CN206607337U - A kind of weighing device of single crystal growing furnace - Google Patents
A kind of weighing device of single crystal growing furnace Download PDFInfo
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- CN206607337U CN206607337U CN201720371910.XU CN201720371910U CN206607337U CN 206607337 U CN206607337 U CN 206607337U CN 201720371910 U CN201720371910 U CN 201720371910U CN 206607337 U CN206607337 U CN 206607337U
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Abstract
This application discloses a kind of weighing device of single crystal growing furnace, including：Weigh device, in the crystal pull mechanism of the single crystal growing furnace, for weighing crystal weight；Bearing part, be supported in it is described weigh on device, the rope for carrying the crystal pull mechanism.The weighing device of this single crystal growing furnace, using the charging gross weight in crucible and the crystal weight weighed, obtains the remaining material weight in crucible, to control the lifting speed of crucible lifting mechanism, it is to avoid pot is with than too small or excessive influence crystal growth.
Description
Technical field
The utility model is related to technical field of crystal growth, more particularly to a kind of weighing device of single crystal growing furnace.
Background technology
Single crystal growing furnace be one kind in inert gas environment, the polycrystalline materials such as polysilicon are melted with graphite heater, with straight
The equipment that daraf(reciprocal of farad) grows dislocation-free monocrystalline.
Existing single crystal growing furnace mainly includes frame, main furnace chamber, concubine, crystal pull mechanism, crucible and crucible lifting mechanism.
Concubine is connected on main furnace chamber, and crucible is arranged in main furnace chamber, and the bottom of crucible is driven by crucible lifting mechanism to be lifted；Crystal
Shift mechanism is arranged above concubine, and the rope of crystal pull mechanism enters in main furnace chamber through concubine, and young crystalline substance is carried
Draw generation crystal bar.Due to during crystal growth, with the continuous lifting of crystal pull mechanism, the molten state in crucible is former
Material forms solid-state crystal bar at young crystalline substance, and now, the solution in crucible constantly reduces, and liquid level declines, in order to ensure continuing for crystal bar
Growth, it is necessary to adjust pot with than pot according to the situation of remaining material in technological requirement and crucible in single crystal growing furnace crystal growing process
With than being the ratio between the translational speed of crucible and the pull rate of crystal pull mechanism.
The pot used at present with than being calculated by formula, draw pot that crystal bar grows per segment length with than.Growing
According to pot in table with than controlling the speed that crucible rises according to the pull rate of crystal pull mechanism in journey, according to crystal growth
Actual conditions carry out artificial modification pot of intervening manually with than coefficient, correcting the growth course of crystal.But in actual production process, by
Changed in the crystal diameter of growth, cause to occur actual pot with than excessive or too small, influenceing the normal growth of crystal.
In summary, the problem of pot is with than adjusting inaccurate how is solved, becomes those skilled in the art urgently to be resolved hurrily
The problem of.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of weighing device of single crystal growing furnace, to be applied to single crystal growing furnace
In, it is to avoid pot is with than excessive or too small influence crystal growth.
To reach above-mentioned purpose, the utility model provides following technical scheme：
A kind of weighing device of single crystal growing furnace, including：
Weigh device, in the crystal pull mechanism of the single crystal growing furnace, for weighing crystal weight；
Bearing part, be supported in it is described weigh on device, the rope for carrying the crystal pull mechanism.
Preferably, in above-mentioned weighing device, in addition to support, in the crystal pull mechanism, institute
Device of weighing is stated to be installed on the support.
Preferably, in above-mentioned weighing device, the bearing part is pulley, and the pulley rotation is supported in described weigh
On device, the rope bypasses the pulley.
Preferably, in above-mentioned weighing device, the bearing part is polished rod, the polished rod rotational support or fixed support
Weighed in described on device, the rope bypasses the polished rod.
Preferably, in above-mentioned weighing device, the quantity of the device of weighing is at least two.
Preferably, in above-mentioned weighing device, the device of weighing is respectively supported at the two ends of the bearing part.
Preferably, in above-mentioned weighing device, the device of weighing is electronic scale.
Compared with prior art, the beneficial effects of the utility model are：
In the weighing device for the single crystal growing furnace that the utility model is provided, including weigh device and bearing part, device of weighing are used for
In the crystal pull mechanism of single crystal growing furnace, for weighing crystal weight；Bearing part, which is supported in, weighs on device, for carrying
The rope of crystal pull mechanism.During work, crystal pull mechanism by rope when lifting crystal, due to rope carrying
In on bearing part, therefore, on the load bearing member, and bearing part is arranged on and weighed on device the weight pressure of whole crystal, therefore, weighs
Device can weigh crystal weight.The weighing device of single crystal growing furnace in the application can be applied in single crystal growing furnace, using in crucible
Charging gross weight and weigh crystal weight, the remaining material weight in crucible is obtained, to control the lifting of crucible lifting mechanism
Speed, it is to avoid pot is with than too small or excessive influence crystal growth.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the accompanying drawing used required in description of the prior art is briefly described, it should be apparent that, drawings in the following description are only
It is embodiment of the present utility model, for those of ordinary skill in the art, on the premise of not paying creative work, also
Other accompanying drawings can be obtained according to the accompanying drawing of offer.
A kind of mounting structure schematic diagram of the weighing device for single crystal growing furnace that Fig. 1 provides for the utility model embodiment；
A kind of operation principle schematic diagram of the weighing device for single crystal growing furnace that Fig. 2 provides for the utility model embodiment.
Wherein, 1 it is crystal pull mechanism, 11 be rope, 12 be lifting casing, 13 be lifting drive device, 2 is secondary
Room, 3 be crystal, 4 be main furnace chamber, 5 be crucible, 6 be crucible lifting mechanism, 7 be weighing device, 71 be bearing part, 72 to weigh
Device, 73 are support.
Embodiment
Core of the present utility model there is provided a kind of weighing device of single crystal growing furnace, can be used in the pot of single crystal growing furnace with than adjusting
Section, it is to avoid pot is with than excessive or too small influence crystal growth.
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Fig. 1 and Fig. 2 are refer to, the utility model embodiment provides a kind of weighing device 7 of single crystal growing furnace, including weighing apparatus
Part 72 and bearing part 71, wherein, device 72 of weighing is used in the crystal pull mechanism 1 of single crystal growing furnace, for weighing crystal
Weight, crystal pull mechanism 1 includes lifting casing 12, lifting drive device 13 and rope 11, and device 72 of weighing is arranged on and carried
Draw in casing 12；Bearing part 71, which is supported in, weighs on device 72, the rope 11 for carrying crystal pull mechanism 1, rope
11 end lifting crystal 3, the upper end of rope 11 can be ridden on bearing part 71, and is driven with the lifting of crystal pull mechanism 1
Device 13 is connected.
During work, crystal pull mechanism 1 by rope 11 when lifting crystal 3, because rope 11 is carried on carrying
On part 71, therefore, the weight of whole crystal 3 is pressed on bearing part 71, and bearing part 71 is arranged on and weighed on device 72, therefore,
Device 72 of weighing can weigh crystal weight.Weighing device in the application can be applied in single crystal growing furnace, using in crucible 5
The gross weight that feeds and the crystal weight weighed, obtain the remaining material weight in crucible 5, and the inside dimension further according to crucible 5 is calculated
Theoretical pot is obtained with than according to theoretical pot with the lifting speed than adjusting crucible lifting mechanism 6, so as to adjust the lifting of crucible 5
Speed, makes the actual pot of crucible 5 with than approaching theoretical pot with than so as to avoid pot with than excessive or too small influence crystal life
It is long.
In the present embodiment, weighing device 7 also includes support 73, in crystal pull mechanism 1, device of weighing
72 are installed on support 73.Whole weighing device 7 is supported by support 73.
As optimization, in the present embodiment, bearing part 71 is pulley, and pulley rotation, which is supported in, weighs on device 72, lifting
Rope 11 bypasses pulley.Pulley can reduce the resistance of rope 11.
Certainly, bearing part 71 can also be polished rod, and polished rod is rotated or is fixedly supported to and weighs on device 72.
In the present embodiment, weigh device 72 quantity be at least two, preferably two.When the quantity for device 72 of weighing
For it is multiple when, then be respectively supported at the two ends of bearing part 71, make bearing capacity more uniform.Certainly, device 72 of weighing can also be
One, three etc. more, weighed as long as can realize.
In the present embodiment, device 72 of weighing is electronic scale, as long as crystal weight can be weighed.
The single crystal growing furnace that weighing device 7 in the application is applied includes main furnace chamber 4, concubine 2, crystal pull mechanism 1, crucible
5 and crucible lifting mechanism 6.Wherein, concubine 2 is connected on main furnace chamber 4, and crucible 5 is arranged in main furnace chamber 4, and the bottom of crucible 5 leads to
Cross the driving lifting of crucible lifting mechanism 6；Crystal pull mechanism 1 is arranged at the top of concubine 2, the rope 11 of crystal pull mechanism 1
Enter through concubine 2 in main furnace chamber 4, to young brilliant progress lifting generation crystal bar；Silicon material of the crucible 5 built with melting；Weighing device 7
It is arranged in crystal pull mechanism 1, the rope 11 of crystal pull mechanism 1 is carried on weighing device 7, for weighing crystal weight
Amount.
Single crystal growing furnace weighs the crystal weight of growth by weighing device 7 in real time, utilizes the charging gross weight and title in crucible 5
The crystal weight of amount, obtains the remaining material weight in crucible 5, and due to the internal structure of crucible 5, remaining material weight is not
Together, cause decrease speed of the melt liquid level in crucible 5 different, therefore, liquid level is obtained in crucible 5 by remaining material weight
Position, position is different, and obtained pot is with than difference, the single crystal growing furnace can be according to remaining material Weight control crucible lifting mechanism 6
Lift speed so that crystal 3 controls more to stablize, it is to avoid pot is with than too small or excessive influence crystal growth.
The embodiment of each in this specification is described by the way of progressive, and what each embodiment was stressed is and other
Between the difference of embodiment, each embodiment identical similar portion mutually referring to.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or new using this practicality
Type.A variety of modifications to these embodiments will be apparent for those skilled in the art, determine herein
The General Principle of justice can in other embodiments be realized in the case where not departing from spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.
Claims (7)
1. a kind of weighing device of single crystal growing furnace, it is characterised in that including：
Weigh device (72), in the crystal pull mechanism (1) installed in the single crystal growing furnace, for weighing crystal weight；
Bearing part (71), be supported in it is described weigh on device (72), the rope for carrying the crystal pull mechanism (1)
(11)。
2. weighing device according to claim 1, it is characterised in that also including support (73), for installed in the crystalline substance
In body shift mechanism (1), the device of weighing (72) is installed on the support (73).
3. weighing device according to claim 1, it is characterised in that the bearing part (71) is pulley, the pulley turns
Move and weighed described in being supported on device (72), the rope (11) bypasses the pulley.
4. weighing device according to claim 1, it is characterised in that the bearing part (71) is polished rod, the polished rod turns
Move and weighed described in supporting or being fixedly supported on device (72), the rope (11) bypasses the polished rod.
5. weighing device according to claim 2, it is characterised in that the quantity of the device of weighing (72) is at least two
It is individual.
6. weighing device according to claim 5, it is characterised in that the device of weighing (72) is respectively supported at described hold
The two ends of holder (71).
7. weighing device according to claim 1, it is characterised in that the device of weighing (72) is electronic scale.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720371910.XU CN206607337U (en) | 2017-04-07 | 2017-04-07 | A kind of weighing device of single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720371910.XU CN206607337U (en) | 2017-04-07 | 2017-04-07 | A kind of weighing device of single crystal growing furnace |
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| Publication Number | Publication Date |
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| CN206607337U true CN206607337U (en) | 2017-11-03 |
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| CN201720371910.XU Active CN206607337U (en) | 2017-04-07 | 2017-04-07 | A kind of weighing device of single crystal growing furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106757315A (en) * | 2017-04-07 | 2017-05-31 | 天通吉成机器技术有限公司 | A kind of weighing device of single crystal growing furnace |
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2017
- 2017-04-07 CN CN201720371910.XU patent/CN206607337U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106757315A (en) * | 2017-04-07 | 2017-05-31 | 天通吉成机器技术有限公司 | A kind of weighing device of single crystal growing furnace |
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