CN109837585A - A kind of full-automatic furnace chamber elevating rotary system - Google Patents
A kind of full-automatic furnace chamber elevating rotary system Download PDFInfo
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- CN109837585A CN109837585A CN201910216481.2A CN201910216481A CN109837585A CN 109837585 A CN109837585 A CN 109837585A CN 201910216481 A CN201910216481 A CN 201910216481A CN 109837585 A CN109837585 A CN 109837585A
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- bracket
- screw rod
- elevator
- screw
- guiding axis
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- 230000003028 elevating effect Effects 0.000 title abstract description 5
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 210000003734 kidney Anatomy 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000002360 preparation method Methods 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Silicon Compounds (AREA)
Abstract
The present invention relates to monocrystalline silicon Preparation equipment field, in particular to a kind of full-automatic furnace chamber elevating rotary system.Including column ontology；Upper support seat, elevator support and lower support base are successively arranged along linear from top to bottom on this body sidewall of column；The elevator assembly driven by servo motor is equipped in elevator support；Hoisting mechanism includes screw rod, and screw lower end is connected with elevator assembly；Lifting plate is connected with by nut in the middle part of screw rod, screw mandrel top is equipped with screw rod footstock, and screw rod footstock is fixedly arranged on column ontology；Lift block one end is connected with furnace body, and the other end is connected by adjusting bracket with bracket, and bracket, which is fixedly arranged on, promotes bearing block side.Rotating mechanism and lifting assembly cooperation of the present invention keeps equipment operation more steady, and the requirement of semiconductor equipment is reached in rotation and lifting precision.
Description
Technical field
The present invention relates to monocrystalline silicon Preparation equipment field, in particular to a kind of full-automatic furnace chamber elevating rotary system.
Background technique
Monocrystalline silicon is the most basic material in electronic information material and photovoltaic industry, and Czochralski method mono-crystal furnace is production silicon
The key technology of monocrystalline is equipped.Single crystal growing furnace is one kind in inert gas environment, is melted raw silicon with graphite heater, with straight
The equipment of daraf(reciprocal of farad) growth dislocation-free monocrystalline.It is charging, is taking crystal bar, the links such as cleaning are needed according to different requirements, by secondary furnace
Room, isolating valve, bell or main furnace chamber are promoted to certain altitude and unscrew, to complete different mission requirements.
Currently, use and gone up and down by hydraulic cylinder in the scheme for realizing furnace chamber lifting rotation, motor and sprocket wheel control
Rotation.Although realizing a degree of automation, in order to realize this method, using hydraulic system, there are oil leaks to pollute
Environment, semiconductor equipment is stringent to environmental requirement, and oil leak easy firing at high temperature, and there are security risks.Existing equipment does not have
Main chamber's rotation function, and then there is the problems such as starting slowly, running accuracy in the rotary system of sprocket wheel transmission.In view of the above problems, because
This selects driving method and the kind of drive more appropriate, and designing more easy structure is that those skilled in the art need at present
It solves the problems, such as.
Summary of the invention
The purpose of the invention is to overcome the deficiencies of the prior art and provide a kind of full-automatic furnace body lifting rotation mechanism.
In order to solve the above technical problem, the present invention provides following technical solutions:
A kind of full-automatic furnace body lifting rotation mechanism, including column ontology, rotating mechanism, hoisting mechanism and carriage assembly.
