CN216274466U - Novel seed crystal rotating device - Google Patents
Novel seed crystal rotating device Download PDFInfo
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- CN216274466U CN216274466U CN202122066907.6U CN202122066907U CN216274466U CN 216274466 U CN216274466 U CN 216274466U CN 202122066907 U CN202122066907 U CN 202122066907U CN 216274466 U CN216274466 U CN 216274466U
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Abstract
The utility model relates to the field of silicon crystal production equipment, in particular to a novel seed crystal rotating device which comprises a seed crystal cavity, a sliding wire ring fixing block, a sliding wire ring support and a seed crystal cavity fixing plate, wherein the seed crystal cavity is arranged on the seed crystal cavity fixing plate; the rotating mechanism is arranged at the lower end of the seed crystal cavity fixing plate; the lifting mechanism is arranged at the right end of the seed crystal cavity fixing plate; the rope sheave assembly is arranged inside the seed crystal cavity and comprises a spline shaft, a spline shaft nut, a rope sheave, a Teflon nut, a stainless steel nut and a fixed plate, wherein the spline shaft is connected with the spline shaft nut, the rope sheave is fixedly arranged on the rope sheave spline shaft nut, the stainless steel nut is fixed on the fixed plate through a bearing, and a thread which drives the rope sheave to move is embedded, so that the whole rope sheave is smaller in structural size, the size of the cavity is reduced simultaneously, and the cost of the whole structure is reduced.
Description
Technical Field
The utility model relates to the field of silicon crystal production equipment, in particular to a novel seed crystal rotating device.
Background
The monocrystalline furnace is necessary equipment in the process of converting polycrystalline silicon into monocrystalline silicon, the monocrystalline silicon is one of the most important monocrystalline materials in the world at present as a key supporting material of the modern information society, and the monocrystalline furnace is not only a main functional material for developing computers and integrated circuits, but also a main functional material for photovoltaic power generation and utilizing solar energy.
In the process of using single crystal furnace preparation monocrystalline silicon, the seed crystal plays the effect of seeding, for realizing seeding smoothly, needs the seed crystal to rotate according to certain speed steady, and the seed crystal need weigh simultaneously, and inside weighing sensor was in the seed crystal cavity, need guarantee to be in the conducting state at the rotatory in-process weighing sensor of seed crystal cavity, for realizing this function, now adopts a novel seed crystal rotary device.
SUMMERY OF THE UTILITY MODEL
The utility model provides a novel seed crystal rotating device with reasonable structure and good use effect for solving the problems in the prior art.
The purpose of the utility model can be realized by the following technical scheme: a novel seed crystal rotating device comprises: the seed crystal cavity is arranged on the seed crystal cavity fixing plate, the sliding wire ring fixing block is arranged at the upper end of the seed crystal cavity, the sliding wire ring is arranged on the sliding wire ring fixing block, and the sliding wire ring support is connected with the sliding wire ring;
the rotating mechanism is arranged at the lower end of the seed crystal cavity fixing plate and drives the seed crystal cavity to rotate;
the lifting mechanism is arranged at the right end of the seed crystal cavity fixing plate and drives the seed crystal cavity to lift, and the lifting mechanism comprises a crystal lifting motor;
the rope pulley assembly is arranged inside the seed crystal cavity and comprises a spline shaft, a spline shaft nut, a rope pulley, a Teflon nut, a stainless steel nut, a fixing plate and a bearing, wherein the spline shaft is connected with the crystal lifting motor, the spline shaft nut is connected with the spline shaft, the rope pulley is fixedly arranged on the rope pulley spline shaft nut, the stainless steel nut is fixed on the fixing plate through the bearing, and threads of the Teflon nut and the stainless steel nut are reverse threads;
the weighing wheel assembly is arranged in the seed crystal cavity and is positioned above the rope pulley assembly;
and the seed crystal rope is connected with the weighing wheel assembly and wound on the rope pulley.
The rotating mechanism comprises a small belt wheel, a first driving mechanism, a poly-wedge belt, crystal-to-magnetic fluid and a large belt wheel, wherein the first driving mechanism is connected with the small belt wheel, the large belt wheel is connected with the small belt wheel through the poly-wedge belt, and the crystal-to-magnetic fluid shaft is connected with the large belt wheel.
In a further improvement, the lifting mechanism further comprises a worm gear speed reducer, a crystal lifting magnetic fluid and a crystal lifting planetary speed reducer, the crystal lifting planetary speed reducer is connected with the crystal lifting motor through a coupler, the crystal lifting planetary speed reducer is connected with the worm gear speed reducer, and the worm gear speed reducer is connected with the crystal lifting magnetic fluid.
In a further improvement, the first driving mechanism comprises a crystal rotating planetary speed reducer and a crystal rotating motor, the crystal rotating motor is connected with the crystal rotating planetary speed reducer through a coupler, and the crystal rotating planetary speed reducer is connected with the small belt wheel.
In a further improvement, a balancing weight is arranged on the seed crystal cavity fixing plate.
In a further improvement, the lower end of the crystal lifting motor is connected with a transmitter.
In a further improvement, a microswitch is arranged at the lower end of the crystal-to-magnetic fluid.
Compared with the prior art, the utility model realizes the smooth rotation of the seed crystal rope, so that the seeding process can be smoothly carried out; meanwhile, the seed crystal cavity is integrated, and compared with the traditional split cavity, the seed crystal cavity has the advantages of simple structure and low cost; the thread that drives the rope sheave motion adopts embedded, makes whole rope sheave structure size littleer, has reduced the cavity size simultaneously, has reduced the cost of whole structure.
Drawings
FIG. 1 is a schematic structural diagram of the present invention
FIG. 2 is a schematic view of another structure of the present invention
FIG. 3 is a schematic structural diagram of the first internal cross-sectional view of the present invention
FIG. 4 is a schematic structural diagram of a second internal cross-sectional view of the present invention
Fig. 5 is a schematic view of a sheave assembly of the present invention
In the figure, 1-slide wire ring, 2-slide wire ring fixed block, 3-seed crystal cavity, 5-worm gear speed reducer, 6-seed crystal cavity fixed plate, 7-small belt wheel, 8-crystal rotation planetary speed reducer, 9-crystal rotation motor, 10-poly wedge belt, 12-crystal rotation magnetofluid, 13-large belt wheel, 14-slide wire ring bracket, 15-crystal lifting magnetofluid, 16-crystal lifting planetary speed reducer, 17-crystal lifting motor, 18-transmitter, 19-crystal rotation motor, 20-microswitch, 21-weighing wheel assembly, 22-rope wheel assembly, 23-balancing weight, 24-spline shaft, 25-spline shaft nut, 26-rope wheel, 27-Teflon nut, 28-stainless steel nut, 29-fixed plate and 30-bearing.
Detailed Description
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected unless otherwise explicitly stated or limited. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The technical solution of the present invention is further described below with reference to the following embodiments and accompanying drawings 1 to 5.
Example 1
A novel seed crystal rotation device, comprising: the seed crystal cavity is 3, the sliding wire ring fixing block 2, the sliding wire ring 1, the sliding wire ring support 14 and the seed crystal cavity fixing plate 6, the seed crystal cavity 3 is arranged on the seed crystal cavity fixing plate 6, the sliding wire ring fixing block 2 is arranged at the upper end of the seed crystal cavity 3, the sliding wire ring 1 is arranged on the sliding wire ring fixing block 2, and the sliding wire ring support 14 is connected with the sliding wire ring 1;
the rotating mechanism is arranged at the lower end of the seed crystal cavity fixing plate 6 and drives the seed crystal cavity 3 to rotate;
the lifting mechanism is arranged at the right end of the seed crystal cavity fixing plate 6 and drives the seed crystal cavity 3 to lift, and the lifting mechanism comprises a crystal lifting motor 17;
the rope pulley component 22 is arranged inside the seed crystal cavity 3 and comprises a spline shaft 24, a spline shaft nut 25, a rope pulley 26, a Teflon nut 27, a stainless steel nut 28, a fixing plate 29 and a bearing 30, wherein the spline shaft 24 is connected with the crystal lift motor 17, the spline shaft nut 25 is connected with the spline shaft 24, the rope pulley 26 is fixedly arranged on the rope pulley spline shaft nut 25, the stainless steel nut 28 is fixed on the fixing plate 29 through the bearing 30, and threads of the Teflon nut 27 and the stainless steel nut 28 are reverse threads;
the weighing wheel assembly 21 is arranged inside the seed crystal cavity 3 and is positioned above the rope pulley assembly 22;
and a seed crystal rope 31 connected with the weighing wheel assembly 21 and wound on the rope pulley 26.
