CN111850678A - Auxiliary furnace chamber lifting and rotating device for single crystal furnace - Google Patents
Auxiliary furnace chamber lifting and rotating device for single crystal furnace Download PDFInfo
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- CN111850678A CN111850678A CN202010852900.4A CN202010852900A CN111850678A CN 111850678 A CN111850678 A CN 111850678A CN 202010852900 A CN202010852900 A CN 202010852900A CN 111850678 A CN111850678 A CN 111850678A
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- 239000013078 crystal Substances 0.000 title claims abstract description 38
- 230000007246 mechanism Effects 0.000 claims abstract description 110
- 230000003028 elevating effect Effects 0.000 claims abstract description 20
- 230000008878 coupling Effects 0.000 claims abstract description 15
- 238000010168 coupling process Methods 0.000 claims abstract description 15
- 238000005859 coupling reaction Methods 0.000 claims abstract description 15
- 239000003638 chemical reducing agent Substances 0.000 claims description 67
- 238000006073 displacement reaction Methods 0.000 claims description 18
- 230000007704 transition Effects 0.000 claims description 17
- 230000001174 ascending effect Effects 0.000 claims description 14
- 238000000034 method Methods 0.000 abstract description 11
- 230000000694 effects Effects 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000008569 process Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000003014 reinforcing effect Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000005728 strengthening Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910021422 solar-grade silicon Inorganic materials 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/002—Continuous growth
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
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- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a field that relates to a single crystal growing furnace, especially a vice furnace chamber goes up and down and rotary device for single crystal growing furnace sets up in one side of main furnace chamber and is connected with the vice furnace chamber, including support frame, elevating system, rotary mechanism and the coupling mechanism who connects the vice furnace chamber, the support frame link to each other with main furnace chamber frame, be provided with the main shaft on the support frame, elevating system set up on the support frame and with main shaft swing joint, rotary mechanism set up at the top of support frame and be connected with the main shaft, coupling mechanism's one end be connected with elevating system, its other end is connected with rotary mechanism, coupling mechanism sets up in the side of main shaft and with main shaft fixed connection. The method has the advantages of improving the running stability of the single crystal furnace and ensuring the effect that the single crystal furnace can run safely and reliably for a long time in the production process.
Description
Technical Field
The application relates to the field of single crystal furnaces, in particular to a lifting and rotating device of an auxiliary furnace chamber for a single crystal furnace.
Background
At present, a single crystal furnace is the highest-yield device for producing solar-grade silicon single crystal rods, and in order to further improve the productivity, reduce the production cost and improve the production efficiency of the silicon single crystal rods, a plurality of silicon rod manufacturers mostly adopt a method of feeding the silicon single crystal furnace for multiple times and pulling the silicon single crystal rods for multiple times to improve the productivity. This requires that the auxiliary furnace chamber be lifted and unscrewed several times during the preparation of the silicon rod in order to achieve multiple charging.
The single crystal furnace on the market is provided with a secondary furnace chamber lifting device which is mostly driven by hydraulic pressure, the method has higher cost, and the later maintenance is not very convenient; the rotating device is driven by adopting a wedge-shaped wheel mode, the wedge-shaped belt is easy to loosen and slip in the frequent rotating process of the auxiliary chamber furnace, and meanwhile, the wedge-shaped belt is easy to generate fatigue and break after being used for a long time.
In view of the above-mentioned related art, the inventors considered that there were defects that the operation of the single crystal furnace sub-furnace chamber elevating and rotating apparatus was unstable and the reliability was low.
Disclosure of Invention
In order to improve the stability and the reliability of the lifting and rotating device of the auxiliary furnace chamber of the single crystal furnace, the application provides the lifting and rotating device of the auxiliary furnace chamber of the single crystal furnace.
The application provides a vice furnace chamber goes up and down and rotary device for single crystal growing furnace adopts following technical scheme:
a lifting and rotating device of an auxiliary furnace chamber for a single crystal furnace is arranged on one side of a main furnace chamber and connected with the auxiliary furnace chamber and comprises a support frame, a lifting mechanism, a rotating mechanism and a connecting mechanism connected with the auxiliary furnace chamber, wherein the support frame is connected with a frame of the main furnace chamber, a main shaft is arranged on the support frame, the lifting mechanism is arranged on the support frame and movably connected with the main shaft, the rotating mechanism is arranged at the top of the support frame and connected with the main shaft, one end of the connecting mechanism is connected with the lifting mechanism, the other end of the connecting mechanism is connected with the rotating mechanism, and the connecting mechanism is arranged on the side surface of the main shaft and fixedly connected with the main shaft.
By adopting the technical scheme, the connecting mechanism is connected with the auxiliary furnace chamber, when the auxiliary furnace chamber needs to be opened, the lifting mechanism drives the connecting mechanism to lift, so that the auxiliary furnace chamber is driven to lift, after the connecting mechanism lifts, the rotating mechanism is started, the connecting mechanism is driven to rotate outwards around the main shaft by taking the main shaft as an axis, so that the auxiliary furnace chamber is driven to rotate outwards, and the auxiliary furnace chamber of the single crystal furnace is opened; when the auxiliary furnace chamber needs to be closed, the rotating mechanism is started to drive the connecting mechanism to rotate inwards, so that the auxiliary furnace chamber is driven to rotate inwards, the auxiliary furnace chamber stops rotating inwards, the lifting mechanism is started to drive the connecting mechanism to descend, so that the auxiliary furnace chamber is driven to descend, and the auxiliary furnace chamber is closed. The lifting mechanism, the rotating mechanism and the connecting mechanism can stably and flexibly complete the opening and closing of the auxiliary furnace chamber, and the operation reliability of the single crystal furnace is improved.
Preferably, the rack comprises a main body column, the bottom of the main body column is connected with the rack of the main furnace body, the main shaft is fixedly connected to the side face of the main body column, a first supporting seat, a second supporting seat and a third supporting seat are sequentially arranged on the side face, opposite to the main shaft, of the main body column from bottom to top, one end of the main shaft sequentially penetrates through the first supporting seat, the second supporting seat and the third supporting seat from bottom to top, a sliding rail is arranged on the main body column, a rod piece is arranged on one side face, far away from the main shaft, of the main body column, and an end of the rod piece, extending outwards, is provided with an auxiliary furnace chamber internal rotation travel limiting switch.
Through adopting above-mentioned technical scheme, elevating system, rotary mechanism and coupling mechanism are run through to the main shaft, main shaft and support frame fixed connection to make elevating system, rotary mechanism and coupling mechanism set up on the main part post, the indoor range limit switch that revolves of the auxiliary furnace that sets up on the member can carry out spacingly to the position of the interior rotation of auxiliary furnace room. The lifting and the rotation of the auxiliary furnace chamber are realized through a lifting mechanism, a rotating mechanism and a connecting mechanism, and the auxiliary furnace chamber is automatically stopped when rotating to the position through a rotary stroke limit switch in the auxiliary furnace chamber, so that the rotation of the auxiliary furnace chamber is prevented from deviating.
Preferably, the main body column is provided with an auxiliary furnace chamber descending stroke limit switch and an auxiliary furnace chamber ascending stroke displacement limit switch, the auxiliary furnace chamber descending stroke limit switch is positioned below the auxiliary furnace chamber ascending stroke displacement limit switch, and the auxiliary furnace chamber ascending stroke displacement limit switch is positioned below the first support seat.
By adopting the technical scheme, when the lifting mechanism touches the lifting travel displacement limit switch of the auxiliary furnace chamber in the lifting process, the lifting mechanism stops lifting action, and when the lifting mechanism touches the descending travel limit switch of the auxiliary furnace chamber in the descending process, the lifting mechanism stops descending action. The descending stroke limit switch of the auxiliary furnace chamber and the ascending stroke displacement limit switch of the auxiliary furnace chamber enable the lifting mechanism to automatically stop, thereby ensuring that the lifting position of the auxiliary furnace chamber does not deviate.
Preferably, the lifting mechanism comprises a first motor, a first worm gear speed reducer and a lead screw, the first worm gear speed reducer is fixedly connected to the main body column, the first worm gear speed reducer is connected with the first motor, the lead screw is positioned at the top end of the first worm gear speed reducer, a first nut, a second nut and a supporting seat are sequentially sleeved on the screw rod from bottom to top, the second nut is fixedly connected with the supporting seat, the second nut is longitudinally and fixedly connected with the first nut, the tail end of the main shaft is inserted into the supporting seat and fixedly connected with the supporting seat, one end of the lead screw passes through the first nut, the second nut and the supporting seat and extends into the main shaft, the supporting seat is connected with the main body column in a sliding way and is positioned between the descending stroke limit switch of the auxiliary furnace chamber and the ascending stroke displacement limit switch of the auxiliary furnace chamber, and the auxiliary furnace chamber descending stroke limit switch is positioned between the first nut and the first worm and gear speed reducer.
