CN102330145A - Single crystal furnace isolation system - Google Patents
Single crystal furnace isolation system Download PDFInfo
- Publication number
- CN102330145A CN102330145A CN201110300690A CN201110300690A CN102330145A CN 102330145 A CN102330145 A CN 102330145A CN 201110300690 A CN201110300690 A CN 201110300690A CN 201110300690 A CN201110300690 A CN 201110300690A CN 102330145 A CN102330145 A CN 102330145A
- Authority
- CN
- China
- Prior art keywords
- valve
- section
- single crystal
- valve body
- fixedly connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Mechanically-Actuated Valves (AREA)
- Details Of Valves (AREA)
Abstract
The invention discloses a single crystal furnace isolation system in the technical field of single crystal furnaces. The system comprises a sealing member, a valve plate component, a valve opening control device and a compaction device, wherein the valve opening control device and the compaction device are fixedly connected with a valve body; the valve plate component is connected with the valve opening control device in a movable way; and the sealing member is arranged in the valve body and is fixedly connected with the valve body. Through the control of a valve opening cylinder, the valve plate component can be horizontally turned downwards; and the valve plate component is turned downwards, so that the condition that a crystal bar cannot be influenced when an isolation valve is opened and closed is ensured.
Description
Technical field
What the present invention relates to is a kind of system of single crystal growing furnace technical field, specifically is a kind of single crystal growing furnace isolated system.
Background technology
The Straight pull single crystal growing furnace is a kind of equipment that adopts vertical pulling method to produce silicon single crystal bar.During production, after silicon rod draws moulding, need cooling back taking-up in upper furnace tube, be exposed in the atmosphere to avoid the high temperature silicon rod, influence the silicon rod quality, upper furnace tube need keep vacuum state during cooling.
Two upper furnace tube single crystal growing furnaces are a kind of Straight pull single crystal growing furnaces with two upper furnace tubes.When silicon rod draws moulding and goes forward side by side into colling stages, can corresponding upper furnace tube and main isolating valve be broken away from and biasing, again another upper furnace tube is gone to the crystal pulling position after, continue production, to raise the efficiency.At this moment, the upper furnace tube that is biased need keep vacuum state, accomplishes process of cooling up to its inner high temperature silicon rod.
For the upper furnace tube that makes two upper furnace tube single crystal growing furnaces can need the configuration vacuum separation valve breaking away from main isolating valve continued maintenance vacuum state.
Widely used segregaion valve mainly contains 2 kinds on the single crystal growing furnace at present: first kind is vertical segregaion valve, and its valve board assembly can upwards be done 90 ° of upsets, is closing condition during valve board assembly to level attitude, is open mode during to 90 ° of positions.But the shortcoming when this segregaion valve applies to upper furnace tube is: the first, and valve board assembly is upset upwards, and easy and crystal bar bumps; The second, vertically segregaion valve vertical direction size is bigger, can increase the complete machine height greatly; The 3rd, existing vertical segregaion valve adopts the sealing of O type circle, under hot environment, possibly come off because of O type circle is softening, and all need change O type circle after each the production; The 4th, for guaranteeing O type circle works better, need a large amount of water coolants.
Second kind is horizontal segregaion valve, and its valve board assembly can move in the horizontal direction, to realize switching. the shortcoming when this segregaion valve applies to upper furnace tube is: horizontal direction is oversize, can't be installed on the compact two upper furnace tube single crystal growing furnaces of space layout.
In sum, existing segregaion valve mainly exists mode of operation to be not suitable for two upper furnace tube single crystal growing furnaces, Working environment is had relatively high expectations, and problem such as volume is excessive.
Summary of the invention
The object of the invention just is to overcome the defective of above-mentioned segregaion valve, thereby a kind of single crystal growing furnace isolated system is provided.
For achieving the above object; Single crystal growing furnace isolated system of the present invention comprises: valvegear and holddown are driven in containment member, valve board assembly, control; Wherein: control is driven valvegear and all is fixedly connected with valve body with holddown; Valve board assembly and control are driven valvegear and are flexibly connected, and containment member is arranged in the valve body and with valve body and is fixedly connected.
Described containment member comprises: the annular pressing plate, support ring, ring and the diaphragm seal that have hollow structure; Wherein: described annular pressing plate comprises: canned paragraph is pressed section with support, and wherein: canned paragraph presses section to be fixedly connected with support, and canned paragraph is fixedly connected with an end face of valve body; Support is pressed between section and this end face gapped; Support ring is arranged at support and presses on the section, and diaphragm seal is arranged on the support ring, and ring is arranged on the diaphragm seal.
Described diaphragm seal is a ring texture; The xsect of sealing sheet is " U " type; The sealing sheet comprises: the section of pressing solidly, sealing segmental arc and fixing section; Wherein: the section of pressing solidly, sealing segmental arc and fix section and be connected in series successively, the section of pressing solidly is arranged between support ring and the ring, and the section of pressing solidly contacts with the valve body face and the termination of the section of pressing solidly does not detach the contact surface with valve body.
The material of described diaphragm seal is that stainless steel and high temperature resistant asbestos plate combine at many levels.
The length of the described section of pressing solidly is greater than the length that fixes section.
The external diameter of described support ring and ring is identical, and the internal diameter of support ring is less than the internal diameter of ring.
The material of described support ring and ring is soft graphite.
The support of described annular pressing plate presses the internal diameter of section to equate with the internal diameter of support ring.
Described valve board assembly comprises: press solidly plate, top-pressure part and water coolant discrepancy pipe, wherein: top-pressure part is connected with the same side that water coolant discrepancy Guan Junyu presses solidly plate.
Described water coolant discrepancy pipe inside is provided with connecting pipe.
Described top-pressure part is a zhou duicheng tuxing, and the extended line of the diad of this top-pressure part passes the center of circle, and this top-pressure part is provided with the face that bears down on one.
The described face that bears down on one is the inclined-plane.
The said plate that presses solidly comprises: be used for forming with containment member the shut and the back up pad of sealed structure, wherein: a side of back up pad is fixedly connected with shut, comes in and goes out to manage with top-pressure part and water coolant respectively and be fixedly connected in another side of back up pad.
Described shut is the right cylinder that has the inclined-plane, and the xsect of this shut is divided into two portions, and a part is an isosceles trapezoid, and another part is a rectangle, one side the long base of the isosceles trapezoid of the xsect of shut overlaps with rectangular.
The cylindrical diameter of the rectangular segment of the xsect of described shut is less than the internal diameter of the support ring of containment member.
When the gradient of the isosceles trapezoid part of the xsect of described shut can make shut be horizontal, the inclined-plane of isosceles trapezoid part and the sealing segmental arc of diaphragm seal had points of tangency, were then circumferentially forming a phase tangent plane.
Described back up pad comprises: main part and pipe connecting portion, and wherein: a side of main part is fixedly connected with shut, and another side of main part is fixedly connected with top-pressure part respectively, and pipe connecting portion comes in and goes out to manage with main part and water coolant respectively and is fixedly connected.
Described main part is a right cylinder, and this main part is concentric with shut.
Described pipe connecting portion is a zhou duicheng tuxing, the extended line of the diad of this pipe connecting portion pass main part the cylindrical center of circle and with the diad conllinear of the part that bears down on one.
The thickness of described back up pad is 50.
Described control is driven valvegear and is comprised: open valve cylinder, turning block, rotating shaft and limited block; Wherein: cylinder barrel and the piston rod of opening the valve cylinder flexibly connect with valve body and turning block respectively; Turning block and valve body are connected in series through rotating shaft, and turning block is fixedly connected with rotating shaft, and rotating shaft and valve body flexibly connect; Rotating shaft is fixedly connected with valve board assembly, and limited block is used for the turned position of limit rotation piece and is fixedly connected with valve body.
Describedly open the standard type double-acting cylinder that the valve cylinder is SMC.
