CN203462158U - Lifting and rotating driving mechanism - Google Patents
Lifting and rotating driving mechanism Download PDFInfo
- Publication number
- CN203462158U CN203462158U CN201320484151.XU CN201320484151U CN203462158U CN 203462158 U CN203462158 U CN 203462158U CN 201320484151 U CN201320484151 U CN 201320484151U CN 203462158 U CN203462158 U CN 203462158U
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- lifting
- guide pillar
- supporting seat
- web plate
- lifting drive
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Abstract
The utility model relates to a lifting and rotating driving mechanism. The mechanism comprises a vertical column, and a first supporting seat and a second supporting seat which are mounted on the vertical column, wherein the top end of a guide column is mounted in the first supporting seat; the bottom end of the guide column penetrates through the second supporting seat and is connected with a rotating driving mechanism mounted on the vertical column; a lifting driving device is mounted on the guide column; an anti-rotating device of the lifting driving device is arranged at a connecting part between the lifting driving device and the guide column; an auxiliary furnace chamber is mounted on the guide column through a connecting plate; an anti-rotating device of the connecting plate is arranged at the connecting part between the connecting plate and the guide column; a lead screw of the lifting driving device is fixed with the connecting plate through a pin shaft, so that the electric lifting and the electric rotating of the auxiliary furnace chamber can be safely and reliably realized. In addition, an oil cylinder is replaced with motor drive, so that a series of technical problems that the oil cylinder causes environmental pollution, is troublesome to maintain and the like in an application process are solved.
Description
Technical field
The utility model relates to monocrystalline silicon production technical field, is specifically related to a kind of lifting rotation driving mechanism.
Background technology
According to the feature of vertical pulling method monocrystalline silicon growing and processing requirement, the vacuum container of Czochralski method mono-crystal furnace is partly divided into secondary furnace chamber, chamber isolation valve, upper furnace chamber, lower furnace chamber, the several parts of furnace bottom.In order to clear up furnace chamber conveniently and safety taking-up crystal, the upper furnace chamber of vacuum container, chamber isolation valve, secondary furnace chamber all need to rise and rotate and get out of the way space.
Most single crystal growing furnace, realizing furnace chamber up-and-down movement is that secondary furnace chamber and chamber isolation valve are fixed on guide pillar, adopts oil cylinder pushing guide pillar, drive secondary furnace chamber or chamber isolation valve lifting, the rotation of furnace chamber also mostly adopts manually, has increased operator's labour intensity, and level of automation is low; Minority single crystal growing furnace, also changes to hydraulic oil cylinder driving motor and drives, and rotation is still manually, hydraulic oil cylinder driving, and installation and maintenance are all cumbersome, long-play Frequent Troubles, during oil cylinder leakage of oil simultaneously, environmental pollution is serious; Separately there is minority single crystal growing furnace, rotation and lifting adopt a motor to drive, need to increase a kind of position-limit mechanism, and establish two kinds of mode positions, by being set, different spacing mode positions realize the conversion that promotes and rotatablely move, this mechanism operation is complicated, when lifting rotation motion judges that error causes mishandle, can cause serious safe mass accident.
Summary of the invention
The problem existing in order to solve above-mentioned prior art, the purpose of this utility model is to provide a kind of lifting rotation driving mechanism, the secondary furnace chamber electric up-down of realization and rotation that can be safe and reliable, and adopt the motor drive to substitute oil cylinder, solved the series of technical such as contaminate environment that oil cylinder in use occurs and troublesome maintenance.
For reaching above object, the utility model adopts following technical scheme:
A kind of lifting rotation driving mechanism, comprise column 4, be arranged on the first supporting seat 2 and the second supporting seat 8 on column 4, guide pillar 3 tops are arranged in the first supporting seat 2, bottom is through the second supporting seat 8, and in bottom, be connected with the rotating driving device 9 being arranged on column 4, lifting drive 7 is installed on guide pillar 3, lifting drive 7 is provided with lifting drive anti-rotation device 11 with the connecting portion of guide pillar 3, secondary furnace chamber 1 is arranged on guide pillar 3 by web plate 5, web plate 5 is provided with web plate anti-rotation device 10 with the connecting portion of guide pillar 3, the leading screw of lifting drive 7 is fixing with web plate 5 by bearing pin 6.
Described lifting drive 7 adopts motor to drive guide screw movement by worm-gear speed reducer.
Described web plate anti-rotation device 10 is for arranging key at web plate 5 and the connecting portion of guide pillar 3.
Described lifting drive anti-rotation device 11 is for arranging key at lifting drive 7 and the connecting portion of guide pillar 3.
Compared with prior art, the beneficial effects of the utility model are:
1, the secondary furnace chamber electric up-down of the utility model can be safe and reliable realization and rotatablely moving.
2, adopt motor to drive and substitute traditional oil cylinder drives structure, operate steadily, installation and debugging are convenient and simple, and failure rate reduces, and operation site has been eliminated the problem of environmental pollution causing because of oil cylinder leakage of oil.
Accompanying drawing explanation
Accompanying drawing is structural representation of the present utility model.
Embodiment
Below in conjunction with drawings and the specific embodiments, the utility model is described in further detail.
