CN102220635A - Seed crystal lifting device for Czochralski monocrystal furnace - Google Patents

Seed crystal lifting device for Czochralski monocrystal furnace Download PDF

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Publication number
CN102220635A
CN102220635A CN2011102013093A CN201110201309A CN102220635A CN 102220635 A CN102220635 A CN 102220635A CN 2011102013093 A CN2011102013093 A CN 2011102013093A CN 201110201309 A CN201110201309 A CN 201110201309A CN 102220635 A CN102220635 A CN 102220635A
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CN
China
Prior art keywords
brilliant
chamber
shaft
changes
lifting
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Pending
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CN2011102013093A
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Chinese (zh)
Inventor
周云龙
刘存华
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WENZHOU YONGTAI ELECTRIC APPLIANCE CO Ltd
Wenzhou Yongtai Electric Co Ltd
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WENZHOU YONGTAI ELECTRIC APPLIANCE CO Ltd
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Priority to CN2011102013093A priority Critical patent/CN102220635A/en
Publication of CN102220635A publication Critical patent/CN102220635A/en
Pending legal-status Critical Current

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Abstract

A seed crystal lifting device for a Czochralski monocrystal furnace consists of a top cavity component, a lifting cavity component, a bipolar transmission and pulling transmission shaft, a clutch component, a quick motor, a slow motor, a Czochralski head limiting mechanism and a rotary component; the top cavity component comprises a top cavity, a top cover flange, a bearing pin, a surface bearing and a pulley component; the lifting cavity component comprises a lifting cavity, a clue pipe, a splined shaft and a crystal lifting magnetofluid; and the rotary component comprises a crystal lifting soleplate, a heavy punch, a slip ring, a crystal rotation drive motor, a worm and gear crystal rotation speed reducer and a crystal rotation magnetofluid. The seed crystal lifting device for a Czochralski monocrystal furnace has the advantages of reasonable structure, good seed crystal lifting stability and convenience for maintenance and use, and the like.

Description

Straight pull single crystal growing furnace seed crystal lifting gear
Technical field
The present invention relates to the single crystal furnace device field, refer in particular to a kind of Straight pull single crystal growing furnace seed crystal lifting gear.
Background technology
The Straight pull single crystal growing furnace be produce used for solar batteries silicon single crystal and unicircuit and silicon single crystal major equipment.Along with the size of solar cell silicon materials is increasing.And unicircuit is more and more higher to the quality requirements of monocrystal material.To the level of automation of corresponding single crystal growth apparatus and the stability of life-time service are had higher requirement with it.Single crystal growth apparatus mainly is a single crystal growing furnace, and single crystal growing furnace comprises monocrystalline silicon growing synthetic master furnace chamber, is positioned at the silicon seed lifting gear and the automatically controlled automatic system of main furnace chamber upper end.The seed crystal lifting gear of traditional single crystal growing furnace adopts hard axle rotation and lifts, thereby quiet axle is longer in making, and causes device height more higher, and the rotary pulling poor stability, causes the product percentage of A-class goods low, use cost height, maintenance trouble.
Chinese patent once disclosed a kind of " seed crystal of single crystal growing furnace lifts rotating mechanism " (China, notification number CN201817575U, May 4 2011 day for announcing), it comprises drive-motor and the casing that is driven by drive-motor, comprise two rotating shafts in the casing, a rotating shaft is rotated with motor, be fixed with rolling wheel in this rotating shaft, the rolling wheel side is provided with the sheet gear, and rolling wheel is provided with wireline, and another rotating shaft is provided with balancing weight, this counterweight and sheet gear are connected with a joggle by tooth, the wireline lower end is provided with linker, and linker is connected with weight, and the weight end is provided with the dop that is used for the clamping seed crystal.Its benefit is to realize the rotary pulling good stability with simple structure, reduces device height and reaches 90%, reaches the ideal result of use, has increased substantially the percentage of A-class goods of product, and simple in structure, and the making use cost is low, maintenance and easy to use effective.
Summary of the invention
The object of the present invention is to provide a kind of Straight pull single crystal growing furnace seed crystal lifting gear, it is rational in infrastructure, have seed crystal promote stablize, maintenance and advantage such as easy to use.
For achieving the above object, the scheme that the invention is taked is: a kind of Straight pull single crystal growing furnace seed crystal lifting gear, but it by top chamber assembly, promote chamber assembly, bipolar variator with pull transmission shaft, clutch pack, fast speed motor, slow speed motor, lift a position-limit mechanism, rotary components constitutes, chamber, top assembly comprises chamber, top, top cover flange, bearing pin, surface bearing, pulley assembly, promotes the chamber assembly and comprises lifting chamber, clue pipe, splined shaft, the brilliant magnetic fluid that rises; Rotary components comprises the brilliant base plate that rises, weight, slip ring, the brilliant drive-motor that changes, the brilliant speed reduction unit that changes of worm and gear, the brilliant magnetic fluid that changes, the brilliant commentaries on classics fixed brilliant magnetic fluid and the brilliant commentaries on classics support of changeing on the static mount pad of magnetic fluid, the brilliant commentaries on classics installed brilliant speed reduction unit and the brilliant drive-motor that changes of changeing of worm and gear on the support, the brilliant drive-motor that changes drives the brilliant speed reduction unit that changes of worm and gear, the brilliant commentaries on classics on the reducer output shaft of worm and gear installed small pulley, many contracts band is installed on the small pulley, the brilliant big belt wheel that changes is given in the transmission of many contracts band, the big belt wheel of brilliant commentaries on classics is fixed on brilliant the commentaries on classics on the rotatable shaft shoulder of magnetic fluid, the brilliant commentaries on classics is equipped with the brilliant base plate that rises on the big belt wheel, the brilliant liter has through wires hole on the base plate, brilliant commentaries on classics magnetic fluid and brilliant the liter between the base plate are slip rings, slip ring is divided into ring in static outer shroud and the rotation, in, outer shroud is connected with many group leads, lead connects the power-on and power-off device respectively, in, outer slip ring electrically conducting manner is fixedly carbon brush and conductive copper, wherein the lead that is connected with last electrical part is vertical by brilliant big belt wheel and the through wires hole of changeing, the brilliant liter fixed bipolar variator and promoted the chamber on the base plate, the chamber, top is connected with the lifting chamber by hinge, top