CN108385164A - Semiconductor monocrystal stove - Google Patents
Semiconductor monocrystal stove Download PDFInfo
- Publication number
- CN108385164A CN108385164A CN201810418045.9A CN201810418045A CN108385164A CN 108385164 A CN108385164 A CN 108385164A CN 201810418045 A CN201810418045 A CN 201810418045A CN 108385164 A CN108385164 A CN 108385164A
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- China
- Prior art keywords
- furnace chamber
- magnetic field
- lifting
- spiral arm
- driving device
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of semiconductor monocrystal stoves, it includes pedestal, main furnace chamber, secondary furnace chamber, lower driving device and upper driving device, it further includes liftable magnetic field device, secondary furnace chamber lifting drive, secondary furnace chamber rotating driving device and electronic connects crystal holder, liftable magnetic field device includes magnetic field generating source and magnetic field lifting drive, magnetic field lifting drive is connected on pedestal, magnetic field generating source is connected with magnetic field lifting drive, will pass through magnetic field lifting drive driving magnetic field generating source lifting, and magnetic field generating source is sleeved on the outside of main furnace chamber；Secondary furnace chamber is connected to by secondary furnace chamber spiral arm on secondary furnace chamber lifting drive；Secondary furnace chamber rotating driving device is connected between secondary furnace chamber lifting drive and secondary furnace chamber spiral arm.The present invention uses automation mechanized operation, accurate positioning, simple in structure, easy to operate, easy to control, and magnetic field generating source, secondary furnace chamber movement it is steady, without shaking, and then ensure that the quality of crystal bar, also reduce production difficulty.
Description
Technical field
The present invention relates to a kind of semiconductor monocrystal stoves.
Background technology
Currently, monocrystalline silicon is a kind of good semi-conducting material, it can be used for diode grade, rectifying device grade, circuit-level
Production with chip product and deep processing manufacture, subsequent product integrated circuit and semiconductor separation part are widely used to respectively
A field, also occupies an important position in military avionic equipment, is in the forward position of new material development, the purposes of monocrystalline silicon is increasingly
Extensively, but existing semiconductor monocrystal stove mainly manually operates, and efficiency is low, there is also security risk, and single crystal growing furnace
Each component there is be not easy to lift or rotate, easily shake, dismounting trouble, it is difficult safeguard, positioning not accurately characteristic, to influence half
The use of conductor single crystal growing furnace also influences the quality of crystal bar.
Invention content
The technical problem to be solved by the present invention is to overcome the deficiencies of existing technologies, a kind of semiconductor monocrystal stove is provided, it
It is accurate positioning, simple in structure, easy to operate, easy to control using automation mechanized operation, and magnetic field generating source, secondary furnace chamber movement are steady, nothing
It shakes, and then ensure that the quality of crystal bar, also reduce production difficulty.
In order to solve the above-mentioned technical problem, the technical scheme is that：A kind of semiconductor monocrystal stove, it include pedestal,
Main furnace chamber, secondary furnace chamber, lower driving device and upper driving device, the main furnace chamber and lower driving device are installed on pedestal, institute
It states and is provided with crucible in main furnace chamber, the lower driving device is connected with crucible, and crucible lifting is driven will pass through lower driving device,
The pair furnace chamber is connected with main furnace chamber, and the upper driving device is mounted on the upper end of secondary furnace chamber, will pass through upper driving device
Crystal pulling is driven, it further includes：
Liftable magnetic field device, the liftable magnetic field device include magnetic field generating source and magnetic field lifting drive, institute
It states magnetic field lifting drive to be connected on pedestal, the magnetic field generating source is connected with magnetic field lifting drive, will pass through
Magnetic field lifting drive driving magnetic field generating source lifting, and the magnetic field generating source is sleeved on the outside of main furnace chamber；
Secondary furnace chamber lifting drive, the pair furnace chamber are connected to secondary furnace chamber lifting drive by secondary furnace chamber spiral arm
On, will pass through the secondary furnace chamber spiral arm lifting of secondary furnace chamber lifting drive driving, and secondary furnace chamber liter is driven by secondary furnace chamber spiral arm
Drop；
Secondary furnace chamber rotating driving device, the pair furnace chamber rotating driving device are connected to secondary furnace chamber lifting drive and pair
Between furnace chamber spiral arm, so that secondary furnace chamber rotating driving device is with secondary one lifting of furnace chamber spiral arm, and rotated by secondary furnace chamber
The secondary furnace chamber spiral arm rotation of driving device driving, secondary furnace chamber spiral arm drive secondary furnace chamber rotation again；
During secondary furnace chamber is moved to and takes brilliant position crystal holder is connect for accepting the electronic of crystal bar.
