CN2475743Y - Crystal growing furnace - Google Patents
Crystal growing furnace Download PDFInfo
- Publication number
- CN2475743Y CN2475743Y CN 00253332 CN00253332U CN2475743Y CN 2475743 Y CN2475743 Y CN 2475743Y CN 00253332 CN00253332 CN 00253332 CN 00253332 U CN00253332 U CN 00253332U CN 2475743 Y CN2475743 Y CN 2475743Y
- Authority
- CN
- China
- Prior art keywords
- heater
- ball
- screw
- crystal growing
- seed rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000013078 crystal Substances 0.000 title claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims abstract description 13
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 239000002826 coolant Substances 0.000 claims description 6
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 10
- 230000001360 synchronised effect Effects 0.000 abstract description 4
- 230000009467 reduction Effects 0.000 abstract description 3
- 239000000498 cooling water Substances 0.000 abstract description 2
- 239000000919 ceramic Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 230000006698 induction Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 241000294743 Gamochaeta Species 0.000 description 2
- 241000219739 Lens Species 0.000 description 2
- 230000027455 binding Effects 0.000 description 2
- 238000009739 binding Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 210000000695 crystalline len Anatomy 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model belongs to a special device for producing various oxide artificial crystals by a Czochralski method. The method is characterized in that: the furnace body is a cylindrical vertical double-layer jacket structure, and cooling water is arranged in the middle of the furnace body; the seed crystal rod is connected with the motor through the flexible belt and the reduction wheel set; the manual mechanism is connected with the ball screw through the transmission rod and the synchronous belt. An object of the utility model is to provide a crystal growth furnace, its aim at solve crystal growth furnace in the past can't adjust the position of seed crystal pole in the stove, the brilliant motor that changes frequently moves under low rotational speed state accurately conveniently, and the electric current is great, the furnace body manufacturing problem that exists in the aspect of complicacy etc.
Description
The utility model relates to a kind of specific equipment of producing various oxide compound artificial lenss with vertical pulling method.
Be used for optical-fibre communications, the artificial lens of photoelectric component base mateiral is the external in recent years novel material of widely applying.China also progressively walks out testing laboratory's stage, begins to occur the newborn enterprise that short run is commercially produced the manufacture of intraocular crystalline material.Because it draws manufacturing condition and requires height, difficulty is big, is starved of drawing production unit one crystal growing furnace that adapts.External crystal growing furnace designing and manufacturing level is very high, and A wide selection of colours and designs, but costs an arm and a leg.Domestic existing minority universities and colleges, subordinate factory of scientific research institution make crystal growth equipment, usually adopt driving, type of drive such as rare earth permanent magnet torque motor, harmonic speed reducer, ball-screw, rolling guide, various forms of furnace bindings, manual or electronic crucible hoisting appliance etc.But in the last pull portion of existing installation, the seed rod fast lifting adopts servomotor through a cover transmission mechanism, drives the mode that leading screw rotates, and in use can't adjust the position of seed rod in stove accurately and easily.The rotation of seed rod is directly driven through belt by motor, because reduction ratio is little, makes motor through the operation under the low speed state of being everlasting, and electric current is bigger.Have the body of heater form of crystal furnace in addition, most processing and manufacturing complexity.
The purpose of this utility model is to provide a kind of crystal growing furnace, the crystal growing furnace that its purpose is to solve in the past moves under the low speed state of being everlasting can't adjusting position, the brilliant rotating motor of seed rod in stove accurately and easily, electric current is bigger, the problem that aspects such as body of heater processing and manufacturing complexity exist.
The utility model is achieved through the following technical solutions:
A kind of crystal growing furnace, the vacuum unit that includes body of heater and be connected with body of heater, the man-operated mechanism in the crucible lift device is connected with leading screw, leading screw is connected with vacuum chamber, vacuum chamber is connected on the guide pillar, and guide pin bushing was connected with body of heater under vacuum chamber passed through, and was sealed by lower seal between following guide pin bushing and the body of heater; Harmonic speed reducer in the electronic pulling apparatus is connected with ball-screw, and ball-screw is arranged on the ball slideway, and slide block is connected with seed rod, and ball-screw is connected with slide block, it is characterized in that: body of heater is that the round shape vertical double is jacket structured, and there is water coolant the centre; Seed rod is connected with flexible band, and flexible band is arranged on the deceleration wheels, and the deceleration wheels connect with motor; Man-operated mechanism is connected with transmission rod, and transmission rod is connected with synchronous band, and band connects with ball-screw synchronously.
One side of body of heater is the laterally opened fire door of the viewing window of double glazing, and there is water coolant the centre.
The deceleration wheels are fixed on the slide block.
Advantage of the present utility model and effect:
The furnace binding design adopts vertical tubbiness jacket structured, adopts water-cooled method, and bottom surface water inlet, end face water outlet meet the cooling principle, reach cooling performance.And great simplified manufacturing technique.Make crystal growing furnace that wide market be arranged, promising.
Seed rod is realized the seed rod slow speed of revolution, the works fine state of the little electric current of motor through two stage speed change.Otherwise the one-level speed change, if the seed rod slow speed of revolution (0-50rpm), then brilliant rotating motor electric current height, the motor feels hot, influences long-time maintainability.And driving moment is less, and the rotary resistance that overcomes seed rod is restricted.
Seed rod promotes or descends and adopts quick manual mechanism, and is simple to operate, and control seed rod position in stove very makes things convenient for (being furnished with scale).Be added with damping system at synchronous band, can prevent that again limited slip block band seed rod glides automatically.
Accompanying drawing 1 is a structural representation of the present utility model.
Below by embodiment the utility model is specifically described:
Body of heater 5 is that the round shape vertical double is jacket structured, and processing and manufacturing is easy.By recirculated cooling water body of heater is cooled off in the chuck.One side of body of heater is equipped with the fire door 16 of band viewing window 17, also is double layer jacket structure, by the refrigeration cycle water cooling.Viewing window 17 makes the operator in time observe the interior crystal growth situation of stove; This viewing window 17 is made up of the double glazing chuck, has water coolant to cool off in the middle of double glazing.Intermediate frequency power supply 6 makes induction coil 15 become thermal source.The crystal raw material of being founded is in the crucible of induction coil; Crucible is being supported by a ceramic bar 14, and ceramic bar is connected with following vacuum chamber 10 through lower seal 13 by following guide pin bushing 12; Vacuum chamber is equipped with the electronic scales (not shown) it is measured; Vacuum chamber 10 can drive ceramic bar and move up and down, and adjusts crucible position in stove.Vacuum chamber moves up and down accurately to be finished along guide pillar 11 by man-operated mechanism 8 rotational lead screws 9 and moves up and down function.
Seed rod in body of heater on or move down, keep vacuum state (or filling the shielding gas state) in the stoves by wear ring 18.
Ball-screw 3 is to drive the ball-screw rotation by torque motor and harmonic reduction 1 through electromagnetic clutch.
For solving the problem of adjusting seed rod position in stove quickly and easily, this machine is provided with seed rod quick manual hoisting appliance.This mechanism drives transmission rod 21 by man-operated mechanism 19 through cone gear, transmission rod 21 epimeres are fixed with synchronous pulley, and through being with 26 to drive the ball-screw fast rotational synchronously, the realization seed rod rises fast or falls, and can fast adjust seed rod position in stove exactly, very easy to use.
This furnaceman makes state---and adjustment such as crystalline substance rises, brilliant commentaries on classics, vacuum tightness are finished by controlling box fully with metering, are measured through transmitter grating chi by slide block 2 as the crystalline substance liter, are accurately shown by digital display meter in the controlling box.
Crystal growing furnace is produced the crystal process:
Utilize man-operated mechanism 19 that slide block is risen to and make seed rod, with man-operated mechanism 8 in the lower body ceramic bar 14 is promoted to then and meets the processing requirement position to the position that meets the requirements; Ceramic bar 14 is supporting the raw material (in crucible) that will found crystal pulling.The induction coil 15 that intermediate frequency power supply 6 is arranged outside crucible.It is on the horizontal flange of threeway that the induction coil lead-in wire is imported and exported.Logical cold water cooling in the induction coil.The existing introducing intermediate frequency power supply of threeway function is again the bonded channel of vacuum unit 7.
After raw material had been adorned, closed furnace door 16 started vacuum unit 7, reach satisfactory vacuum tightness after, closed furnace body.In body of heater, charge into rare gas element.
Starting each cold device, intermediate frequency power supply, crystalline substance of going changes.
After the crystal raw material fusing, adjust the seed rod position, seed rod lower end crystal seed is stretched in the brilliant liquid, behind the certain hour, start brilliant the liter with man-operated mechanism 19; The beginning pulling crystal.
Crystal growing process is a successive process of growth, can not pause in the centre.So require intermediate frequency power supply, brilliant device, brilliant rotary device, the refrigerating unit etc. of rising, must be reliable and stable in whole process of growth.And each installs and surrounding environment mustn't have any vibration.Every technical indicator, each functional stabilization, production technique, production environment to crystal growing furnace requires to be strict thus.
Claims (3)
1, a kind of crystal growing furnace, the vacuum unit (7) that includes body of heater (5) and be connected with body of heater (5), man-operated mechanism in the crucible lift device (8) is connected with leading screw (9), leading screw (9) is connected with vacuum chamber (10), vacuum chamber (10) is connected on the guide pillar (11), guide pin bushing (12) was connected with body of heater (5) under vacuum chamber (10) passed through, and was sealed by lower seal (13) between following guide pin bushing (12) and the body of heater (5); Harmonic speed reducer in the electronic pulling apparatus (1) is connected with ball-screw (3), ball-screw (3) is arranged on the ball slideway (4), slide block (2) is connected with seed rod (20), ball-screw (3) is connected with slide block (2), it is characterized in that: body of heater (5) is jacket structured for the round shape vertical double, and there is water coolant the centre; Seed rod (20) is connected with flexible band (23), flexible band (23) is arranged on the deceleration wheels (24), deceleration wheels (24) connect with motor (22): man-operated mechanism (19) is connected with transmission rod (21), transmission rod (21) is connected with being with (26) synchronously, and band (26) connects with ball-screw (3) synchronously.
2, crystal growing furnace according to claim 1 is characterized in that: a side of body of heater (5) is the laterally opened fire door (16) of the viewing window (17) of double glazing, and there is water coolant the centre.
3, crystal growing furnace according to claim 1 is characterized in that: deceleration wheels (24) are fixed on the slide block (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00253332 CN2475743Y (en) | 2000-12-05 | 2000-12-05 | Crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00253332 CN2475743Y (en) | 2000-12-05 | 2000-12-05 | Crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2475743Y true CN2475743Y (en) | 2002-02-06 |
Family
ID=33610804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00253332 Expired - Fee Related CN2475743Y (en) | 2000-12-05 | 2000-12-05 | Crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2475743Y (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1329558C (en) * | 2004-08-13 | 2007-08-01 | 山东大学 | Apparatus for rotating and drawing of crystal with damping |
| CN100460572C (en) * | 2006-12-16 | 2009-02-11 | 杭州慧翔电液技术开发有限公司 | Sensor built-out type crystal lifting device |
| CN100460571C (en) * | 2006-12-16 | 2009-02-11 | 杭州慧翔电液技术开发有限公司 | Linear guide rail type crucible lifting device |
| CN101407940B (en) * | 2008-07-24 | 2012-01-25 | 中国科学院上海硅酸盐研究所 | Crystal growth apparatus and method under vibration field |
| CN102477587A (en) * | 2010-11-24 | 2012-05-30 | 中国科学院沈阳科学仪器研制中心有限公司 | Seed-crystal transmission gear |
| CN103374753A (en) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | Large-size sapphire crystal growing furnace |
| CN104278331A (en) * | 2014-09-23 | 2015-01-14 | 上海朗兆机电设备有限公司 | Rotating fine adjustment mechanism |
| CN104357908A (en) * | 2014-10-28 | 2015-02-18 | 西安建筑科技大学 | Crystal growing device and application thereof for being used as fluoro boron beryllium acid potassium crystal growing device |
| CN106544722A (en) * | 2016-11-04 | 2017-03-29 | 曲靖师范学院 | A kind of vertical automatization's grower of crystal |
-
2000
- 2000-12-05 CN CN 00253332 patent/CN2475743Y/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1329558C (en) * | 2004-08-13 | 2007-08-01 | 山东大学 | Apparatus for rotating and drawing of crystal with damping |
| CN100460572C (en) * | 2006-12-16 | 2009-02-11 | 杭州慧翔电液技术开发有限公司 | Sensor built-out type crystal lifting device |
| CN100460571C (en) * | 2006-12-16 | 2009-02-11 | 杭州慧翔电液技术开发有限公司 | Linear guide rail type crucible lifting device |
| CN101407940B (en) * | 2008-07-24 | 2012-01-25 | 中国科学院上海硅酸盐研究所 | Crystal growth apparatus and method under vibration field |
| CN102477587A (en) * | 2010-11-24 | 2012-05-30 | 中国科学院沈阳科学仪器研制中心有限公司 | Seed-crystal transmission gear |
| CN102477587B (en) * | 2010-11-24 | 2014-04-16 | 中国科学院沈阳科学仪器股份有限公司 | Seed-crystal transmission gear |
| CN103374753A (en) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | Large-size sapphire crystal growing furnace |
| CN104278331A (en) * | 2014-09-23 | 2015-01-14 | 上海朗兆机电设备有限公司 | Rotating fine adjustment mechanism |
| CN104278331B (en) * | 2014-09-23 | 2017-10-03 | 上海朗兆机电设备有限公司 | Rotary fine adjustment mechanism |
| CN104357908A (en) * | 2014-10-28 | 2015-02-18 | 西安建筑科技大学 | Crystal growing device and application thereof for being used as fluoro boron beryllium acid potassium crystal growing device |
| CN104357908B (en) * | 2014-10-28 | 2017-07-28 | 西安建筑科技大学 | Crystal growth equipment and its application as fluoro boron potassjum beryllate crystal growth equipment |
| CN106544722A (en) * | 2016-11-04 | 2017-03-29 | 曲靖师范学院 | A kind of vertical automatization's grower of crystal |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |