CN215404638U - Lifting mechanism based on crystal growth device adopting descent method - Google Patents
Lifting mechanism based on crystal growth device adopting descent method Download PDFInfo
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- CN215404638U CN215404638U CN202122189193.8U CN202122189193U CN215404638U CN 215404638 U CN215404638 U CN 215404638U CN 202122189193 U CN202122189193 U CN 202122189193U CN 215404638 U CN215404638 U CN 215404638U
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Abstract
The utility model relates to the field of crystal growth equipment, in particular to a lifting mechanism of a crystal growth device based on a descent method, which comprises a crystal growth device provided with a crucible and used for growing crystals, a supporting device used for placing the crystal growth device and provided with a lifting supporting platform, and a vertical lifting device used for controlling the lifting of the crucible, wherein the vertical lifting device comprises a bearing unit connected with the crucible, a guide unit used for limiting the movement direction of the bearing unit, and a driving unit used for providing power for the movement of the bearing unit. Through setting up guide unit, the fixing base of being connected with guide unit to and the support column of connection on the fixing base, increase the bearing capacity of crucible when guaranteeing the perpendicular steady motion of fixing base and crucible.
Description
Technical Field
The utility model relates to the field of crystal growth equipment, in particular to a lifting mechanism of a crystal growth device based on a descent method.
Background
In the prior art, a Czochralski method or a descent method is adopted to grow the composite fluoride laser crystal, and the temperature gradient at a solid-liquid interface in the growth process is too large by adopting the Czochralski method, so that the internal stress of the crystal is larger and the defects are more, and therefore, the descent method is more suitable for growing the composite fluoride laser crystal.
The descending method is a vacuum crucible descending method, the used growth equipment is a crystal growth furnace of the crucible descending method, a crucible is positioned in the vacuum furnace, a crucible descending device is a worm gear mechanism, a gear motor drives a worm gear, the worm moves downwards, and the crucible positioned at the top end of the worm descends along with the worm gear mechanism. However, the decelerating motor can cause the intermediate frequency vibration with the frequency of 1.4-3.8 KHz, and the worm gear mechanism can cause the low frequency vibration, and even if the vibration is light, the interference on the crystal growth can be formed through the crucible regardless of the intermediate frequency or the low frequency vibration.
The utility model discloses a crucible descent method is with molybdenum crucible mobile device is disclosed in 201120163799.8, including elevating system and crucible pole, the upper end of crucible pole is connected with the molybdenum crucible that is located the furnace body, the lower extreme of crucible pole is worn out the furnace body and is connected with elevating system, the furnace body bottom is provided with the connecting seat, be provided with the dog on the crucible pole, the cover is equipped with the bellows on the crucible pole, just the upper end of bellows is fixed on the connecting seat, the lower extreme of bellows is fixed on the dog. The molybdenum crucible moving device can ensure good sealing performance of the molybdenum crucible moving device in a motion state, so that the quality of crystal products is improved, installation and debugging procedures are simplified, and the processing and production cost is reduced.
The utility model patent 201210509805.X discloses a descending device of a crystal growing furnace by a Bridgman method, which is suitable for the growth of crystals with crystal quality sensitive to external vibration and belongs to the technical field of crystal growth. In the prior art, medium-frequency and low-frequency vibration exists, interference on crystal growth is formed through a crucible, and the crystal quality is reduced. The descending device of the crystal growing furnace by the Bridgman-Stockbarge method is characterized in that a piston at the lower end of a lifting rod is positioned in a hydraulic cylinder; one end of an oil dropping valve positioned at the bottom of the hydraulic cylinder is communicated with the interior of the hydraulic cylinder, and the other end of the oil dropping valve is communicated with the oil storage tank; the displacement sensor arranged on the side wall close to the lifting rod is connected with the speed reduction controller, and the speed reduction controller is connected with the control part of the oil drip valve. The undoped crystal is grown by adopting the descent method, the diameter of the crystal is 20mm, the length of the crystal is 200mm, the single crystal structure is complete, the cleavage plane of the crystal obtained by splitting is smooth and flat, the stress birefringence of the crystal is less than 10nm/cm, the absorption coefficient is less than 2X 10E-3 when the middle part of the crystal is cut and cut for measurement, and the damage threshold value is improved.
With the development of industrial technology and the more and more extensive application of crystal materials and the mature development of crystal growth technology, the size of a single diameter of a grown crystal is increased, the length of the grown crystal is lengthened, the quantity of the crystal grown at one time is increased, and for the crystal growth equipment adopting a Bridgman method, a single lifting mechanism with a screw rod and a sliding table is used at present, and the mechanism has the defects of limited load and poor operation stability. The lifting mechanism in the utility model and the utility model can not meet the requirement when the diameter of a single crystal is increased, and because the single screw rod and the sliding table lifting mechanism have a structural reason, the height of the whole growth equipment is very high, thus having higher requirement on the height of a factory building.