A kind of magnetic field lifting drive concrete structure is further provided, the magnetic field lifting drive includes lifting
Machine actuating device and at least two elevators, the elevator include reduction box, leading screw and elevator nut, the leading screw connection
On the output shaft of reduction box, the elevator nut is connected to along the circumferential direction of magnetic field generating source in the generating source of magnetic field, and described
Elevator nut is connected by screw thread with leading screw, input shaft and the elevator drive transmission of the reduction box of all elevators
Connection.
Further for making magnetic field generating source steadily lift, liftable magnetic field device further includes magnetic field guider, institute
It includes the guiding trestle of the linear guide and slide fit in the linear guide to state magnetic field guider, and the guiding trestle is connected to lifting
On machine nut.
Further, there are three the elevator settings, three elevators are uniformly distributed along the circumferential direction of magnetic field generating source, three liftings
Machine is respectively the first elevator, the second elevator and third elevator.
A kind of concrete structure of elevator drive is further provided, the elevator drive includes elevator
The input shaft of driving motor and speed reducer, the speed reducer is connected with the output shaft of elevator drives motor, described first liter
The input shaft of the reduction box of the input shaft of the reduction box of drop machine and the second elevator is connected to by card gear respectively
On the output shaft of speed reducer, the input shaft of the reduction box of the third elevator is connected to the second elevator by transmission device
On the output shaft of reduction box, the transmission device includes corner case and two card gears, the input of the corner case
Axis is connected by a card gear with the output shaft of the reduction box of the second elevator, the output shaft of the corner case
It is connected with the input shaft of the reduction box of third elevator by another card gear, the card gear
Including transmission shaft and two universal joints, the transmission shaft is connected between two universal joints, and all transmission shafts pass through universal joint
It is connected with speed reducer, reduction box and corner case.
Further provide a kind of concrete structure of secondary furnace chamber lifting drive, the pair furnace chamber lifting drive packet
Elevating screw, planker and lead screw rotating driving device are included, column, the rotatable twelve Earthly Branches of elevating screw are provided on the pedestal
It holds on column, the planker is threadedly attached on elevating screw, and the pair furnace chamber spiral arm is connected on planker, the liter
Drop lead screw is connected on lead screw rotating driving device, will pass through the driving elevating screw rotation of lead screw rotating driving device, in turn
The elevating movement that the rotary motion of elevating screw is converted to planker drives secondary furnace chamber spiral arm lifting, the pair stove by planker
Room spiral arm drives secondary furnace chamber lifting again.
Further for making planker preferably lift, semiconductor monocrystal stove further include be arranged between column and planker and
Lifting and guiding device for the lifting for being oriented to planker, the lifting and guiding device include the guide rail being arranged on column and setting
Sliding block on planker, the planker is by the cooperation slide fit of sliding block and guide rail on column.
Further provide a kind of concrete structure of secondary furnace chamber rotating driving device, the pair furnace chamber rotating driving device packet
Electric rotating machine, rotary screw, rotary sleeve and fixed seat are included, the rotary sleeve is hinged on planker, and the rotary screw is rotatable
Ground is supported in fixed seat, and the electric rotating machine is mounted in fixed seat, the one end of the rotary screw and electric rotating machine
Output shaft is connected, and the other end of the rotary screw and rotary sleeve are connected through a screw thread, and the pair furnace chamber spiral arm is hinged on
In fixed seat, rotary screw spinning in and out in rotary sleeve are driven will pass through electric rotating machine so that fixed seat generates displacement, and
Fixed seat is set to drive secondary furnace chamber spiral arm rotation.
