CN101319408A - Transmission mechanism of monocrystaline silicon stove - Google Patents
Transmission mechanism of monocrystaline silicon stove Download PDFInfo
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- CN101319408A CN101319408A CNA2008101116086A CN200810111608A CN101319408A CN 101319408 A CN101319408 A CN 101319408A CN A2008101116086 A CNA2008101116086 A CN A2008101116086A CN 200810111608 A CN200810111608 A CN 200810111608A CN 101319408 A CN101319408 A CN 101319408A
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Abstract
The invention belongs to a transmission device for a monocrystalline silicon furnace. The transmission device is divided into a principal axis lifting device and a principal axis rotating device, and the principal axis lifting device and the principal axis rotating device are arranged in parallel and are positioned on a slide carriage in parallel. The transmission device separates lifting operation of the principal device from rotating operation of the principal axis, can effectively maintain stable and tight operation of the principal axis, thereby greatly improving the quality of silicon crystal seeds; moreover, the transmission device has the advantages of simple structure, low manufacture cost and use cost, convenient maintenance and use and good effect.
Description
Technical field
The invention belongs to a kind of transmission mechanism of monocrystaline silicon stove.
Background technology
Traditional monocrystaline silicon stove is mainly used in the production silicon semiconductor material, and monocrystaline silicon stove comprises silicon semiconductor material growth synthetic master furnace chamber, main shaft lifting drive mechanism and automatically controlled automatic yarn system.The main shaft lifting drive mechanism of traditional monocrystaline silicon stove adopts tooth bar single-point transmission stability of equilibrium poor, the dynamic vacuum degree of the main shaft that is not easy to guarantee to move down merit and rotates, thereby cause the decline of vacuum tightness in the monocrystaline silicon stove, make the silicon seed poor quality of producing, cause the product percentage of A-class goods low.For this reason, the contriver once designed a kind of study on floating zone silicon growth furnace, adopt the upper and lower ends of rectangular four angular distribution four guide pillars to be installed in respectively on the corresponding angles of top board and base plate, be provided with screw mandrel between two guide pillars on corresponding both sides, two screw mandrels upper ends is coupling with corresponding top board, two screw mandrel lower ends are coupling and pass base plate and join with two reduction box output terminals respectively, two reduction box input terminuss join by shaft joint and motor shaft, four jiaos of slides are joined by linear bearings and four guide pillar cunnings and are spirally connected with two screw mandrels, and the slide middle part is provided with main shaft.Good to realize main shaft lifting drive mechanism stability of equilibrium, move down the also dynamic vacuum degree of the main shaft of rotation of merit in the assurance, to reach the ideal result of use.Though move down the dynamic vacuum degree of merit and live spindle on this improvement has improved to a certain extent, stretch into a segment distance and rotation in the silicon single crystal body of heater owing to should guarantee the main shaft upper end, long main shaft passes through the design of slide, causes main shaft running stability difference and stopping property poor, also makes body of heater excessive.Since require main shaft have oscilaltion operation and rotating operation two to moving, every is moved and all should keep the dynamic seal of main shaft to body of heater.And main shaft is in the kinestate that moves up and down and rotate of this structure, very difficult assurance promptly reaches the smooth running of main shaft, can guarantee two dynamic vacuum degrees up and down again, thereby guarantee the silicon seed quality that vacuum state is grown down in the monocrystaline silicon stove to the main shaft that moves.
Summary of the invention
The objective of the invention is to design a kind of transmission mechanism of monocrystaline silicon stove, the main shaft lifting is separated with rotating operation, can effectively keep the steady and vacuum-sealing operation of main shaft, to increase substantially the quality of silicon seed, also have simple in structure, the making use cost is low, maintenance and effective advantage easy to use.For this reason, this transmission mechanism of the present invention is divided into main shaft lifting device and main axis rotation device, and main shaft lifting device and main axis rotation device are arranged side by side, and main axis rotation device and main shaft lifting device are positioned on the slide side by side.Described main shaft lifting device comprises guide pillar, the screw mandrel bearing, last lower fixed seat, screw mandrel, slide, block set and fast lifting mechanism, the guide pillar upper and lower ends is separately fixed on the lower fixed seat, slide is joined by linear bearings and guide pillar cunning and is spirally connected by the screw mandrel transmission mother in the fast lifting mechanism with screw mandrel, the screw mandrel lower end is T-shaped, the screw mandrel upper end is coupling by screw mandrel bearing and upper fixed seat, screw mandrel lower end jacking on the axle bowl and its T shape end output terminal of passing axle bowl and harmonic speed reducer join, the input terminus of harmonic speed reducer joins by power wheel and motor shaft, and fast lifting mechanism is between screw mandrel and slide.Described main axis rotation device comprises main shaft, bearing, be connected and fixed ring flange, the spindle nose water jacket, corrugated tube, magnetic fluid seal, axle center water jacket and rotating machine, screw mandrel and main shaft be arranged in parallel, the main shaft bottom is connected in the slide of main shaft lifting device side by bearing shaft, use magnetic fluid seal vacuum-sealing between the main shaft of bearing support upper end and the corresponding slide, the main shaft upper end is passed the fixed flange middle part and is positioned at body of heater, the fixed flange lower end is provided with the spindle nose water jacket, spindle nose water jacket lower end to the main shaft section between the magnetic fluid seal is sealed in the corrugated tube, the main shaft of bearing support lower end is provided with belt wheel, and the rotating machine that is fixed on the corresponding slide passes through the belt transmission belt wheel.