Described holddown adopts clamping cylinder, and clamping cylinder is connected with valve body, and the output terminal of this clamping cylinder is provided with compressing member.
The face that bears down on one of the top-pressure part that presses closer end and valve board assembly of described compressing member is suitable, and the end that presses closer of this compressing member is used to compress the valve board assembly that is horizontal, and valve board assembly is not fallen.
The tight vertical xsect of described compressing member is a circular arc.
Described clamping cylinder is the slim cylinder of CDQ2B series.
Described clamping cylinder can be pushed ahead the position that compresses to the face that bears down on one of the top-pressure part that presses closer end and valve board assembly that makes compressing member with compressing member.
When opening valve board assembly, start clamping cylinder it is retreated, compressing member is retreated, remove the pressuring action of compressing member to valve board assembly; Start and open the valve cylinder, the piston rod of valve cylinder is stretched in the cylinder barrel, turning block drives rotating shaft and rotates, and rotating shaft drives valve board assembly and rotates, and valve board assembly is opened downwards.The movement travel of piston rod in cylinder barrel can the limit rotation piece angle of rotation, thereby the angle of rotation of control rotating shaft, the limit position that makes the downward open mode of valve board assembly is to be rotated down 90 °.Limited block is used for the turned position of limit rotation piece, has promptly limited the extreme angles of rotating shaft rotation, and the limit position when making the downward open mode of valve board assembly is be rotated down 90 °.
When the shut-off valve board component, start and open the valve cylinder, the piston rod of valve cylinder is stretched out in the cylinder barrel; Turning block drives rotating shaft and rotates; Rotating shaft drives valve board assembly and rotates, and valve board assembly is upwards closed, and starts clamping cylinder and makes its propelling; Compressing member is advanced, and compressing member is to the generation pressuring action of valve board assembly.
The present invention makes valve board assembly ability realization level to downward 90 ° of upsets through opening the control of valve cylinder, and valve board assembly upset has downwards been guaranteed can not have influence on crystal bar when segregaion valve opens and closes.
When valve board assembly is positioned at level attitude, logical through holddown for valve board assembly provides enough snap-in forces, to guarantee sealing effectiveness.
The vertical segregaion valve of the present invention's size compared has in vertical direction reduced half the, and the horizontal direction size is identical with vertical segregaion valve, and much smaller than horizontal segregaion valve.
The present invention adopts soft graphite support ring, soft graphite ring and " U " shaped metal diaphragm seal to realize the hard sealing structure of valve board assembly and valve body, to replace the sealing of O type circle.Eliminated O type circle possibility Yin Gaowen and the factor leading to social instability of softening and shedding after using hard sealing to substitute the sealing of O type circle.And the hard sealing element life-span is longer, need not frequent change.
Hard sealing structure of the present invention can be anti-high temperature more than 1500 ℃, so can cancel the valve plate cooling water channel, reduce tongued and grooved flanges place cooling water flow, cut down finished cost greatly.
Description of drawings
Fig. 1 is an overall schematic of the present invention.
Fig. 2 is Fig. 1 sectional view, wherein: (a) for valve board assembly is in open mode, (b) be in closing condition for valve board assembly.
Fig. 3 (a) is the partial enlarged drawing at the A place of Fig. 2 (b).
Fig. 3 (b) is the structural representation of diaphragm seal.
Fig. 4 is the partial enlarged drawing at the B place of Fig. 2 (a).
Fig. 5 is the structural representation of valve board assembly, and wherein: (a) being stereographic map, (b) is upward view, (c) is front view, (d) is vertical view, (e) is left view.
Fig. 6 is the C-C cross section view of Fig. 5 (d).
Fig. 7 is the support ring structural representation, and wherein: (a) being vertical view, (b) is front view.
Embodiment
Technical characterictic of the present invention is described further with specific embodiment below in conjunction with accompanying drawing.Should be understood that following examples only are used to the present invention is described but not are used to limit scope of the present invention.
Embodiment 1
As depicted in figs. 1 and 2; Single crystal growing furnace isolated system of the present invention comprises: valvegear 3 and holddown 4 are driven in containment member 1, valve board assembly 2, control; Wherein: control is driven valvegear 3 and all is fixedly connected with valve body 5 with holddown 4; Valve board assembly 2 is driven valvegear 3 with control and is flexibly connected, and containment member 1 is arranged in the valve body 5 and with valve body 5 and is fixedly connected.
Like Fig. 2, Fig. 3, Fig. 4 and shown in Figure 7; Described containment member 1 comprises: the annular pressing plate 11, support ring 12, ring 13 and the diaphragm seal 14 that have hollow structure; Wherein: described annular pressing plate 11 comprises: canned paragraph 111 is pressed section 112 with support, and canned paragraph 111 presses section 112 to be fixedly connected with support, and canned paragraph 111 is fixedly connected with an end face of valve body 5; Support is pressed between section 112 and this end face gapped; Support ring 12 is arranged at support and presses on the section 112, and diaphragm seal 14 is arranged on the support ring 12, and ring 13 is arranged on the diaphragm seal 14.
Described diaphragm seal 14 is a ring texture; The xsect of sealing sheet 14 is " U " type; Sealing sheet 14 comprises: the section of pressing solidly 141, sealing segmental arc 142 and fixing section 143; Wherein: the section of pressing solidly 141, sealing segmental arc 142 and fix section 143 and be connected in series successively, the section of pressing solidly 141 is arranged between support ring 12 and the ring 13, and the section of pressing solidly 141 contacts with 5 of valve bodies and the termination of the section of pressing solidly 141 does not detach the contact surface with valve body 5.
The material of described diaphragm seal 14 is that stainless steel and high temperature resistant asbestos plate combine at many levels.
The length of the described section of pressing solidly 141 is greater than the length that fixes section 143.
Described support ring 12 is identical with the external diameter of ring 13, and the inner diameter d 1 of support ring 12 is less than the inner diameter d 2 of ring 13.
The material of described support ring 12 and ring 13 is soft graphite.
The support of described annular pressing plate 11 presses the inner diameter d 3 of section 112 to equate with the inner diameter d 1 of support ring 12.
As shown in Figure 5, described valve board assembly 2 comprises: press solidly plate 21, top-pressure part 22 and water coolant discrepancy pipe 23, wherein: top-pressure part 22 all is connected with the same side that presses solidly plate 21 with water coolant discrepancy pipe 23.
As shown in Figure 6, described water coolant discrepancy pipe 23 inside are provided with connecting pipe 231.
Described top-pressure part 22 is a zhou duicheng tuxing, and the extended line of the diad of this top-pressure part 22 passes the center of circle, and this top-pressure part 22 is provided with the face 221 that bears down on one.
The described face 221 that bears down on one is the inclined-plane.
The said plate 21 that presses solidly comprises: the shut 211 and back up pad 212 that are used for forming with containment member 1 sealed structure; Wherein: a side of back up pad 212 is fixedly connected with shut 211, and another side of back up pad 212 is fixedly connected with top-pressure part 22 and water coolant discrepancy pipe 23 respectively.
Described shut 211 is for having the right cylinder on inclined-plane; The xsect of this shut 211 is divided into two portions; A part is an isosceles trapezoid 2111, and another part is a rectangle 2112, one side the long base of the isosceles trapezoid 2111 of the xsect of shut 211 and overlapping of rectangle 2112.
The cylindrical diameter of rectangle 2112 parts of the xsect of described shut 211 is less than the internal diameter of the support ring 12 of containment member 1.
When the gradient of isosceles trapezoid 2111 parts of the xsect of described shut 211 can make shut 211 be horizontal, the inclined-plane of isosceles trapezoid 2111 parts and the sealing segmental arc 142 of diaphragm seal 14 had points of tangency C, were then circumferentially forming a phase tangent plane.
The thickness of described shut 211 is 32.