By adopting the technical scheme, the lifting mechanism is lifted, the first motor is started, the first motor drives the first worm and gear speed reducer to operate, the first worm and gear speed reducer drives the lead screw connected with the first worm and gear speed reducer to operate, the first nut sleeved on the lead screw is driven to move upwards, the second nut is driven to move upwards and push the supporting seat, the supporting seat drives the main shaft to lift, so that the auxiliary furnace chamber is lifted, and when the supporting seat touches the lifting stroke displacement limit switch of the auxiliary furnace chamber, the first motor stops working; the lifting mechanism descends, the first motor is started, the first motor drives the first worm and gear speed reducer to reversely rotate, the first worm and gear speed reducer drives the lead screw connected with the first worm and gear speed reducer to reversely rotate, the supporting seat drives the main shaft to descend, and therefore the auxiliary furnace chamber descends. The automation of the lifting of the auxiliary furnace chamber is realized, the operation is more flexible and stable, and the positioning is accurate.
Preferably, the main body column on be provided with the guide rail, the guide rail be located the below of first supporting seat, set up the spout that uses with the guide rail cooperation on the supporting seat is close to the side of main body column, supporting seat and guide rail sliding connection.
Through adopting above-mentioned technical scheme, the supporting seat slides along the guide rail, makes the main shaft reciprocate on the main part post, and its simple structure is easy and simple to handle for the reciprocating of main shaft is more steady.
Preferably, the connecting mechanism comprises a radial arm component and a connecting component, and the radial arm component is fixedly connected with at least one connecting component;
the spiral arm assembly comprises a first connecting column and a second connecting column, the first connecting column is connected with the main shaft, and the first connecting column and the second connecting column are parallel to each other and connected;
the connecting assembly comprises a connecting block and at least one clamping block connected with the connecting block, the connecting block is connected with the auxiliary furnace chamber, the clamping block is connected with the connecting block in a floating mode, and the clamping block is fixedly connected with the second connecting column.
Through adopting above-mentioned technical scheme, the first connecting post of spiral arm subassembly is connected with the main shaft, and coupling assembling's connecting block is connected with the auxiliary furnace room, makes the auxiliary furnace room be connected with the main shaft through coupling mechanism to can drive the motion of auxiliary furnace room when the main shaft moves. The connecting mechanism ensures the stability and the safety of the operation of the auxiliary furnace chamber.
Preferably, the main shaft is sequentially sleeved with a first connecting seat and a second connecting seat from bottom to top, the first connecting seat and the second connecting seat are fixedly connected with the first connecting column respectively, the first connecting seat is located above the first supporting seat, the second connecting seat is located above the second supporting seat, and the bottom of the first connecting seat and the bottom of the second connecting seat are respectively provided with a fixing sleeve.
Through adopting above-mentioned technical scheme, the setting of first connecting seat and second connecting seat has increased main shaft and coupling mechanism's contact, has increased the stationarity of vice furnace chamber operation, and fixed cover plays the effect of lifting first connecting seat and second connecting seat.
Preferably, rotary mechanism include second motor, second worm gear speed reducer machine, crank link mechanism and shift fork, second worm gear speed reducer machine be located the top of main part post, the one end of second worm gear speed reducer machine is connected with the second motor, the other end is connected with crank link mechanism, crank link mechanism and shift fork swing joint, first connecting post be located between the two arms of shift fork, be provided with the transition sleeve in the below of shift fork, the shift fork suit is on the transition sleeve, the transition sleeve be located the top of third bearing, the one end of main shaft upwards extend insert the transition sleeve, be provided with vice stove outdoor rotation stroke limit switch on the third bearing.
By adopting the technical scheme, the rotating mechanism rotates outwards, the second motor is started to drive the second worm gear speed reducer to operate, the second worm gear speed reducer drives the crank link mechanism connected with the second worm gear speed reducer to move, so that the shifting fork is driven to rotate outwards by bypassing the transition sleeve, the shifting fork drives the connecting mechanism to rotate, the auxiliary furnace chamber rotates outwards, and when the first connecting column contacts the auxiliary furnace chamber outward rotation stroke limit switch in the rotating process, the second motor stops working; the rotating mechanism rotates inwards, the second motor is started to drive the second worm and gear speed reducer to rotate reversely, the second worm and gear speed reducer drives the crank link mechanism connected with the second worm and gear speed reducer to move, so that the shifting fork is driven to rotate inwards by bypassing the transition sleeve, the shifting fork drives the connecting mechanism to rotate, the auxiliary furnace chamber rotates inwards, and when the first connecting column contacts the auxiliary furnace chamber internal rotation stroke limit switch in the rotating process, the second motor stops working. The rotation of the auxiliary furnace chamber is automated, the operation is more flexible and stable, and the positioning is accurate.
Preferably, the rotating mechanism further comprises a third worm gear speed reducer, and the third worm gear speed reducer is located between the second motor and the second worm gear speed reducer and connected with each other.
By adopting the technical scheme, the third worm gear speed reducer is arranged, so that the transmission torque and the speed ratio are increased, and the working reliability of the single crystal furnace is improved.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the lifting mechanism, the rotating mechanism and the connecting mechanism realize automatic operation, can flexibly complete the opening and closing of the auxiliary furnace chamber, improve the running stability of the single crystal furnace, and ensure the long-term safe and reliable running of the single crystal furnace in the production process;
2. the third worm gear speed reducer is arranged, so that the transmission torque and the speed ratio are increased, and the working reliability of the single crystal furnace is improved.
Drawings
Fig. 1 is a schematic view of the overall structure of the present application.
Fig. 2 is a schematic structural view of the lifting mechanism and the guide rail of the present application.
Fig. 3 is a schematic structural view of the rotating mechanism and the connecting mechanism of the present application.
Fig. 4 is a schematic structural view of the connection assembly of the present application.
Fig. 5 is a schematic structural view of a clamp block of the present application.
Fig. 6 is a schematic structural view of the rotating mechanism of the present application.
Description of reference numerals: 1. a support frame 11, a main body column 12 and an auxiliary column;
2. the lifting mechanism 21, the first motor 22, the first worm and gear speed reducer 23, the lead screw 24, the first nut 25, the second nut 26 and the support seat;
3. the device comprises a rotating mechanism, a first motor, a second worm gear speed reducer, a crank connecting rod mechanism, a first shifting fork, a second shifting fork, a transition sleeve, a third worm gear speed reducer, a third motor, a fourth motor, a fifth motor, a sixth motor, a;
4. the connecting mechanism 41, the swing arm assembly 411, the first connecting column 412, the second connecting column 413, the third connecting column 414, the fourth connecting column 42, the connecting assembly 421, the connecting block 422, the clamping block 4221, the long round hole 4222, the long round hole 423, the first cushion plate 424 and the second cushion plate;
5. the furnace comprises a main shaft, 6, a first supporting seat, 7, a second supporting seat, 8, a third supporting seat, 9, an auxiliary furnace chamber descending stroke limit switch, 10, an auxiliary furnace chamber ascending stroke displacement limit switch, 20, an auxiliary furnace chamber external rotary stroke limit switch, 30, a rod piece, 40, an auxiliary furnace chamber internal rotary stroke limit switch, 50, a guide rail, 60, a first connecting seat, 70, a second connecting seat, 80 and a first pin.
Detailed Description
The present application is described in further detail below with reference to figures 1-6.
The embodiment of the application discloses a lifting and rotating device for an auxiliary furnace chamber of a single crystal furnace. Referring to fig. 1, a vice furnace chamber lifting and rotating device for a single crystal furnace, set up in one side of the main furnace chamber and be connected with the vice furnace chamber, including support frame 1, elevating system 2, rotary mechanism 3 and coupling mechanism 4 of connecting the vice furnace chamber, support frame 1 links to each other with the main furnace chamber frame, be provided with main shaft 5 on the support frame 1, elevating system 2 sets up on support frame 1 and is connected with main shaft 5, rotary mechanism 3 sets up at the top of support frame 1 and with main shaft 5 swing joint, coupling mechanism 4's one end is connected with elevating system 2, its other end is connected with rotary mechanism 3, coupling mechanism 4 sets up in the side of main shaft 5 and with main shaft 5 fixed connection.
The support frame 1 comprises a main body column 11 and an auxiliary column 12, the main body column 11 and the auxiliary column 12 are arranged in parallel, the bottoms of the main body column 11 and the auxiliary column 12 are connected with a frame of a main furnace body, a main shaft 5 is fixedly connected to the side surface of the main body column 11 opposite to the main shaft 5, a first supporting seat 6, a second supporting seat 7 and a third supporting seat 8 are sequentially arranged on the side surface of the main body column 11 opposite to the main shaft 5 from bottom to top, one end of the main shaft 5 sequentially penetrates through the first supporting seat 6, the second supporting seat 7 and the third supporting seat 8 from bottom to top, an L-shaped rod piece 30 is arranged on the side surface of the main body column 11 far away from the main shaft 5, the short edge of the rod piece 30 is connected with the main body column 11, and the.
An auxiliary furnace chamber descending stroke limit switch 9 and an auxiliary furnace chamber ascending stroke displacement limit switch 10 are arranged on the main body column 11, the auxiliary furnace chamber descending stroke limit switch 9 is positioned below the auxiliary furnace chamber ascending stroke displacement limit switch 10, and the auxiliary furnace chamber ascending stroke displacement limit switch 10 is positioned below the first supporting seat 6.