Said structure has reached purpose of the present invention.
Advantage of the present invention is that the main shaft lifting is separated with rotating operation, change main shaft and be the rotation one-way movement to motion with respect to two of slide lifting and rotation, can effectively keep main shaft steadily to move, increase substantially the quality of silicon seed, make the percentage of A-class goods of product reach 99.9% with sealing.Also have simple in structurely, it is low to make use cost, maintenance and effective advantage easy to use.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is the fast lifting mechanism structural representation of invention
Specific embodiments
As depicted in figs. 1 and 2, a kind of transmission mechanism of monocrystaline silicon stove mainly is made up of main shaft 13, screw mandrel 2, guide pillar 1 and rotating machine 28.This transmission mechanism is divided into main shaft lifting device and main axis rotation device, and main shaft lifting device and main axis rotation device are arranged side by side, and main axis rotation device and main shaft lifting device are positioned on the slide 4 side by side.
Described main shaft lifting device comprises guide pillar, screw mandrel bearing 18, upper fixed seat 19 and lower fixed seat 7, screw mandrel, slide, block set 33 and fast lifting mechanism.The guide pillar upper and lower ends is separately fixed on the lower fixed seat.Slide is joined by linear bearings 14 and guide pillar cunning and is spirally connected by the screw mandrel transmission mother 37 in the fast lifting mechanism with screw mandrel.Screw mandrel lower end T-shaped 39, the screw mandrel upper end is coupling by screw mandrel bearing and upper fixed seat, screw mandrel lower end jacking on axle bowl 40 and its T shape end output terminal 41 of passing axle bowl and harmonic speed reducer 15 join, the input terminus of harmonic speed reducer joins by power wheel 34 and motor (not marking among the figure) axle, and the body skin 8 and the lower fixed seat of harmonic speed reducer are fixed.Fast lifting mechanism is between screw mandrel and slide.
As shown in Figure 2, described fast lifting mechanism comprises that axle sleeve 5, screw mandrel transmission mother, worm gear 38, worm screw 35, bearing 36 and worm screw motor (not marking among the figure) form.Screw mandrel passes axle sleeve, the female the inner of screw mandrel transmission is spirally connected with screw mandrel, female outer end of screw mandrel transmission and axle sleeve are inner fixing, worm gear is fixed on the axle sleeve outer end, the worm screw motor that drives the worm screw rotation is fixed on the slide, the axle sleeve outer end is coupling by bearing and slide, between slide and the bearing for ease of the affixed block set 33 that is provided with.The effect of fast lifting mechanism is when needs fast lifting main shaft, when for example needing to the intravital crucible charge of stove, then start the worm screw motor, worm screw driven by motor worm drive worm gear, and then drive axle sleeve and with the female twirl of its fixed screw mandrel transmission, be spirally connected with screw mandrel because the screw mandrel transmission is female, screw mandrel transmission mother is moved along screw mandrel, drive slide and make main shaft simultaneously along the guide pillar quick travel.At this moment, the screw mandrel transmission is female rotates, and screw mandrel does not change.If behind the crucible charge, when being driven screw mandrel and rotated by harmonic speed reducer, then screw mandrel transmission mother is stubbornly refused to move by worm-lock, and screw mandrel transmission mother still can move up and down and drive slide and main shaft moves simultaneously along screw mandrel.
