CN215947457U - Mobile regulation and control device for high-frequency induction single crystal furnace - Google Patents
Mobile regulation and control device for high-frequency induction single crystal furnace Download PDFInfo
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- CN215947457U CN215947457U CN202121461241.8U CN202121461241U CN215947457U CN 215947457 U CN215947457 U CN 215947457U CN 202121461241 U CN202121461241 U CN 202121461241U CN 215947457 U CN215947457 U CN 215947457U
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Abstract
The utility model discloses a mobile regulation and control device for a high-frequency induction single crystal furnace, which comprises a single crystal furnace and a control panel, wherein: the single crystal furnace is connected and arranged on the left side of the base, the right side of the base is provided with the control panel, the center of the bottom of the single crystal furnace is provided with the crucible shaft, the crucible shaft is connected and arranged with the crucible and the high-frequency electric furnace tube, the top of the single crystal furnace is connected and arranged with the furnace cover, the top of the furnace cover is connected and arranged with the transmission box, and the bottom of the right side of the transmission box is connected and arranged with the motor box. The energy-saving environment-friendly solar water heater is greatly improved in the aspects of manpower and material resources, saves the manpower and capital consumption, and is beneficial to promoting the development of energy conservation and environment protection.
Description
Technical Field
The utility model belongs to the technical field of single crystal furnace regulation and control, and particularly relates to a mobile regulation and control device for a high-frequency induction single crystal furnace.
Background
The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas environment and growing dislocation-free single crystals by using a Czochralski method. The production process flow of the single crystal furnace is generally as follows: firstly, a certain amount of polycrystalline silicon raw material is put into a crucible and heated to be molten, seed crystals are clamped at the lower end of a pull rod and immersed into the molten crystal raw material, the pull rod is slowly pulled upwards and simultaneously slowly rotated, and finally, the cylindrical monocrystalline silicon rod is grown.
The present regulating device is stationary. The movable regulation and control cannot be realized, the operation is inconvenient and difficult to control, and the risk of high defective products exists in the operation process aiming at the original equipment, so that the improvement is needed.
Disclosure of Invention
The utility model aims to provide a mobile regulating device for a high-frequency induction single crystal furnace, which aims to solve the technical problem.
In order to achieve the purpose, the utility model provides the following technical scheme: a mobile regulation and control device for a high-frequency induction single crystal furnace comprises the single crystal furnace and a control panel, wherein:
the single crystal furnace is connected and arranged on the left side of the base, and the right side of the base is provided with a control panel;
a crucible shaft is arranged at the center of the bottom of the single crystal furnace and connected with a crucible and a high-frequency electric furnace tube;
the top of the single crystal furnace is connected with a furnace cover, the top of the furnace cover is connected with a transmission case, and the bottom of the right side of the transmission case is connected with a motor case.
Preferably, the crucible shaft is connected with a graphite crucible, the periphery of the graphite crucible is connected with a high-frequency electric furnace tube, the high-frequency electric furnace tube is in a ring-shaped circuit tube shape, a heat insulation layer is attached to and arranged on the inner wall of the single crystal furnace, and the heat insulation layer filling material is phenolic resin foaming material and the like.
Preferably, the furnace cover is connected with a valve, the seed rod is connected with the screw rod, the top of the screw rod is connected with a transmission box, the transmission box is internally provided with a transmission chain connecting screw rod, the bottom of the transmission box is connected with a motor box, the motor box is internally provided with a servo motor through the transmission chain, and the servo motor is connected with a control panel through a controller.
Preferably, the base right side is fixed and is set up the supporting seat, the supporting seat is connected and is set up control panel, control panel surface sets up lifting button, display screen and emergency stop button.
Preferably, the front side of the single crystal furnace is provided with a furnace door, the right side surface of the single crystal furnace is provided with an observation door, and the observation door corresponds to the seed rod and the graphite crucible.
Preferably, the inner wall of the heat-insulating layer is provided with a plurality of position sensors in a circumferential array, and the position sensors highly penetrate through the inner wall of the heat-insulating layer.
