CN109253266A - Valve plate mobile device is isolated in single crystal growing furnace - Google Patents
Valve plate mobile device is isolated in single crystal growing furnace Download PDFInfo
- Publication number
- CN109253266A CN109253266A CN201811221036.7A CN201811221036A CN109253266A CN 109253266 A CN109253266 A CN 109253266A CN 201811221036 A CN201811221036 A CN 201811221036A CN 109253266 A CN109253266 A CN 109253266A
- Authority
- CN
- China
- Prior art keywords
- plate
- valve plate
- main shaft
- shaft
- mobile device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 23
- 238000002955 isolation Methods 0.000 claims abstract description 26
- 230000007246 mechanism Effects 0.000 claims abstract description 7
- 230000006872 improvement Effects 0.000 claims abstract description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 21
- 229910052802 copper Inorganic materials 0.000 claims description 21
- 239000010949 copper Substances 0.000 claims description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 230000002787 reinforcement Effects 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 3
- 238000010621 bar drawing Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a kind of single crystal growing furnaces, and valve plate mobile device is isolated, including valve body, valve body includes upper plate, lower plate, lower plate is equipped with opening, setting isolation valve plate in valve body, valve plate is isolated and blocks the opening, isolation one end face of valve plate is bonded to block opening with the lower plate upper surface, another end face is equipped with rotating arm, rotating arm is fixedly connected with main shaft, main shaft lower end is mounted in the Lower shaft sleeve in lower plate, main shaft upper end is passed through the Upper shaft sleeve on upper plate and is fixedly connected with the lifting cylinder that upper plate upper surface is arranged in, the direction of improvement of lifting cylinder is main shaft axis direction, main shaft upper end has elongate holes, upper plate upper surface is additionally provided with the driving mechanism for driving the main axis.In single crystal growing furnace operation process, using isolation valve plate mobile device, the simplification of operation is effectively raised, reduces labor intensity and cost, thoroughly solves the furnace space waste of former technical operation generation, the phenomenon that crystal bar drawing length is limited.
Description
Technical field
The present invention relates to single crystal growing furnaces, and in particular to a kind of single crystal growing furnace isolation valve plate mobile device.
Background technique
Single crystal growing furnace is the necessary equipment that polysilicon is converted into monocrystalline silicon technical process, and monocrystalline silicon be photovoltaic power generation and
Basic material in semicon industry.Critical support material of the monocrystalline silicon as advanced information society is most heavy in the world at present
One of monocrystal material wanted, it is not only to develop computer and the major function material and photovoltaic power generation of integrated circuit utilize
The major function material of solar energy.
The effect of the isolation valve plate mobile device of single crystal growing furnace is as follows: during pulling single crystal silicon, being moved by isolation valve plate
Dynamic device is removed valve plate is isolated or is closed, and operation labor intensity is reduced, and is prevented isolation valve plate from fitting badly, is caused monocrystalline silicon by oxygen
The problems such as change.General single crystal growing furnace isolating valve all without isolation valve plate mobile device, be all using overturning isolation valve plate by the way of,
It is easy to cause isolation spool overturning occupied space big, influences phenomena such as monocrystal rod drawing length is limited.
Summary of the invention
In view of the above technical problems, the present invention provides a kind of single crystal growing furnaces, and valve plate mobile device is isolated, in single crystal growing furnace operation
In the process, using isolation valve plate mobile device, the simplification of operation is effectively raised, reduces labor intensity and cost, thoroughly
Solves the furnace space waste of former technical operation generation, the phenomenon that crystal bar drawing length is limited.
In order to solve the above technical problems, one technical scheme adopted by the invention is that: valve plate mobile device is isolated in single crystal growing furnace,
Including valve body, valve body includes upper plate, lower plate, and lower plate, which is equipped with, to be open, setting isolation valve plate in valve body, described in isolation valve plate closure
Opening, isolation one end face of valve plate be bonded to block and be open with the lower plate upper surface, another end face equipped with rotating arm,
Rotating arm is fixedly connected with main shaft, and main shaft lower end is mounted in the Lower shaft sleeve in lower plate, and main shaft upper end is passed through on upper plate
Upper shaft sleeve is simultaneously fixedly connected with the lifting cylinder that upper plate upper surface is arranged in, and the direction of improvement of lifting cylinder is main-shaft axis side
To, main shaft upper end has elongate holes,
Upper plate upper surface is additionally provided with the driving mechanism for driving the main axis, driving mechanism include breeches joint, cylinder,
Pin shaft, breeches joint include major joint and two sub-joints, and pin shaft is along main shaft radially across elongate holes and the pin shaft both ends point
Not Lian Jie a sub-joint, sub-joint connects major joint, and major joint is hinged cylinder, and cylinder is mounted on upper plate.