Upper support seat, elevator support and lower support base are successively arranged along linear from top to bottom on this body sidewall of column；
The elevator assembly driven by servo motor is equipped in elevator support；
Hoisting mechanism includes screw rod, and screw lower end is connected with elevator assembly；Promotion is connected with by nut in the middle part of screw rod
Plate, screw mandrel top are equipped with screw rod footstock, and screw rod footstock is fixedly arranged on column ontology；Second guiding axis lower end is fixedly arranged on elevator branch
In seat；
Rotating mechanism is fixedly arranged on lifting plate upper surface, is promoted bearing block and is connected with rotating mechanism, the first guiding axis lower end
It is set to and is promoted in bearing block by self-lubricating bearing, upper end is connected with upper support seat；First guiding axis upper end is set to upper support seat
It is interior；
First guiding axis and the second guiding axis both pass through lifting plate, and are carried out respectively by self-lubricating bearing and linear bearing
It is fixed on positioning；
Carriage assembly includes bracket, adjusting bracket and lift block；Lift block one end is connected with furnace body, and the other end passes through adjusting
Bracket is connected with bracket, and bracket, which is fixedly arranged on, promotes bearing block side.
As an improvement bracket is equipped with waist-shaped hole, adjusting bracket frame passes through screw on the horizontal adjustment plate of bracket
Level is adjusted, front-rear position is adjusted by kidney slot, and fastened with screw.
As an improvement linear bearing and lifting plate are connected through a screw thread.
As an improvement self-lubricating bearing is positioned in bearing block and lifting plate by sealing plate and step surface.
As an improvement lifting plate upper surface is equipped with limited block, for limiting the rotation angle for promoting bearing block.
As an improvement the column ontology of the second guiding axis side is equipped with limit fixed plate up and down, limit is solid up and down
Fixed board is equipped with limit switch.
Compared with prior art, the invention has the benefit that
Rotating mechanism and lifting assembly cooperation keep equipment operation more steady, reach semiconductor in precision rotating and going up and down
The requirement of equipment.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Appended drawing reference in figure are as follows: 1- upper support seat, the first guiding axis of 2-, 3- promote bearing block, 4- screw rod footstock, 5- rotation
Support base, 11- column ontology, 12- under rotation mechanism, 6- lifting plate, 7- screw rod, the second guiding axis of 8-, 9- elevator support, 10-
Furnace body, 13- lift block, 14- adjusting bracket, 15- bracket.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, with reference to the accompanying drawing with specific embodiment
Present invention is further described in detail:
Attached drawing is please referred to, attached drawing is the structural representation that full-automatic furnace provided in an embodiment of the present invention mentions elevating rotary system
Figure.
A kind of full-automatic furnace body lifting rotation mechanism, including column ontology 11, rotating mechanism 5, hoisting mechanism and bracket group
Part.
Upper support seat 1, elevator support 9 and lower support base are successively arranged along linear from top to bottom on 11 side wall of column ontology
10.The elevator assembly driven by servo motor is equipped in elevator support 9.
Hoisting mechanism includes screw rod 7, and 7 lower end of screw rod is connected with elevator assembly.It is connected with and is mentioned by nut in the middle part of screw rod 7
Lift slab 6,7 top of screw rod are equipped with screw rod footstock 4, and screw rod footstock 4 is fixedly arranged on column ontology 11.Second guiding axis, 8 lower end is fixed
In in elevator support 9.The column ontology 11 of second guiding axis, 8 side is equipped with limit fixed plate up and down, and limit is fixed up and down
Plate is equipped with limit switch.
Rotating mechanism 5 is fixedly arranged on 6 upper surface of lifting plate, is promoted bearing block 3 and is connected with rotating mechanism 5, the first guiding axis 2
Lower end is set to by self-lubricating bearing and is promoted in bearing block 3, and upper end is connected with upper support seat 1.First guiding axis, 2 upper end is set to upper
In support base 1.Lifting plate 6 is equipped with limited block, for limiting the rotation angle for promoting bearing block 3.Rotating mechanism 5 passes through rotation
Motor, worm-gear speed reducer, reducer output shaft, torque force limiting device etc. drive driving gear to rotate, by using gear
The secondary kind of drive is connected by bearing between driven gear and lifting plate 6, and is connected through a screw thread with bearing block 3, and bearing is made
Seat 3 realizes the function of rotation, to drive the carriage assembly rotation connected with bearing block 3.Gear drive mutually relatively before sprocket wheel
The problems such as transmission, transmission efficiency is higher, solves and starts overlong time caused by sprocket wheel transmission, and running accuracy is not high.
