling component, wherein the fixing component comprises a clamping plate 14, a lower pin shaft 13 and an upper pin shaft 15, a connecting block at the lower end of the auxiliary furnace chamber 12 and the lower end of a lifting swing arm 11 are clamped by the clamping plate 14, and the lower pin shaft 13 penetrates through a through hole of the clamping plate 14 to be fixed with a connecting block at the lower end of the auxiliary furnace chamber 12; the upper connecting block of the auxiliary furnace chamber 12 is connected with the self-adaptive leveling component through an upper pin shaft 15. The horizontal monitoring part 16 is positioned on the upper end surface of the auxiliary furnace chamber 12, and the self-adaptive leveling part is positioned on the upper end surface of the lifting swing arm 11.
As shown in fig. 1 and 2, the self-adaptive leveling component comprises a motor 1, a speed reducer 2, a bearing 3, a screw rod 4, a screw rod nut 5, a tension arm 6, a bearing seat 7, a linear guide rail 8, a bottom plate 9 and a guide clamping plate 10; the motor 1 generates driving force after receiving an instruction sent by the control component, the driving force is reduced by the speed reducer 2 and drives the screw rod 4 to rotate, and the screw rod 4 drives the tension arm 6 fixed with the screw rod nut 5 to move back and forth along the linear guide rail 8; the bearing 3 is located the head end of lead screw 4, the bearing 3 with lead screw 4 all is located in the bearing frame 7, the bearing frame 7 with linear guide 8 all is fixed in on the bottom plate 9, the direction splint 10 is located pulling force arm 6 both sides, and the centre gripping is in the upper end of lift swing arm 11.
The invention relates to a leveling method of a leveling mechanism of a secondary furnace chamber of a single crystal furnace, which comprises the following steps:
s1: the auxiliary furnace chamber 12 is placed on the main furnace chamber and the isolating valve, the horizontal monitoring component 16 is arranged on the upper end surface of the auxiliary furnace chamber 12, and after horizontal adjustment, the horizontal monitoring component 16 is positioned at a zero position;
s2: in the working state, the auxiliary furnace chamber 12 moves up and down to incline; the level monitoring component 16 monitors the angle of inclination and compares it with the zero position; and feeding back the result to the control part;
s3: after the control part collects the signals sent by the level monitoring part 16, processing and generating control data, and sending control instructions to the motor 1, wherein the control instructions comprise steering, rotating speed and rotating time;
s4: the motor 1 receives a control instruction and then generates driving force, the motor is decelerated by the speed reducer 2 and then drives the screw rod 4 to rotate, the screw rod 4 drives the tension arm 6 fixed with the screw rod nut 5 to move back and forth along the linear guide rail 8, the purpose of taking a connecting block at the lower end of the auxiliary furnace chamber 12 as a fulcrum is achieved, the connecting block at the upper end of the auxiliary furnace chamber 12 is driven to move along with the tension arm 6, the inclination of the auxiliary furnace chamber 12 is corrected, and the auxiliary furnace chamber 12 is leveled.
Implementation example 1: when the auxiliary furnace chamber is lifted in the state of bearing the crystal bar
As shown in fig. 3, the auxiliary furnace chamber 12 is inclined outward (i.e., the F side in fig. 3) under the load of the dead weight and the ingot weight due to the structural rigidity, the bearing clearance, and the like; the horizontal monitoring part 16 detects the angle change and feeds the angle change back to the control part; the control part outputs a correction instruction to the motor 1, at the moment, the motor 1 rotates positively, the screw rod 4 is driven to rotate clockwise after being decelerated by the speed reducer 2, the tension arm 6 is pulled to move inwards, the lower end connecting block of the auxiliary furnace chamber 12 is taken as a fulcrum, and the tension arm 6 drives the upper end connecting block of the auxiliary furnace chamber 12 to approach the motor side, so that the inclination angle is corrected. Leveling of the auxiliary furnace chamber is achieved, and the vertical state of the auxiliary furnace chamber, namely the O position of fig. 3, is guaranteed.
Implementation example 2: when the auxiliary chamber descends in the idle state after taking the rod:
as shown in fig. 3, the auxiliary furnace chamber 12 is inclined to the inner side (i.e., the side B in fig. 3) after rod taking is completed, and the horizontal monitoring part 16 detects the angle change and feeds back the angle change to the control part; the control part outputs a correction instruction to the motor 1, at the moment, the motor 1 is reversely rotated, the screw rod 4 is driven to anticlockwise rotate after being decelerated by the speed reducer 2, the tension arm 6 is pulled to move outwards, the lower end connecting block of the auxiliary furnace chamber 12 is taken as a fulcrum, and the tension arm 6 drives the upper end connecting block of the auxiliary furnace chamber 12 to be far away from the motor side, so that the inclination angle is corrected. Leveling of the auxiliary furnace chamber is achieved, and the vertical state of the auxiliary furnace chamber, namely the O position of fig. 3, is guaranteed.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.