Axis water jacket, the radially fixed connection rotating arm of axis water jacket are fixed on main shaft as a preferred embodiment of the above solution,.
Lower shaft sleeve includes the shaft end support base being fixed in lower plate and supports with the shaft end as a preferred embodiment of the above solution,
The lower copper sheathing of seat interference fit, lower copper sheathing cooperate with the gap of main reinforcement for passing through the lower copper sheathing, shaft end support base and the lower plate it
Between seal cooperation.
Upper shaft sleeve includes upper mounting seat, upper copper sheathing as a preferred embodiment of the above solution, upper mounting seat be fixed on upper plate and with
The upper plate sealing cooperation, upper copper sheathing and the upper mounting seat are interference fitted, upper copper sheathing and the gap of main reinforcement for passing through the upper copper sheathing
Cooperation.
Lifting cylinder mounting base is fixed in upper mounting seat as a preferred embodiment of the above solution, is consolidated in lifting cylinder mounting base
Dingan County fills lifting cylinder.
Major joint is connecting pin as a preferred embodiment of the above solution, connects pin connection list knuckle joint, and single knuckle joint connects gas
Cylinder.
The beneficial effects of the present invention are: in single crystal growing furnace operation process, it is effective to improve using isolation valve plate mobile device
The simplification of operation reduces labor intensity and cost, thoroughly solves furnace space waste, crystal bar that former technical operation generates
The limited phenomenon of drawing length；
Valve plate mobile device is isolated, reduces time and the labor intensity of artificial rotation and lifting isolating valve valve plate, improves control
The accuracy of system；
Valve plate mobile device is isolated, the lifting and movement of isolating valve valve plate are realized using cylinder, instead of former isolating valve
Valve plate can only be overturn, and reduce the vacuum degree influence of the factors to equipment such as not enough, meanwhile, because its usability is strong, convenient for promoting.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the sectional view of Fig. 1；
Fig. 3 is the perspective view one of Fig. 1；
Fig. 4 is the perspective view two of Fig. 1.
Specific embodiment
With reference to embodiment, the specific embodiment of the present invention is further described.
As shown in Figs 1-4, valve plate mobile device is isolated in single crystal growing furnace, including valve body, valve body include upper plate 1, lower plate 2, lower plate
Be equipped with opening, setting isolation valve plate 3 in valve body, isolation valve plate blocks the opening 5, isolation one end face of valve plate with it is described
The fitting of lower plate upper surface to block opening, another end face is equipped with rotating arm 4, and rotating arm is fixedly connected with main shaft 6, main shaft lower end
Be mounted in the Lower shaft sleeve in lower plate, main shaft upper end be passed through the Upper shaft sleeve on upper plate and with upper plate upper surface is set
Lifting cylinder is fixedly connected, and the direction of improvement of lifting cylinder is main shaft axis direction, and main shaft upper end has elongate holes.
Upper plate upper surface is additionally provided with the driving mechanism for driving the main axis, and driving mechanism includes breeches joint 13, gas
Cylinder, pin shaft, breeches joint include major joint and two sub-joints, and pin shaft is along main shaft radially across elongate holes and the pin shaft two
End is separately connected a sub-joint 17, and sub-joint connects major joint, and major joint is hinged cylinder, and cylinder is fixedly mounted on upper plate
On.
Axis water jacket, the radially fixed connection rotating arm of axis water jacket are fixed on main shaft.
Lower shaft sleeve includes the shaft end support base 7 being fixed in lower plate and the lower copper sheathing with shaft end support base interference fit
8, lower copper sheathing cooperates with the gap of main reinforcement for passing through the lower copper sheathing, and cooperation is sealed between shaft end support base and the lower plate.
Upper shaft sleeve includes upper mounting seat 10, upper copper sheathing 9, and upper mounting seat is fixed on upper plate and matches with upper plate sealing
It closes, upper copper sheathing and the upper mounting seat are interference fitted, and upper copper sheathing cooperates with the gap of main reinforcement for passing through the upper copper sheathing.
It is fixed with lifting cylinder mounting base 11 in upper mounting seat, lifting cylinder 12 is fixedly mounted in lifting cylinder mounting base.
Major joint is connecting pin 14, connects pin connection list knuckle joint 15, and single knuckle joint connects cylinder 16.