As shown in drawings, a kind of lifting rotation driving mechanism of the utility model, comprise column 4, be arranged on the first supporting seat 2 and the second supporting seat 8 on column 4, guide pillar 3 tops are arranged in the first supporting seat 2, bottom is through the second supporting seat 8, and in bottom, be connected with the rotating driving device 9 being arranged on column 4, lifting drive 7 is installed on guide pillar 3, lifting drive 7 is provided with lifting drive anti-rotation device 11 with the connecting portion of guide pillar 3, while preventing from promoting, lifting drive 7 rotates relative to guide pillar 3, secondary furnace chamber 1 is arranged on guide pillar 3 by web plate 5, web plate 5 is provided with web plate anti-rotation device 10 with the connecting portion of guide pillar 3, while preventing from promoting, web plate 5 rotates relative to guide pillar 3, the leading screw of lifting drive 7 is fixing with web plate 5 by bearing pin 6.
As preferred implementation of the present utility model, described lifting drive 7 adopts motor to drive guide screw movement by worm-gear speed reducer, and while preventing from promoting, web plate 5 rotates relative to guide pillar 3.
As preferred implementation of the present utility model, described web plate anti-rotation device 10 is for arranging key at web plate 5 and the connecting portion of guide pillar 3.
As preferred implementation of the present utility model, described lifting drive anti-rotation device 11 is for arranging key at lifting drive 7 and the connecting portion of guide pillar 3, and while preventing from promoting, lifting drive 7 rotates relative to guide pillar 3.
Principle of work of the present utility model is: lifting drive 7 work, and the leading screw of lifting drive 7 moves up and down and drives web plate 5 up-and-down movement by bearing pin 6, and final web plate 5 drives secondary furnace chamber 1 up-and-down movement; Rotating driving device 9 work, drive guide pillar 3 clockwise or rotate counterclockwise, by web plate anti-rotation device 10 and lifting drive anti-rotation device 11, prevent that lifting drive 7 guide pillar 3 relative to web plate 5 from relatively rotating, guide pillar 3 drives lifting drive 7 and web plate 5 clockwise or rotates counterclockwise, and finally drives secondary furnace chamber 1 clockwise or rotates counterclockwise.
Claims (4)
1. a lifting rotation driving mechanism, it is characterized in that: comprise column (4), be arranged on the first supporting seat (2) and the second supporting seat (8) on column (4), guide pillar (3) top is arranged in the first supporting seat (2), bottom is through the second supporting seat (8), and in bottom, be connected with the rotating driving device (9) being arranged on column (4), lifting drive (7) is installed on guide pillar (3), lifting drive (7) is provided with lifting drive anti-rotation device (11) with the connecting portion of guide pillar (3), secondary furnace chamber (1) is arranged on guide pillar (3) by web plate (5), web plate (5) is provided with web plate anti-rotation device (10) with the connecting portion of guide pillar (3), the leading screw of lifting drive (7) is fixing by bearing pin (6) and web plate (5).
2. a kind of lifting rotation driving mechanism according to claim 1, is characterized in that: described lifting drive (7) adopts motor to drive guide screw movement by worm-gear speed reducer.
3. a kind of lifting rotation driving mechanism according to claim 1, is characterized in that: described web plate anti-rotation device (10) is for arranging key at web plate (5) and the connecting portion of guide pillar (3).
4. a kind of lifting rotation driving mechanism according to claim 1, is characterized in that: described lifting drive anti-rotation device (11) is for arranging key at lifting drive (7) and the connecting portion of guide pillar (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320484151.XU CN203462158U (en) | 2013-08-08 | 2013-08-08 | Lifting and rotating driving mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320484151.XU CN203462158U (en) | 2013-08-08 | 2013-08-08 | Lifting and rotating driving mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203462158U true CN203462158U (en) | 2014-03-05 |
Family
ID=50174533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320484151.XU Expired - Fee Related CN203462158U (en) | 2013-08-08 | 2013-08-08 | Lifting and rotating driving mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203462158U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108385164A (en) * | 2018-05-04 | 2018-08-10 | 蒋国庆 | Semiconductor monocrystal stove |
| CN109837585A (en) * | 2019-03-21 | 2019-06-04 | 浙江晶盛机电股份有限公司 | A kind of full-automatic furnace chamber elevating rotary system |
| CN111850678A (en) * | 2020-08-22 | 2020-10-30 | 北京北方华创真空技术有限公司 | Auxiliary furnace chamber lifting and rotating device for single crystal furnace |
| TWI806530B (en) * | 2022-01-30 | 2023-06-21 | 大陸商浙江晶盛機電股份有限公司 | Single crystal furnace |
-
2013
- 2013-08-08 CN CN201320484151.XU patent/CN203462158U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108385164A (en) * | 2018-05-04 | 2018-08-10 | 蒋国庆 | Semiconductor monocrystal stove |
| CN109837585A (en) * | 2019-03-21 | 2019-06-04 | 浙江晶盛机电股份有限公司 | A kind of full-automatic furnace chamber elevating rotary system |
| CN111850678A (en) * | 2020-08-22 | 2020-10-30 | 北京北方华创真空技术有限公司 | Auxiliary furnace chamber lifting and rotating device for single crystal furnace |
| TWI806530B (en) * | 2022-01-30 | 2023-06-21 | 大陸商浙江晶盛機電股份有限公司 | Single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140305 Termination date: 20190808 |