Described main axis rotation device comprises main shaft, bearing, is connected and fixed ring flange 22, spindle nose water jacket 24, corrugated tube 32, magnetic fluid seal 6, axle center water jacket 27 and rotating machine 28.Screw mandrel and main shaft be arranged in parallel, and the main shaft bottom is coupling in the slide of main shaft lifting device side by bearing 17 and sealing bearing 16, and the bearing support 3 and the slide of bearing and sealing bearing are fixed.Spindle nose water jacket lower end is sealed in the corrugated tube to the main shaft section between the magnetic fluid seal, and magnetic fluid seal is by being purchased product on the market.The main shaft upper end is passed the fixed flange middle part and is positioned at body of heater.Fixed flange is affixed by standing bolt 23 and body of heater lower end.The fixed flange lower end is provided with the spindle nose water jacket, and the upper end of spindle nose water jacket is provided with spindle nose water outlet 20, and the lower end of spindle nose water jacket is provided with spindle nose water-in 26.Be provided with seal bellows between the slide on spindle nose water jacket lower end and magnetic fluid seal side, the main shaft of inside, corrugated tube bottom is by web member 11 and sleeve 12 and slide shaft seal.The main shaft of bearing support lower end is provided with belt wheel 10, and the rotating machine that is fixed on the corresponding slide passes through belt 29 drive pulleys, makes main axis rotation.
Described main shaft is a quill shaft, hollow bulb forms axle core water jacket 27 in the axle, the water-in 31 of axle core water jacket communicates with the top of axle core water jacket by being positioned at a water pipe of core water jacket 9, the lower end of the axle core water jacket water outlet 30 that communicates, or the water outlet of axle core water jacket communicates with the top of axle core water jacket by being positioned at a water pipe of core water jacket, the lower end of the core water jacket water-in that communicates.Obviously, the water pipe upper end should be provided with posticum 25, flows out for water.Because main shaft is positioned at crucible bottom contact high temperature, so the effect of bearing water jacket and axle core water jacket is with recirculated water main shaft to be lowered the temperature.During use, cold water enters separately water jacket from the water-in separately of bearing water jacket and axle core water jacket respectively and siphons away in the main shaft behind the heat, flows out separately water jacket along water outlet separately again, and main shaft is lowered the temperature.
Described corrugated tube is a steel pressure-resistant seal corrugated tube.The upper and lower ends of described spindle nose water jacket is communicated with spindle nose water-in and spindle nose water outlet respectively.Described main shaft upper end is provided with crucible access slot 21, and the effect of crucible access slot is to be used to connect crucible bottom.
During use, if in crucible, feed, then start fast lifting mechanism, its traditional mechanism as mentioned above, so be not repeated.If in the smelting pot during silicon raw material, the driven by motor power wheel slowly rotates by harmonic speed reducer deceleration strip movable wire bar, and, slide is moved up along guide pillar (two or four guide pillars) by screw mandrel transmission mother (this moment with by worm gear and worm screw are locked be fixed as one) transmission slide with slide.Simultaneously, slide drives main shaft and also moves up, bellows contract then, and main shaft heads in the body of heater for the action of machine silicon raw material, if when needing live spindle, starts rotating machine and drives belt wheel and make main axis rotation.Otherwise, then can finish the main shaft reversing motion, so be not repeated.
In a word, the present invention separates lifting spindle with rotating operation, can effectively keep main shaft steadily and the sealing operation, Significantly improve the quality of silicon seed, also have simple in structurely, it is low to make use cost, the easy effect of maintenance and use The advantage that fruit is good.
Claims (8)
1, a kind of transmission mechanism of monocrystaline silicon stove, mainly formed by main shaft, screw mandrel, guide pillar and rotating machine, it is characterized in that: this transmission mechanism is divided into main shaft lifting device and main axis rotation device, main shaft lifting device and main axis rotation device are arranged side by side, and main axis rotation device and main shaft lifting device are positioned on the slide side by side.
2, by the described transmission mechanism of monocrystaline silicon stove of claim 1, it is characterized in that: described main shaft lifting device comprises guide pillar, the screw mandrel bearing, last lower fixed seat, screw mandrel, slide, block set and fast lifting mechanism, the guide pillar upper and lower ends is separately fixed on the lower fixed seat, slide is joined by linear bearings and guide pillar cunning and is spirally connected by the screw mandrel transmission mother in the fast lifting mechanism with screw mandrel, the screw mandrel lower end is T-shaped, the screw mandrel upper end is coupling by screw mandrel bearing and upper fixed seat, screw mandrel lower end jacking on the axle bowl and its T shape end output terminal of passing axle bowl and harmonic speed reducer join, the input terminus of harmonic speed reducer joins by power wheel and motor shaft, and fast lifting mechanism is between screw mandrel and slide.
3, by the described transmission mechanism of monocrystaline silicon stove of claim 2, it is characterized in that: described fast lifting mechanism comprises that axle sleeve, screw mandrel transmission mother, worm gear, worm screw, bearing and worm screw motor form, screw mandrel passes axle sleeve, the female the inner of screw mandrel transmission is spirally connected with screw mandrel, female outer end of screw mandrel transmission and axle sleeve are inner fixing, worm gear is fixed on the axle sleeve outer end, and the worm screw motor that drives the worm screw rotation is fixed on the slide, and the axle sleeve outer end is coupling by bearing and slide.
4, by the described transmission mechanism of monocrystaline silicon stove of claim 1, it is characterized in that: described main axis rotation device comprises main shaft, bearing, be connected and fixed ring flange, the spindle nose water jacket, corrugated tube, magnetic fluid seal, axle center water jacket and rotating machine, screw mandrel and main shaft be arranged in parallel, the main shaft bottom is connected in the slide of main shaft lifting device side by bearing shaft, use magnetic fluid seal vacuum-sealing between the main shaft of bearing support upper end and the corresponding slide, the main shaft upper end is passed the fixed flange middle part and is positioned at body of heater, the fixed flange lower end is provided with the spindle nose water jacket, spindle nose water jacket lower end to the main shaft section between the magnetic fluid seal is sealed in the corrugated tube, the main shaft of bearing support lower end is provided with belt wheel, and the rotating machine that is fixed on the corresponding slide passes through the belt transmission belt wheel.
5, by the described transmission mechanism of monocrystaline silicon stove of claim 4, it is characterized in that: described main shaft is a quill shaft, hollow bulb forms axle core water jacket in the axle, the water-in of axle core water jacket communicates with the top of axle core water jacket by being positioned at a water pipe of core water jacket, the lower end of the axle core water jacket water outlet that communicates, or the water outlet of axle core water jacket communicates with the top of axle core water jacket by being positioned at a water pipe of core water jacket, the lower end of the core water jacket water-in that communicates.
6, by the described transmission mechanism of monocrystaline silicon stove of claim 4, it is characterized in that: described corrugated tube is a steel pressure-resistant seal corrugated tube.
7, by the described transmission mechanism of monocrystaline silicon stove of claim 4, it is characterized in that: the upper and lower ends of described spindle nose water jacket is communicated with spindle nose water-in and spindle nose water outlet respectively.
8, by the described transmission mechanism of monocrystaline silicon stove of claim 4, it is characterized in that: described main shaft upper end is provided with the crucible access slot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101116086A CN101319408B (en) | 2008-05-15 | 2008-05-15 | Transmission mechanism of monocrystaline silicon stove |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101116086A CN101319408B (en) | 2008-05-15 | 2008-05-15 | Transmission mechanism of monocrystaline silicon stove |
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| CN101319408A true CN101319408A (en) | 2008-12-10 |
| CN101319408B CN101319408B (en) | 2011-01-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008101116086A Active CN101319408B (en) | 2008-05-15 | 2008-05-15 | Transmission mechanism of monocrystaline silicon stove |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102477587A (en) * | 2010-11-24 | 2012-05-30 | 中国科学院沈阳科学仪器研制中心有限公司 | Seed-crystal transmission gear |
| CN102912421A (en) * | 2012-09-13 | 2013-02-06 | 北京京运通科技股份有限公司 | Inner shaft motion device for zone melting furnace |
| CN106222733A (en) * | 2016-10-12 | 2016-12-14 | 安徽贝意克设备技术有限公司 | A kind of crucible lifting method single-crystal metal growth furnace |
-
2008
- 2008-05-15 CN CN2008101116086A patent/CN101319408B/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102477587A (en) * | 2010-11-24 | 2012-05-30 | 中国科学院沈阳科学仪器研制中心有限公司 | Seed-crystal transmission gear |
| CN102477587B (en) * | 2010-11-24 | 2014-04-16 | 中国科学院沈阳科学仪器股份有限公司 | Seed-crystal transmission gear |
| CN102912421A (en) * | 2012-09-13 | 2013-02-06 | 北京京运通科技股份有限公司 | Inner shaft motion device for zone melting furnace |
| CN102912421B (en) * | 2012-09-13 | 2015-06-24 | 北京京运通科技股份有限公司 | Inner shaft motion device for zone melting furnace |
| CN106222733A (en) * | 2016-10-12 | 2016-12-14 | 安徽贝意克设备技术有限公司 | A kind of crucible lifting method single-crystal metal growth furnace |
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| Publication number | Publication date |
|---|---|
| CN101319408B (en) | 2011-01-19 |
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