First guiding axis 2 and the second guiding axis 8 both pass through lifting plate 6, and pass through self-lubricating bearing and linear bearing respectively
It is fixed in positioning.Linear bearing and lifting plate 6 are connected through a screw thread.Linear bearing and lifting plate 6 are threadedly coupled, led
Cooperating to axis 2 and linear bearing, the axial force that guiding axis 2 generates it by lifting plate 6 plays the role of support, and
It realizes the function of guiding, improves the position precision that lifting plate 6 is gone up and down.
Carriage assembly includes bracket 15, adjusting bracket 14 and lift block 13.13 one end of lift block and furnace body 12 connect, another
End is connected by adjusting bracket 14 with bracket 15, and bracket 15, which is fixedly arranged on, promotes 3 side of bearing block.Bracket 15 is equipped with waist-shaped hole,
14 frame of adjusting bracket adjusts level by screw on bracket 15, adjusts front-rear position by kidney slot, and fastened with screw.From
Bearing is lubricated to position on promoting bearing block 3 and lifting plate 6 by sealing plate and step surface.
Each embodiment in this specification is classified according to function difference.Finally it should be noted that it is listed above only
It is specific embodiments of the present invention.It is clear that the invention is not restricted to which above embodiments, can also there is many variations.This field it is general
All deformations that logical technical staff directly can export or associate from present disclosure, are considered as of the invention
Protection scope.
Claims (6)
1. a kind of full-automatic furnace body lifting rotation mechanism, which is characterized in that including column ontology, rotating mechanism, hoisting mechanism with
Carriage assembly；
Upper support seat, elevator support and lower support base are successively arranged along linear from top to bottom on described this body sidewall of column；Institute
State the elevator assembly being equipped in elevator support through servo motor and planetary reducer driving；
The hoisting mechanism includes screw rod, and screw lower end is connected with elevator assembly；Promotion is connected with by nut in the middle part of screw rod
Plate, screw mandrel top are equipped with screw rod footstock, and screw rod footstock is fixedly arranged on column ontology；Second guiding axis lower end is fixedly arranged on elevator branch
In seat；
The rotating mechanism is fixedly arranged on lifting plate upper surface, is promoted bearing block and is connected with rotating mechanism, the first guiding axis lower end
It is set to and is promoted in bearing block by self-lubricating bearing, upper end is connected with upper support seat；First guiding axis upper end is set to upper support seat
It is interior；
First guiding axis and the second guiding axis both pass through lifting plate, and are carried out respectively by self-lubricating bearing and linear bearing
It is fixed on positioning；
The carriage assembly includes bracket, adjusting bracket and lift block；Lift block one end is connected with furnace body, and the other end passes through adjusting
Bracket is connected with bracket, and bracket, which is fixedly arranged on, promotes bearing block side.
2. mechanism according to claim 1, which is characterized in that the bracket is equipped with waist-shaped hole, and adjusting bracket frame is being held in the palm
Level is adjusted by screw on the horizontal adjustment plate of frame, front-rear position is adjusted by kidney slot, and fastened with screw.
3. mechanism according to claim 1, which is characterized in that the linear bearing and lifting plate are connected through a screw thread.
4. mechanism according to claim 1, which is characterized in that the self-lubricating bearing passes through in bearing block and lifting plate
Sealing plate and step surface positioning.
5. mechanism according to claim 1, which is characterized in that the lifting plate upper surface is equipped with limited block, for limiting
Promote the rotation angle of bearing block.
6. mechanism according to claim 1, which is characterized in that the column ontology of the second guiding axis side is equipped with upper
Lower limit fixed plate limits fixed plate up and down and is equipped with limit switch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910216481.2A CN109837585A (en) | 2019-03-21 | 2019-03-21 | A kind of full-automatic furnace chamber elevating rotary system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910216481.2A CN109837585A (en) | 2019-03-21 | 2019-03-21 | A kind of full-automatic furnace chamber elevating rotary system |
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| Publication Number | Publication Date |
|---|---|
| CN109837585A true CN109837585A (en) | 2019-06-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910216481.2A Pending CN109837585A (en) | 2019-03-21 | 2019-03-21 | A kind of full-automatic furnace chamber elevating rotary system |
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| Country | Link |
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| CN (1) | CN109837585A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114214731A (en) * | 2021-10-08 | 2022-03-22 | 上海汉虹精密机械有限公司 | Seed crystal lifting and rotating mechanism special for silicon carbide furnace |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201648566U (en) * | 2010-04-20 | 2010-11-24 | 宁夏日晶电子科技有限公司 | Electric-rotating mechanism of furnace body of mono-crystal furnace |
| CN202139326U (en) * | 2011-06-24 | 2012-02-08 | 西安理工晶体科技有限公司 | Automatic rotary device for secondary furnace chamber of single crystal furnace |
| CN203065639U (en) * | 2013-01-06 | 2013-07-17 | 河北同光晶体有限公司 | Lifting-rotating mechanism of silicon carbide mono-crystal furnace |
| CN203462158U (en) * | 2013-08-08 | 2014-03-05 | 西安创联新能源设备有限公司 | Lifting and rotating driving mechanism |
| CN203569234U (en) * | 2013-11-18 | 2014-04-30 | 上海森松压力容器有限公司 | Seed crystal rotating lift mechanism for sapphire furnace |
| CN105839176A (en) * | 2016-05-17 | 2016-08-10 | 中国科学院上海光学精密机械研究所 | Micro drop-down crystal growth device automatically controlled and automatic control method |
| CN108385164A (en) * | 2018-05-04 | 2018-08-10 | 蒋国庆 | Semiconductor monocrystal stove |
| CN210085620U (en) * | 2019-03-21 | 2020-02-18 | 浙江晶盛机电股份有限公司 | Full-automatic furnace chamber lifting and rotating system |
-
2019
- 2019-03-21 CN CN201910216481.2A patent/CN109837585A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201648566U (en) * | 2010-04-20 | 2010-11-24 | 宁夏日晶电子科技有限公司 | Electric-rotating mechanism of furnace body of mono-crystal furnace |
| CN202139326U (en) * | 2011-06-24 | 2012-02-08 | 西安理工晶体科技有限公司 | Automatic rotary device for secondary furnace chamber of single crystal furnace |
| CN203065639U (en) * | 2013-01-06 | 2013-07-17 | 河北同光晶体有限公司 | Lifting-rotating mechanism of silicon carbide mono-crystal furnace |
| CN203462158U (en) * | 2013-08-08 | 2014-03-05 | 西安创联新能源设备有限公司 | Lifting and rotating driving mechanism |
| CN203569234U (en) * | 2013-11-18 | 2014-04-30 | 上海森松压力容器有限公司 | Seed crystal rotating lift mechanism for sapphire furnace |
| CN105839176A (en) * | 2016-05-17 | 2016-08-10 | 中国科学院上海光学精密机械研究所 | Micro drop-down crystal growth device automatically controlled and automatic control method |
| CN108385164A (en) * | 2018-05-04 | 2018-08-10 | 蒋国庆 | Semiconductor monocrystal stove |
| CN210085620U (en) * | 2019-03-21 | 2020-02-18 | 浙江晶盛机电股份有限公司 | Full-automatic furnace chamber lifting and rotating system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114214731A (en) * | 2021-10-08 | 2022-03-22 | 上海汉虹精密机械有限公司 | Seed crystal lifting and rotating mechanism special for silicon carbide furnace |
| CN114214731B (en) * | 2021-10-08 | 2024-02-06 | 上海汉虹精密机械有限公司 | Seed crystal lifting and rotating mechanism special for silicon carbide furnace |
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