The utility model has the technical effects and advantages that: the movement control device for the high-frequency induction single crystal furnace has the following advantages:
1. the regulating device is safe to use, convenient and reliable, greatly improves the crystal pulling effect, can save a large amount of funds and electric power, and is convenient to use.
2. There is the high risk of defective products to former equipment in operation process, has removed too complicated manual regulation process from. The energy-saving environment-friendly solar water heater is greatly improved in the aspects of manpower and material resources, saves the manpower and capital consumption, and is beneficial to promoting the development of energy conservation and environment protection.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an internal schematic view of the present invention;
fig. 3 is a top view of the interior of the present invention.
In the figure: 1-single crystal furnace, 11-base, 12-furnace bottom, 13-high-frequency electric furnace tube, 14-graphite crucible, 15-heat-insulating layer, 16-position sensor, 17-seed rod, 18-furnace cover, 181-valve, 182-screw, 183-transmission box, 1831-transmission chain, 184-motor box, 1841-servo motor, 19-furnace door, 191-observation door, 2-control panel, 21-support seat, 22-display screen, 23-emergency stop button and 54-lifting button.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to fig. 1 to 3 in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The utility model provides a mobile regulation and control device for a high-frequency induction single crystal furnace, which comprises a single crystal furnace 1 and a control panel 2, wherein the mobile regulation and control device comprises:
the single crystal furnace 1 is connected and arranged on the left side of a base 11, the base 11 is fixedly arranged at the bottom of the single crystal furnace 1, and a control panel 2 is arranged on the right side of the base 11;
a crucible shaft 141 is arranged at the center of the bottom 12 of the single crystal furnace 1, and the crucible shaft 141 is connected with a crucible 14 and a high-frequency electric furnace tube 13;
the top of the single crystal furnace 1 is connected with a furnace cover 18, the top of the furnace cover 18 is connected with a transmission case 183, and the bottom of the right side of the transmission case 183 is connected with a motor case 184.
Specifically, the crucible shaft 141 is connected with the graphite crucible 14, the high-frequency furnace tube 13 is connected and arranged on the periphery of the graphite crucible 14, the high-frequency furnace tube 13 is in a ring shape, so that the graphite crucible 14 can be uniformly heated by the product, the heat insulation layer 15 is attached and arranged on the inner wall of the single crystal furnace 1, and the filling material of the heat insulation layer 15 is a phenolic resin foaming material, so that the product has good heat insulation performance.
Specifically, the connection of the outside of bell 18 sets up valve 181, 1 top center department of single crystal growing furnace sets up seed rod 17, seed rod 17 connecting screw 182, just screw 182 top connection sets up transmission case 183, the inside drive chain 1831 connecting screw 182 that sets up of transmission case 183, the connection of transmission case 183 bottom sets up motor case 184, motor case 184 is inside to be connected through drive chain 1831 and to be set up servo motor 1841, servo motor 1841 connects drive chain 1831, servo motor 1841 is through setting up controller connection control panel 2 for the product passes through control panel 2 control drive chain 1831 and to the action of screw 182.
Specifically, the right side of the base 11 is fixedly provided with a supporting seat 21, the supporting seat 21 is connected with a control panel 2, the surface of the control panel 2 is provided with a lifting button 24, a display screen 22 and an emergency stop button 23, the display screen 22 displays the position information of the seed rod 17 in the single crystal furnace 1, and the servo motor 1841 acts on the lifting of the screw 182 by controlling the lifting button 24.
Specifically, the front side of the single crystal furnace 1 is provided with a furnace door 19, the right side of the single crystal furnace 1 is provided with an observation door 191, and the observation door 191 corresponds to the positions of the seed rod 17 and the graphite crucible 14, so that an operator can observe the operation condition inside the single crystal furnace 1 through the observation door 191.
Specifically, heat preservation 15 inner wall is that the circumference array sets up a plurality of position sensor 16, position sensor 16 highly runs through heat preservation 15 inner wall, corresponds information feedback to display screen 22 on through setting up position sensor 16.
The working principle is as follows: the mobile regulation and control device for the high-frequency induction single crystal furnace relates to a mobile display device, and can display the real-time height of the single crystal furnace on a regulation and control terminal, so that an operator can conveniently perform fine regulation and real-time control.
An operator places raw materials inside the graphite crucible 14, loads the seed rod 17 into the pulling-replacing hanger, connects the pulling-replacing hanger to the rotating shaft, completes the lifting action of the lifting rod by adjusting the lifting button 24 on the control panel 2, and displays the position information of the lifting rod on the display screen 22 by arranging the plurality of position sensors 16 inside the heat insulation layer 15 until the seed rod 17 enters the graphite crucible 14.
An observation door 191 is arranged on the right side of the single crystal furnace 1, and the observation door 191 corresponds to the positions of the seed rod 17 and the graphite crucible 14, so that an operator can observe the operation condition inside the single crystal furnace 1 through the observation door 191, and when danger is sent or the operator needs to stop timely to control the controller to complete the emergency stop action through an emergency stop button 23 arranged on the surface of the control panel 2.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the utility model.
Claims (6)
1. The utility model provides a remove regulation and control device for high frequency induction single crystal growing furnace, includes single crystal growing furnace (1), control panel (2), its characterized in that:
the bottom of the single crystal furnace (1) is fixedly provided with a base (11), a crucible shaft (141) is arranged at the center of the bottom of the single crystal furnace (1), the crucible shaft (141) is connected with a graphite crucible (14), the periphery of the graphite crucible (14) is connected with a high-frequency electric furnace tube (13), the inner wall of the single crystal furnace (1) is attached with a heat insulation layer (15), and the inner wall of the heat insulation layer (15) is provided with a plurality of position sensors (16) in a circumferential array;
the seed crystal rod (17) is arranged at the center of the top of the single crystal furnace (1), the furnace cover (18) is fixedly arranged at the top of the single crystal furnace (1), a screw rod (182) is fixedly arranged in the furnace cover (18), the screw rod (182) is connected with a servo motor (1841) through a transmission chain (1831), and the servo motor (1841) is connected with a control panel (2) through a controller.
2. The movement control device for the high-frequency induction single crystal furnace according to claim 1, characterized in that: the high-frequency electric furnace tube (13) is a circular interface at the same side.
3. The movement control device for the high-frequency induction single crystal furnace according to claim 1, characterized in that: the utility model discloses a set up motor case, bell (18) outside is connected and is set up valve (181), seed rod (17) connecting screw (182), just screw (182) top is connected and is set up transmission case (183), transmission case (183) inside sets up drive chain (1831) connecting screw (182), motor case (184) are connected to transmission case (183) bottom.
4. The movement control device for the high-frequency induction single crystal furnace according to claim 1, characterized in that: the fixed supporting seat (21) that sets up in base (11) right side, supporting seat (21) are connected and are set up control panel (2), control panel (2) surface sets up lift button (24), display screen (22) and scram button (23).
5. The movement control device for the high-frequency induction single crystal furnace according to claim 1, characterized in that: the front side of the single crystal furnace (1) is provided with a furnace door (19), the right side surface of the single crystal furnace (1) is provided with an observation door (191), and the observation door (191) corresponds to the positions of the seed rod (17) and the graphite crucible (14).
6. The movement control device for the high-frequency induction single crystal furnace according to claim 3, characterized in that: the servo motor (1841) is arranged in the motor box (184), and the servo motor (1841) is connected with the transmission chain (1831).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121461241.8U CN215947457U (en) | 2021-06-29 | 2021-06-29 | Mobile regulation and control device for high-frequency induction single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121461241.8U CN215947457U (en) | 2021-06-29 | 2021-06-29 | Mobile regulation and control device for high-frequency induction single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215947457U true CN215947457U (en) | 2022-03-04 |
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ID=80436301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121461241.8U Active CN215947457U (en) | 2021-06-29 | 2021-06-29 | Mobile regulation and control device for high-frequency induction single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215947457U (en) |
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2021
- 2021-06-29 CN CN202121461241.8U patent/CN215947457U/en active Active
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