top of chamber centre hole is processed with one heart, the leave from office terrace, mounting plane bearing in the step, on two surface bearings rely on, the transition fit of getting out of a predicament or an embarrassing situation, guarantee concentric with top top of chamber centre hole, connect pulley assembly by bearing pin again, pulley assembly drives bearing pin and rotates automatically, the gravity sensor flexible lead passes top chamber through wires hole and fixedlys connected with the top cover flange on the pulley assembly, after the rope that twines on the clue pipe is walked around pulley assembly, rope center and the brilliant magnetic fluid endoporus centres and vertical of changeing, slow speed motor is by first shaft coupling, first shaft coupling drives clutch pack, clutch pack is imported bipolar variator, but bipolar variator is by the pull transmission shaft, but pore area inner hole key slot in pull transmission shaft one end, another axle head has hex tool hole in six millimeters, the hex tool hole is processed with the M5 threaded hole with one heart in six millimeters, but pull transmission shaft external diameter is processed with keyway, but the pull transmission shaft drives splined shaft, splined shaft rises magnetic fluid by crystalline substance and is in the lifting chamber, splined shaft drives the rotation of clue pipe, fast speed motor is by second shaft coupling, second shaft coupling is imported bipolar variator, but bipolar variator is by the pull transmission shaft, but the pull transmission shaft drives splined shaft, splined shaft drives the rotation of clue pipe, synchronous pulley is installed on the splined shaft is done synchronous rotation, synchronous pulley will rotatablely move transmission to lifting a position-limit mechanism by synchronous band, lift a position-limit mechanism and will rotatablely move and change translational motion into, lift a position-limit mechanism control rope and be in correct position.
This Straight pull single crystal growing furnace has following characteristics with seed crystal lifting gear and prior art:
1. push up the chamber.Top top of chamber centre hole is processed upper and lower step surface, mounting plane bearing in the step with one heart.Two surface bearings rely on upper and lower step transition to cooperate, guarantees concentric with top top of chamber centre hole, again by pin connection pulley assembly.During working order, it is in a single day stressed to penetrate the pulley rope, and pulley assembly drives bearing pin and rotates to required angle automatically.Be that the rope center overlaps with the brilliant magnetic fluid rotating shaft center of changeing.Even the chamber, top is promoting the variation of chamber generation setting angle at every turn, the inner pulley assembly all can rotate by slight stressed down at rope (50 gram) drive bearing pin automatically, and it is concentric to make rope and crystalline substance change the magnetic fluid rotating shaft.The wheel rope is subjected to pulling force big more, and its pulley assembly angle of rotation is accurate more, and rope is accurate more with the brilliant magnetic fluid rotating shaft concentricity of changeing.Rope is stressed greater than 5Kg during working order.Pulley assembly upper sensor flexible lead passes chamber, top through wires hole, fixedlys connected with the top cover flange; The trace rotation in 10 ° of scopes of the actual required angle of rotation maximum of pulley assembly.Even pull down rope, because the lead constraint, the positive and negative rotating range of pulley assembly also is no more than 90 °.
But 2. pull transmission shaft.But bipolar variator transmission output shaft is the pull transmission shaft, but bipolar variator is given the pull transmission shaft by the flat key driving torque, but the pull transmission shaft passes through the inner hole sleeve of band keyway again outside the splined shaft axle, and transmission shaft endoporus flat key driving torque is given and promoted the chamber female splined shaft, finishes the moment of torsion transmission.But pull transmission shaft advantage: positive and negative stable drive, the required torque size can be controlled, the speed of rotation may command, apply moment of torsion according to socket screw hexagon wrench in the rotary course, can judge flexibly whether stuck point is arranged in the rotary course, counter-rotating in time avoids the device security accident to take place; Whole maintenance process, flexibly, quick, save time, single can finishing the work.But pore area inner hole key slot in pull transmission shaft one end, effect: location and driving torque are given and are promoted the chamber splined shaft; Another axle head has hex tool hole in six millimeters, effect: manual rotating drive shaft; The hex tool hole is processed with the M5 screw thread with one heart in six millimeters, effect: by being screwed into the screw rod in the threaded hole, but the pull transmission shaft that takes out, packs into; But pull transmission shaft external diameter processing keyway.Effect: but bipolar transmission torque is passed to the pull transmission shaft.