Described back up pad 212 comprises: main part 2121 and pipe connecting portion 2122; Wherein: a side of main part 2121 is fixedly connected with shut 211; Another side of main part 2121 is fixedly connected with top-pressure part 22 respectively, and pipe connecting portion 2122 is fixedly connected with main part 2121 and water coolant discrepancy pipe 23 respectively.
Described main part 2121 is a right cylinder, and this main part 2121 is concentric with shut 211.
Described pipe connecting portion 2122 is a zhou duicheng tuxing, the extended line of the diad of this pipe connecting portion 2122 pass main part 2121 the cylindrical center of circle and with the diad conllinear of top-pressure part 22.
The thickness of described back up pad 212 is 50.
As depicted in figs. 1 and 2; Described control is driven valvegear 3 and is comprised: open valve cylinder 31, turning block 32, rotating shaft 33 and limited block 34; Wherein: the cylinder barrel 35 of opening valve cylinder 31 flexibly connects with valve body 5 and turning block 32 respectively with piston rod 36; Turning block 32 is connected in series through rotating shaft 33 with valve body 5, and turning block 32 is fixedly connected with rotating shaft 33, and rotating shaft 33 flexibly connects with valve body 5; Rotating shaft 33 is fixedly connected with valve board assembly 2, and limited block 34 is used for the turned position of limit rotation piece 32 and is fixedly connected with valve body 5.
The described valve cylinder 31 of opening is the standard type double-acting cylinder of SMC.
Described holddown 4 adopts clamping cylinder 41, and clamping cylinder 41 is connected with valve body 5, and the output terminal of this clamping cylinder 41 is provided with compressing member 42.
The face 221 that bears down on one of the top-pressure part 22 that presses closer end 421 and valve board assembly 2 of described compressing member 42 is suitable, and the end 421 that presses closer of this compressing member 42 is used to compress the valve board assembly 2 that is horizontal, and valve board assembly 2 is not fallen.
The xsect that presses closer end 421 of described compressing member 42 is a circular arc.
Described clamping cylinder is the slim cylinder of CDQ2B series.
Described clamping cylinder 41 can be pushed ahead the position that compresses to the face 221 that bears down on one of the top-pressure part 22 that presses closer end 421 and valve board assembly 2 that makes compressing member 42 with compressing member 42.
When opening valve board assembly 2, start clamping cylinder 41 it is retreated, compressing member 42 is retreated, remove the pressuring action of 42 pairs of valve board assemblies 2 of compressing member; Start and open valve cylinder 31, the piston rod 36 of valve cylinder 31 is stretched in the cylinder barrel 35, turning block 32 drives rotating shaft 33 and rotates, and rotating shaft 33 drives valve board assembly 2 and rotates, and valve board assembly 2 is opened downwards.The movement travel of piston rod 36 in cylinder barrel 35 can limit rotation piece 32 angle of rotation, thereby the angle of rotation of control rotating shaft 33, the limit position that makes valve board assembly 2 downward open modes is to be rotated down 90 °.Limited block 34 is used for the turned position of limit rotation piece 32, has promptly limited the extreme angles of rotating shaft 33 rotations, and the limit position when making the downward open mode of valve board assembly 2 is be rotated down 90 °.
When shut-off valve board component 2, start and open valve cylinder 31, the piston rod 36 of valve cylinder 31 is stretched out in the cylinder barrel 35; Turning block 32 drives rotating shaft 33 and rotates; Rotating shaft 33 drives valve board assembly 2 and rotates, and valve board assembly 2 is upwards closed, and starts clamping cylinder 41 and makes its propelling; Make compressing member 42 advance the generation pressuring action of 42 pairs of valve board assemblies 2 of compressing member.
Claims (10)
1. single crystal growing furnace isolated system; It is characterized in that; Comprise: valvegear and holddown are driven in containment member, valve board assembly, control; Wherein: control is driven valvegear and all is fixedly connected with valve body with holddown, and valve board assembly and control are driven valvegear and flexibly connected, and containment member is arranged in the valve body and with valve body and is fixedly connected.
