CN209115696U - Valve plate mobile device is isolated in single crystal growing furnace - Google Patents
Valve plate mobile device is isolated in single crystal growing furnace Download PDFInfo
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- CN209115696U CN209115696U CN201821698807.7U CN201821698807U CN209115696U CN 209115696 U CN209115696 U CN 209115696U CN 201821698807 U CN201821698807 U CN 201821698807U CN 209115696 U CN209115696 U CN 209115696U
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Abstract
The utility model discloses a kind of single crystal growing furnaces, and valve plate mobile device is isolated, including valve body, valve body includes upper plate, lower plate, lower plate is equipped with opening, setting isolation valve plate in valve body, valve plate is isolated and blocks the opening, isolation one end face of valve plate is bonded to block opening with the lower plate upper surface, another end face is equipped with rotating arm, rotating arm is fixedly connected with main shaft, main shaft lower end is mounted in the Lower shaft sleeve in lower plate, main shaft upper end is passed through the Upper shaft sleeve on upper plate and is fixedly connected with the lifting cylinder that upper plate upper surface is arranged in, the direction of improvement of lifting cylinder is main shaft axis direction, main shaft upper end has elongate holes, upper plate upper surface is additionally provided with the driving mechanism for driving the main axis.In single crystal growing furnace operation process, using isolation valve plate mobile device, the simplification of operation is effectively raised, reduces labor intensity and cost, thoroughly solves the furnace space waste of former technical operation generation, the phenomenon that crystal bar drawing length is limited.
Description
Technical field
The utility model relates to single crystal growing furnaces, and in particular to a kind of single crystal growing furnace isolation valve plate mobile device.
Background technique
Single crystal growing furnace is the necessary equipment that polysilicon is converted into monocrystalline silicon technical process, and monocrystalline silicon be photovoltaic power generation and
Basic material in semicon industry.Critical support material of the monocrystalline silicon as advanced information society is most heavy in the world at present
One of monocrystal material wanted, it is not only to develop computer and the major function material and photovoltaic power generation of integrated circuit utilize
The major function material of solar energy.
The effect of the isolation valve plate mobile device of single crystal growing furnace is as follows: during pulling single crystal silicon, being moved by isolation valve plate
Dynamic device is removed valve plate is isolated or is closed, and operation labor intensity is reduced, and is prevented isolation valve plate from fitting badly, is caused monocrystalline silicon by oxygen
The problems such as change.General single crystal growing furnace isolating valve all without isolation valve plate mobile device, be all using overturning isolation valve plate by the way of,
It is easy to cause isolation spool overturning occupied space big, influences phenomena such as monocrystal rod drawing length is limited.
Summary of the invention
In view of the above technical problems, the utility model provides a kind of single crystal growing furnace isolation valve plate mobile device, in single crystal growing furnace
In operation process, using isolation valve plate mobile device, the simplification of operation is effectively raised, reduces labor intensity and cost,
Thoroughly solves the furnace space waste of former technical operation generation, the phenomenon that crystal bar drawing length is limited.
In order to solve the above technical problems, the technical solution that the utility model uses is: it is mobile that valve plate is isolated in single crystal growing furnace
Device, including valve body, valve body include upper plate, lower plate, and lower plate is equipped with opening, setting isolation valve plate in valve body, isolation valve plate envelope
The opening is blocked up, isolation one end face of valve plate is bonded to block opening with the lower plate upper surface, another end face is equipped with
Rotating arm, rotating arm are fixedly connected with main shaft, and main shaft lower end is mounted in the Lower shaft sleeve in lower plate, and main shaft upper end is passed through
Upper shaft sleeve on plate is simultaneously fixedly connected with the lifting cylinder that upper plate upper surface is arranged in, and the direction of improvement of lifting cylinder is spindle shaft
Line direction, main shaft upper end have elongate holes,
Upper plate upper surface is additionally provided with the driving mechanism for driving the main axis, driving mechanism include breeches joint, cylinder,
Pin shaft, breeches joint include major joint and two sub-joints, and pin shaft is along main shaft radially across elongate holes and the pin shaft both ends point
Not Lian Jie a sub-joint, sub-joint connects major joint, and major joint is hinged cylinder, and cylinder is mounted on upper plate.
Axis water jacket, the radially fixed connection rotating arm of axis water jacket are fixed on main shaft as a preferred embodiment of the above solution,.
Lower shaft sleeve includes the shaft end support base being fixed in lower plate and supports with the shaft end as a preferred embodiment of the above solution,
The lower copper sheathing of seat interference fit, lower copper sheathing cooperate with the gap of main reinforcement for passing through the lower copper sheathing, shaft end support base and the lower plate it
Between seal cooperation.
Upper shaft sleeve includes upper mounting seat, upper copper sheathing as a preferred embodiment of the above solution, upper mounting seat be fixed on upper plate and with
The upper plate sealing cooperation, upper copper sheathing and the upper mounting seat are interference fitted, upper copper sheathing and the gap of main reinforcement for passing through the upper copper sheathing
Cooperation.
Lifting cylinder mounting base is fixed in upper mounting seat as a preferred embodiment of the above solution, is consolidated in lifting cylinder mounting base
Dingan County fills lifting cylinder.
Major joint is connecting pin as a preferred embodiment of the above solution, connects pin connection list knuckle joint, and single knuckle joint connects gas
Cylinder.
The beneficial effects of the utility model are: in single crystal growing furnace operation process, using isolation valve plate mobile device, effectively
Improve the simplification of operation, reduce labor intensity and cost, thoroughly solve furnace space waste that former technical operation generates,
The limited phenomenon of crystal bar drawing length；
Valve plate mobile device is isolated, reduces time and the labor intensity of artificial rotation and lifting isolating valve valve plate, improves control
The accuracy of system；
Valve plate mobile device is isolated, the lifting and movement of isolating valve valve plate are realized using cylinder, instead of former isolating valve
Valve plate can only be overturn, and reduce the vacuum degree influence of the factors to equipment such as not enough, meanwhile, because its usability is strong, convenient for promoting.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the sectional view of Fig. 1；
Fig. 3 is the perspective view one of Fig. 1；
Fig. 4 is the perspective view two of Fig. 1.
Specific embodiment
Below with reference to embodiment, specific embodiment of the present utility model is further described.
As shown in Figs 1-4, valve plate mobile device is isolated in single crystal growing furnace, including valve body, valve body include upper plate 1, lower plate 2, lower plate
Be equipped with opening, setting isolation valve plate 3 in valve body, isolation valve plate blocks the opening 5, isolation one end face of valve plate with it is described
The fitting of lower plate upper surface to block opening, another end face is equipped with rotating arm 4, and rotating arm is fixedly connected with main shaft 6, main shaft lower end
Be mounted in the Lower shaft sleeve in lower plate, main shaft upper end be passed through the Upper shaft sleeve on upper plate and with upper plate upper surface is set
Lifting cylinder is fixedly connected, and the direction of improvement of lifting cylinder is main shaft axis direction, and main shaft upper end has elongate holes.
Upper plate upper surface is additionally provided with the driving mechanism for driving the main axis, and driving mechanism includes breeches joint 13, gas
Cylinder, pin shaft, breeches joint include major joint and two sub-joints, and pin shaft is along main shaft radially across elongate holes and the pin shaft two
End is separately connected a sub-joint 17, and sub-joint connects major joint, and major joint is hinged cylinder, and cylinder is fixedly mounted on upper plate
On.
Axis water jacket, the radially fixed connection rotating arm of axis water jacket are fixed on main shaft.
Lower shaft sleeve includes the shaft end support base 7 being fixed in lower plate and the lower copper sheathing with shaft end support base interference fit
8, lower copper sheathing cooperates with the gap of main reinforcement for passing through the lower copper sheathing, and cooperation is sealed between shaft end support base and the lower plate.
Upper shaft sleeve includes upper mounting seat 10, upper copper sheathing 9, and upper mounting seat is fixed on upper plate and matches with upper plate sealing
It closes, upper copper sheathing and the upper mounting seat are interference fitted, and upper copper sheathing cooperates with the gap of main reinforcement for passing through the upper copper sheathing.
It is fixed with lifting cylinder mounting base 11 in upper mounting seat, lifting cylinder 12 is fixedly mounted in lifting cylinder mounting base.
Major joint is connecting pin 14, connects pin connection list knuckle joint 15, and single knuckle joint connects cylinder 16.
Lifting cylinder driving spindle is moved to lower plate direction, main shaft band moving axis water jacket and then the downward plate fortune of drive isolation valve plate
It is dynamic, until isolation valve plate blocks opening.When needing to open opening, lifting cylinder driving is actively moved to upper plate, is actively driven
Axis water jacket and then the upward plate movement of drive isolation valve plate, so that isolation valve plate and lower plate separation, the single knuckle joint of cylinder pulling, single elbow
Connector drives breeches joint, and breeches joint drives main axis, because isolation valve plate is fixedly connected with main shaft, drives in main axis
Valve plate rotation is isolated.Wherein, main axis is driven by breeches joint, pin shaft and main shaft connection because of single knuckle joint, because pin shaft is located at
In elongate holes, when main shaft up or down is done exercises, the presence of elongate holes remains unchanged the position of pin shaft, avoids producing
Raw interference.
