CN100460571C - Linear guide rail type crucible lifting device - Google Patents
Linear guide rail type crucible lifting device Download PDFInfo
- Publication number
- CN100460571C CN100460571C CNB2006101668769A CN200610166876A CN100460571C CN 100460571 C CN100460571 C CN 100460571C CN B2006101668769 A CNB2006101668769 A CN B2006101668769A CN 200610166876 A CN200610166876 A CN 200610166876A CN 100460571 C CN100460571 C CN 100460571C
- Authority
- CN
- China
- Prior art keywords
- crucible
- screwed
- assembly
- shaft
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a crystal driving device of straight drawing typed crystal growing furnace, wherein the frame part of external crystal elevating device of sensor contains rail seat, bar board, floor and foot adjusting block; the furnace elevating part is composed of rapid-slow motor component, straight-line rolling rail spoke, upper bearing seat, screw rod, elevating rack, screw rod nut, lower bearing and large synchronous band component; the copple switching part concludes bellow, copple shaft component, copple-switching magnetofluid, copple-switching motor, motor rack and multi-band composition. The invention improves the stability and reliability of copple greatly, which is automatic to control.
Description
Technical field
The present invention relates to a kind of crucible drive unit of Czochralski crystal grower, particularly a kind of linear guide rail type crucible lifting device.
Background technology
Czochralski crystal grower is topmost high quality silicon crystal production equipment.According to the crystallization rule of silicon single-crystal, in the fusing of quartz crucible internal heating, controlled temperature is slightly higher than the Tc of silicon single-crystal with starting material, and the silicon materials after guaranteeing to melt can crystallization at molten surface.By seed chuck monocrystalline is proposed liquid level reposefully, make it in stove tube internal cooling, shaping, crystallizing into a main body at last is that right cylinder, afterbody are the crystal of cone.
Crucible lifting device is one of system of crystal growing furnace most critical.It extend in the body of heater by the stainless steel shaft of a hollow water-cooled; under the protection of graphite piece, hold quartz crucible; speed with stable and controllable promotes and low speed rotation; make liquid level of solution be stabilized in same horizontal plane and thermograde suitable; allow silicon single-crystal grow regularly on request; ooze assorted agent, oxygen level axial and radial distribution is even, guarantee the integrity and the homogeneity of final crystal product.In this respect, domestic production producer has done a large amount of technological improvements and raising, but traveling comfort and controllability all can't adapt to the full-automatic control system of present crystal furnace, the integrity of crystal product and homogeneity far do not reach the requirement of high quality IC sheet silicon single crystal bar, and majority can only be used for the production of solar cell.
Summary of the invention
Main purpose of the present invention is to overcome deficiency of the prior art, and a kind of lifting gear of linear guide rail type crucible is provided.
In order to realize the object of the invention, technical scheme provided by the invention is:
The invention provides a kind of linear guide rail type crucible lifting device, comprise frame parts, crucible ascending part spare and crucible rotation member, wherein:
Described frame parts comprises track base, gusset, base plate and lower margin adjustment piece; Wherein, track base is screwed on base plate, and its guide rail mounting plane is vertical with base plate;
Described crucible ascending part spare comprises speed electric machine assembly, linear rolling guide, top chock, screw mandrel, lifting support, feed screw nut, step and the big assembly of band synchronously; Wherein, linear rolling guide comprises two contour guide rails and the slide block that can be free to slide on guide rail; Two guide rails are screwed respectively in track base planar groove, slide block and lifting support screw attachment; Top chock is screwed at the track base end face; Step is screwed in bottom plate hole, with top chock on same vertical curve; The last hypomere of screw mandrel connects by bearing and top chock, step respectively, can freely rotate; The feed screw nut is screwed promoting on the support, connects with screw mandrel by screw thread; The speed electric machine assembly is screwed in base plate one side, can be along the translation of yi word pattern groove; The big assembly of band synchronously one end is enclosed within on the output shaft of speed electric machine assembly, and an end is enclosed within the screw mandrel lower end, transmits synchronous speed.