2. single crystal growing furnace isolated system according to claim 1 is characterized in that, described containment member comprises: the annular pressing plate, support ring, ring and the diaphragm seal that have hollow structure; Wherein: described annular pressing plate comprises: canned paragraph is pressed section with support, and canned paragraph presses section to be fixedly connected with support, and canned paragraph is fixedly connected with an end face of valve body; Support is pressed between section and this end face gapped; Support ring is arranged at support and presses on the section, and diaphragm seal is arranged on the support ring, and ring is arranged on the diaphragm seal.
3. single crystal growing furnace isolated system according to claim 2; It is characterized in that described diaphragm seal is a ring texture, the xsect of sealing sheet is " U " type; The sealing sheet comprises: the section of pressing solidly, sealing segmental arc and fixing section; Wherein: the section of pressing solidly, sealing segmental arc and fix section and be connected in series successively, the section of pressing solidly is arranged between support ring and the ring, and the section of pressing solidly contacts with the valve body face and the termination of the section of pressing solidly does not detach the contact surface with valve body.
4. single crystal growing furnace isolated system according to claim 3 is characterized in that, the length of the described section of pressing solidly is greater than the length that fixes section.
5. single crystal growing furnace isolated system according to claim 2 is characterized in that, the external diameter of described support ring and ring is identical, and the internal diameter of support ring is less than the internal diameter of ring.
6. single crystal growing furnace isolated system according to claim 1 is characterized in that, described valve board assembly comprises: press solidly plate, top-pressure part and water coolant discrepancy pipe, wherein: top-pressure part is connected with the same side that water coolant discrepancy Guan Junyu presses solidly plate.
7. single crystal growing furnace isolated system according to claim 6 is characterized in that, described top-pressure part is a zhou duicheng tuxing, and the extended line of the diad of this top-pressure part passes the center of circle, and this top-pressure part is provided with the face that bears down on one.
8. single crystal growing furnace isolated system according to claim 6; It is characterized in that; The said plate that presses solidly comprises: the shut and the back up pad that are used for forming with containment member sealed structure; Wherein: a side of back up pad is fixedly connected with shut, comes in and goes out to manage with top-pressure part and water coolant respectively and be fixedly connected in another side of back up pad.
9. single crystal growing furnace isolated system according to claim 1 is characterized in that, described control is driven valvegear and comprised: open valve cylinder, turning block, rotating shaft and limited block; Wherein: cylinder barrel and the piston rod of opening the valve cylinder flexibly connect with valve body and turning block respectively; Turning block and valve body are connected in series through rotating shaft, and turning block is fixedly connected with rotating shaft, and rotating shaft and valve body flexibly connect; Rotating shaft is fixedly connected with valve board assembly, and limited block is used for the turned position of limit rotation piece and is fixedly connected with valve body.
10. single crystal growing furnace isolated system according to claim 1 is characterized in that, described holddown adopts clamping cylinder, and clamping cylinder is connected with valve body, and the output terminal of this clamping cylinder is provided with compressing member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110300690.9A CN102330145B (en) | 2011-09-28 | 2011-09-28 | Single crystal furnace isolation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110300690.9A CN102330145B (en) | 2011-09-28 | 2011-09-28 | Single crystal furnace isolation system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102330145A true CN102330145A (en) | 2012-01-25 |
| CN102330145B CN102330145B (en) | 2016-05-04 |
Family