Referring to fig. 2, the lifting mechanism 2 includes a first motor 21, a first worm gear reducer 22 and a lead screw 23, a mounting seat is disposed at the bottom of the first worm gear reducer 22, the first worm gear reducer 22 is fixedly connected to the main body column 11 through the mounting seat, the first worm gear reducer 22 is connected to the first motor 21, the lead screw 23 is located at the top end of the first worm gear reducer 22, a first nut 24, a second nut 25 and a supporting seat 26 are sequentially sleeved on the lead screw 23 from bottom to top, the second nut 25 is fixedly connected to the supporting seat 26, two vertical grooves are respectively formed in the second nut 25 and the first nut 24, the tail end of the main shaft 5 is longitudinally and fixedly connected to the supporting seat 26 through a pin, one end of the lead screw 23 penetrates through the first nut 24, the second nut 25 and the supporting seat 26 and extends into the main shaft 5, the supporting seat 26 is slidably connected to the main body column 11 and is located between the auxiliary furnace chamber descending stroke limit switch 9 and the auxiliary furnace chamber ascending stroke displacement limit switch 10, respectively.
The main column 11 is provided with a guide rail 50, the guide rail 50 is located below the first support seat 6, a sliding groove matched with the guide rail 50 is formed in the side surface of the support seat 26 close to the main column 11, and the support seat 26 is connected with the guide rail 50 in a sliding mode.
The second nut 25 is because the load of bearing vice furnace chamber for a long time, and the internal thread can appear wearing and tearing, leads to the second nut 25 to lose efficacy, loses the effect of fastening, if the second nut 25 became invalid, will lead to vice furnace chamber to fall downwards suddenly, causes the harm to the main furnace body. First nut 24 is located second nut 25 below, has the effect of protection, because the distance is very little between first nut 24 and the second nut 25, and when second nut 25 became invalid, vice furnace chamber falls suddenly, and first nut 24 can bear vice furnace chamber produced impact force that falls, can prevent that vice furnace chamber from continuing to fall or slowing down the speed that vice furnace chamber falls, plays the effect of protection to main furnace chamber.
Referring to fig. 3, the connection mechanism 4 includes a radial arm assembly 41 and two connection assemblies 42, wherein the two connection assemblies 42 are respectively located at the upper and lower ends of the radial arm assembly 41 and are connected to each other;
the swing arm assembly 41 comprises a first connecting column 411 and a second connecting column 412, the first connecting column 411 and the second connecting column 412 are parallel to each other, five transverse third connecting columns 413 are arranged between the first connecting column 411 and the second connecting column 412, two ends of each third connecting column 413 are fixedly connected with the first connecting column 411 and the second connecting column 412 respectively, and the two connecting assemblies 42 are located at the upper end and the lower end of the second connecting column 412 respectively and are arranged oppositely;
the length of second spliced pole 412 is less than the length of first spliced pole 411, the top of first spliced pole 411 and second spliced pole 412 is in the same horizontal plane, be provided with diagonal fourth spliced pole 414 between the bottom of its first spliced pole 411 and second spliced pole 412, be provided with fore-and-aft first strengthening rib between third spliced pole 413 and the fourth spliced pole 414 that are located the bottom, be provided with fore-and-aft second strengthening rib between first third spliced pole 411 and the second third spliced pole 411, first strengthening rib and second strengthening rib contact with second spliced pole 412. The first reinforcing rib and the second reinforcing rib play a role in reinforcing the swing arm assembly 41, and maintain the stability of the operation of the swing arm assembly 41.
Referring to fig. 4, the connection assembly 42 includes a connection block 421 and two clamping blocks 422 connected to the connection block 421, an installation plate is fixedly connected to an outer side surface of the connection block 421, the connection block 421 is connected to the auxiliary furnace chamber through the installation plate, the two clamping blocks 422 are connected to the connection block 421 in a floating manner, the two clamping blocks 422 are fixedly connected to the second connection column 412, and the two clamping blocks 422 are respectively disposed at an upper portion and a lower portion of the second connection column 412 and are disposed opposite to each other.
Referring to fig. 5, four long round holes 4221 are formed in the rear section of each clamping block 422, a long hole 4222 is formed in the front section of each clamping block 422, the space of each long hole 4221 gradually increases from one end to the other end, each connecting block 421 is located at the front section between the two clamping blocks 422, a first cushion plate 423 is arranged between each connecting block 421 and the corresponding clamping block 422, a through hole corresponding to each long hole 4222 is formed in each first cushion plate 423, a round through hole corresponding to each long hole 4222 is formed in each connecting block 421, and the two clamping blocks 422 are fixedly connected with the two first cushion plates 423 and the connecting block 421 by inserting the first pin 80 into the two long holes 4222, the through holes and the round through holes.
When the lifting mechanism 2 lifts the connecting mechanism 4, the connecting block 421 is connected with the auxiliary furnace chamber to lift the auxiliary furnace chamber, the auxiliary furnace chamber presses the first pin 80 to one end of the elongated hole 4222 with a small space under the action of gravity of the auxiliary furnace chamber, when the lifting mechanism 2 lowers the connecting mechanism 4, the auxiliary furnace chamber also descends along with the connecting block 421, after the auxiliary furnace chamber descends, the swing arm assembly 41 continues to descend, then the two clamping blocks 422 start to float, the elongated hole 4222 floats up and down along the first pin 80, finally the first pin 80 is located at the middle position of the elongated hole 4222 to prevent the auxiliary furnace chamber from being clamped, and meanwhile, the other end, located at the middle position of the elongated hole 4222, of the first pin 80, which is far away from the other end of the elongated hole 4222 with a large space, is provided with a space for preventing the furnace in the auxiliary furnace chamber from being excessively high pressure, and jacking the auxiliary furnace chamber to damage other devices.
The second connecting column 412 is located at the rear section between the two clamping blocks 422, a second cushion plate 424 is arranged between the second connecting column 412 and the clamping blocks 422, long holes corresponding to the four long round holes 4221 are formed in the second cushion plate 424, long through holes corresponding to the four long round holes 4221 are formed in the second connecting column 412, and the two clamping blocks 422 are fixedly connected with the two second cushion plates 424 and the second connecting column 412 by inserting screws into the long round holes 4221, the long holes and the long through holes.
The second pad 424 located above is fixedly connected to the second connecting column 412 and is fixedly connected to the first reinforcing rib and the third connecting column 413 located at the lowermost position.
The second pad 424 located at the lower portion is fixedly connected to the second connecting column 412, and is fixedly connected to the second reinforcing rib and the third connecting column 413 located at the uppermost portion.
The main shaft 5 is sequentially sleeved with a first connecting seat 60 and a second connecting seat 70 from bottom to top, two limiting plates are respectively arranged on the first connecting seat 60 and the second connecting seat 70, the first connecting column 411 is located between the two limiting plates to connect the first connecting column 411 with the main shaft 5, the first connecting seat 60 is located above the first supporting seat 6, the second connecting seat 70 is located above the second supporting seat 7, and a fixing sleeve is respectively arranged at the bottom of the first connecting seat 60 and the bottom of the second connecting seat 70.
Referring to fig. 6, the rotating mechanism 3 includes a second motor 31, a second worm gear reducer 32, a crank link mechanism 33, a shift fork 34 and a third worm gear reducer 36, the third worm gear reducer 36 is located between the second motor 31 and the second worm gear reducer 32 and connected to each other, the second worm gear reducer 32 is located on the top of the main body column 11, one end of the second worm gear reducer 32 is connected to the second motor 31, the other end is connected to the crank link mechanism 33, the crank link mechanism 33 is movably connected to the shift fork 34, the ends of the two arms of the shift fork 34 are respectively provided with a guide wheel, a first connecting column 411 is located between the two arms of the shift fork 34 and the two guide wheels, the sides of the first connecting column 411 opposite to the two guide wheels are respectively provided with a slide bar, when the lifting mechanism 2 is lifted, the main shaft 5 is driven to be lifted, and the auxiliary furnace chamber is lifted therewith, at this time, the guide wheel slides along the slide bar on the first connecting column 411, so that the friction force between the first connecting column 411 and the main shaft 5 is increased, and the anti-skid effect is achieved, a transition sleeve 35 is arranged below the shifting fork 34, the shifting fork 34 is sleeved on the transition sleeve 35, the transition sleeve 35 is positioned above the third supporting seat 8 and is inserted into the third supporting seat 8, one end of the main shaft 5 extends upwards and is inserted into the transition sleeve 35, and the third supporting seat 8 is provided with an auxiliary furnace outdoor rotation stroke limit switch 20.
The implementation principle of the auxiliary furnace chamber lifting and rotating device for the single crystal furnace in the embodiment of the application is as follows: in the production process of the single crystal furnace, the auxiliary furnace chamber needs to be opened, the lifting mechanism 2 starts to work, the first motor 21 is started, the first motor 21 drives the first worm and gear reducer 22 to operate, the first worm and gear reducer 22 drives the lead screw 23 connected with the first worm and gear reducer 22 to operate, the first nut 24 sleeved on the lead screw 23 is driven to move upwards, the first nut 24 drives the second nut 25 to move upwards and push the supporting seat 26, the supporting seat 26 drives the main shaft 5 to rise, the main shaft 5 pushes the first connecting seat 60 and the second connecting seat 70 to enable the connecting mechanism 4 to rise, so that the auxiliary furnace chamber rises, when the supporting seat 26 touches the auxiliary furnace chamber rising stroke displacement limit switch 10 in the rising process, the first motor 21 stops working, the rotating mechanism 3 works to start to rotate outwards, the second motor 31 is started to drive the third worm and gear reducer to operate 36, the third worm and gear reducer 36 drives the second worm and gear reducer 32 to operate, the second worm gear reducer 32 drives the crank link mechanism 33 connected with the second worm gear reducer to move, so that the shifting fork 34 is driven to rotate outwards around the transition sleeve 35, the shifting fork 34 drives the first connecting column 411 to rotate, the connecting mechanism 4 is driven to rotate outwards, so that the auxiliary furnace chamber rotates outwards, when the first connecting column 411 touches the auxiliary furnace chamber outward rotation stroke limit switch 20 in the outward rotation process, the second motor 31 stops working, and at the moment, the auxiliary furnace chamber is opened;
when the auxiliary furnace chamber needs to be closed after the related production process is finished, the rotating mechanism 3 works to start to rotate inwards, the second motor 31 is started to drive the third worm gear reducer 36 to rotate reversely, the third worm gear reducer 36 drives the second worm gear reducer 32 to rotate reversely, the second worm gear reducer 32 drives the crank link mechanism 33 connected with the second worm gear reducer to move, so that the shifting fork 34 is driven to rotate inwards by bypassing the transition sleeve 35, the shifting fork 34 drives the first connecting column 411 to rotate, the connecting mechanism 4 is driven to rotate outwards, so that the auxiliary furnace chamber rotates inwards, when the auxiliary furnace chamber contacts with the rotary stroke limit switch 40 in the auxiliary furnace chamber in the rotating process, the second motor 31 stops working, at the moment, the lifting mechanism 2 descends, the first motor 21 is started, the first worm gear reducer 21 drives the first worm gear reducer 22 to rotate reversely, and the first worm gear reducer 22 drives the lead screw 23 connected with the first worm gear reducer to rotate reversely, the supporting seat 26 drives the main shaft 5 to descend, the connecting mechanism 4 descends, and therefore the auxiliary furnace chamber descends, when the supporting seat 26 touches the descending stroke displacement limit switch 9 of the auxiliary furnace chamber, the first motor 21 stops working, the auxiliary furnace chamber stops descending, and at the moment, the auxiliary furnace chamber is closed, and then the subsequent related production process can be carried out.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (9)
1. A lifting and rotating device of an auxiliary furnace chamber for a single crystal furnace is arranged at one side of a main furnace chamber and is connected with the auxiliary furnace chamber, and is characterized in that: including support frame (1), elevating system (2), rotary mechanism (3) and coupling mechanism (4) of connecting vice furnace chamber, support frame (1) link to each other with main furnace chamber frame, be provided with main shaft (5) on support frame (1), elevating system (2) set up on support frame (1) and with main shaft (5) swing joint, rotary mechanism (3) set up at the top of support frame (1) and be connected with main shaft (5), the one end of coupling mechanism (4) be connected with elevating system (2), its other end is connected with rotary mechanism (3), coupling mechanism (4) set up in the side of main shaft (5) and with main shaft (5) fixed connection.
2. The apparatus for elevating and rotating the sub-furnace chamber for a single crystal furnace according to claim 1, wherein: the support frame (1) comprises a main body column (11), the bottom of the main body column (11) is connected with a frame of a main furnace body, the main shaft (5) is fixedly connected to the side face of the main body column (11), a first supporting seat (6), a second supporting seat (7) and a third supporting seat (8) are sequentially arranged on the side face, opposite to the main shaft (5), of the main body column (11) from bottom to top, one end of the main shaft (5) sequentially penetrates through the first supporting seat (6), the second supporting seat (7) and the third supporting seat (8) from bottom to top, a rod piece (30) is arranged on the side face, far away from the main shaft (5), of the main body column (11), and an end, extending outwards, of the rod piece (30) is provided with an auxiliary furnace chamber internal rotation travel limiting switch (40).
3. The apparatus for elevating and rotating the sub-furnace chamber for a single crystal furnace according to claim 2, wherein: the main body column (11) is provided with an auxiliary furnace chamber descending stroke limit switch (9) and an auxiliary furnace chamber ascending stroke displacement limit switch (10), the auxiliary furnace chamber descending stroke limit switch (9) is positioned below the auxiliary furnace chamber ascending stroke displacement limit switch (10), and the auxiliary furnace chamber ascending stroke displacement limit switch (10) is positioned below the first supporting seat (6).
4. The apparatus for elevating and rotating the sub-furnace chamber for a single crystal furnace according to claim 3, wherein: the lifting mechanism (2) comprises a first motor (21), a first worm and gear speed reducer (22) and a lead screw (23), the first worm and gear speed reducer (22) is fixedly connected to the main body column (11), the first worm and gear speed reducer (22) is connected with the first motor (21), the lead screw (23) is positioned at the top end of the first worm and gear speed reducer (22), a first nut (24), a second nut (25) and a supporting seat (26) are sequentially sleeved on the lead screw (23) from bottom to top, the second nut (25) is fixedly connected with the supporting seat (26), the second nut (25) is longitudinally and fixedly connected with the first nut (24), the tail end of the spindle (5) is inserted into the supporting seat (26) and fixedly connected with the supporting seat, one end of the lead screw (23) penetrates through the first nut (24), the second nut (25) and the supporting seat (26) and extends into the spindle (5), the supporting seat (26) is connected with the main body column (11) in a sliding mode and is located between the auxiliary furnace chamber descending stroke limit switch (9) and the auxiliary furnace chamber ascending stroke displacement limit switch (10), and the auxiliary furnace chamber descending stroke limit switch (9) is located between the first nut (24) and the first worm and gear speed reducer (22).
5. The apparatus for elevating and rotating the sub-furnace chamber for a single crystal furnace according to claim 4, wherein: the main body column (11) is provided with a guide rail (50), the guide rail (50) is positioned below the first supporting seat (6), a sliding groove matched with the guide rail (50) is formed in the side face, close to the main body column (11), of the supporting seat (26), and the supporting seat (26) is connected with the guide rail (50) in a sliding mode.
6. The apparatus for elevating and rotating the sub-furnace chamber for a single crystal furnace according to claim 2, wherein: the connecting mechanism (4) comprises a radial arm component (41) and at least one connecting component (42), wherein the radial arm component (41) is fixedly connected with the connecting component (42);
the swing arm assembly (41) comprises a first connecting column (411) and a second connecting column (412), the first connecting column (411) is connected with the spindle (5), and the first connecting column (411) and the second connecting column (412) are parallel to each other and connected;
coupling assembling (42) including connecting block (421) and at least clamp splice (422) that are connected with connecting block (421), connecting block (421) be connected with the auxiliary furnace room, clamp splice (422) float with connecting block (421) and be connected, clamp splice (422) and second spliced pole (412) fixed connection.
7. The apparatus for elevating and rotating the sub-furnace chamber for a single crystal furnace according to claim 6, wherein: the main shaft (5) is sequentially sleeved with a first connecting seat (60) and a second connecting seat (70) from bottom to top, the first connecting seat (60) and the second connecting seat (70) are fixedly connected with a first connecting column (411) respectively, the first connecting seat (60) is located above a first supporting seat (6), the second connecting seat (70) is located above a second supporting seat (7), and the bottom of the first connecting seat (60) and the bottom of the second connecting seat (70) are respectively provided with a fixing sleeve.
8. The apparatus for elevating and rotating the sub-furnace chamber for a single crystal furnace according to claim 6, wherein: the rotating mechanism (3) comprises a second motor (31), a second worm gear speed reducer (32), a crank connecting rod mechanism (33) and a shifting fork (34), the second worm gear speed reducer (32) is positioned at the top of the main body column (11), one end of the second worm gear speed reducer (32) is connected with the second motor (31), the other end is connected with the crank link mechanism (33), the crank connecting rod mechanism (33) is movably connected with the shifting fork (34), the first connecting column (411) is positioned between two arms of the shifting fork (34), a transition sleeve (35) is arranged below the shifting fork (34), the shifting fork (34) is sleeved on the transition sleeve (35), the transition sleeve (35) is positioned at the top of the third supporting seat (8), one end of the main shaft (5) extends upwards and is inserted into the transition sleeve (35), an auxiliary furnace outdoor rotation travel limit switch (20) is arranged on the third supporting seat (8).
9. The apparatus for elevating and rotating the sub-furnace chamber for a single crystal furnace according to claim 8, wherein: the rotating mechanism (3) further comprises a third worm gear speed reducer (36), and the third worm gear speed reducer (36) is located between the second motor (31) and the second worm gear speed reducer (32) and connected with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010852900.4A CN111850678A (en) | 2020-08-22 | 2020-08-22 | Auxiliary furnace chamber lifting and rotating device for single crystal furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010852900.4A CN111850678A (en) | 2020-08-22 | 2020-08-22 | Auxiliary furnace chamber lifting and rotating device for single crystal furnace |
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| CN111850678A true CN111850678A (en) | 2020-10-30 |
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| CN202010852900.4A Pending CN111850678A (en) | 2020-08-22 | 2020-08-22 | Auxiliary furnace chamber lifting and rotating device for single crystal furnace |
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