Lifting cylinder driving spindle is moved to lower plate direction, main shaft band moving axis water jacket and then the downward plate fortune of drive isolation valve plate
It is dynamic, until isolation valve plate blocks opening.When needing to open opening, lifting cylinder driving is actively moved to upper plate, is actively driven
Axis water jacket and then the upward plate movement of drive isolation valve plate, so that isolation valve plate and lower plate separation, the single knuckle joint of cylinder pulling, single elbow
Connector drives breeches joint, and breeches joint drives main axis, because isolation valve plate is fixedly connected with main shaft, drives in main axis
Valve plate rotation is isolated.Wherein, main axis is driven by breeches joint, pin shaft and main shaft connection because of single knuckle joint, because pin shaft is located at
In elongate holes, when main shaft up or down is done exercises, the presence of elongate holes remains unchanged the position of pin shaft, avoids producing
Raw interference.
For those skilled in the art, technical solution documented by foregoing embodiments can still be repaired
Change or equivalent replacement of some of the technical features, it is all within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (6)
1. valve plate mobile device, including valve body is isolated in single crystal growing furnace, valve body includes upper plate, lower plate, and lower plate, which is equipped with, to be open, in valve body
Setting isolation valve plate, isolation valve plate block the opening, which is characterized in that on isolation one end face of valve plate and the lower plate
End face fitting is to block opening, another end face is equipped with rotating arm, and rotating arm is fixedly connected with main shaft, and main shaft lower end is mounted on lower plate
On Lower shaft sleeve in, main shaft upper end is passed through the Upper shaft sleeve on upper plate and solid with lifting cylinder that upper plate upper surface is arranged in
Fixed connection, the direction of improvement of lifting cylinder are main shaft axis direction, and main shaft upper end has elongate holes,
Upper plate upper surface is additionally provided with the driving mechanism for driving the main axis, and driving mechanism includes breeches joint, cylinder, pin shaft,
Breeches joint includes major joint and two sub-joints, and pin shaft is along main shaft radially across elongate holes and the pin shaft both ends connect respectively
A sub-joint is connect, sub-joint connects major joint, and major joint is hinged cylinder, and cylinder is mounted on upper plate.
2. valve plate mobile device is isolated in single crystal growing furnace as described in claim 1, which is characterized in that axis water jacket is fixed on main shaft,
The radially fixed connection rotating arm of axis water jacket.
3. valve plate mobile device is isolated in single crystal growing furnace as described in claim 1, which is characterized in that Lower shaft sleeve includes being fixed on lower plate
On shaft end support base and lower copper sheathing with shaft end support base interference fit, lower copper sheathing and between the main shaft of the lower copper sheathing
Gap cooperation, seals cooperation between shaft end support base and the lower plate.
4. valve plate mobile device is isolated in single crystal growing furnace as described in claim 1, which is characterized in that Upper shaft sleeve include upper mounting seat,
Upper copper sheathing, upper mounting seat, which is fixed on upper plate and seals with the upper plate, to be cooperated, and upper copper sheathing and the upper mounting seat are interference fitted,
Upper copper sheathing cooperates with the gap of main reinforcement for passing through the upper copper sheathing.
5. valve plate mobile device is isolated in single crystal growing furnace as claimed in claim 4, which is characterized in that be fixed with promotion in upper mounting seat
Lifting cylinder is fixedly mounted in lifting cylinder mounting base in cylinder mounting base.