ID=45482102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110300690.9A Active CN102330145B (en) | 2011-09-28 | 2011-09-28 | Single crystal furnace isolation system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102330145B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109253266A (en) * | 2018-10-19 | 2019-01-22 | 浙江晶阳机电有限公司 | Valve plate mobile device is isolated in single crystal growing furnace |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0217518B2 (en) * | 1984-11-13 | 1990-04-20 | Kokusai Electric Co Ltd | |
| JP2000211989A (en) * | 1999-01-22 | 2000-08-02 | Toshiba Ceramics Co Ltd | Single crystal pulling apparatus |
| CN201321510Y (en) * | 2008-12-03 | 2009-10-07 | 河北晶龙阳光设备有限公司 | Rotating isolation valve for crystal growing device |
| CN201496575U (en) * | 2009-09-30 | 2010-06-02 | 中冶赛迪工程技术股份有限公司 | Sealing valve used under high-temperature environment |
| CN101824656A (en) * | 2010-04-29 | 2010-09-08 | 杭州富通半导体设备科技有限公司 | Vice furnace door-opening type single crystal furnace |
| CN201651347U (en) * | 2010-04-20 | 2010-11-24 | 宁夏日晶电子科技有限公司 | Integrated electric and hand-operated isolation valve |
-
2011
- 2011-09-28 CN CN201110300690.9A patent/CN102330145B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0217518B2 (en) * | 1984-11-13 | 1990-04-20 | Kokusai Electric Co Ltd | |
| JP2000211989A (en) * | 1999-01-22 | 2000-08-02 | Toshiba Ceramics Co Ltd | Single crystal pulling apparatus |
| CN201321510Y (en) * | 2008-12-03 | 2009-10-07 | 河北晶龙阳光设备有限公司 | Rotating isolation valve for crystal growing device |
| CN201496575U (en) * | 2009-09-30 | 2010-06-02 | 中冶赛迪工程技术股份有限公司 | Sealing valve used under high-temperature environment |
| CN201651347U (en) * | 2010-04-20 | 2010-11-24 | 宁夏日晶电子科技有限公司 | Integrated electric and hand-operated isolation valve |
| CN101824656A (en) * | 2010-04-29 | 2010-09-08 | 杭州富通半导体设备科技有限公司 | Vice furnace door-opening type single crystal furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109253266A (en) * | 2018-10-19 | 2019-01-22 | 浙江晶阳机电有限公司 | Valve plate mobile device is isolated in single crystal growing furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102330145B (en) | 2016-05-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104015089A (en) | Clamp for automatically clamping and positioning flange | |
| CN202302083U (en) | Hydraulic three-way stop valve | |
| CN204239798U (en) | A kind of high temperature resistant upper-mounting type ball valve | |
| WO2020135120A1 (en) | Ceramic tile die, expanded ceramic tile die support, and ceramic tile made out of die | |
| CN102330145A (en) | Single crystal furnace isolation system | |
| CN204076616U (en) | A kind of novel evacuated apparatus for pouring | |
| CN210420014U (en) | Split type middle barrel connecting structure for blast furnace distributor | |
| CN201030434Y (en) | Ladle outer-loading air brick hot drawing apparatus | |
| CN116475991A (en) | Sectional type mounting tool and method suitable for mounting large-size floating sealing ring | |
| CN104595512A (en) | Water-cooled double-valve-plate high-temperature gate valve | |
| CN110216196A (en) | The floating punch hot-forming die of steel patch plate and hot press-formed method | |
| CN213512205U (en) | Self-positioning top-mounted slag ball locking valve | |
| CN201827385U (en) | Vacuum manual all-metal valve | |
| CN202297847U (en) | Rotating mechanism for sealing valve plate of single crystal furnace | |
| CN201827393U (en) | Special double-seal hydraulic control butterfly valve for hydroelectricity | |
| CN204019887U (en) | There is the TOP-TIP of removable needle covering device | |
| CN102910566A (en) | Heat-seal device for sealing aluminum-film covers | |
| CN103213245B (en) | Transformer manufacture vacuum (-tight) housing and use the transformer manufacturing installation of this vacuum (-tight) housing | |
| CN205056826U (en) | Novel mould of suppression head | |
| CN208417562U (en) | A kind of valve plate hold-down mechanism for vacuum separation valve | |
| CN101672718B (en) | Water pressure testing device of intermediate heat exchanger | |
| CN207577189U (en) | A kind of locking decompressor of erosion control internal lining pipe | |
| CN219195095U (en) | Compression sealing device of nitriding equipment | |
| CN204469372U (en) | A kind of efficient filter press | |
| CN204592359U (en) | Bellows parallel gate valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |