CN206616290U - A kind of single crystal growing furnace - Google Patents
A kind of single crystal growing furnace Download PDFInfo
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- CN206616290U CN206616290U CN201720365944.8U CN201720365944U CN206616290U CN 206616290 U CN206616290 U CN 206616290U CN 201720365944 U CN201720365944 U CN 201720365944U CN 206616290 U CN206616290 U CN 206616290U
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- crucible
- weighing
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- single crystal
- growing furnace
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Abstract
This application discloses a kind of single crystal growing furnace, including main furnace chamber, concubine, crucible, crucible lifting mechanism and crystal pull mechanism, in addition to：Weighing mechanism, is arranged in crystal pull mechanism, and the rope of crystal pull mechanism is carried on the Weighing mechanism, for weighing crystal weight.This single crystal growing furnace, using the charging gross weight in crucible and the crystal weight weighed, obtains the remaining material weight in crucible, to control the lifting speed of crucible lifting mechanism, it is to avoid pot is with than too small or excessive influence crystal growth by increasing Weighing mechanism.
Description
Technical field
The utility model is related to technical field of crystal growth, more particularly to a kind of single crystal growing furnace.
Background technology
Single crystal growing furnace be one kind in inert gas environment, the polycrystalline materials such as polysilicon are melted with graphite heater, with straight
The equipment that daraf(reciprocal of farad) grows dislocation-free monocrystalline.
Existing single crystal growing furnace mainly includes frame, main furnace chamber, concubine, crystal pull mechanism, crucible and crucible lifting mechanism.
Concubine is connected on main furnace chamber, and crucible is arranged in main furnace chamber, and the bottom of crucible is driven by crucible lifting mechanism to be lifted；Crystal
Shift mechanism is arranged above concubine, and the rope of crystal pull mechanism enters in main furnace chamber through concubine, and young crystalline substance is carried
Draw generation crystal bar.Due to during crystal growth, with the continuous lifting of crystal pull mechanism, the molten state in crucible is former
Material forms solid-state crystal bar at young crystalline substance, and now, the solution in crucible constantly reduces, and liquid level declines, in order to ensure continuing for crystal bar
Growth, it is necessary to adjust pot with than pot according to the situation of remaining material in technological requirement and crucible in single crystal growing furnace crystal growing process
With than being the ratio between the translational speed of crucible and the pull rate of crystal pull mechanism.
The pot used at present with than being calculated by formula, draw pot that crystal bar grows per segment length with than.Growing
According to pot in table with than controlling the speed that crucible rises according to the pull rate of crystal pull mechanism in journey, according to crystal growth
Actual conditions carry out artificial modification pot of intervening manually with than coefficient, correcting the growth course of crystal.But in actual production process, by
Changed in the crystal diameter of growth, cause to occur actual pot with than excessive or too small, influenceing the normal growth of crystal.
In summary, the problem of pot is with than adjusting inaccurate how is solved, becomes those skilled in the art urgently to be resolved hurrily
The problem of.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of single crystal growing furnace, to avoid pot with than excessive or too small shadow
Ring crystal growth.
To reach above-mentioned purpose, the utility model provides following technical scheme：
A kind of single crystal growing furnace, including main furnace chamber, concubine, crucible, crucible lifting mechanism and crystal pull mechanism, in addition to：
Weighing mechanism, is arranged in the crystal pull mechanism, and the rope of the crystal pull mechanism is carried on described
On Weighing mechanism, for weighing crystal weight.
Preferably, in above-mentioned single crystal growing furnace, the Weighing mechanism includes：
Support, in the crystal pull mechanism；
Weigh device, install on the bracket, for weighing crystal weight；
Bearing part, be supported in it is described weigh on device, for carrying the rope.
Preferably, in above-mentioned single crystal growing furnace, the bearing part is pulley, and the pulley rotation is supported in the weighing apparatus
On part, the rope bypasses the pulley.
Preferably, in above-mentioned single crystal growing furnace, the quantity of the device of weighing is at least two, is respectively supported at described hold
The two ends of holder.
Preferably, in above-mentioned single crystal growing furnace, the device of weighing is electronic scale.
Preferably, in above-mentioned single crystal growing furnace, the rope is tungsten rope.
Preferably, in above-mentioned single crystal growing furnace, the crystal pull mechanism includes lifting casing, lifting drive device and carried
Drawstring, the lifting drive device is installed in the stretching tank body, and the rope is connected with the lifting drive device, institute
Weighing mechanism is stated to be installed in the stretching tank body.
Preferably, in above-mentioned single crystal growing furnace, the internal structure of the crucible from top to bottom includes column body segment, circular arc successively
Section and bottom stage.
Compared with prior art, the beneficial effects of the utility model are：
In the single crystal growing furnace that the utility model is provided, including main furnace chamber, concubine, crucible, crucible lifting mechanism, drawing machine for quartz
Structure and Weighing mechanism, Weighing mechanism are arranged in crystal pull mechanism, and the rope of crystal pull mechanism is carried on Weighing mechanism
On, for weighing crystal weight.Single crystal growing furnace in the application by increasing Weighing mechanism, using the charging gross weight in crucible and
The crystal weight of weighing, obtains the remaining material weight in crucible, to control the lifting speed of crucible lifting mechanism, it is to avoid pot with
Than too small or excessive influence crystal growth.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the accompanying drawing used required in description of the prior art is briefly described, it should be apparent that, drawings in the following description are only
It is embodiment of the present utility model, for those of ordinary skill in the art, on the premise of not paying creative work, also
Other accompanying drawings can be obtained according to the accompanying drawing of offer.
A kind of structural representation for single crystal growing furnace that Fig. 1 provides for the utility model embodiment；
A kind of mounting structure schematic diagram of the Weighing mechanism for single crystal growing furnace that Fig. 2 provides for the utility model embodiment；
A kind of operation principle schematic diagram for single crystal growing furnace that Fig. 3 provides for the utility model embodiment；
A kind of structural representation of the crucible for single crystal growing furnace that Fig. 4 provides for the utility model embodiment.
Wherein, 1 it is crystal pull mechanism, 11 be rope, 12 be lifting casing, 13 be lifting drive device, 2 is secondary
Room, 3 be crystal, 4 be main furnace chamber, 5 be crucible, 51 be column body segment, 52 be arc section, 53 be bottom stage, 6 be crucible hoister
Structure, 7 be Weighing mechanism, 71 be bearing part, 72 be device of weighing, 73 be support.
Embodiment
Core of the present utility model there is provided a kind of single crystal growing furnace, can in real time dynamic regulation pot with than, it is to avoid pot with than
Excessive or too small influence crystal growth.
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Fig. 1-Fig. 3 is refer to, the utility model embodiment provides a kind of single crystal growing furnace, including main furnace chamber 4, concubine 2, crucible
5th, crucible lifting mechanism 6, crystal pull mechanism 1 and Weighing mechanism 7.Wherein, concubine 2 is connected on main furnace chamber 4, and crucible 5 is set
In in main furnace chamber 4, the bottom of crucible 5 drives lifting by crucible lifting mechanism 6；Crystal pull mechanism 1 is arranged on concubine 2
Side, the rope 11 of crystal pull mechanism 1 enters in main furnace chamber 4 through concubine 2, and lifting generation crystal bar is carried out to young crystalline substance；Crucible 5
Built with the silicon material of melting；Weighing mechanism 7 is arranged in crystal pull mechanism 1, and the rope 11 of crystal pull mechanism 1 is carried on
On the Weighing mechanism 7, for weighing crystal weight.
Single crystal growing furnace in the application adds Weighing mechanism 7, weighs the crystal weight of growth in real time by Weighing mechanism 7,
Using the charging gross weight in crucible 5 and the crystal weight weighed, the remaining material weight in crucible 5 is obtained, due in crucible 5
The reason for portion's structure, the difference of remaining material weight causes decrease speed of the melt liquid level in crucible 5 different, therefore, by surplus
Clout weight obtains position of the liquid level in crucible, and position is different, and obtained pot is with than difference, the single crystal growing furnace can be according to residue
Expect the lifting speed of Weight control crucible lifting mechanism 6 so that crystal 3 controls more to stablize, it is to avoid pot with than too small or
Excessive influence crystal 3 grows.
As shown in Fig. 2 present embodiments providing a kind of specific Weighing mechanism 7, it includes support 73, weigh the and of device 72
Bearing part 71.Wherein, support 73 is arranged in crystal pull mechanism 1；Device 72 of weighing is arranged on support 73, for weighing crystalline substance
Body weight；Bearing part 71, which is supported in, is weighed on device 72, and for carrying rope 11, the end lifting crystal 3 of rope 11 is carried
The upper end of drawstring 11 can be ridden on bearing part 71, and is connected with the lifting drive device 13 of crystal pull mechanism 1.
During work, crystal pull mechanism 1 by rope 11 when lifting crystal 3, because rope 11 is carried on carrying
On part 71, therefore, the weight of whole crystal 3 is pressed on bearing part 71, and bearing part 71 is arranged on and weighed on device 72, therefore,
Device 72 of weighing can weigh crystal weight.Single crystal growing furnace is according to the inside of crystal weight, the charging gross weight of crucible 5 and crucible 5
Size calculation obtains theoretical pot with than according to theoretical pot with the lifting speed than adjusting crucible lifting mechanism 6, so as to adjust crucible
5 lifting speed, makes the actual pot of crucible 5 with than approaching theoretical pot with than so as to avoid pot with than excessive or too small influence
Crystal 3 grows.
As optimization, in the present embodiment, bearing part 71 is pulley, and pulley rotation, which is supported in, weighs on device 72, lifting
Rope 11 bypasses pulley.Pulley can reduce the resistance of rope 11.Certainly, bearing part 71 can also be polished rod, polished rod rotate or
It is fixedly supported to and weighs on device 72.
In the present embodiment, weigh device 72 quantity be at least two, preferably two, be respectively supported at bearing part 71
Two ends, make bearing capacity more uniform.Certainly, weigh device 72 can also for one, three etc. more, as long as can realize
Weigh.
In the present embodiment, device 72 of weighing is electronic scale, as long as crystal weight can be weighed.
Further, rope 11 is tungsten rope, and the heat-resisting quantity of tungsten rope is strong, and is not involved in reaction.It is, of course, also possible to using
The rope 11 of other materials, it is not limited to the situation cited by the present embodiment.
As shown in Fig. 2 in the present embodiment, crystal pull mechanism 1 includes lifting casing 12, lifting drive device 13 and carried
Drawstring 11, lifting drive device 13 is installed in lifting casing 12, and rope 11 is connected with lifting drive device 13, Weighing mechanism
7 are installed in lifting casing 12.Weighing mechanism 7 is installed in lifting casing 12, so as to protect Weighing mechanism 7 not by external rings
Border is damaged, and meets the demand of crystal vacuum growth.
As shown in figure 4, the internal structure of the crucible 5 in the present embodiment from top to bottom includes column body segment 51, arc section successively
52 and bottom stage 53.Wherein, the inside diameter of crucible 5 is Dr, and the height of column body segment 51 is La, and the radius of arc section 52 is Rs,
The distance of the center line of the centre distance crucible 5 of arc section 52 is C, and the height of arc section 52 is X；The radius of bottom stage 53 is
Rb, the height of bottom stage 53 is Lb.The liquid level position of remaining material is in the different sections of crucible 5, and obtained pot is with than difference.
Certainly, the internal structure of crucible 5 can also be other structures, correspondingly, for the different zones of internal structure, obtain
The pot arrived is with than difference.
The embodiment of each in this specification is described by the way of progressive, and what each embodiment was stressed is and other
Between the difference of embodiment, each embodiment identical similar portion mutually referring to.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or new using this practicality
Type.A variety of modifications to these embodiments will be apparent for those skilled in the art, determine herein
The General Principle of justice can in other embodiments be realized in the case where not departing from spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.
Claims (8)
1. a kind of single crystal growing furnace, including main furnace chamber (4), concubine (2), crucible (5), crucible lifting mechanism (6) and crystal pull mechanism
(1), it is characterised in that also include：
Weighing mechanism (7), is arranged on the crystal pull mechanism (1), and the rope (11) of the crystal pull mechanism (1) is held
It is loaded on the Weighing mechanism (7), for weighing crystal weight.
2. single crystal growing furnace according to claim 1, it is characterised in that the Weighing mechanism (7) includes：
Support (73), in the crystal pull mechanism (1)；
Weigh device (72), on the support (73), for weighing crystal weight；
Bearing part (71), be supported in it is described weigh on device (72), for carrying the rope (11).
3. single crystal growing furnace according to claim 2, it is characterised in that the bearing part (71) is pulley, the pulley rotation
Weighed described in being supported on device (72), the rope (11) bypasses the pulley.
4. single crystal growing furnace according to claim 3, it is characterised in that the quantity of the device of weighing (72) is at least two,
It is respectively supported at the two ends of the bearing part (71).
5. single crystal growing furnace according to claim 2, it is characterised in that the device of weighing (72) is electronic scale.
6. single crystal growing furnace according to claim 1, it is characterised in that the rope (11) is tungsten rope.
7. the single crystal growing furnace according to claim any one of 1-6, it is characterised in that the crystal pull mechanism (1) includes carrying
Casing (12), lifting drive device (13) and the rope (11) are drawn, the lifting drive device (13) is installed on described carry
Draw in casing (12), the rope (11) is connected with the lifting drive device (13), and the Weighing mechanism (7) is installed on institute
State in lifting casing (12).
8. the single crystal growing furnace according to claim any one of 1-6, it is characterised in that the internal structure of the crucible (5) is by upper
Include column body segment (51), arc section (52) and bottom stage (53) successively under.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720365944.8U CN206616290U (en) | 2017-04-07 | 2017-04-07 | A kind of single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720365944.8U CN206616290U (en) | 2017-04-07 | 2017-04-07 | A kind of single crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206616290U true CN206616290U (en) | 2017-11-07 |
Family
ID=60235817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720365944.8U Active CN206616290U (en) | 2017-04-07 | 2017-04-07 | A kind of single crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206616290U (en) |
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2017
- 2017-04-07 CN CN201720365944.8U patent/CN206616290U/en active Active
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