3. rotary components.Crystalline substance in the rotary components rises base plate and is processed with through wires hole, and slip ring power supply signal bus vertically by brilliant belt wheel and the base plate through wires hole of changeing, is connected with the electrical part of the required power supply of the brilliant lifting mechanism of son.Advantage: cabling mode is reasonable, structure is ingenious, good looking appearance (circuit is all walked internally, and good looking appearance almost be can't see cabling).
4. the brilliant type of drive of changeing.The brilliant commentaries on classics installed brilliant speed reduction unit and the brilliant drive-motor that changes of changeing of worm and gear on the support, changeing the static mount pad of magnetic fluid with crystalline substance fixes, the brilliant drive-motor that changes drives the brilliant speed reduction unit that changes, after the brilliant commentaries on classics of the worm and gear speed reduction unit speed change, small pulley that output shaft is installed drives many contracts band, the brilliant big belt wheel that changes is given in the transmission of many contracts band, the big belt wheel of brilliant commentaries on classics is fixed on brilliant the commentaries on classics on the rotatable shaft shoulder of magnetic fluid, and brilliant the commentaries on classics on the big belt wheel is equipped with young brilliant lifting mechanism, rotates thereby drive young brilliant lifting mechanism.
5. slip ring circuit.Slip ring is divided into ring in static outer shroud and the rotation, and inner and outer rings is connected with many group leads, and lead connects the power-on and power-off device respectively, and inside and outside slip ring electrically conducting manner is fixedly carbon brush and conductive copper.Working order: outer slip ring and outer slip ring are organized the lead stationary fixing more, and interior slip ring and interior slip ring are organized the rotation of lead circumference more.
6. brilliant ascending, descending transmission.At a slow speed during lifting, slow speed motor is by first shaft coupling, first shaft coupling drives clutch pack, clutch pack is imported bipolar variator, but bipolar variator is by the pull transmission shaft, but the pull transmission shaft drives splined shaft, and splined shaft drives the rotation of clue pipe, after the rope that twines on the clue pipe was walked around pulley assembly, up-and-down movement was at a slow speed done with the brilliant also vertical and brilliant magnetic fluid baseplane of changeing of magnetic fluid endoporus centres of changeing in the rope center.During fast lifting, fast speed motor is by second shaft coupling, second shaft coupling is imported bipolar variator, but bipolar variator is by the pull transmission shaft, but the pull transmission shaft drives splined shaft, splined shaft drives the rotation of clue pipe, and after the rope that twines on the clue pipe was walked around pulley assembly, up-and-down movement was at a slow speed done with the brilliant also vertical and brilliant magnetic fluid baseplane of changeing of magnetic fluid endoporus centres of changeing in the rope center.
7. the spacing control of brilliant ascending, descending.Splined shaft rotates, synchronous pulley is installed on the splined shaft is done synchronous rotation, synchronous pulley is given and to be lifted a position-limit mechanism by the transmission that will rotatablely move of synchronous band, will rotatablely move and change translational motion into by lifting a position-limit mechanism, lifts a position-limit mechanism control rope and is in correct position.
Description of drawings
Fig. 1 is that the present embodiment master looks the cut-away section structural representation.
Fig. 2 is a present embodiment plan structure synoptic diagram.
Fig. 3 promotes chamber unit construction synoptic diagram in the present embodiment.
Among the figure: 1, the brilliant static mount pad of magnetic fluid, 2 of changeing, brilliant magnetic fluid, 3 of changeing, the brilliant support that changes, 4, brilliant speed reduction unit, 5 of changeing of worm and gear, brilliant drive-motor, 6 of changeing, small pulley, 7, many contracts band, 8, brilliant big belt wheel, 9 of changeing, the brilliant base plate that rises, 10, through wires hole, 11, slip ring, 12, bipolar variator, 13, promote the chamber, 14, the chamber, top, 15, hinge, 16, surface bearing, 17, bearing pin, 18, pulley assembly, 19, the top cover flange, 20, rope, 21, slow speed motor, 22, first shaft coupling, 23, clutch pack, 24, weight, 25, but the pull transmission shaft, 26, crystalline substance rises magnetic fluid, 27, fast speed motor, 28, second shaft coupling, 29, lift a position-limit mechanism, 30, spacing end cap, 31, weight arm, 32, the clue pipe, 33, splined shaft, 34, be with synchronously.
Embodiment
Below in conjunction with embodiment and accompanying drawing thereof the present invention is remake description.
Referring to Fig. 1-Fig. 3, a kind of Straight pull single crystal growing furnace seed crystal lifting gear, it is by chamber, top assembly, promote the chamber assembly, but two-stage variator 12 and pull transmission shaft 25, clutch pack 23, fast speed motor 27, slow speed motor 21, lift a position-limit mechanism 29, rotary components constitutes, chamber, top assembly comprises chamber 14, top, top cover flange 19, bearing pin 17, surface bearing 16, pulley assembly 18, promote the chamber assembly and comprise lifting chamber 13, clue pipe 32, splined shaft 33, the brilliant magnetic fluid 29 that rises, rotary components comprises the brilliant base plate 9 that rises, weight 24, slip ring 11, the brilliant drive-motor 5 that changes, the brilliant speed reduction unit 4 that changes of worm and gear, the brilliant magnetic fluid 2 that changes, the brilliant commentaries on classics fixed brilliant magnetic fluid 2 and the brilliant commentaries on classics support 3 of changeing on the static mount pad 1 of magnetic fluid, the brilliant commentaries on classics installed brilliant speed reduction unit 4 and the brilliant drive-motor 5 that changes of changeing of worm and gear on the support 3, the brilliant drive-motor 5 that changes drives the brilliant speed reduction unit 4 that changes of worm and gear, the brilliant commentaries on classics of worm and gear installed small pulley 6 on speed reduction unit 4 output shafts, many contracts band 7 is installed on the small pulley 6, the brilliant big belt wheel 8 that changes is given in 7 transmissions of many contracts band, the big belt wheel 8 of brilliant commentaries on classics is fixed on brilliant the commentaries on classics on the magnetic fluid 2 rotatable shaft shoulders, the brilliant commentaries on classics is equipped with the brilliant base plate 9 that rises on the big belt wheel 8, the brilliant liter has through wires hole 10 on the base plate 9, brilliant commentaries on classics magnetic fluid 2 and brilliant the liter between the base plate 9 are slip rings 11, slip ring is divided into ring in static outer shroud and the rotation, in, outer shroud is connected with many group leads, lead connects the power-on and power-off device respectively, in, outer slip ring electrically conducting manner is fixedly carbon brush and conductive copper, wherein the lead that is connected with last electrical part is vertical by brilliant big belt wheel 8 and the through wires hole 10 of changeing, the brilliant liter fixed bipolar variator 12 and promoted chamber 13 on the base plate 9, chamber 14, top is connected with lifting chamber 13 by hinge 15,14 top center holes, chamber, top are processed with one heart, the leave from office terrace, mounting plane bearing 16 in the step, two surface bearings 16 rely on, the transition fit of getting out of a predicament or an embarrassing situation, guarantee with 14 top center holes, chamber, top concentric, connect pulley assembly 18 by bearing pin 17 again, pulley assembly 18 drives bearing pin 17 and rotates automatically, the gravity sensor flexible lead passes top chamber through wires hole and fixedlys connected with top cover flange 19 on the pulley assembly 18, after the rope 20 that twines on the clue pipe 32 is walked around pulley assembly 18, rope 20 centers and the brilliant magnetic fluid 2 endoporus centres and vertical of changeing, slow speed motor 21 is by first shaft coupling 22, first shaft coupling 22 drives clutch pack 23, the bipolar variator 12 of clutch pack 23 inputs, but bipolar variator 12 is by pull transmission shaft 25, but pore area inner hole key slot in pull transmission shaft 25 1 ends, another axle head has hex tool hole in six millimeters, the hex tool hole is processed with the M5 threaded hole with one heart in six millimeters, but pull transmission shaft 25 external diameters are processed with keyway, but pull transmission shaft 25 drives splined shaft 33, splined shaft 33 rises magnetic fluid 26 by crystalline substance and is in the lifting chamber 13, splined shaft 33 drives 32 rotations of clue pipe, fast speed motor 27 is by second shaft coupling 28, the bipolar variator 12 of second shaft coupling, 28 inputs, but bipolar variator 12 is by pull transmission shaft 25, but pull transmission shaft 25 drives splined shaft 33, splined shaft 33 drives 32 rotations of clue pipe, synchronous pulley 35 is installed on the splined shaft 33 is done synchronous rotation, synchronous pulley 35 is by being with 34 will rotatablely move transmission to lifting a position-limit mechanism 29 synchronously, lift a position-limit mechanism 20 and will rotatablely move and change translational motion into, lift a position-limit mechanism 20 control ropes 20 and be in correct position.
Referring to Fig. 1 and Fig. 3, spacing end cap 30 is installed on the described bipolar variator 15, but is prevented 25 axial displacements of pull transmission shaft and skid off.
Referring to Fig. 1 and Fig. 2, described crystalline substance rises base plate 9 and is connected with weight 24 by weight arm 21.
Referring to Fig. 1 and Fig. 3, when needing to change crystal pulling growth rope 20, pull down spacing end cap 30 earlier, but screw in pull transmission shaft 25 with the M5 screw rod, but but outwards slowly pull transmission shaft 25 is drawn to pull transmission shaft 25 external diameters and flat key is installed is all exposed, but pull transmission shaft 25 external diameters installation flat key taken off, but slowly with pull transmission shaft 25 pushed home, by required direction rotation, promote chamber splined shaft rotation with six millimeters socket screw hexagon wrenchs, change rope 20 thereby drive.Rope 20 is changed and is finished, and according to reverse order, installs and restores sample.