A kind of electronic concrete structure for connecing crystal holder is further provided, the electronic crystal holder that connects includes lift lever, for holding
It connects the supporting plate of crystal bar, electric pushrod, connect crystal holder motor and fixing pipe, the electric pushrod is connected on secondary furnace chamber spiral arm, described
Lift lever is connected on the push rod of electric pushrod, and the lifting will pass through push rod drives lift lever lifting, described to connect crystal holder motor
It is connected on lift lever, the supporting plate is connected on the output shaft for connecing crystal holder motor, and crystal holder motor driving supporting plate is connect will pass through
Rotation, the fixing pipe are sleeved on the outside of the push rod of lift lever and electric pushrod, and the fixing pipe is connected to secondary furnace chamber spiral arm
On.
Further include that main furnace chamber lifting is driven further for dismantling, move and feeding for main furnace chamber, semiconductor monocrystal stove is facilitated
Dynamic device and main furnace chamber rotating driving device, the main furnace chamber are connected to main furnace chamber lifting driving dress by main furnace chamber spiral arm
It sets, drives main furnace chamber spiral arm to lift will pass through main furnace chamber lifting drive, and main furnace chamber is driven by main furnace chamber spiral arm
Lifting, the main furnace chamber rotating driving device are connected between main furnace chamber lifting drive and main furnace chamber spiral arm, so that
Main furnace chamber rotating driving device drives main furnace chamber spiral arm with main one lifting of furnace chamber spiral arm, and by main furnace chamber rotating driving device
Rotation, main furnace chamber spiral arm drive main furnace chamber to rotate again.
After using above-mentioned technical proposal, after being cleaned to semiconductor single crystal growing furnace, each component of main furnace chamber is hung successively
It is attached to installation position, magnetic field generating source is then risen to by proper height by magnetic field lifting drive, and carry out crystal pulling beam worker
Make and complete crystal pulling, is driven finally by secondary furnace chamber lifting drive and the secondary secondary furnace chamber spiral arm of furnace chamber rotating driving device driving
Secondary furnace chamber, which is moved to, takes brilliant position, and during secondary furnace chamber moves, the electronic crystal holder that connects is automatically adjusted to appropriate connect brilliant position
It sets, to prevent from causing the accident because crystal bar falls off, then by the decline of magnetic field lifting drive driving magnetic field generating source to facilitate
Tear stove open；The present invention uses automation mechanized operation, safe and efficient, easy to operate, easy to control, has both prevented manually-operated security risk,
Also improve production efficiency；The liftable magnetic field device of the present invention controls at least two liters by a magnetic field lifting drive
Drop machine works asynchronously, and to ensure that the consistency of all elevator heave amplitudes, and is produced to magnetic field by magnetic field guider
The lifting of source of students is oriented to so that magnetic field generating source steadily lifts；The secondary furnace chamber lifting drive of the present invention and secondary furnace chamber
Rotating driving device stable drive, without shaking, and registration；The present invention connects crystal holder and prevents crystal bar from falling off by electronic, pacifies
It is complete effective, and the electronic crystal bar for connecing crystal holder and being suitable for various length of the present invention；The present invention also lifts driving dress by main furnace chamber
It sets and main furnace chamber rotating driving device lifts each component of main furnace chamber, not only prevented manually-operated security risk, but also improve
Production efficiency.
Description of the drawings
Fig. 1 is the structural schematic diagram of the semiconductor monocrystal stove of the present invention；
Fig. 2 is the left view of Fig. 1；
Fig. 3 is the structural schematic diagram of the magnetic field lifting drive of the present invention；
Fig. 4 is the structural schematic diagram of the secondary furnace chamber lifting drive of the present invention；
Fig. 5 is the structural schematic diagram of the secondary furnace chamber rotating driving device of the present invention；
Fig. 6 is the electronic structural schematic diagram for connecing crystal holder of the present invention.
Specific implementation mode
In order that the present invention can be more clearly and readily understood, right below according to specific embodiment and in conjunction with attached drawing
The present invention is described in further detail.