As shown in fig. 1 to 5, in the working process, the whole structure is installed on the furnace body, vacuum sealing is realized through the magnetic fluid, and the rotation mechanism drives the seed crystal cavity 3 to rotate, so that the seed crystal rope 31 is driven to rotate, and the rotation of the seed crystal is realized. During the rotation, the wire sliding ring 1 can make the seed crystal rope 31 in a conductive state all the time, and the seed crystal rope bracket 14 ensures that all the wires are not interfered by the rotation of the seed crystal cavity 3. In addition, the rope wheel 26 is rotated by the rotation of the crystal lifting motor 17, thereby driving the seed crystal to move up and down.
The motion mode of the rope pulley component is that the crystal lifting motor 17 drives the spline shaft 24 to rotate, so as to drive the spline shaft nut 25 and the rope pulley 26 to rotate, and the threads on the Teflon nut 27 and the stainless steel nut 28 are reverse threads, so that the threads push the rope pulley to move horizontally when the rope pulley 26 rotates.
The device realizes the smooth rotation of the seed crystal rope, so that the seeding process can be smoothly carried out.
Meanwhile, the seed crystal cavity body is integrated, and compared with the traditional split type cavity body, the seed crystal cavity body has the advantages of simple structure and low cost.
The thread that drives the rope sheave motion adopts embedded, makes whole rope sheave structure size littleer, has reduced the cavity size simultaneously, has reduced the cost of whole structure.
As a further preferred embodiment, the rotating mechanism comprises a small belt pulley 7, a first driving mechanism, a poly-v-belt 10, a crystal-to-magnetic fluid 12 and a large belt pulley 13, the first driving mechanism is connected with the small belt pulley 7, the large belt pulley 13 is connected with the small belt pulley 7 through the poly-v-belt 10, and the crystal-to-magnetic fluid 12 is connected with the large belt pulley 13 through a shaft. As shown in fig. 1 and fig. 2, the rotation of the magnetocrystalline fluid 12 is realized by the small pulley 7, the first driving mechanism, the multi-wedge belt 10, the transcrystalline magnetic fluid 12 and the large pulley 13 in the rotating mechanism. The belt wheel driving mode is adopted to realize the rotary motion of the device, and the slide wire environment is used to ensure that the weighing sensor is in a conductive state in the rotation process of the seed crystal cavity.
As a further preferred embodiment, the lifting mechanism further includes a worm gear reducer 5, a crystal lifting magnetic fluid 15, and a crystal lifting planetary reducer 16, the crystal lifting planetary reducer 16 is connected to the crystal lifting motor 17 through a coupling, the crystal lifting planetary reducer 16 is connected to the worm gear reducer 5, and the worm gear reducer 5 is connected to the crystal lifting magnetic fluid 15. As shown in fig. 1 and fig. 2, the crystal lifting magnetic fluid 15 is lifted and lowered by the worm gear and worm speed reducer 5, the crystal lifting magnetic fluid 15 and the crystal lifting planetary speed reducer 16 in the lifting mechanism.
As a further preferred embodiment, the first driving mechanism includes a crystal rotation planetary reducer 8 and a crystal rotation motor 9, the crystal rotation motor 9 is connected to the crystal rotation planetary reducer 8 through a coupling, and the crystal rotation planetary reducer 8 is connected to the small belt pulley 7. As shown in figure 1, the crystal rotating planetary reducer 8 and the crystal rotating motor 9 are matched for use, so that the speed and the torque are reduced and increased, and the use requirements are met.
As a further preferred embodiment, a balancing weight 23 is arranged on the seed crystal cavity fixing plate 6, and as shown in fig. 3, the center of gravity of the seed crystal cavity 3 coincides with the rotation axis by adjusting the position of the balancing weight 23, so that the overall operation stability is improved.
As a further preferred embodiment, the lower end of the crystal lifting motor 17 is connected with a transmitter 18. The smoothness of the overall operation is improved by transmitter 18 as shown in fig. 2.
As a further preferred embodiment, a microswitch 20 is arranged at the lower end of the crystal-to-magnetic fluid 12. As shown in fig. 2, the overall operation smoothness is improved by the microswitch 20.
The foregoing detailed description of the preferred embodiments of the utility model has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.
Claims (7)
1. A novel seed crystal rotating device is characterized by comprising: the seed crystal cavity is arranged on the seed crystal cavity fixing plate, the sliding wire ring fixing block is arranged at the upper end of the seed crystal cavity, the sliding wire ring is arranged on the sliding wire ring fixing block, and the sliding wire ring support is connected with the sliding wire ring;
the rotating mechanism is arranged at the lower end of the seed crystal cavity fixing plate and drives the seed crystal cavity to rotate;
the lifting mechanism is arranged at the right end of the seed crystal cavity fixing plate and drives the seed crystal cavity to lift, and the lifting mechanism comprises a crystal lifting motor;
the rope pulley assembly is arranged inside the seed crystal cavity and comprises a spline shaft, a spline shaft nut, a rope pulley, a Teflon nut, a stainless steel nut, a fixing plate and a bearing, wherein the spline shaft is connected with the crystal lifting motor, the spline shaft nut is connected with the spline shaft, the rope pulley is fixedly arranged on the rope pulley spline shaft nut, the stainless steel nut is fixed on the fixing plate through the bearing, and threads of the Teflon nut and the stainless steel nut are reverse threads;
the weighing wheel assembly is arranged in the seed crystal cavity and is positioned above the rope pulley assembly;
and the seed crystal rope is connected with the weighing wheel assembly and wound on the rope pulley.
2. A novel seed crystal rotating device as claimed in claim 1, wherein the rotating mechanism comprises a small belt wheel, a first driving mechanism, a poly-wedge belt, a crystal-to-magnetic fluid and a large belt wheel, the first driving mechanism is connected with the small belt wheel, the large belt wheel is connected with the small belt wheel through the poly-wedge belt, and the crystal-to-magnetic fluid shaft is connected with the large belt wheel.
3. The novel seed crystal rotating device as claimed in claim 1, wherein the lifting mechanism further comprises a worm gear reducer, a crystal lifting magnetic fluid and a crystal lifting planetary reducer, the crystal lifting planetary reducer is connected with the crystal lifting motor through a coupler, the crystal lifting planetary reducer is connected with the worm gear reducer, and the worm gear reducer is connected with the crystal lifting magnetic fluid.
4. A novel seed crystal rotation device as claimed in claim 2, wherein the first driving mechanism comprises a crystal rotation planetary reducer and a crystal rotation motor, the crystal rotation motor is connected with the crystal rotation planetary reducer through a coupling, and the crystal rotation planetary reducer is connected with the small belt wheel.
5. A novel seed crystal rotating device as claimed in claim 1, wherein a balancing weight is provided on the seed crystal cavity fixing plate.
6. A novel seed crystal rotating device as claimed in claim 1, wherein a transducer is connected to the lower end of the crystal lifting motor.
7. A novel seed crystal rotating device as claimed in claim 2, wherein a microswitch is arranged at the lower end of the crystal-to-magnetic fluid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122066907.6U CN216274466U (en) | 2021-08-30 | 2021-08-30 | Novel seed crystal rotating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122066907.6U CN216274466U (en) | 2021-08-30 | 2021-08-30 | Novel seed crystal rotating device |
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| Publication Number | Publication Date |
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| CN216274466U true CN216274466U (en) | 2022-04-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122066907.6U Active CN216274466U (en) | 2021-08-30 | 2021-08-30 | Novel seed crystal rotating device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115467027A (en) * | 2022-08-15 | 2022-12-13 | 上海汉虹精密机械有限公司 | Conductive structure used in silicon carbide furnace cavity |
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2021
- 2021-08-30 CN CN202122066907.6U patent/CN216274466U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115467027A (en) * | 2022-08-15 | 2022-12-13 | 上海汉虹精密机械有限公司 | Conductive structure used in silicon carbide furnace cavity |
| CN115467027B (en) * | 2022-08-15 | 2024-02-06 | 上海汉虹精密机械有限公司 | Conductive structure for silicon carbide furnace chamber |
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