CN207454893U - A kind of single crystal growing furnace valve body - Google Patents
A kind of single crystal growing furnace valve body Download PDFInfo
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- CN207454893U CN207454893U CN201721343303.9U CN201721343303U CN207454893U CN 207454893 U CN207454893 U CN 207454893U CN 201721343303 U CN201721343303 U CN 201721343303U CN 207454893 U CN207454893 U CN 207454893U
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- valve seat
- water
- valve
- window
- single crystal
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Abstract
The utility model is related to a kind of single crystal growing furnace valve bodies,It includes valve seat and the flap valve in the valve seat,Flap valve is connected to operation lever,The valve seat is the structure at preceding round rear,Front end is equipped with window,Window is equipped on the window,Interlayer is equipped in the window,The interlayer is communicated with advancing water nozzle and preceding water outlet nozzle,The side wall of the valve seat,Window,Valve seat upper plate is interior equipped with the water-cooling sandwich connected with valve seat lower plate,The upper water-out nozzle being connected with water-cooling sandwich is provided on the upper valve base upper plate,The water inlet nozzle for being connected with the water-cooling sandwich and being connected with is provided in the valve seat lower plate,Keying cylinder is connected on the valve seat,The end of the piston rod for opening and closing cylinder is pivotally connected to operation lever by joint,The tracheae for opening and closing cylinder is connected with solenoid valve,Link block and connecting pole are provided on the valve seat upper plate,Total design is reasonable,Using effect is good,Machining yield is high.
Description
Technical field
The utility model is related to a kind of single crystal growing furnace valve bodies, belong to single crystal growing furnace manufacturing field.
Background technology
Straight pulling silicon single crystal furnace stage casing is set there are one isolating valve, is mainly used for isolating main chamber and concubine, realizes two furnace chambers not
Same job requirement.The flap valve of traditional valve body mainly controls opening and closing manually by control stick, inconvenient for operation,
CN202730298U discloses a kind of straight pulling silicon single crystal furnace isolation valve seat with Pneumatic actuator, achieves automation control
System, but still remain the defects of cooling effect is bad.
In view of this, it is necessary to invent a kind of new valve body.
Utility model content
The purpose of this utility model is to provide a kind of good single crystal growing furnace valve bodies of using effect.
To solve the above problems, technical solution adopted in the utility model is：
A kind of single crystal growing furnace valve body, the flap valve including valve seat and in the valve seat, flap valve are connected to operation
Bar, the valve seat are the structure at preceding round rear, and front end is equipped with window, is equipped with window on the window, is equipped in the window
Interlayer, the interlayer are communicated with advancing water nozzle and preceding water outlet nozzle, side wall, window, valve seat upper plate and the valve seat lower plate of the valve seat
It is interior to be equipped with the water-cooling sandwich connected, it is provided with the upper water-out nozzle being connected with water-cooling sandwich, the valve seat on the valve seat upper plate
The water inlet nozzle for being connected with the water-cooling sandwich and being connected with is provided in lower plate, keying cylinder, the keying are connected on the valve seat
The end of the piston rod of cylinder is pivotally connected to operation lever by joint, and the tracheae for opening and closing cylinder is connected with solenoid valve, described
Link block and connecting pole are provided on valve seat upper plate.
As further improvement of the utility model, the end set of the piston rod has flake connector, and the flake connects
Head and joint axis connection.
As further improvement of the utility model, set on the side wall of valve seat there are two corresponding seed crystal position detection pair
Loophole.
As further improvement of the utility model, the side wall of the valve seat is equipped with bleeding point.
As further improvement of the utility model, return water skirt is provided on the side wall of the valve seat.
It is using advantageous effect caused by above-mentioned technical proposal：
The utility model uses the structure at preceding round rear, makes intensity that is compact-sized, and improving valve body, sets in front
There is the circular window with water cooling, observation inner case can be facilitated and replace seed crystal.The side wall of valve seat and top and bottom arrange water
It is cold, it is ensured that good cooling effect.Link block is provided in upper end conveniently to connect with concubine with connecting pole, realizes single crystal growing furnace
Automation, can realize the control of whole process, total design is reasonable, and using effect is good, and machining yield is high.
Description of the drawings
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution of the prior art
Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it describes below
In attached drawing be the utility model some embodiments, for those of ordinary skill in the art, do not paying creativeness
On the premise of work, other attached drawings are can also be obtained according to these attached drawings.
Fig. 1 is the structure diagram of the utility model；
Fig. 2 is the side view of the utility model；
Fig. 3 is the top view of the utility model；
In the accompanying drawings：1 valve seat, 11 windows, 12 return water skirts, 13 valve seat upper plates, 14 upper water-out nozzles, 15 valve seat lower plates, 16
Lower water inlet nozzle, 2 flap valves, 3 operation levers, 4 open and close cylinder, 41 piston rods, 42 flake connectors, and 5 joint shafts, 61 windows, 61 are advanced
Water outlet nozzle, 71 link blocks, 72 connecting poles, 8 detections are to loophole, 9 bleeding points, 10 solenoid valves before water nozzle, 62.
Specific embodiment
To make the purpose of this utility model, technical solution and advantage clearer, with reference to specific embodiment to practicality
It is new to carry out clear, complete description.
A kind of single crystal growing furnace valve body as shown in attached drawing 1,2 and 3, the turnover panel including valve seat 1 and in the valve seat
Valve 2, flap valve 2 are connected to operation lever 3, and the valve seat 1 is the structure at preceding round rear, and front end is equipped with window 11, the window 11
On be hinged with window 6, interlayer is equipped in the window 6, the interlayer is communicated with advancing water nozzle 61 and preceding water outlet nozzle 62, the valve
The side wall of seat 1, window 11 are equipped with the water-cooling sandwich connected in valve seat upper plate 13 and valve seat lower plate 15, on the valve seat upper plate 13
The upper water-out nozzle 14 being connected with water-cooling sandwich is provided with, is provided in the valve seat lower plate 15 and is connected with the water-cooling sandwich
Lower water inlet nozzle 16, return water skirt 12 is installed on the side wall of valve seat 1, for docking the pipeline of upper water-out nozzle 14, the valve
It is connected on seat 1 and opens and closes cylinder 4, the end of the piston rod 41 for opening and closing cylinder 4 is connected with flake connector 42, and the flake connects
First 42 are connected to operation lever 3 by joint shaft 5, can rotate operation lever 3 by opening and closing cylinder, open and close cylinder, institute
State the link block 71 for being provided with to connect on valve seat upper plate 13 with concubine and connecting pole 72.
It is set on the side wall of the valve seat 1 there are two corresponding seed crystal position detection to loophole 8 for detecting seed crystal position,
And bleeding point 9 is additionally provided on the side wall of valve seat 1, for vacuumizing for valve body and concubine.
The application method of single crystal growing furnace valve body provided by the utility model is as follows：
It is connected with concubine by link block 71 and connecting pole 72, it is necessary to when isolating to main chamber and concubine, solenoid valve control
The piston rod that system starts cylinder is shunk, and the unlatching of operation lever 3 is driven to turn over valve plate.
Finally it should be noted that：Above example is only to illustrate the technical solution of the utility model, rather than its limitations；
Although the utility model is described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that：
It still can modify to the technical solution recorded in previous embodiment or which part technical characteristic is equal
It replaces；And these modifications or replacement, the essence of appropriate technical solution is not made to depart from the utility model embodiment technical solution
Spirit and scope.
Claims (5)
1. a kind of single crystal growing furnace valve body, including valve seat（1）With arranged on the valve seat（1）Interior flap valve（2）, flap valve（2）
It is connected to operation lever（3）, which is characterized in that the valve seat（1）For the structure at preceding round rear, front end is equipped with window（11）, it is described
Window（11）On be equipped with window（6）, the window（6）Interior to be equipped with interlayer, the interlayer is communicated with advancing water nozzle（61）With it is preceding
Water outlet nozzle（62）, the valve seat（1）Side wall, window（11）, valve seat upper plate（13）With valve seat lower plate（15）It is interior to be equipped with what is connected
Water-cooling sandwich, the valve seat upper plate（13）On be provided with the upper water-out nozzle being connected with water-cooling sandwich（14）, the valve seat lower plate
（15）On be provided with the lower water inlet nozzle being connected with the water-cooling sandwich（16）, the valve seat（1）On be connected with keying cylinder
（4）, the keying cylinder（4）Piston rod（41）End pass through joint shaft（5）It is connected to operation lever, the keying cylinder
（4）Tracheae and solenoid valve（10）Connection, the valve seat upper plate（13）On be provided with link block（71）And connecting pole（72）.
A kind of 2. single crystal growing furnace valve body according to claim 1, which is characterized in that the piston rod（41）End set
There is flake connector（42）, the flake connector（42）With joint shaft（5）Connection.
A kind of 3. single crystal growing furnace valve body according to claim 1, which is characterized in that valve seat（1）Side wall on set there are two
Corresponding seed crystal position detection is to loophole（8）.
A kind of 4. single crystal growing furnace valve body according to claim 1, which is characterized in that the valve seat（1）Side wall be equipped with
Bleeding point（9）.
A kind of 5. single crystal growing furnace valve body according to claim 1, which is characterized in that the valve seat（1）Side wall on set
There is return water skirt（12）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721343303.9U CN207454893U (en) | 2017-10-18 | 2017-10-18 | A kind of single crystal growing furnace valve body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721343303.9U CN207454893U (en) | 2017-10-18 | 2017-10-18 | A kind of single crystal growing furnace valve body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207454893U true CN207454893U (en) | 2018-06-05 |
Family
ID=62252723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721343303.9U Active CN207454893U (en) | 2017-10-18 | 2017-10-18 | A kind of single crystal growing furnace valve body |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207454893U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108456918A (en) * | 2018-06-20 | 2018-08-28 | 南京晶能半导体科技有限公司 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal stove |
| CN109253266A (en) * | 2018-10-19 | 2019-01-22 | 浙江晶阳机电有限公司 | Valve plate mobile device is isolated in single crystal growing furnace |
| CN113005508A (en) * | 2021-01-29 | 2021-06-22 | 河北晶龙阳光设备有限公司 | Single crystal furnace |
-
2017
- 2017-10-18 CN CN201721343303.9U patent/CN207454893U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108456918A (en) * | 2018-06-20 | 2018-08-28 | 南京晶能半导体科技有限公司 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal stove |
| CN108456918B (en) * | 2018-06-20 | 2024-04-05 | 南京晶能半导体科技有限公司 | Flap valve for semiconductor silicon single crystal furnace and single crystal furnace |
| CN109253266A (en) * | 2018-10-19 | 2019-01-22 | 浙江晶阳机电有限公司 | Valve plate mobile device is isolated in single crystal growing furnace |
| CN113005508A (en) * | 2021-01-29 | 2021-06-22 | 河北晶龙阳光设备有限公司 | Single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210511 Address after: 655000 east of photovoltaic No.1 road and south of Nanhai Avenue, Qujing Economic and Technological Development Zone, Yunnan Province Patentee after: Qujing Jinglong Electronic Materials Co.,Ltd. Address before: 055550 Jinglong third industrial park, Jinglong street, Ningjin County, Xingtai City, Hebei Province Patentee before: HEBEI JING-LONG SUN EQUIPMENT Co.,Ltd. |
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| TR01 | Transfer of patent right |