As shown in figs. 1 to 6, a kind of semiconductor monocrystal stove, it includes pedestal 1, main furnace chamber 2, secondary furnace chamber 3, lower driving device 4
With upper driving device 5, the main furnace chamber 2 and lower driving device 4 are installed on pedestal 1, and earthenware is provided in the main furnace chamber 2
Crucible, the lower driving device 4 are connected with crucible, and crucible lifting, the pair furnace chamber 3 and master are driven will pass through lower driving device 4
Furnace chamber 2 is connected, and the upper driving device 5 is mounted on the upper end of secondary furnace chamber 3, and crystal pulling is driven will pass through upper driving device 5, it
Further include：
Liftable magnetic field device, the liftable magnetic field device include magnetic field generating source 61 and magnetic field lifting drive,
The magnetic field lifting drive is connected on pedestal 1, and the magnetic field generating source 61 is connected with magnetic field lifting drive, so as to
It is lifted by magnetic field lifting drive driving magnetic field generating source 61, and the magnetic field generating source 61 is sleeved on the outer of main furnace chamber 2
Side；
Secondary furnace chamber lifting drive, the pair furnace chamber 3 are connected to secondary furnace chamber lifting driving dress by secondary furnace chamber spiral arm 81
It sets, will pass through secondary 81 lifting of furnace chamber spiral arm of secondary furnace chamber lifting drive driving, and pair is driven by secondary furnace chamber spiral arm 81
Furnace chamber 3 lifts；
Secondary furnace chamber rotating driving device, the pair furnace chamber rotating driving device are connected to secondary furnace chamber lifting drive and pair
Between furnace chamber spiral arm 81, so that secondary furnace chamber rotating driving device is with secondary 81 1 lifting of furnace chamber spiral arm, and pass through secondary furnace chamber
Secondary 81 rotation of furnace chamber spiral arm of rotating driving device driving, secondary furnace chamber spiral arm 81 drive secondary furnace chamber 3 to rotate again；
During secondary furnace chamber 3 is moved to and takes brilliant position crystal holder is connect for accepting the electronic of crystal bar.
As shown in Figure 1, 2, 3, the magnetic field lifting drive includes elevator drive and at least two elevators,
The elevator includes reduction box 62, leading screw 69 and elevator nut 63, and the leading screw 69 is connected to the output shaft of reduction box 62
On, the elevator nut 63 is connected to along the circumferential direction of magnetic field generating source 61 in magnetic field generating source 61, and the elevator nut
63 are connected by screw thread with leading screw 69, and input shaft and the elevator drive transmission of the reduction box 62 of all elevators connect
It connects.Specifically, in order to prevent during magnetic field generating source 61 rises, leading screw 69 is detached from elevator nut 63, the silk
The top of thick stick 69 is connected with positioning plate 65 by positioning bearing 64.Lubricant grease volatilization pollution raw material in order to prevent, the leading screw
69 outer sheath is equipped with telescopic dust cover 68, and the dust cover 68 is ripple dust cover.
As shown in figure 3, in order to enable magnetic field generating source 61 steadily lifts, liftable magnetic field device further includes that magnetic field is oriented to dress
It sets, the magnetic field guider includes the guiding trestle 67 of the linear guide 66 and slide fit in the linear guide 66, the guiding branch
Frame 67 is connected to 63 on elevator nut.
As shown in figure 3, there are three the elevator settings, three elevators are uniformly distributed along the circumferential direction of magnetic field generating source 61, three
A elevator is respectively the first elevator, the second elevator and third elevator.
As shown in figure 3, the elevator drive includes elevator drives motor 71 and speed reducer 72, the speed reducer
72 input shaft is connected with the output shaft of elevator drives motor 71, the input shaft of the reduction box 62 of first elevator and
The input shaft of the reduction box 62 of second elevator is connected on the output shaft of speed reducer 72 respectively by card gear, institute
State the reduction box 62 of third elevator input shaft be connected to by transmission device the second elevator reduction box 62 output shaft
On, the transmission device includes corner case 73 and two card gears, and the input shaft of the corner case 73 passes through one
Card gear is connected with the output shaft of the reduction box 62 of the second elevator, and the output shaft of the corner case 73 passes through another
One card gear is connected with the input shaft of the reduction box 62 of third elevator, and the card gear includes
Transmission shaft 74 and two universal joints 75, the transmission shaft 74 are connected between two universal joints 75, and all transmission shafts 74 pass through
Universal joint 75 is connected with speed reducer 72, reduction box 62 and corner case 73.Specifically, between the transmission shaft 74 and universal joint 75
It is connected by expansion sleeve 76.
As shown in Figure 2,4, the secondary furnace chamber lifting drive includes elevating screw 94, planker 92 and lead screw rotation driving
Device is provided with column 8 on the pedestal 1, and the elevating screw 94 can be rotated to support on column 8, and the planker 92 is logical
It crosses and is threaded on elevating screw 94, the pair furnace chamber spiral arm 81 is connected on planker 92, and the elevating screw 94 is connected to
On lead screw rotating driving device, rotated with will pass through lead screw rotating driving device driving elevating screw 94, and then by elevating screw
94 rotary motion is converted to the elevating movement of planker 92, drives secondary furnace chamber spiral arm 81 to lift by planker 92, the pair furnace chamber
Spiral arm 81 drives secondary furnace chamber 3 to lift again.Specifically, the lead screw rotating driving device includes lifting motor 91 and lifting decelerator
93, the lifting decelerator 93 is connected on the output shaft of lifting motor 91, and the elevating screw 94 is connected to lifting decelerator
On 93 output shaft.
As shown in figure 4, in order to enable planker 92 preferably lifts, semiconductor monocrystal stove further includes setting in column 8 and drags
The lifting and guiding device of lifting between plate 92 and for being oriented to planker 92, the lifting and guiding device include being arranged in column 8
On guide rail 82 and the sliding block that is arranged on planker 92, the planker 92 is by the cooperation slide fit of sliding block and guide rail 82 in column 8
On.Specifically, lubricant grease volatilizees and pollutes raw material in order to prevent, and the outer sheath of the elevating screw 94 and guide rail 82 is equipped with and can stretch
The dust cover 68 of contracting, the dust cover 68 are ripple dust cover.
As shown in Fig. 2,5, the pair furnace chamber rotating driving device includes electric rotating machine 101, rotary screw 102, rotary sleeve
103 and fixed seat 104, the rotary sleeve 103 be hinged on planker 92, the rotary screw 102 can be rotated to support on fixation
On seat 104, the electric rotating machine 101 is mounted in fixed seat 104, the one end and electric rotating machine 101 of the rotary screw 102
Output shaft be connected, the other end of the rotary screw 102 and rotary sleeve 103 are connected through a screw thread, it is described pair furnace chamber rotation
Arm 81 is hinged in fixed seat 104, drives the precession in rotary sleeve 103 of rotary screw 102 to revolve will pass through electric rotating machine 101
Go out so that fixed seat 104 generates displacement, and makes fixed seat 104 that secondary furnace chamber spiral arm 81 be driven to rotate.Specifically, the rotary sleeve
103 are hinged on by positioning screw 105 on column 8.Lubricant grease, which volatilizees, in order to prevent pollutes raw material, outside the rotary screw
Side is set with telescopic dust cover 68, and the dust cover 68 is ripple dust cover.
It is as shown in Figure 2,6, described that electronic to connect crystal holder include the electronic crystal holder that connects includes lift lever, for accepting crystal bar
Supporting plate 113, electric pushrod 112 connect crystal holder motor 114 and fixing pipe 111, and the electric pushrod 112 is connected to secondary furnace chamber spiral arm
On 81, the lift lever is connected on the push rod of electric pushrod 112, and the lifting will pass through push rod drives lift lever lifting, institute
It states and connects crystal holder motor 114 and be connected on lift lever, the supporting plate 113 is connected on the output shaft for connecing crystal holder motor 114, to lead to
It crosses and connects the driving rotation of supporting plate 113 of crystal holder motor 114, the fixing pipe 111 is sleeved on the push rod of lift lever and electric pushrod 112
Outside, the fixing pipe 111 are connected on secondary furnace chamber spiral arm 81.Specifically, raw material, institute are polluted in lubricant grease volatilization in order to prevent
The outer sheath for stating lift lever is equipped with telescopic dust cover 68, and the dust cover 68 is ripple dust cover.