Claims (6)
1. A leveling mechanism for an auxiliary furnace chamber of a single crystal furnace is characterized in that: comprises a fixed component, a horizontal monitoring component (16), a control component and an adaptive leveling component;
the fixing component comprises a clamping plate (14), a lower pin shaft (13) and an upper pin shaft (15), wherein the lower end connecting block of the auxiliary furnace chamber (12) and the lower end of the lifting swing arm (11) are clamped by the clamping plate (14), and the lower pin shaft (13) penetrates through a through hole of the clamping plate (14) to be fixed with the lower end connecting block of the auxiliary furnace chamber (12); the upper end connecting block of the auxiliary furnace chamber (12) is connected with the self-adaptive leveling component through an upper pin shaft (15);
the horizontal monitoring component (16) is positioned on the upper end surface of the auxiliary furnace chamber (12), and the self-adaptive leveling component is positioned on the upper end surface of the lifting swing arm (11);
the self-adaptive leveling component comprises a motor (1), a speed reducer (2), a bearing (3), a screw rod (4), a screw rod nut (5), a tension arm (6), a bearing seat (7), a linear guide rail (8), a bottom plate (9) and a guide clamping plate (10); the motor (1) generates driving force after receiving an instruction sent by the control component, the driving force is reduced by the speed reducer (2) to drive the screw rod (4) to rotate, and the screw rod (4) drives the tension arm (6) fixed with the screw rod nut (5) to move forwards and backwards along the linear guide rail (8); the bearing (3) is located the head end of lead screw (4), bearing (3) with lead screw (4) all are located in bearing frame (7), bearing frame (7) with linear guide (8) all are fixed in on bottom plate (9), guide splint (10) are located pulling force arm (6) both sides, just guide splint (10) centre gripping is in the upper end of lift swing arm (11).
2. The auxiliary furnace chamber leveling mechanism of the single crystal furnace according to claim 1, wherein: the upper pin shaft (15) passes through the through hole of the tension arm (6) and is connected with the upper end connecting block of the auxiliary furnace chamber (12).
3. The auxiliary furnace chamber leveling mechanism of the single crystal furnace according to claim 1 or 2, wherein: the control component comprises a control component and a communication component, the communication component receives signals sent by the level monitoring component (16) and then transmits the signals to the control component, and the control component processes and generates control data and sends control instructions to the motor (1) through the communication component.
4. A single crystal furnace auxiliary furnace chamber leveling mechanism according to claim 3, wherein: the communication component is a PLC communication module.
5. The auxiliary furnace chamber leveling mechanism of the single crystal furnace according to claim 1 or 2, wherein: the level monitoring component (16) is any one of an inclinometer, a level meter or an inclination sensor.
6. A method for leveling a secondary furnace chamber leveling mechanism of a single crystal furnace as claimed in claim 1, which is characterized by comprising the following steps: the method comprises the following steps:
s1: the auxiliary furnace chamber (12) is placed on the main furnace chamber and the isolating valve, the horizontal monitoring component (16) is arranged on the upper end surface of the auxiliary furnace chamber (12), and after horizontal adjustment, the horizontal monitoring component (16) is in a zero position;
s2: in the working state, the auxiliary furnace chamber (12) moves up and down to incline; the horizontal monitoring component (16) monitors the inclination angle and compares the inclination angle with a zero position; and feeding back the result to the control part;
s3: after the control part collects the signals sent by the horizontal monitoring part, processing and generating control data, and sending control instructions to the motor (1), wherein the control instructions comprise steering, rotating speed and rotating time;
s4: the motor (1) generates driving force after receiving a control instruction, the motor drives the screw rod (4) to rotate after being decelerated by the speed reducer (2), the screw rod (4) drives the tension arm (6) fixed with the screw rod nut (5) to move back and forth along the linear guide rail (8), the aim of taking a connecting block at the lower end of the auxiliary furnace chamber (12) as a fulcrum is achieved, the connecting block at the upper end of the auxiliary furnace chamber (12) is driven to move along with the tension arm (6), the inclination of the auxiliary furnace chamber (12) is corrected, and the auxiliary furnace chamber (12) is leveled.
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| CN202210131827.0A CN114318532B (en) | 2022-02-14 | 2022-02-14 | Auxiliary furnace chamber leveling mechanism and leveling method for single crystal furnace |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002211890A (en) * | 2001-01-10 | 2002-07-31 | Aichi Corp | Work bench leveling device |
| CN207227586U (en) * | 2017-08-15 | 2018-04-13 | 浙江晶盛机电股份有限公司 | Single crystal growing furnace liftable pair furnace chamber bellows extension mechanism |
| CN108385164A (en) * | 2018-05-04 | 2018-08-10 | 蒋国庆 | Semiconductor monocrystal stove |
| CN109143916A (en) * | 2017-11-16 | 2019-01-04 | 湖北汉丹机电有限公司 | Adaptive leveling device |
| CN112795981A (en) * | 2020-11-06 | 2021-05-14 | 北京工业大学 | Dynamic balancing mechanism for mass center of pulling head of single crystal furnace |
| CN217026143U (en) * | 2022-02-14 | 2022-07-22 | 浙江精功科技股份有限公司 | Leveling mechanism for auxiliary furnace chamber of single crystal furnace |
-
2022
- 2022-02-14 CN CN202210131827.0A patent/CN114318532B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002211890A (en) * | 2001-01-10 | 2002-07-31 | Aichi Corp | Work bench leveling device |
| CN207227586U (en) * | 2017-08-15 | 2018-04-13 | 浙江晶盛机电股份有限公司 | Single crystal growing furnace liftable pair furnace chamber bellows extension mechanism |
| CN109143916A (en) * | 2017-11-16 | 2019-01-04 | 湖北汉丹机电有限公司 | Adaptive leveling device |
| CN108385164A (en) * | 2018-05-04 | 2018-08-10 | 蒋国庆 | Semiconductor monocrystal stove |
| CN112795981A (en) * | 2020-11-06 | 2021-05-14 | 北京工业大学 | Dynamic balancing mechanism for mass center of pulling head of single crystal furnace |
| CN217026143U (en) * | 2022-02-14 | 2022-07-22 | 浙江精功科技股份有限公司 | Leveling mechanism for auxiliary furnace chamber of single crystal furnace |
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