Described crucible rotation member comprise corrugated tube, crucible shaft assembly, crucible change magnetic fluid, crucible rotating motor, electric machine support He Duo ?the band assembly; Wherein, crucible changes magnetic fluid and passes the lifting support, is screwed; The crucible shaft assembly is enclosed within crucible to be changeed in the hollow shaft sleeve of magnetic fluid, circumferential seal with O ring, lower end screw lock; Corrugated tube entangles the crucible shaft epimere, and its lower flange is screwed at crucible to be changeed on the magnetic fluid, the end face seal with O ring; The corrugated tube upper flanges will with crystal furnace equipment drop-bottom flange screw attachment, end face seal with O ring; Electric machine support is screwed below promoting support; The crucible rotating motor is connected with screw with electric machine support; Duo ?band assembly one end be enclosed within the hollow shaft sleeve hypomere that crucible changes magnetic fluid, holding screw is fixed, the other end is enclosed within on the crucible rotating motor output shaft, holding screw is fixed.
As a kind of improvement of the present invention, two square edges of described gusset respectively with track base and base plate screw attachment.
As a kind of improvement of the present invention, described lower margin is adjusted piece three, fills up respectively below three screws of base plate, passes base plate and lower margin with long spiro nail and adjusts piece and be fixed on the Equipment Foundations.
As a kind of improvement of the present invention, described speed electric machine assembly comprises support, slow speed motor, fast speed motor, little synchronous band assembly, flexible coupling, photoelectric encoder and worm type of reduction gearing; Wherein, slow speed motor and worm type of reduction gearing are screwed on support, connect by flexible coupling; Fast speed motor is screwed at the slow speed motor end face, by the output shaft connection of little synchronous band assembly and slow speed motor; Photoelectric encoder connects by holding screw with an end of worm type of reduction gearing output shaft; The other end of worm type of reduction gearing output shaft is the output shaft of speed electric machine assembly, connects with screw mandrel by the big assembly of band synchronously.
As a kind of improvement of the present invention, described crucible shaft assembly comprises swivel joint, isocon, cooling tube, copper pipe and crucible shaft; Wherein, crucible shaft is the stainless steel shaft of a hollow; The welding of copper pipe and cooling tube connects, and fills in fully in the hole of crucible shaft to the cooling tube flange and contacts the crucible shaft bottom; Use seal with O ring between cooling tube bottom and crucible shaft; Swivel joint connects with cooling tube by sealing thread; Isocon is used seal with O ring between an end and cooling tube in cooling tube, the other end connects by sealing thread and swivel joint are inner.
Compared with prior art, beneficial effect of the present invention is:
The present invention is by selecting suitable mechanism and rational structure layout for use, the stationarity and the reliability of crucible lifting device have been increased substantially, improved its load performance, and crucible promotes and the precision of velocity of rotation control, adapt to the full-automatic control system of crystal furnace fully.Equip the crystal growing furnace of this crucible lifting device, it is reliable to operate steadily, and its crystal product integrity and homogeneity are all very good, can reach the requirement of IC circuit to monocrystal material fully.
Description of drawings
Fig. 1 is a system architecture front view in the embodiment of the invention;
Fig. 2 is a system architecture vertical view in the embodiment of the invention;
Fig. 3 is a system architecture side view cutaway drawing in the embodiment of the invention;
Fig. 4 is a speed electric machine assembly structure iron in the embodiment of the invention;
Fig. 5 is a crucible shaft assembly assumption diagram in the embodiment of the invention.
1. track bases among the figure, 2. gusset, 3. base plate, 4. lower margin is adjusted piece, 5. speed electric machine assembly, 6. linear rolling guide, 7. top chock, 8. screw mandrel 9. promotes support, 10. feed screw nut, 11. steps, the 12. big assemblies of band synchronously, 13. support, 14. slow speed motors, 15. fast speed motors, 16. little synchronous band assembly, 17. flexible couplings, 18. photoelectric encoders, 19. worm type of reduction gearing, 20. corrugated tubes, 21. crucible shaft assemblies, 22. crucible changes magnetic fluid, 23. crucible rotating motors, 24. electric machine supports, 25. Duo ?the band assembly, 26. swivel joints, 27. isocons, 28. cooling tube, 29. copper pipes, 30. crucible shaft.
Embodiment
The present invention will be further described below in conjunction with specific embodiment:
The structure of specific embodiment 1 cathetus guide rail type crucible lifting device is shown in Fig. 1 to 5.It comprises following three parts:
Frame parts: comprise track base 1, gusset 2, base plate 3, lower margin is adjusted piece 4; Track base 1 is screwed on base plate 3, and its guide rail mounting plane is vertical with base plate 3; Two square edges of gusset 2 are used screw attachment with track base 1 and base plate 3 respectively, increase the rigidity of framework; Lower margin is adjusted piece 4 three, fills up respectively below three screws of base plate 3, passes base plate 3 and lower margin with long spiro nail and adjusts piece 4 and be fixed on the Equipment Foundations; Adjust piece 4 by regulating three lower margins respectively, base plate 3 is adjusted to horizontality.
Crucible ascending part spare: comprise speed electric machine assembly 5, linear rolling guide 6, top chock 7, screw mandrel 8 promotes support 9, and the feed screw nut 10, step 11, the big assembly 12 of band synchronously; Linear rolling guide 6 comprises two contour guide rails and the slide block that can be free to slide on guide rail; Two guide rails are screwed respectively in track base 1 planar groove, are parallel to each other, and slide block is used screw attachment with promoting support 9, and promoting support 9 can slide along guide rail, and steady and nothing is creeped; Top chock 7 is screwed at track base 1 end face; Step 11 is screwed in base plate 3 holes, with top chock 7 on same vertical curve; The last hypomere of screw mandrel 8 connects by bearing and top chock 7, step 11 respectively, can freely rotate; Feed screw nut 10 is screwed promoting on the support 9, connects with screw mandrel 8 by screw thread; When screw mandrel 8 rotated, feed screw nut 10 drove lifting support 9 and vertically moves up or down, and can realize self-locking under the situation of high capacity even motor outage; The big assembly of band synchronously 12 1 ends are enclosed within on the output shaft of speed electric machine assembly 5, and an end is enclosed within screw mandrel 8 lower ends, transmits synchronous speed; Speed electric machine assembly 5 is screwed in base plate 3 one sides, can regulate the degree of tightness of being with synchronously in the big pulley assemblies 12 synchronously along the translation of yi word pattern groove.
Speed electric machine assembly 5 structures comprise support 13 as shown in Figure 4, slow speed motor 14, fast speed motor 15, little synchronous band assembly 16, flexible coupling 17, photoelectric encoder 18, worm type of reduction gearing 19; Slow speed motor 14 and worm type of reduction gearing 19 are screwed on support 13, connect by flexible coupling 17; Fast speed motor 15 is screwed at slow speed motor 14 end faces, by the output shaft connection of little synchronous band assembly 16 and slow speed motor 14; When the electromagnetic clutch of slow speed motor 14 was switched on adhesive, the rotation of slow speed motor 14 passed to screw mandrel 8 by flexible coupling 17, worm type of reduction gearing 19 and big pulley assemblies 12 synchronously, realizes promoting the rising at a slow speed or the decline of support 9; When the electromagnetic clutch dead electricity of slow speed motor 14 is thrown off, the rotation of fast speed motor 15 passes to screw mandrel 8 by little synchronous band assembly 3, flexible coupling 17, worm type of reduction gearing 19 and big pulley assemblies 12 synchronously, realizes promoting the fast rise or the decline of support 9.This mechanism has realized the quick switching of Belt Driven by Double Motor, guarantees that two motors all are operated in the optimal performance interval, has improved the load performance and the traveling comfort of crucible lifting device.Photoelectric encoder 18 connects by holding screw with an end of worm type of reduction gearing 19 output shafts, measures the angle that turns over, and promotes the stroke that support 9 promotes or descends thereby further calculate.
The crucible rotation member: comprise corrugated tube 20, crucible shaft assembly 21, crucible change magnetic fluid 22, crucible rotating motor 23, electric machine support 24 ， Duo ?band assembly 25; Crucible changes magnetic fluid 22 and passes lifting support 9, is screwed; Crucible shaft assembly 21 is enclosed within crucible to be changeed in the hollow shaft sleeve of magnetic fluid 22, circumferential seal with O ring, lower end screw lock, but co-rotation; Hollow shaft sleeve and crucible change relatively rotating by ferrofluid seal between magnetic fluid 22 housings, and frictional coefficient is little and vacuum-sealing is effective; Corrugated tube 20 entangles crucible shaft assembly 21 epimeres, and its lower flange is screwed at crucible to be changeed on the magnetic fluid 22, the end face seal with O ring; Corrugated tube 20 upper flanges will with crystal furnace equipment drop-bottom flange screw attachment, end face seal with O ring; Corrugated tube 20 and crucible change the magnetic fluid 22 common vacuum-sealing cavitys of forming crucible lifting device; Electric machine support 24 is screwed below promoting support 9; Crucible rotating motor 23 is connected with electric machine support 24 usefulness screws; Duo ?band assembly 25 1 ends be enclosed within the hollow shaft sleeve hypomere that crucible changes magnetic fluid 22, holding screw is fixed, the other end is enclosed within on crucible rotating motor 23 output shafts, holding screw is fixed; The rotation Tong Guo Duo of crucible rotating motor 23 ?after band assembly 25 slows down, the hollow shaft sleeve and the crucible shaft assembly 21 that drive crucible and change magnetic fluid 22 slowly rotate.
Obviously, the invention is not restricted to above embodiment, many distortion can also be arranged.All distortion that those of ordinary skill in the art can directly derive or associate from content disclosed by the invention all should be thought protection scope of the present invention.
Claims (5)
1. a linear guide rail type crucible lifting device comprises frame parts, crucible ascending part spare and crucible rotation member, it is characterized in that:
Described frame parts comprises track base, gusset, base plate and lower margin adjustment piece; Wherein, track base is screwed on base plate, and its guide rail mounting plane is vertical with base plate;
Described crucible ascending part spare comprises speed electric machine assembly, linear rolling guide, top chock, screw mandrel, lifting support, feed screw nut, step and the big assembly of band synchronously; Wherein, linear rolling guide comprises two contour guide rails and the slide block that can be free to slide on guide rail; Two guide rails are screwed respectively in track base planar groove, slide block and lifting support screw attachment; Top chock is screwed at the track base end face; Step is screwed in bottom plate hole, with top chock on same vertical curve; The last hypomere of screw mandrel connects by bearing and top chock, step respectively, can freely rotate; The feed screw nut is screwed promoting on the support, connects with screw mandrel by screw thread; The speed electric machine assembly is screwed in base plate one side, can be along the translation of yi word pattern groove; The big assembly of band synchronously one end is enclosed within on the output shaft of speed electric machine assembly, and an end is enclosed within the screw mandrel lower end, transmits synchronous speed;
Described crucible rotation member comprise corrugated tube, crucible shaft assembly, crucible change magnetic fluid, crucible rotating motor, electric machine support He Duo ?the band assembly; Wherein, crucible changes magnetic fluid and passes the lifting support, is screwed; The crucible shaft assembly is enclosed within crucible to be changeed in the hollow shaft sleeve of magnetic fluid, circumferential seal with O ring, lower end screw lock; Corrugated tube entangles the crucible shaft epimere, and its lower flange is screwed at crucible to be changeed on the magnetic fluid, the end face seal with O ring; The corrugated tube upper flanges will with crystal furnace equipment drop-bottom flange screw attachment, end face seal with O ring; Electric machine support is screwed below promoting support; The crucible rotating motor is connected with screw with electric machine support; Duo ?band assembly one end be enclosed within the hollow shaft sleeve hypomere that crucible changes magnetic fluid, holding screw is fixed, the other end is enclosed within on the crucible rotating motor output shaft, holding screw is fixed.
2. linear guide rail type crucible lifting device according to claim 1 is characterized in that, two square edges of described gusset respectively with track base and base plate screw attachment.
3. linear guide rail type crucible lifting device according to claim 1 is characterized in that, described lower margin is adjusted piece three, fills up respectively below three screws of base plate, passes base plate and lower margin with long spiro nail and adjusts piece and be fixed on the Equipment Foundations.
4. linear guide rail type crucible lifting device according to claim 1 is characterized in that, described speed electric machine assembly comprises support, slow speed motor, fast speed motor, little synchronous band assembly, flexible coupling, photoelectric encoder and worm type of reduction gearing; Wherein, slow speed motor and worm type of reduction gearing are screwed on support, connect by flexible coupling; Fast speed motor is screwed at the slow speed motor end face, by the output shaft connection of little synchronous band assembly and slow speed motor; Photoelectric encoder connects by holding screw with an end of worm type of reduction gearing output shaft; The other end of worm type of reduction gearing output shaft is the output shaft of speed electric machine assembly, connects with screw mandrel by the big assembly of band synchronously.
5. linear guide rail type crucible lifting device according to claim 1 is characterized in that, described crucible shaft assembly comprises swivel joint, isocon, cooling tube, copper pipe and crucible shaft; Wherein, crucible shaft is the stainless steel shaft of a hollow; The welding of copper pipe and cooling tube connects, and fills in fully in the hole of crucible shaft to the cooling tube flange and contacts the crucible shaft bottom; Use seal with O ring between cooling tube bottom and crucible shaft; Swivel joint connects with cooling tube by sealing thread; Isocon is used seal with O ring between an end and cooling tube in cooling tube, the other end connects by sealing thread and swivel joint are inner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101668769A CN100460571C (en) | 2006-12-16 | 2006-12-16 | Linear guide rail type crucible lifting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101668769A CN100460571C (en) | 2006-12-16 | 2006-12-16 | Linear guide rail type crucible lifting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1995483A CN1995483A (en) | 2007-07-11 |
| CN100460571C true CN100460571C (en) | 2009-02-11 |
Family
ID=38250684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101668769A Active CN100460571C (en) | 2006-12-16 | 2006-12-16 | Linear guide rail type crucible lifting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100460571C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104451884A (en) * | 2014-12-11 | 2015-03-25 | 河北同光晶体有限公司 | Lifting controlsystem and lifting control method for crucible of silicon carbide crystal furnace |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4986921B2 (en) * | 2008-04-30 | 2012-07-25 | ジャパンスーパークォーツ株式会社 | Crucible lift device |
| CN101928982B (en) * | 2009-06-22 | 2011-10-05 | 中国科学院上海硅酸盐研究所 | Silicon carbide crystal growing device with double-chamber structure |
| CN102268727A (en) * | 2011-07-04 | 2011-12-07 | 温州永泰电器有限公司 | Crucible driving device for Czochralski crystal growing furnace |
| CN102400207A (en) * | 2011-11-18 | 2012-04-04 | 宁夏日晶新能源装备股份有限公司 | Single crystal furnace crucible dustproof device |
| CN103290469A (en) * | 2012-02-24 | 2013-09-11 | 宁夏日晶新能源装备股份有限公司 | Single crystal furnace with encoder |
| CN103954130A (en) * | 2014-05-04 | 2014-07-30 | 济南海川投资集团有限公司 | Novel flame-path shutter of roasting furnace |
| CN104250848A (en) * | 2014-09-11 | 2014-12-31 | 浙江晶盛机电股份有限公司 | Control method for utilizing external charging structure to charge polysilicon |
| CN109610000B (en) * | 2019-02-19 | 2020-12-15 | 博兴战新产业发展有限公司 | Single crystal furnace with stable heat supply in thermal field |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2400459Y (en) * | 1999-12-16 | 2000-10-11 | 中国科学院上海光学精密机械研究所 | High-temperature oxide crystal growth furnace |
| CN2475743Y (en) * | 2000-12-05 | 2002-02-06 | 沈阳科晶设备制造有限公司 | Crystal growing furnace |
| CN200992594Y (en) * | 2006-12-16 | 2007-12-19 | 杭州慧翔电液技术开发有限公司 | Linear rail type crucible lifting device |
-
2006
- 2006-12-16 CN CNB2006101668769A patent/CN100460571C/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2400459Y (en) * | 1999-12-16 | 2000-10-11 | 中国科学院上海光学精密机械研究所 | High-temperature oxide crystal growth furnace |
| CN2475743Y (en) * | 2000-12-05 | 2002-02-06 | 沈阳科晶设备制造有限公司 | Crystal growing furnace |
| CN200992594Y (en) * | 2006-12-16 | 2007-12-19 | 杭州慧翔电液技术开发有限公司 | Linear rail type crucible lifting device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104451884A (en) * | 2014-12-11 | 2015-03-25 | 河北同光晶体有限公司 | Lifting controlsystem and lifting control method for crucible of silicon carbide crystal furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1995483A (en) | 2007-07-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100460571C (en) | Linear guide rail type crucible lifting device | |
| CN200992594Y (en) | Linear rail type crucible lifting device | |
| CN102864496A (en) | Device for growing tellurium-zinc-cadmium crystals by traveling heater method | |
| CN101851782A (en) | Double-cavity heat-insulation cage of second single crystal silicon ingot production furnace | |
| CN102268727A (en) | Crucible driving device for Czochralski crystal growing furnace | |
| CN102732947B (en) | Ingot thermal field for growing pure quasi-monocrystalline | |
| US9574825B2 (en) | Directional solidification furnace having movable heat exchangers | |
| CN201241197Y (en) | Copple drive device for vertical pulling single crystal furnace | |
| CN210177003U (en) | Crucible driving device for single crystal furnace | |
| CN202492612U (en) | Reflection ring lifting device for improving thermal field of zone-melting single crystal furnace | |
| CN207632922U (en) | A kind of big kilogram of sapphire crystallization equipment adjustment structure | |
| CN108907122B (en) | Automatic control device for cold water pressure in copper processing | |
| CN102534754B (en) | Reflection ring lifting device for improving thermal field of zone-melting single-crystal furnace | |
| CN201321511Y (en) | New type crystal growing furnace | |
| CN107541788A (en) | A kind of integral type monocrystalline silicon growing furnace electrode lifting mechanism | |
| CN207227590U (en) | A kind of polycrystalline furnace heat-insulation cage electric lifting device | |
| CN201695105U (en) | Double-cavity heat-insulation cage of secondary monocrystal silicon ingot furnace | |
| CN111850683B (en) | Heat balance's high-efficient type ingot furnace | |
| CN210856408U (en) | Crystal growth furnace provided with furnace body lifting mechanism | |
| CN201756597U (en) | Single crystal furnace cusp magnetic field lifting device | |
| CN101319408A (en) | Transmission mechanism of monocrystaline silicon stove | |
| CN202968741U (en) | Lower-shaft moving mechanism for zone-melting single-crystal furnace | |
| CN108728896B (en) | Crucible shaft lifting device | |
| CN219526864U (en) | Cooling device of Czochralski single crystal furnace | |
| CN110184649A (en) | A kind of novel heat insulation material structure PVT single crystal growth device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Hangzhou City, Zhejiang province Xihu District 310013 Ancient Jade Road 149, room 310 Co-patentee after: Zhejiang Jingsheng Electrical and Mechanical Co., Ltd. Patentee after: Hangzhou Huixiang Electrohydraulic Technology Development Co., Ltd. Address before: Hangzhou City, Zhejiang province Xihu District 310013 Ancient Jade Road 149, room 310 Co-patentee before: Shangyu Jingsheng M&E Co., Ltd. Patentee before: Hangzhou Huixiang Electrohydraulic Technology Development Co., Ltd. |