For those skilled in the art, technical solution documented by foregoing embodiments can still be repaired
Change or equivalent replacement of some of the technical features, it is within the spirit and principle of the utility model, made any
Modification, equivalent replacement, improvement etc., should be included within the scope of protection of this utility model.
Claims (6)
1. valve plate mobile device, including valve body is isolated in single crystal growing furnace, valve body includes upper plate, lower plate, and lower plate, which is equipped with, to be open, in valve body
Setting isolation valve plate, isolation valve plate block the opening, which is characterized in that on isolation one end face of valve plate and the lower plate
End face fitting is to block opening, another end face is equipped with rotating arm, and rotating arm is fixedly connected with main shaft, and main shaft lower end is mounted on lower plate
On Lower shaft sleeve in, main shaft upper end is passed through the Upper shaft sleeve on upper plate and solid with lifting cylinder that upper plate upper surface is arranged in
Fixed connection, the direction of improvement of lifting cylinder are main shaft axis direction, and main shaft upper end has elongate holes,
Upper plate upper surface is additionally provided with the driving mechanism for driving the main axis, and driving mechanism includes breeches joint, cylinder, pin shaft,
Breeches joint includes major joint and two sub-joints, and pin shaft is along main shaft radially across elongate holes and the pin shaft both ends connect respectively
A sub-joint is connect, sub-joint connects major joint, and major joint is hinged cylinder, and cylinder is mounted on upper plate.
2. valve plate mobile device is isolated in single crystal growing furnace as described in claim 1, which is characterized in that axis water jacket is fixed on main shaft,
The radially fixed connection rotating arm of axis water jacket.
3. valve plate mobile device is isolated in single crystal growing furnace as described in claim 1, which is characterized in that Lower shaft sleeve includes being fixed on lower plate
On shaft end support base and lower copper sheathing with shaft end support base interference fit, lower copper sheathing and between the main shaft of the lower copper sheathing
Gap cooperation, seals cooperation between shaft end support base and the lower plate.
4. valve plate mobile device is isolated in single crystal growing furnace as described in claim 1, which is characterized in that Upper shaft sleeve include upper mounting seat,
Upper copper sheathing, upper mounting seat, which is fixed on upper plate and seals with the upper plate, to be cooperated, and upper copper sheathing and the upper mounting seat are interference fitted,
Upper copper sheathing cooperates with the gap of main reinforcement for passing through the upper copper sheathing.
5. valve plate mobile device is isolated in single crystal growing furnace as claimed in claim 4, which is characterized in that be fixed with promotion in upper mounting seat
Lifting cylinder is fixedly mounted in lifting cylinder mounting base in cylinder mounting base.
6. valve plate mobile device is isolated in single crystal growing furnace as described in claim 1, which is characterized in that major joint is connecting pin, connection
Pin connection list knuckle joint, single knuckle joint connect cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821698807.7U CN209115696U (en) | 2018-10-19 | 2018-10-19 | Valve plate mobile device is isolated in single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821698807.7U CN209115696U (en) | 2018-10-19 | 2018-10-19 | Valve plate mobile device is isolated in single crystal growing furnace |
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| Publication Number | Publication Date |
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| CN209115696U true CN209115696U (en) | 2019-07-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821698807.7U Active CN209115696U (en) | 2018-10-19 | 2018-10-19 | Valve plate mobile device is isolated in single crystal growing furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109253266A (en) * | 2018-10-19 | 2019-01-22 | 浙江晶阳机电有限公司 | Valve plate mobile device is isolated in single crystal growing furnace |
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2018
- 2018-10-19 CN CN201821698807.7U patent/CN209115696U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109253266A (en) * | 2018-10-19 | 2019-01-22 | 浙江晶阳机电有限公司 | Valve plate mobile device is isolated in single crystal growing furnace |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 314000 2 building 72, Zhenbao Road, Dingqiao Town, Haining, Jiaxing, Zhejiang Patentee after: Zhejiang Jingyang electromechanical Co., Ltd Address before: 314000 2 building 72, Zhenbao Road, Dingqiao Town, Haining, Jiaxing, Zhejiang Patentee before: ZHEJIANG JINGYANG MECHANICAL & ELECTRICAL Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |