CN101824656A - Vice furnace door-opening type single crystal furnace - Google Patents
Vice furnace door-opening type single crystal furnace Download PDFInfo
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- CN101824656A CN101824656A CN201010161413A CN201010161413A CN101824656A CN 101824656 A CN101824656 A CN 101824656A CN 201010161413 A CN201010161413 A CN 201010161413A CN 201010161413 A CN201010161413 A CN 201010161413A CN 101824656 A CN101824656 A CN 101824656A
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Abstract
The invention relates to a vice furnace door-opening type single crystal furnace relating to a single crystal furnace. The furnace body of the single crystal furnace is sequentially provided with main parts such as a storage warehouse, a vice furnace, a furnace cover, a main furnace and a furnace bottom plate from top to bottom. The single crystal furnace is characterized in that the front face of the vice furnace is provided with a vice furnace door-opening device, and the lower end of the vice furnace is provided with a rotation type isolation valve device; the connection position between the furnace cover and the main furnace is provided with a protection baffle plate; a screw type water channel surrounding the main furnace from bottom to top and distributed in a screw mode is arranged in a cooling interlayer of the main furnace; and the end planes of two vacuum tubes connected to the lower part of the main furnace are respectively provided with two same anti-explosion valves. The invention is convenient for crystal obtaining, vice furnace cleaning, intermediate doping and secondary material feeding in the production process. The height of the furnace body is reduced, the isolation performance of the main furnace and the vice furnace is improved, the cooling effect is improved, the protection measure is further perfected, and the safe production is ensured.
Description
Technical field:
The present invention relates to a kind of vice furnace door-opening type single crystal furnace.
Background technology:
The secondary furnace structure of existing single crystal growing furnace mostly is the barrel type structure, thoroughly dedusting, and must rise secondary stove and revolute stove could take out single crystal rod, and the operating space is bigger, is awkward, and also inconvenience is mixed and secondary batching midway; Major and minor stove disrupter mostly is the flip-shell disrupter, so must strengthen the body of heater height, it is bigger to cause body of heater to take up room, and is awkward; Existing single crystal growing furnace master stove cooling sandwith layer is simple in structure, and its inner each several part coolant temperature height skewness has considerable influence to cooling performance, influences service life of equipment; Simultaneously, furnace pressure is excessive in production process, and furnace gas is ejected, and causes dangerous the generation, and existing single crystal growing furnace does not have safety prevention measure or safety prevention measure is too simple, so it is very important to improve safety device.
Summary of the invention:
The invention provides a kind of vice furnace door-opening type single crystal furnace, it has made things convenient for getting crystalline substance, the cleaning of secondary stove, mix and secondary batching in the production process midway, reduces the body of heater height, improve major-minor stove isolation performance, improve cooling performance, further improved safeguard procedures, guaranteed safety in production.
The present invention is achieved by the following technical solution: a kind of vice furnace door-opening type single crystal furnace, its body of heater major parts from top to bottom is followed successively by: storage warehouse, secondary stove, bell, main stove, drop-bottom, it is characterized in that: the front of secondary stove is provided with secondary stove door opener, the lower end of secondary stove is provided with rotary segregaion valve device, the junction of bell and main stove is provided with protective baffle plate, be provided with in the main stove cooling sandwith layer from the bottom to top around main stove and the spiral water channel that distributes with spiral form, two valve tube end faces that connect with main stove bottom are respectively equipped with two identical Explosion-proof valves.
Described secondary stove door opener comprises fire door, locking spanner, sealed strip, locking bail, locking connecting rod, door hinge, wherein fire door is in secondary stove front, and be connected with secondary stove by door hinge, the locking spanner is connected in secondary stove lower end and with the locking connecting rod, locks connecting rod and is connected with locking bail.
Described fire door is shaped as rectangle, and its inside is provided with a cooling sandwith layer, and its outer lower portion is provided with a water-in, vision slit, door guard bar, and its outer upper is provided with a water outlet, and its side is provided with auxiliary catch, and sealed strip is annular and is located on the fire door.
Described rotary segregaion valve device comprises horizontal valve plate, valve storehouse, valve handle, valve rotating shaft, water-cooled tube, rotary valve sealing-ring, horizontal valve plate all is connected with the valve rotating shaft with water-cooled tube, wherein water-cooled tube is on horizontal valve plate top, and valve handle is connected with the valve rotating shaft, and the valve storehouse is on right side, secondary stove lower end.
Described spiral water channel connects main stove water-in and main stove water outlet respectively, and around the spiral arrangement of main stove.
Described protective shield is circular-arc, and by bolting on the bell flange.
Described Explosion-proof valve comprises safe valve gap, emergency valve seat, explosion trap sealing-ring, pivot pin, wherein emergency valve seat is connected with the valve tube end face, pivot pin is connected with safe valve gap with emergency valve seat respectively, and safe valve gap is on emergency valve seat top, and sealing-ring is between emergency valve seat and safe valve gap.
The invention has the beneficial effects as follows: adopt secondary stove door opener to make things convenient in secondary furnace chamber and take out crystal, cleaning deposition refuse, prevent that refuse stains crystalline in process of production, improve the quality of products; Adopt rotary segregaion valve device to reduce the height of whole body of heater, improved the isolation effect of main stove and secondary stove, improve isolation performance; After adopting spiral water channel to make cooling fluid enter main stove cooling sandwith layer, rise around the body of heater spiral, cooling fluid constantly circulates, and each part of the main stove cooling sandwith layer of flowing through, main stove is cooled off in process of production uniformly, improve cooling performance, prolong service life of equipment; When high-temperature gas is arranged in the stove from bell and the ejection of main stove junction, adopt protective shield can make the horizontal-jet direction of high-temperature gas change downward direction into, avoid gas level to spray and cause danger, the protection operational zone.Adopt Explosion-proof valve can prevent that the danger that causes because of furnace pressure is excessive from taking place, and ensures safety in production.
Description of drawings:
Fig. 1 is a front view of the present invention;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the outside front view of described fire door;
Fig. 4 is the left view of Fig. 3;
Fig. 5 is the inboard front view of described fire door;
Fig. 6 is the front view of described rotation segregaion valve device;
Fig. 7 is the A-A sectional view of Fig. 6;
Fig. 8 is the front view of described Explosion-proof valve;
Fig. 9 is the vertical view of Fig. 8;
Figure 10 is the front view of described protective baffle plate;
Figure 11 is the B-B sectional view of Figure 10.
Embodiment:
Among the figure, 1, secondary stove, 2, the locking connecting rod, 3, the door water-in, 4, vision slit, 5, the locking spanner, 6, main stove, 7, storage warehouse, 8, the door water outlet, 9, door hinge, 10, fire door, 11, valve handle, 12, the bell flange, 13, the valve rotating shaft, 14, the valve storehouse, 15, horizontal valve plate, 16, bell, 17, protective shield, 18, main stove water outlet, 19, spiral water channel, 20, main stove water-in, 21, valve tube, 22, pivot pin, 23, the explosion trap sealing-ring, 24, safe valve gap, 25, emergency valve seat, 26, sealed strip, 27, locking bail, 28, auxiliary catch, 29, door guard bar, 30, reinforcing rod, 31, drop-bottom, 32, the rotary valve sealing-ring, 33, water-cooled tube, 34, bolt, 35, the door cooling sandwith layer, 36, main stove cooling sandwith layer.
With reference to Fig. 1, Fig. 2, a kind of vice furnace door-opening type single crystal furnace, its body of heater major parts from top to bottom is followed successively by: storage warehouse 7, secondary stove 1, bell 16, main stove 6, drop-bottom 31, the front of secondary stove 1 is provided with secondary stove door opener, the lower end of secondary stove 1 is provided with rotary segregaion valve device, bell 16 is provided with protective shield 17 with the junction of main stove 6, be provided with in the main stove cooling sandwith layer 36 from the bottom to top around main stove and the spiral water channel 19 that distributes with spiral form, two valve tube 21 end faces that connect with main stove 6 bottoms are respectively equipped with two identical Explosion-proof valves.
Referring to figs. 1 through Fig. 5, secondary stove door opener comprises fire door 10, locking spanner 5, sealed strip 26, locking bail 27, locking connecting rod 2, door hinge 9, wherein fire door is in secondary stove front, and be connected with secondary stove 1 by door hinge 9, locking spanner 5 is connected in secondary stove 1 lower end and with locking connecting rod 2, locking connecting rod 2 is connected with locking bail 27, and sealed strip 26 is rectangle and is located on the secondary stove 1.Fire door is shaped as rectangle, and its inside is provided with a cooling sandwith layer 35, and its outer lower portion is provided with a water-in 3, vision slit 4, door guard bar 29, and its outer upper is provided with a water outlet 8, and its side is provided with auxiliary catch 28, and sealed strip 26 is for annular and be located at the fire door inboard.
With reference to Fig. 6 and Fig. 7, secondary stove 1 lower end is provided with rotary segregaion valve device, it comprises horizontal valve plate 15, valve storehouse 14, valve handle 11, valve rotating shaft 13, water-cooled tube 33, horizontal valve plate 15 all is connected with valve rotating shaft 13 with water-cooled tube 33, wherein water-cooled tube 33 is on horizontal valve plate 15 tops, valve handle 11 is connected with valve rotating shaft 13, and valve rotating shaft 13 is in valve storehouse 14, and 14 in valve storehouse is connected with secondary stove 1 lower end.Can pull valve handle 11 and make horizontal valve plate 15 move into valve storehouse 14 or move on to bell 16 napexes around valve rotating shaft 13 rotations in the horizontal direction, make main stove 6 be communicated with or isolate with secondary stove 1.
With reference to Fig. 2, spiral water channel 19 connects main stove water-in 20 and main stove water outlet 18 respectively, and around main stove 6 spiral arrangements.
With reference to Figure 10 and Figure 11, protective shield 17 is circular-arc, and is fixed on the bell flange 12 by bolt 34.
With reference to Fig. 8 and Fig. 9, Explosion-proof valve comprises safe valve gap 24, emergency valve seat 25, explosion trap sealing-ring 23, pivot pin 22, wherein emergency valve seat 25 is connected with valve tube 21 1 ends, pivot pin 22 is connected with safe valve gap 24 with emergency valve seat 25 respectively, safe valve gap 24 is on emergency valve seat 25 tops, and explosion trap sealing-ring 23 is between emergency valve seat 25 and safe valve gap 24.
Before the work of the present invention, need open 10 pairs of secondary stoves 1 of fire door clears up, be specially downward trip lock spanner 5 referring to figs. 1 through Fig. 5, driving locking bail 27 by locking connecting rod 2 opens downwards, manual unlocking auxiliary catch 28, pulling door guard bar 29 is opened fire door 10 from left to right, and can carry out the cleaning of secondary stove 1 inwall and rotary segregaion valve device this moment.
After secondary stove 1 cleans out, start water cooling system, with reference to Fig. 2, cooling fluid enters main stove cooling sandwith layer 36 from main stove water-in 20, rise at last from main stove water outlet 18 outflows around main stove spiral from the bottom to top along spiral water channel 19, cooling liquid flowing is through main stove 6 various pieces, cool off comparatively even, until producing the recurrent state that finishes to keep water coolant.
After feeding, check the sealed strip 26 of sealing situation and fire door 10 places between the body of heater, confirm cleaning back banking.Be specially referring to figs. 1 through Fig. 5: pull valve handle 11 and make horizontal valve plate 15 horizontally rotate and move in the valve storehouse 14 around valve rotating shaft 13, spur door guard bar 29 then, fire door 10 is shut from right to left, trip lock spanner 5 then makes progress, driving locking connecting rod 2 upwards closes locking bail 27, manually put auxiliary catch 28, banking is finished.Through vacuumizing the technological process of leak detection → melt → seeding → shouldering → commentaries on classics shoulder → isometrical → crystal growths such as ending, crystal growth is finished.
Temperature in the stove in the normal productive process is 1300 ℃ to 1500 ℃, when pressure in the stove surpasses external atmosphere pressure suddenly because of unexpected situation, be specially with reference to Fig. 8 and Fig. 9: safe valve gap 24 rotates up around pivot pin 22, promptly two Explosion-proof valves can be opened automatically, hot gas ejection in the stove, the pressure that the balance stove is interior and stove is outer.With reference to Figure 10 and Figure 11, for preventing that hot gas is from bell 16 and the ejection of main stove 6 junctions in the stove, protective shield 17 makes the gas of horizontal-jet change downward direction into, forms duplicate protection simultaneously.
Crystal production finishes, observe by vision slit 4, single crystal rod risen to be higher than horizontal valve plate 15 about 100mm places, argon gas is poured in continuation in stove, applying argon gas stops when making in the stove to about 760Toor, is specially referring to figs. 1 through Fig. 5 then: downward trip lock spanner 5, by locking connecting rod 2 locking bail 27 is opened downwards, manual unlocking auxiliary catch 28, pulling door guard bar 29 is opened fire door 10 from left to right.Be specially with reference to Fig. 6 and Fig. 7 this moment: pull valve handle 11 and horizontal valve plate 15 is horizontally rotated from valve storehouse 14 around valve rotating shaft 13 shift out, forward bell 16 tops to, main stove 6 is isolated with secondary stove 1.Take out crystal with mechanical manipulator then.
Above-mentioned embodiment is only for being illustrated more clearly in the present invention; and be not qualification to the specific embodiment of the invention; can also make multi-form variation or change on this basis, still be within protection scope of the present invention and belong to variation or the change that the present invention extends out.
Claims (7)
1. vice furnace door-opening type single crystal furnace, its body of heater major parts from top to bottom is followed successively by: storage warehouse, secondary stove, bell, main stove, drop-bottom, it is characterized in that: the front of secondary stove is provided with secondary stove door opener, the lower end of secondary stove is provided with rotary segregaion valve device, the junction of bell and main stove is provided with protective shield, be provided with in the main stove cooling sandwith layer from the bottom to top around main stove and the spiral water channel that distributes with spiral form, the end face of two valve tubes that connect with main stove bottom is respectively equipped with two identical Explosion-proof valves.
2. a kind of vice furnace door-opening type single crystal furnace as claimed in claim 1, it is characterized in that described secondary stove door opener comprises fire door, locking spanner, sealed strip, locking bail, locking connecting rod, door hinge, wherein be provided with fire door in secondary stove front, and be connected with secondary stove by door hinge, the locking spanner is connected in secondary stove lower end and with the locking connecting rod, and the locking connecting rod is connected with locking bail.
3. a kind of vice furnace door-opening type single crystal furnace as claimed in claim 1 or 2, it is characterized in that described fire door is shaped as rectangle, its inside is provided with a cooling sandwith layer, its outer lower portion is provided with a water-in, vision slit, door guard bar, its outer upper is provided with a water outlet, its side is provided with auxiliary catch, and sealed strip is annular and is located on the fire door.
4. a kind of vice furnace door-opening type single crystal furnace as claimed in claim 1, it is characterized in that described rotary segregaion valve device comprises horizontal valve plate, valve storehouse, valve handle, valve rotating shaft, water-cooled tube, rotary valve sealing-ring, horizontal valve plate all is connected with the valve rotating shaft with water-cooled tube, wherein water-cooled tube is on horizontal valve plate top, the rotary valve sealing-ring is in the valve plate bottom, valve handle is connected with the valve rotating shaft, and the valve storehouse is on right side, secondary stove lower end.
5. a kind of vice furnace door-opening type single crystal furnace as claimed in claim 1 is characterized in that described spiral water channel connects main stove water-in and main stove water outlet respectively, and around the spiral arrangement of main stove.
6. a kind of vice furnace door-opening type single crystal furnace as claimed in claim 1 is characterized in that described protective shield is circular-arc, and by bolting on the bell flange.
7. a kind of vice furnace door-opening type single crystal furnace as claimed in claim 1, it is characterized in that described Explosion-proof valve comprises safe valve gap, emergency valve seat, explosion trap sealing-ring, pivot pin, wherein emergency valve seat is connected with the valve tube end face, pivot pin is connected with safe valve gap with emergency valve seat respectively, safe valve gap is on emergency valve seat top, and the explosion trap sealing-ring is between emergency valve seat and safe valve gap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201010161413A CN101824656A (en) | 2010-04-29 | 2010-04-29 | Vice furnace door-opening type single crystal furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201010161413A CN101824656A (en) | 2010-04-29 | 2010-04-29 | Vice furnace door-opening type single crystal furnace |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102330145A (en) * | 2011-09-28 | 2012-01-25 | 上海汉虹精密机械有限公司 | Single crystal furnace isolation system |
| CN102851746A (en) * | 2012-09-26 | 2013-01-02 | 南京晶升能源设备有限公司 | Bidirectional symmetric pump-down system for sapphire single crystal furnace |
| CN103993350A (en) * | 2014-04-21 | 2014-08-20 | 洛阳金诺机械工程有限公司 | Silicon core drawing furnace chamber |
| CN107151819A (en) * | 2017-06-08 | 2017-09-12 | 浙江晶盛机电股份有限公司 | For monocrystalline silicon growing furnace furnace chamber retaining mechanism |
| CN107541771A (en) * | 2017-07-20 | 2018-01-05 | 上海汉虹精密机械有限公司 | The growth furnace of major diameter single crystal silicon ingot can be grown in bell and furnace tube |
| CN115094510A (en) * | 2022-05-25 | 2022-09-23 | 连城凯克斯科技有限公司 | Pressure relief method for split type czochralski crystal growing furnace |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102330145A (en) * | 2011-09-28 | 2012-01-25 | 上海汉虹精密机械有限公司 | Single crystal furnace isolation system |
| CN102330145B (en) * | 2011-09-28 | 2016-05-04 | 上海汉虹精密机械有限公司 | Single crystal furnace isolation system |
| CN102851746A (en) * | 2012-09-26 | 2013-01-02 | 南京晶升能源设备有限公司 | Bidirectional symmetric pump-down system for sapphire single crystal furnace |
| CN102851746B (en) * | 2012-09-26 | 2015-06-17 | 南京晶升能源设备有限公司 | Bidirectional symmetric pump-down system for sapphire single crystal furnace |
| CN103993350A (en) * | 2014-04-21 | 2014-08-20 | 洛阳金诺机械工程有限公司 | Silicon core drawing furnace chamber |
| CN107151819A (en) * | 2017-06-08 | 2017-09-12 | 浙江晶盛机电股份有限公司 | For monocrystalline silicon growing furnace furnace chamber retaining mechanism |
| CN107151819B (en) * | 2017-06-08 | 2023-06-23 | 浙江晶盛机电股份有限公司 | Furnace chamber locking mechanism for monocrystalline silicon growth furnace |
| CN107541771A (en) * | 2017-07-20 | 2018-01-05 | 上海汉虹精密机械有限公司 | The growth furnace of major diameter single crystal silicon ingot can be grown in bell and furnace tube |
| CN115094510A (en) * | 2022-05-25 | 2022-09-23 | 连城凯克斯科技有限公司 | Pressure relief method for split type czochralski crystal growing furnace |
| CN115094510B (en) * | 2022-05-25 | 2024-04-09 | 连城凯克斯科技有限公司 | Pressure relief method for split type Czochralski single crystal furnace |
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Owner name: FUTONG GROUP CO., LTD. Free format text: FORMER OWNER: HANGZHOU FUTONG SEMICONDUCTOR EQUIPMENT TECHNOLOGY CO., LTD. Effective date: 20130124 |
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Effective date of registration: 20130124 Address after: 311400, No. 1-8, Fortis Science Park, Golden Autumn Road, Zhejiang, Fuyang Applicant after: Futong Group Co., Ltd. Address before: 311400, No. 1-8, Fortis Science Park, Golden Autumn Road, Zhejiang, Fuyang Applicant before: Hangzhou Futong Semiconductor Equipment Technology Co., Ltd. |
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Application publication date: 20100908 |