As shown in Figure 1, dismantling, move and feeding in order to facilitate main furnace chamber 2, semiconductor monocrystal stove further includes main furnace chamber liter
Drop driving device 12 and main furnace chamber rotating driving device 13, the main furnace chamber 2 are connected to main stove by main furnace chamber spiral arm 83
On room lifting drive 12,2 spiral arm of main furnace chamber is driven to rotate will pass through main furnace chamber lifting drive 12, and pass through main stove
Room spiral arm 83 drives main furnace chamber 2 to rotate, and the main furnace chamber rotating driving device 13 is connected to main 12 He of furnace chamber lifting drive
Between main furnace chamber spiral arm 83, so that main furnace chamber rotating driving device 13 is with main 83 1 lifting of furnace chamber spiral arm, and pass through master
Furnace chamber rotating driving device 13 drives main furnace chamber spiral arm 83 to rotate, and main furnace chamber spiral arm 83 drives main furnace chamber 2 to rotate again.In this implementation
In example, the structure of the main furnace chamber lifting drive 12 is consistent with the secondary structure of furnace chamber lifting drive, the main furnace chamber
The structure of rotating driving device 13 and the structure of secondary furnace chamber rotating driving device are also consistent.
Working principle of the present invention is as follows：
After being cleaned to semiconductor single crystal growing furnace, each component of main furnace chamber 2 is lifted into installation position successively, then passes through magnetic
Magnetic field generating source 61 is risen to proper height by field lifting drive, and is carried out crystal pulling preparation and completed crystal pulling, is finally led to
It crosses secondary furnace chamber lifting drive and the secondary furnace chamber spiral arm of secondary furnace chamber rotating driving device driving 81 drives secondary furnace chamber 3 to be moved to take crystalline substance
Position, during secondary furnace chamber 3 moves, it is described it is electronic connect crystal holder be automatically adjusted to it is appropriate connect brilliant position, to prevent because of crystal bar
It falls off and causes the accident, then declined by magnetic field lifting drive driving magnetic field generating source 61 and tear stove open to facilitate；The present invention adopts
It is safe and efficient with automation mechanized operation, it is easy to operate, it is easy to control, both prevent manually-operated security risk, and also improves production effect
Rate；The liftable magnetic field device of the present invention controls at least two elevators synchronous working by a magnetic field lifting drive,
To ensure that the consistency of all elevator heave amplitudes, and by magnetic field guider to the lifting of magnetic field generating source 61 into
Row is oriented to so that magnetic field generating source 61 steadily lifts；The secondary furnace chamber lifting drive of the present invention and secondary furnace chamber rotation driving dress
Set stable drive, without shaking, and registration；The present invention connects crystal holder and prevents crystal bar from falling off by electronic, safely and effectively, and this
The electronic crystal bar for connecing crystal holder and being suitable for various length of invention；The present invention also passes through main furnace chamber lifting drive 12 and main furnace chamber
Rotating driving device 13 lifts each component of main furnace chamber 2, has not only prevented manually-operated security risk, but also improves production effect
Rate；The leading screw 69 of the present invention, the outside of elevating screw 94 and rotary screw 102 are set with dust cover 68, effectively prevent
Lubricant grease volatilization pollutes raw material.
Particular embodiments described above, pair present invention solves the technical problem that, technical solution and advantageous effect carry out
It is further described, it should be understood that the above is only a specific embodiment of the present invention, is not limited to this
Invention, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in this hair
Within bright protection domain.
Claims (10)
1. a kind of semiconductor monocrystal stove, it includes pedestal (1), main furnace chamber (2), secondary furnace chamber (3), lower driving device (4) and upper drive
Dynamic device (5), the main furnace chamber (2) and lower driving device (4) are installed on pedestal (1), are provided in the main furnace chamber (2)
Crucible, the lower driving device (4) are connected with crucible, and crucible lifting, the pair furnace chamber are driven will pass through lower driving device (4)
(3) it is connected with main furnace chamber (2), the upper driving device (5) is mounted on the upper end of secondary furnace chamber (3), is filled with will pass through upper driving
Set (5) driving crystal pulling, which is characterized in that it further includes：
Liftable magnetic field device, the liftable magnetic field device include magnetic field generating source (61) and magnetic field lifting drive, institute
Magnetic field lifting drive to be stated to be connected on pedestal (1), the magnetic field generating source (61) is connected with magnetic field lifting drive, with
Magnetic field lifting drive driving magnetic field generating source (61) lifting is will pass through, and the magnetic field generating source (61) is sleeved on main furnace chamber
(2) outside；
Secondary furnace chamber lifting drive, the pair furnace chamber (3) are connected to secondary furnace chamber lifting driving dress by secondary furnace chamber spiral arm (81)
It setting, being lifted with will pass through the secondary secondary furnace chamber spiral arm (81) of furnace chamber lifting drive driving, and pass through secondary furnace chamber spiral arm (81) band
Dynamic pair furnace chamber (3) lifts；
Secondary furnace chamber rotating driving device, the pair furnace chamber rotating driving device are connected to secondary furnace chamber lifting drive and secondary furnace chamber
Between spiral arm (81), so that secondary furnace chamber rotating driving device is with (81) one lifting of secondary furnace chamber spiral arm, and pass through secondary furnace chamber
Secondary furnace chamber spiral arm (81) rotation of rotating driving device driving, secondary furnace chamber spiral arm (81) and the secondary furnace chamber (3) of drive rotate；
During secondary furnace chamber (3) is moved to and takes brilliant position crystal holder is connect for accepting the electronic of crystal bar.
2. semiconductor monocrystal stove according to claim 1, it is characterised in that：The magnetic field lifting drive includes lifting
Machine actuating device and at least two elevators, the elevator include reduction box (62), leading screw (69) and elevator nut (63),
The leading screw (69) is connected on the output shaft of reduction box (62), week of the elevator nut (63) along magnetic field generating source (61)
To being connected in magnetic field generating source (61), and the elevator nut (63) is connected by screw thread with leading screw (69), Suo Yousheng
The input shaft and elevator drive of the reduction box (62) of drop machine are sequentially connected.
3. semiconductor monocrystal stove according to claim 2, it is characterised in that：Liftable magnetic field device further includes that magnetic field is oriented to
Device, the magnetic field guider include the guiding trestle (67) of the linear guide (66) and slide fit in the linear guide (66), institute
Guiding trestle (67) is stated to be connected on elevator nut (63).
4. semiconductor monocrystal stove according to claim 2, it is characterised in that：There are three the elevator settings, and three rise
Drop machine is uniformly distributed along the circumferential direction of magnetic field generating source (61), and three elevators are respectively the first elevator, the second elevator and third liter
Drop machine.
5. semiconductor monocrystal stove according to claim 4, it is characterised in that：The elevator drive includes elevator
Driving motor (71) and speed reducer (72), the output shaft phase of the input shaft and elevator drives motor (71) of the speed reducer (72)
The input shaft of connection, the input shaft of the reduction box (62) of first elevator and the reduction box (62) of the second elevator leads to respectively
It crosses card gear to be connected on the output shaft of speed reducer (72), the input shaft of the reduction box (62) of the third elevator
It is connected on the output shaft of reduction box (62) of the second elevator by transmission device, the transmission device includes corner case (73)
Pass through a card gear and the second elevator with the input shaft of two card gears, the corner case (73)
The output shaft of reduction box (62) be connected, the output shaft of the corner case (73) passes through another card gear and
The input shaft of the reduction box (62) of three elevators is connected, and the card gear includes that transmission shaft (74) and two are universal
It saves (75), the transmission shaft (74) is connected between two universal joints (75), and all transmission shafts (74) pass through universal joint (75)
It is connected with speed reducer (72), reduction box (62) and corner case (73).
6. semiconductor monocrystal stove according to claim 1, it is characterised in that：The pair furnace chamber lifting drive includes rising
Lead screw (94), planker (92) and lead screw rotating driving device are dropped, column (8), the elevating screw are provided on the pedestal (1)
(94) it can be rotated to support on column (8), the planker (92) is threadedly attached on elevating screw (94), the pair stove
Room spiral arm (81) is connected on planker (92), and the elevating screw (94) is connected on lead screw rotating driving device, will pass through
Lead screw rotating driving device drives elevating screw (94) to rotate, and then the rotary motion of elevating screw (94) is converted to planker
(92) elevating movement is lifted by the secondary furnace chamber spiral arm (81) of planker (92) drive, the pair furnace chamber spiral arm (81) and drive pair
Furnace chamber (3) lifts.
7. semiconductor monocrystal stove according to claim 6, it is characterised in that：Further include being arranged in column (8) and planker
(92) lifting and guiding device of the lifting between and for being oriented to planker (92), the lifting and guiding device include being arranged in column
(8) sliding block of guide rail (82) and setting on planker (92) on, the cooperation that the planker (92) passes through sliding block and guide rail (82)
Slide fit is on column (8).
8. semiconductor monocrystal stove according to claim 6, it is characterised in that：The pair furnace chamber rotating driving device includes rotation
Rotating motor (101), rotary screw (102), rotary sleeve (103) and fixed seat (104), the rotary sleeve (103) are hinged on planker
(92) on, the rotary screw (102) can be rotated to support in fixed seat (104), and the electric rotating machine (101) is mounted on solid
In reservation (104), the one end of the rotary screw (102) is connected with the output shaft of electric rotating machine (101), the rotating wire
The other end of bar (102) and rotary sleeve (103) are connected through a screw thread, and the pair furnace chamber spiral arm (81) is hinged on fixed seat
(104) on, will pass through electric rotating machine (101) driving rotary screw (102) in rotary sleeve (103) interior spinning in and out so that Gu
Reservation (104) generates displacement, and makes fixed seat (104) that secondary furnace chamber spiral arm (81) be driven to rotate.
9. semiconductor monocrystal stove according to claim 1, it is characterised in that：The electronic crystal holder that connects includes lift lever, uses
In accept crystal bar supporting plate (113), electric pushrod (112), connect crystal holder motor (114) and fixing pipe (111), the electric pushrod
(112) it is connected on secondary furnace chamber spiral arm (81), the lift lever is connected on the push rod of electric pushrod (112), is pushed away with will pass through
The lifting of bar drives lift lever lifting, the crystal holder motor (114) that connects to be connected on lift lever, and the supporting plate (113) is connected to
On the output shaft for connecing crystal holder motor (114), crystal holder motor (114) driving supporting plate (113) rotation, the fixing pipe are connect will pass through
(111) it is sleeved on the outside of the push rod of lift lever and electric pushrod (112), the fixing pipe (111) is connected to secondary furnace chamber spiral arm
(81) on.
10. semiconductor monocrystal stove according to claim 1, it is characterised in that：It further include main furnace chamber lifting drive
(12) and main furnace chamber rotating driving device (13), the main furnace chamber (2) are connected to main furnace chamber by main furnace chamber spiral arm (83)
On lifting drive (12), main furnace chamber (2) spiral arm is driven to lift will pass through main furnace chamber lifting drive (12), and pass through
Main furnace chamber spiral arm (83) drives main furnace chamber (2) lifting, the main furnace chamber rotating driving device (13) to be connected to main furnace chamber lifting and drive
It moves between device (12) and main furnace chamber spiral arm (83), so that main furnace chamber rotating driving device (13) is with main furnace chamber spiral arm (83)
One lifting, and drive main furnace chamber spiral arm (83) to rotate by main furnace chamber rotating driving device (13), main furnace chamber spiral arm (83) is again
Main furnace chamber (2) is driven to rotate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810418045.9A CN108385164A (en) | 2018-05-04 | 2018-05-04 | Semiconductor monocrystal stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810418045.9A CN108385164A (en) | 2018-05-04 | 2018-05-04 | Semiconductor monocrystal stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108385164A true CN108385164A (en) | 2018-08-10 |
Family
ID=63066418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810418045.9A Pending CN108385164A (en) | 2018-05-04 | 2018-05-04 | Semiconductor monocrystal stove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108385164A (en) |
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| CN109837585A (en) * | 2019-03-21 | 2019-06-04 | 浙江晶盛机电股份有限公司 | A kind of full-automatic furnace chamber elevating rotary system |
| CN114318532A (en) * | 2022-02-14 | 2022-04-12 | 浙江精功科技股份有限公司 | Leveling mechanism and leveling method for auxiliary furnace chamber of single crystal furnace |
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