Claims (3)

1. Straight pull single crystal growing furnace seed crystal lifting gear, it is characterized in that: it is by chamber, top assembly, promote the chamber assembly, two-stage variator (12) but with pull transmission shaft (25), clutch pack (23), fast speed motor (27), slow speed motor (21), lift a position-limit mechanism (29), rotary components constitutes, chamber, top assembly comprises chamber (14), top, top cover flange (19), bearing pin (17), surface bearing (16), pulley assembly (18), promote the chamber assembly and comprise lifting chamber (13), clue pipe (32), splined shaft (33), the brilliant magnetic fluid (29) that rises, rotary components comprises the brilliant base plate (9) that rises, weight (24), slip ring (11), the brilliant drive-motor (5) that changes, the brilliant speed reduction unit (4) that changes of worm and gear, the brilliant magnetic fluid (2) that changes, the brilliant static mount pad of magnetic fluid (1) that changes is gone up fixing brilliant magnetic fluid (2) and the brilliant support (3) that changes of changeing, the brilliant support (3) that changes is gone up brilliant speed reduction unit (4) and the brilliant drive-motor (5) that changes of changeing of installation worm and gear, the brilliant drive-motor (5) that changes drives the brilliant speed reduction unit (4) that changes of worm and gear, the brilliant commentaries on classics on speed reduction unit (4) output shaft of worm and gear installed small pulley (6), small pulley (6) is gone up many contracts band (7) is installed, the brilliant big belt wheel (8) that changes is given in many contracts band (7) transmission, the brilliant big belt wheel (8) that changes is fixed on brilliant the commentaries on classics on the rotatable shaft shoulder of magnetic fluid (2), the brilliant commentaries on classics is equipped with the brilliant base plate (9) that rises on the big belt wheel (8), the brilliant liter has through wires hole (10) on the base plate (9), brilliant commentaries on classics magnetic fluid (2) and brilliant the liter between the base plate (9) are slip ring (11), slip ring is divided into ring in static outer shroud and the rotation, in, outer shroud is connected with many group leads, lead connects the power-on and power-off device respectively, in, outer slip ring electrically conducting manner is fixedly carbon brush and conductive copper, wherein the lead that is connected with last electrical part is vertical by brilliant big belt wheel (8) and the through wires hole (10) of changeing, the brilliant base plate (9) that rises is gone up fixing bipolar variator (12) and is promoted chamber (13), chamber, top (14) is connected with lifting chamber (13) by hinge (15), top center hole, chamber (14), top is processed with one heart, the leave from office terrace, mounting plane bearing (16) in the step, in two surface bearings (16) dependence, the transition fit of getting out of a predicament or an embarrassing situation, guarantee with top center hole, chamber (14), top concentric, connect pulley assembly (18) by bearing pin (17) again, pulley assembly (18) drives bearing pin (17) rotation automatically, the last gravity sensor flexible lead of pulley assembly (18) passes chamber, top through wires hole fixedlys connected with top cover flange (19), after the rope (20) that clue pipe (32) upward twines is walked around pulley assembly (18), rope (20) center and brilliant magnetic fluid (2) the endoporus centres and vertical of changeing, slow speed motor (21) is by first shaft coupling (22), first shaft coupling (22) drives clutch pack (23), clutch pack (23) is imported bipolar variator (12), bipolar variator (12) but by pull transmission shaft (25), but pore area inner hole key slot in pull transmission shaft (25) one ends, another axle head has hex tool hole in six millimeters, the hex tool hole is processed with the M5 threaded hole with one heart in six millimeters, but pull transmission shaft (25) external diameter is processed with keyway, but pull transmission shaft (25) drives splined shaft (33), splined shaft (33) is in the lifting chamber (13) by the brilliant magnetic fluid (26) that rises, splined shaft (33) drives clue pipe (32) rotation, fast speed motor (27) is by second shaft coupling (28), second shaft coupling (28) is imported bipolar variator (12), bipolar variator (12) but by pull transmission shaft (25), but pull transmission shaft (25) drives splined shaft (33), splined shaft (33) drives clue pipe (32) rotation, splined shaft (33) is gone up installation synchronous pulley (35) and is done synchronous rotation, synchronous pulley (35) will rotatablely move transmission to lifting a position-limit mechanism (29) by being with (34) synchronously, lift a position-limit mechanism (20) and will rotatablely move and change translational motion into, lift a position-limit mechanism (20) control rope (20) and be in correct position.
2. Straight pull single crystal growing furnace seed crystal lifting gear according to claim 1 is characterized in that: described bipolar variator (15) is gone up spacing end cap (30) is installed.
3. Straight pull single crystal growing furnace seed crystal lifting gear according to claim 1 is characterized in that: described crystalline substance rises base plate (9) and is connected with counterbalance weight (24) by weight arm (21).
CN2011102013093A 2011-07-13 2011-07-13 Seed crystal lifting device for Czochralski monocrystal furnace Pending CN102220635A (en)

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Application Number Priority Date Filing Date Title
CN2011102013093A CN102220635A (en) 2011-07-13 2011-07-13 Seed crystal lifting device for Czochralski monocrystal furnace

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Application Number Priority Date Filing Date Title
CN2011102013093A CN102220635A (en) 2011-07-13 2011-07-13 Seed crystal lifting device for Czochralski monocrystal furnace

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107460540A (en) * 2017-09-22 2017-12-12 浙江昀丰新材料科技股份有限公司 A kind of balance adjustment type Winder
CN109306524A (en) * 2018-11-21 2019-02-05 南京晶升能源设备有限公司 The crystal equilibrium lifting device and method for improving of sapphire single-crystal furnace
CN110304577A (en) * 2019-06-21 2019-10-08 浙江神阳机电科技有限公司 It is a kind of to change the outfit the lifting device of hoistable platform for battery
CN111307192A (en) * 2020-04-09 2020-06-19 南京顺升自动化有限公司 Control system for collecting field instrument signals by providing 5G network

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107460540A (en) * 2017-09-22 2017-12-12 浙江昀丰新材料科技股份有限公司 A kind of balance adjustment type Winder
CN109306524A (en) * 2018-11-21 2019-02-05 南京晶升能源设备有限公司 The crystal equilibrium lifting device and method for improving of sapphire single-crystal furnace
CN110304577A (en) * 2019-06-21 2019-10-08 浙江神阳机电科技有限公司 It is a kind of to change the outfit the lifting device of hoistable platform for battery
CN110304577B (en) * 2019-06-21 2023-10-20 浙江神阳机电科技有限公司 Lifting device for be used for battery to trade dress lift platform
CN111307192A (en) * 2020-04-09 2020-06-19 南京顺升自动化有限公司 Control system for collecting field instrument signals by providing 5G network

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Application publication date: 20111019