6. valve plate mobile device is isolated in single crystal growing furnace as described in claim 1, which is characterized in that major joint is connecting pin, connection
Pin connection list knuckle joint, single knuckle joint connect cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811221036.7A CN109253266A (en) | 2018-10-19 | 2018-10-19 | Valve plate mobile device is isolated in single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811221036.7A CN109253266A (en) | 2018-10-19 | 2018-10-19 | Valve plate mobile device is isolated in single crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109253266A true CN109253266A (en) | 2019-01-22 |
Family
ID=65046016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811221036.7A Pending CN109253266A (en) | 2018-10-19 | 2018-10-19 | Valve plate mobile device is isolated in single crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109253266A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114165602A (en) * | 2022-02-14 | 2022-03-11 | 新沂中大节能科技有限公司 | Monocrystalline silicon oval rotary vane isolating valve mechanism |
| CN114395793A (en) * | 2021-11-26 | 2022-04-26 | 浙江晶盛机电股份有限公司 | Crystal bar anti-collision structure of hard shaft single crystal furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5020775A (en) * | 1989-03-24 | 1991-06-04 | Shin-Etsu Handotai Co., Ltd. | Isolation valve used in a single crystal pulling apparatus |
| US5356113A (en) * | 1992-09-30 | 1994-10-18 | Shin-Etsu Handotai Co., Ltd. | Isolation valve for single crystal pulling apparatus |
| JP2000211989A (en) * | 1999-01-22 | 2000-08-02 | Toshiba Ceramics Co Ltd | Single crystal pulling apparatus |
| JP2003002788A (en) * | 2001-06-18 | 2003-01-08 | Komatsu Machinery Corp | Gate valve of semiconductor single crystal pulling apparatus |
| CN102330145A (en) * | 2011-09-28 | 2012-01-25 | 上海汉虹精密机械有限公司 | Single crystal furnace isolation system |
| CN202297847U (en) * | 2011-10-09 | 2012-07-04 | 上海汉虹精密机械有限公司 | Rotating mechanism for sealing valve plate of single crystal furnace |
| CN202432080U (en) * | 2011-12-26 | 2012-09-12 | 浙江百隆机械有限公司 | Pneumatic control device of valve plate |
| CN105479625A (en) * | 2015-12-10 | 2016-04-13 | 安徽凯特泵业有限公司 | Mold material pressing and positioning device |
| CN207454893U (en) * | 2017-10-18 | 2018-06-05 | 河北晶龙阳光设备有限公司 | A kind of single crystal growing furnace valve body |
| CN207740484U (en) * | 2017-12-29 | 2018-08-17 | 晶创铭盛电子科技（香河）有限公司 | A kind of single crystal growing furnace pressuring rotating plate valve |
| CN108612905A (en) * | 2018-07-19 | 2018-10-02 | 浙江晶阳机电有限公司 | The Pneumatic reverse turning bed structure of isolating valve |
| CN209115696U (en) * | 2018-10-19 | 2019-07-16 | 浙江晶阳机电有限公司 | Valve plate mobile device is isolated in single crystal growing furnace |
-
2018
- 2018-10-19 CN CN201811221036.7A patent/CN109253266A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5020775A (en) * | 1989-03-24 | 1991-06-04 | Shin-Etsu Handotai Co., Ltd. | Isolation valve used in a single crystal pulling apparatus |
| US5356113A (en) * | 1992-09-30 | 1994-10-18 | Shin-Etsu Handotai Co., Ltd. | Isolation valve for single crystal pulling apparatus |
| JP2000211989A (en) * | 1999-01-22 | 2000-08-02 | Toshiba Ceramics Co Ltd | Single crystal pulling apparatus |
| JP2003002788A (en) * | 2001-06-18 | 2003-01-08 | Komatsu Machinery Corp | Gate valve of semiconductor single crystal pulling apparatus |
| CN102330145A (en) * | 2011-09-28 | 2012-01-25 | 上海汉虹精密机械有限公司 | Single crystal furnace isolation system |
| CN202297847U (en) * | 2011-10-09 | 2012-07-04 | 上海汉虹精密机械有限公司 | Rotating mechanism for sealing valve plate of single crystal furnace |
| CN202432080U (en) * | 2011-12-26 | 2012-09-12 | 浙江百隆机械有限公司 | Pneumatic control device of valve plate |
| CN105479625A (en) * | 2015-12-10 | 2016-04-13 | 安徽凯特泵业有限公司 | Mold material pressing and positioning device |
| CN207454893U (en) * | 2017-10-18 | 2018-06-05 | 河北晶龙阳光设备有限公司 | A kind of single crystal growing furnace valve body |
| CN207740484U (en) * | 2017-12-29 | 2018-08-17 | 晶创铭盛电子科技（香河）有限公司 | A kind of single crystal growing furnace pressuring rotating plate valve |
| CN108612905A (en) * | 2018-07-19 | 2018-10-02 | 浙江晶阳机电有限公司 | The Pneumatic reverse turning bed structure of isolating valve |
| CN209115696U (en) * | 2018-10-19 | 2019-07-16 | 浙江晶阳机电有限公司 | Valve plate mobile device is isolated in single crystal growing furnace |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114395793A (en) * | 2021-11-26 | 2022-04-26 | 浙江晶盛机电股份有限公司 | Crystal bar anti-collision structure of hard shaft single crystal furnace |
| CN114165602A (en) * | 2022-02-14 | 2022-03-11 | 新沂中大节能科技有限公司 | Monocrystalline silicon oval rotary vane isolating valve mechanism |
| CN114165602B (en) * | 2022-02-14 | 2022-05-10 | 新沂中大节能科技有限公司 | Monocrystalline silicon oval spinning disc isolating valve mechanism |
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| PB01 | Publication | ||
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190122 |
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| RJ01 | Rejection of invention patent application after publication |