Disclosure of Invention
Aiming at the problems in the prior art, the utility model aims to provide a crucible lifting mechanism, which can solve the problem of unstable mechanical system in crystal growth equipment with high bearing capacity by changing the mechanical structure, controlling a planetary reducer by a motor, connecting a worm gear for transmission and adding a multi-column guide mechanism, and can solve the problem of limited load weight and poor operation stability of a screw rod lifting mechanism of the crystal growth equipment by a descent method in the prior art, and improve the bearing range of the mechanical lifting system in the crystal growth equipment. Meanwhile, the motor is adjusted to be laterally arranged from the vertical direction through the worm gear structure, so that the height of the whole crystal growth device is reduced, and the requirement on the device use site is reduced.
In order to achieve the purpose, the utility model adopts the technical scheme that: the utility model provides a elevating system based on falling method crystal growth device, is including the crystal growth device who is used for growing the crystal that is provided with the crucible for place crystal growth device and be equipped with lift supporting platform's strutting arrangement, a vertical lift device for controlling the crucible lift, vertical lift device includes the load cell of being connected with the crucible, the direction of motion's of restriction load cell guide unit to and for the drive unit that the load cell motion provided power, load cell includes the support column that one end and crucible are connected, and the other end of support column is connected with the fixing base that has the guiding hole, and two are no less than in the support column setting, and the junction evenly distributed of support column and fixing base is on the fixing base, the guiding hole on the fixing base is passed to the guide unit, drive unit is connected with the bottom surface of fixing base.
The lifting mechanism based on the crystal growth device adopting the descent method comprises a guide unit and a sliding bush, wherein the guide unit comprises a guide straight rod, one end of the guide straight rod is connected with the lifting supporting platform, the other end of the guide straight rod is connected with the crystal growth device, the guide straight rod vertically penetrates through a guide hole, the lifting mechanism further comprises the sliding bush sleeved outside the guide straight rod, the sliding bush is in sliding connection with the guide straight rod and fixed on a fixing seat through a bush fixing seat, and at least one group of guide unit is arranged.
Foretell elevating system based on descent method crystal growth device, the direction unit is provided with 3 groups, the even equidistance distribution of guiding hole is on the fixing base.
The lifting mechanism comprises a worm wheel part and a driving part, wherein the worm wheel part is connected with the fixed seat and drives the fixed seat to move, the driving part is used for providing power for the worm wheel part, the worm wheel part comprises a worm vertically connected with the fixed seat and a wheel rod connected with the output end of the driving part, and the driving part comprises a motor and a planetary reducer, the motor is installed on the lifting supporting platform and used for providing driving force, the planetary reducer is connected with the worm, the rotating speed of the motor is reduced, and meanwhile, the output torque is increased.
The lifting mechanism of the crystal growth device based on the descent method has the beneficial effects that: at least one group of guide units, a fixed seat connected with the guide units and at least two support columns connected to the fixed seat are arranged, so that the bearing capacity of the crucible is improved while the fixed seat and the crucible move vertically and stably; the drive unit increases the output torque through the planetary reducer who utilizes the motor to increase the reduction ratio, goes up and down through turbine worm platform mechanism, and the movable platform that goes up and down simultaneously adopts 3 or many slip guiding mechanisms to guarantee that movable platform's atress is even, has strengthened the stability of operation. The vertical direction occupation ratio of the equipment is reduced through the horizontal and vertical motion relation of the worm gear, so that the overall height of the equipment is reduced.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic structural diagram of a load-bearing unit according to the present invention;
FIG. 3 is a schematic structural diagram of a driving unit according to the present invention;
FIG. 4 is a schematic view of the mechanism of the crystal growing apparatus of the present invention;
FIG. 5 is a schematic view of a guide unit according to the present invention;
fig. 6 is an enlarged view of a portion a.
In the figure: the crucible support comprises a crucible support 1, a crucible support base 11, a crucible hole 12, a crystal growth device 2, a heat-preservation upper cover 21, a heat-preservation heating block 22, a supporting device 3, a lifting supporting platform 31, a furnace frame platform 32, a foot rest 33, a vertical lifting device 4, a bearing unit 5, a supporting column 51, a fixed seat 52, a guide hole 53, a guide unit 6, a guide straight rod 61, a sliding bush 62, a bush fixed seat 63, a driving unit 7, a worm 71, a wheel rod 72, a motor 73, a planetary reducer 74, a height detection unit 8, a grating ruler 81 and a grating ruler installation seat 82.
Detailed Description
In order to make the technical solutions of the present invention better understood, the present invention is specifically described below with reference to the following description of the embodiments and the accompanying drawings.
As shown in figures 1-6, a elevating system based on descent method crystal growth device, including being provided with the crystal growth device that is used for growing crystal that the crucible held in the palm, the crucible holds in the palm places the inside at the crystal growth device, a strutting arrangement for placing the crystal growth device and being equipped with lift supporting platform, a vertical lift device for controlling the crucible holds in the palm the lift, the crucible holds in the palm to divide into the crucible hole that is used for placing the material of growing crystal and holds in the palm the base at the crucible that sets up in crucible hole below, the cavity tube-shape of crystal growth device for having the heat preservation upper cover, be provided with on the section of thick bamboo wall on every side and be used for holding in the palm the heat preservation heating block that heats and keep warm for the crucible, the crucible holds in the palm and places the inside at the crystal growth device.
The top end of the supporting device is provided with a furnace frame platform for placing a crystal growth device, the furnace frame platform can use a square flat plate and is parallel to the ground, the crystal growth device is placed on the furnace frame platform, the bottom of the crystal growth device and the furnace frame platform are both provided with support column through holes, the number of the support column through holes is determined according to the number of support columns connected to the crucible support base, the support column through holes and the support columns are connected in a sealing sliding mode, and the joints are resistant to high-temperature corrosion; the supporting device is connected with foot rests for supporting the furnace frame platform below the four corners of the furnace frame platform, a lifting supporting platform parallel to the furnace frame platform is arranged in the middle of the foot rests, and the vertical lifting device is arranged on the supporting platform.
The vertical lifting device comprises a bearing unit connected with the crucible support, a guide unit for limiting the movement direction of the bearing unit and a driving unit for providing power for the movement of the bearing unit.
The carrier unit includes that one end and crucible hold in the palm the support column of being connected, and the other end of support column is connected with the fixing base that has the guiding hole, and two are no less than in the support column setting, and this technical scheme well support column is provided with 3, and the junction evenly distributed of support column and fixing base is on the fixing base, and the guiding hole on the fixing base is passed to the guide unit, and drive unit is connected with the bottom surface of fixing base.
The guide unit includes that one end is connected with lift supporting platform, the direction straight-bar that the other end is connected with crystal growth device, the direction straight-bar runs through the guiding hole perpendicularly, still including cup jointing the sliding bush outside the direction straight-bar, sliding bush and direction straight-bar sliding connection to fix on the fixing base with the bush fixing base, a set ofly is no less than in the setting of guide unit, and the guide unit is provided with 3 groups among this technical scheme, and the even equidistance of guiding hole distributes on the fixing base. The sliding bush has certain length, can ensure that the fixing base moves up and down within the range limited by the guide straight rod, and does not deviate. The center shafts of the guide straight rod, the sliding bush and the bush fixing seat are overlapped with the center shaft of the guide hole.
The guide straight rod and the support rod are uniformly distributed on the fixed seat at intervals. The bushing holder may represent a connection of the sliding bushing to the holder, including but not limited to welding, screwing, and snap-fit connection.
The drive unit comprises a worm wheel part and a drive part, wherein the worm wheel part is connected with the fixing seat and drives the fixing seat to move, the drive part is used for providing power for the worm wheel part, the worm wheel part comprises a worm vertically connected with the fixing seat and a wheel rod connected with the output end of the drive part, the drive part comprises a motor and a planetary reducer, the motor is installed on the lifting support platform and used for providing drive force, the motor is connected with the worm, the rotating speed of the motor is reduced, and meanwhile the output torque is increased. The connecting point of the worm and the fixing seat is arranged at the central position of the fixing seat, and the central axis of the worm is coincided with the central axis of the fixing seat.
And furthermore, a height detection unit for recording the lifting height of the crucible support is further arranged, a grating ruler mounting seat vertical to the lifting support platform and the furnace frame platform is arranged between the lifting support platform and the furnace frame platform, and a grating ruler is mounted on the grating ruler mounting seat.
Specifically, taking sodium iodide crystal growth equipment as an example, in the equipment, a servo motor is adopted to be matched with a planetary reducer to control parameters such as the running speed, the position and the like of crystal growth with high precision, 3 groups of sliding guide unit mechanisms are utilized to increase the running stability and the stress of a fixed seat and a crucible support base, 4 crystal bars with large sizes can be grown on the crucible support, 60 kilograms of raw materials are filled in each crucible hole, and the total amount of the raw materials is 240 kilograms.
The crystal growth device and the furnace frame platform part form a frame of crystal growth equipment, and the heat-insulating upper cover, the heat-insulating heating block and the crucible support are parts of a furnace body in the crystal growth equipment. The equipment driving unit comprises servo motor and planetary reducer, and direction straight-bar, slip bush, bush fixing base guarantee that the crucible holds in the palm the mechanical motion stability that reciprocates, do not produce and sway, carry out accurate control to the worm through servo motor control system. The equipment driving unit drives the worm wheel to rotate, so that the worm wheel drives the worm to vertically move, the fixed seat vertically moves on the top end of the worm, the crucible support moves, the grating ruler installed on the grating ruler installation seat records data of up-down movement of the fixed seat, and the position and the movement rate of the crucible support are read and fed back to the control unit.
The crystal growth process is as follows: 1. loading the raw materials into a crucible hole, wherein the weight of a crucible is 30 kilograms; 2. the crucible support is adjusted to a proper position by controlling a servo motor; 3. heating the heating furnace through a temperature control system; 4. after the required temperature is reached, the servo motor is controlled to regulate and operate to descend; 5. and (6) stopping the movement of the lifting mechanism after the crystal grows to the completion after the crystal descends for a certain distance, and taking out the crystal after the temperature is reduced to the room temperature.
The above-mentioned embodiments are only for illustrating the structural conception and the characteristics of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, and the protection scope of the present invention is not limited thereby. All equivalent changes or modifications made according to the spirit of the present disclosure should be covered within the scope of the present disclosure.
Claims (4)
1. The utility model provides an elevating system based on descent method crystal growth device, holds in the palm including being provided with the crucible and is used for growing crystal's crystal growth device for place crystal growth device and be equipped with the strutting arrangement who goes up and down to support crucible platform, be used for controlling crucible and hold in the palm the vertical lift device of lift, its characterized in that: vertical lift device includes the carrier unit who is connected with crucible support, restricts the guide unit of carrier unit direction of motion to and provide powered drive unit for the carrier unit motion, the carrier unit includes that one end and crucible support the support column of being connected, and the other end of support column is connected with the fixing base that has the guiding hole, and two are no less than in the support column setting, and the junction evenly distributed of support column and fixing base is on the fixing base, the guide unit passes the guiding hole on the fixing base, drive unit is connected with the bottom surface of fixing base.
2. The crystal growth apparatus lift mechanism based on the descent method as set forth in claim 1, wherein: the guide unit comprises a guide straight rod, wherein one end of the guide straight rod is connected with the lifting support platform, the other end of the guide straight rod is connected with the crystal growth device, the guide straight rod vertically penetrates through the guide hole, the guide unit further comprises a sliding bush sleeved outside the guide straight rod, the sliding bush is in sliding connection with the guide straight rod and fixed on the fixed seat through a bush fixed seat, and the guide unit is not less than one group.
3. The crystal growth apparatus lift mechanism based on the descent method as set forth in claim 2, wherein: the direction unit is provided with 3 groups, the even equidistance distribution of guiding hole is on the fixing base.
4. The crystal growth apparatus lift mechanism based on the descent method as set forth in claim 1, wherein: the drive unit includes and is connected with the fixing base, drives the worm wheel portion of fixing base motion to and be used for providing the drive division of power for the worm wheel portion, the worm wheel portion includes the worm of being connected perpendicularly with the fixing base, and the wheel pole of being connected with the drive division output, the drive division is including installing the motor that is used for providing drive power on lift supporting platform, and be connected with the worm, reduces the rotational speed of motor, increases output torque's planetary reducer simultaneously.
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| CN202122189193.8U CN215404638U (en) | 2021-09-10 | 2021-09-10 | Lifting mechanism based on crystal growth device adopting descent method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115233288A (en) * | 2022-08-03 | 2022-10-25 | 北京铭镓半导体有限公司 | Method for fixing support platform of crucible for growing colored gem crystals by VGF (vacuum gradient freeze) method |
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2021
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115233288A (en) * | 2022-08-03 | 2022-10-25 | 北京铭镓半导体有限公司 | Method for fixing support platform of crucible for growing colored gem crystals by VGF (vacuum gradient freeze) method |
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Effective date of registration: 20230412 Address after: 066000 Green Chemical Industry Park, Lulong Economic Development Zone, Qinhuangdao City, Hebei Province, South of Yongwang Street, East of Kaiwu Road Patentee after: Qinhuangdao microcrystalline Technology Co.,Ltd. Address before: 066000 No. 1 Xihu Road, Qinhuangdao Economic and Technological Development Zone, Hebei Province Patentee before: INTRINIC CRYSTAL TECHNOLOGY CO.,LTD. |