CN217579140U

CN217579140U - Czochralski crystal growth furnace

Info

Publication number: CN217579140U
Application number: CN202220951742.2U
Authority: CN
Inventors: 陈从贺
Original assignee: Hg Optoelectronic Inc
Current assignee: Hg Optoelectronic Inc
Priority date: 2022-04-24
Filing date: 2022-04-24
Publication date: 2022-10-14
Anticipated expiration: 2032-04-24

Abstract

The utility model relates to a crystal growing furnace by a Czochralski method, which comprises a fixed seat, a lower furnace hearth and a fixed frame, wherein the lower furnace hearth and the fixed frame are arranged at the top of the fixed seat; the adjusting device comprises a servo motor fixedly installed at the top of the fixing frame, an adjusting lead screw is fixedly connected to an output shaft of the servo motor, a threaded sleeve is connected to the outer surface of the adjusting lead screw in a threaded mode, and an installation plate is fixedly connected to one side of the threaded sleeve. This crystal growth furnace by pulling method, servo motor start-up drive adjust the lead screw and rotate, adjust the lead screw and rotate and drive the thread bush and reciprocate, the thread bush reciprocates and drives the mounting panel and reciprocates, the mounting panel reciprocates and drives the upper furnace thorax and reciprocates, is convenient for adjust the height of upper furnace thorax according to the processing demand, the effectual application scope that improves the growth furnace has reached the wide advantage of application scope.

Description

Czochralski crystal growth furnace

Technical Field

The utility model relates to the technical field of crystal growing furnaces, in particular to a crystal growing furnace adopting a Czochralski method.

Background

The Czochralski method is a common artificial crystal preparation method, and can be used for pulling and growing high-quality single crystal materials from a melt. The method is already applied to growing important artificial crystal materials such as sapphire single crystal, yttrium aluminum garnet single crystal, silicon germanium single crystal, calcium fluoride single crystal and the like, and the crystal growing furnace is a process test instrument used in the technical field of electronics and communication, is suitable for preparing oxides, photonic crystal metals, alloys, compounds and various single crystal samples, and can adjust the atmosphere in the growing process.

The growth of the fluoride optical crystal needs to adopt a three-phase alternating current heating mode in order to ensure the uniformity of a temperature field in a furnace, the existing growth furnace for crystal growth by the Czochralski method is of an integrated structure and adopts a side-opening door mode, a hearth cannot move, and the growth furnace cannot be installed when a heat-insulating cylinder of a heater or the heater is high, so that the existing growth furnace can only be used for the growth of the fluoride optical crystal with a small size, has a narrow application range and cannot meet social requirements, and the Czochralski method crystal growth furnace is provided to solve the problems.

SUMMERY OF THE UTILITY MODEL

To the deficiency of the prior art, the utility model provides a czochralski crystal growth furnace possesses advantages such as application scope is wide, has solved the furnace of growth furnace and is not convenient for height-adjusting to as for the narrower problem of application scope.

In order to realize the above-mentioned wide purpose of application scope of being convenient for, the utility model provides a following technical scheme: a crystal growth furnace adopting a Czochralski method comprises a fixed seat, a lower hearth and a fixed frame, wherein the lower hearth and the fixed frame are arranged at the top of the fixed seat;

the adjusting device comprises a servo motor fixedly installed at the top of the fixing frame, an adjusting lead screw is fixedly connected to an output shaft of the servo motor, a threaded sleeve is connected to the outer surface of the adjusting lead screw in a threaded mode, an installing plate is fixedly connected to one side of the threaded sleeve, and one side of the installing plate is fixedly connected with the upper hearth.

Furthermore, the lower furnace and the fixing frame are fixedly connected with the fixing seat, and the fixing frame is arranged outside the lower furnace.

Furthermore, one side fixedly connected with that the thread bush is close to the mount extends to the inside stopper of mount, the inside of mount is seted up with the spacing spout of stopper looks adaptation.

Further, fixedly connected with dead lever between thread bush and the mounting panel, the inside fixed mounting of fixing base has the bearing with adjusting lead screw looks adaptation, one side fixed mounting of mount has the controller.

Further, be provided with the heat preservation on the inner wall of furnace down, the inside of furnace is rotated down and is connected with the crucible, go up the bottom of furnace and be located the outside fixedly connected with sealing washer of furnace down.

Further, be provided with spacing subassembly on the mount, spacing subassembly includes fixed connection in the inside slide bar of mount, the outside sliding connection of slide bar has the sliding sleeve.

Furthermore, the connection mode of sliding sleeve and mounting panel is fixed connection, fixedly connected with connecting rod between mounting panel and the sliding sleeve.

Furthermore, the inside of fixing base is provided with four mobile device, mobile device includes the telescopic machanism of fixed mounting in the fixing base inside, fixedly connected with removes the wheel on telescopic machanism's the output.

Compared with the prior art, the utility model provides a crystal growing furnace by a pulling method, which has the following beneficial effects:

1. this crystal growth furnace by pulling method, when needs are adjusted furnace's height, start through controller control servo motor, servo motor starts and drives the regulation lead screw and rotate, adjusts the lead screw and rotates and drive the thread bush and reciprocate, and the thread bush reciprocates and drives the mounting panel and reciprocate, and the mounting panel reciprocates and drives the upper furnace and reciprocate, is convenient for adjust the height of upper furnace according to the processing demand, the effectual application scope that has improved growth furnace has reached the wide advantage of application scope.

2. This crystal growth furnace by pulling method, start through controller control telescopic machanism and drive and remove wheel downstream, make and remove the wheel and remove to ground, the staff of being convenient for removes the growth furnace to suitable position, remove and accomplish the back, start through controller control telescopic machanism once more and drive and remove the wheel to the inside removal of fixing base, it removes to inside the fixing base to make to remove the wheel, be convenient for fixing base and ground contact, the advantage of placing firmly has been reached, the furnace of having solved the growth furnace is not convenient for height-adjusting, so that as to the narrower problem of application scope.

Drawings

FIG. 1 is a sectional view of the structure of the present invention;

fig. 2 is a front view of the structure of the present invention.

In the figure: the device comprises a fixed seat 1, a lower hearth 2, a fixed frame 3, an upper hearth 4, an adjusting device 5, a limiting component 6, a moving device 7, a controller 8, a heat-insulating layer 9, a crucible 10, a sealing ring 11, a servo motor 12, an adjusting screw rod 13, a threaded sleeve 14, a mounting plate 15, a sliding rod 16, a sliding sleeve 17, a telescopic mechanism 18 and a moving wheel 19.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-2, a czochralski crystal growth furnace comprises a fixed seat 1, a lower hearth 2 and a fixed mount 3 which are arranged at the top of the fixed seat 1, wherein the lower hearth 2 and the fixed mount 3 are fixedly connected with the fixed seat 1, the fixed mount 3 is arranged outside the lower hearth 2, the outer part of the lower hearth 2 is movably connected with an upper hearth 4, and the fixed mount 3 is provided with an adjusting device 5 for adjusting the height of the upper hearth 4; adjusting device 5 includes servo motor 12 of fixed mounting in the 3 tops of mount, fixedly connected with adjusts lead screw 13 on servo motor 12's the output shaft, threaded connection has thread bush 14 on adjusting lead screw 13's the surface, one side fixedly connected with mounting panel 15 of thread bush 14, this czochralski crystal growth stove of one side and last furnace 4 fixed connection of mounting panel 15, one side fixed mounting of mount 3 has controller 8, control servo motor 12 through controller 8 and start, servo motor 12 starts to drive and adjusts lead screw 13 and rotates, it drives thread bush 14 and reciprocates to adjust lead screw 13 and rotate, thread bush 14 reciprocates and drives mounting panel 15 and reciprocate, mounting panel 15 reciprocates and drives furnace 4 and reciprocate, be convenient for adjust the height of furnace 4 according to the processing demand, the effectual application scope that has improved the growth stove, the advantage that application scope is wide has been reached.

Wherein, threaded bush 14 is close to the stopper that one side fixedly connected with of mount 3 extended to mount 3 inside, and the inside of mount 3 is offered with the spacing spout of stopper looks adaptation, and the external diameter of stopper equals with the internal diameter of spacing spout, fixedly connected with dead lever between threaded bush 14 and the mounting panel 15, the inside fixed mounting of fixing base 1 has and adjusts the bearing of lead screw 13 looks adaptation.

In this embodiment, be provided with heat preservation 9 on the inner wall of lower furnace 2, through setting up heat preservation 9, can effectively improve the holistic heat preservation effect of growth furnace, the inside of lower furnace 2 rotates and is connected with crucible 10, goes up the bottom of furnace 4 and is located the outside fixedly connected with sealing washer 11 of furnace 2 down, and sealing washer 11 is swing joint with the connected mode of lower furnace 2, through setting up sealing washer 11, can effectively improve the leakproofness of last furnace 4 and lower furnace 2 junction.

In this embodiment, be provided with spacing subassembly 6 on mount 3, spacing subassembly 6 includes fixed connection in the inside slide bar 16 of mount 3, slide bar 16 is solid cylinder, slide bar 16's outside sliding connection has sliding sleeve 17, sliding sleeve 17's internal diameter equals with slide bar 16's external diameter, sliding sleeve 17 is fixed connection with mounting panel 15's connected mode, fixedly connected with connecting rod between mounting panel 15 and the sliding sleeve 17, slide from top to bottom in slide bar 16's outside through sliding sleeve 17, stability when can effectively strengthen mounting panel 15 reciprocates.

In this embodiment, the inside of fixing base 1 is provided with four mobile device 7, mobile device 7 includes fixed mounting in the inside telescopic machanism 18 of fixing base 1, the mounting groove with telescopic machanism 18 looks adaptation is seted up to the inside of fixing base 1, fixedly connected with removes wheel 19 on telescopic machanism 18's the output, it drives to remove wheel 19 downstream to start through 8 control telescopic machanism 18 of controller, make and remove wheel 19 and remove to ground, it will grow the stove and remove to suitable position to be convenient for the staff, remove the completion back, it drives to remove wheel 19 to 1 inside removal of fixing base to start through 8 control telescopic machanism 18 of controller once more, make and remove wheel 19 and remove to 1 inside of fixing base, be convenient for fixing base 1 and ground contact, reached and placed firm advantage.

The telescopic mechanism 18 may be an electric push rod or a telescopic cylinder.

The beneficial effects of the above embodiment are as follows:

this crystal growth furnace by pulling method, when needs are adjusted furnace's height, start through 8 control servo motor 12 of controller, servo motor 12 starts and drives regulation lead screw 13 and rotate, it reciprocates to adjust lead screw 13 and rotate and drive thread bush 14, thread bush 14 reciprocates and drives mounting panel 15 and reciprocates, mounting panel 15 reciprocates and drives furnace 4 and reciprocates, be convenient for adjust furnace 4's height according to the processing demand, the effectual application scope who improves the growth furnace, the advantage that application scope is wide has been reached.

This crystal growth furnace by pulling method, it drives and removes 19 downstream wheels to start through 8 control telescopic machanism 18 of controller, make and remove 19 wheels and remove to ground, the staff of being convenient for removes suitable position with the growth furnace, remove and accomplish the back, it drives and removes 19 wheels to 1 inside removal of fixing base to start through 8 control telescopic machanism 18 of controller once more, it removes to inside fixing base 1 to make to remove 19 wheels, be convenient for fixing base 1 and ground contact, reached and placed firm advantage, the furnace of having solved the growth furnace is not convenient for height-adjusting, so that application scope is narrower problem.

The electrical components shown herein are electrically connected to a main controller and a power supply, the main controller can be a conventional known device controlled by a computer, and the conventional power connection technology disclosed in the prior art is not described in detail herein.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising a … …" does not exclude the presence of another identical element in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a czochralski crystal growth furnace, includes fixing base (1) and sets up lower furnace (2) and mount (3) at fixing base (1) top, its characterized in that: the outer part of the lower hearth (2) is movably connected with an upper hearth (4), and the fixed frame (3) is provided with an adjusting device (5) for adjusting the height of the upper hearth (4); adjusting device (5) are including servo motor (12) of fixed mounting in mount (3) top, fixedly connected with adjusts lead screw (13) on the output shaft of servo motor (12), threaded connection has thread bush (14) on the surface of adjusting lead screw (13), one side fixedly connected with mounting panel (15) of thread bush (14), one side and last furnace (4) fixed connection of mounting panel (15).

2. A czochralski crystal growing furnace as claimed in claim 1, wherein: the lower furnace (2) and the fixing frame (3) are fixedly connected with the fixing seat (1), and the fixing frame (3) is arranged outside the lower furnace (2).

3. A crystal growing furnace as claimed in claim 1, wherein: one side of the threaded sleeve (14) close to the fixing frame (3) is fixedly connected with a limiting block extending to the inside of the fixing frame (3), and a limiting sliding groove matched with the limiting block is formed in the fixing frame (3).

4. A crystal growing furnace as claimed in claim 1, wherein: fixedly connected with dead lever between thread bush (14) and mounting panel (15), the inside fixed mounting of fixing base (1) has the bearing with adjusting lead screw (13) looks adaptation, one side fixed mounting of mount (3) has controller (8).

5. A crystal growing furnace as claimed in claim 1, wherein: be provided with heat preservation (9) on the inner wall of furnace (2) down, the inside of furnace (2) is rotated down and is connected with crucible (10), go up the outside fixedly connected with sealing washer (11) of furnace (2) down and be located in the bottom of furnace (4).

6. A czochralski crystal growing furnace as claimed in claim 1, wherein: the fixing frame (3) is provided with a limiting component (6), the limiting component (6) comprises a sliding rod (16) fixedly connected to the inside of the fixing frame (3), and the outside of the sliding rod (16) is connected with a sliding sleeve (17) in a sliding mode.

7. The crystal growth furnace of claim 6, wherein: the connecting mode of sliding sleeve (17) and mounting panel (15) is fixed connection, fixedly connected with connecting rod between mounting panel (15) and sliding sleeve (17).

8. A crystal growing furnace as claimed in claim 1, wherein: the movable type parking device is characterized in that four moving devices (7) are arranged inside the fixed base (1), each moving device (7) comprises a telescopic mechanism (18) fixedly installed inside the fixed base (1), and a moving wheel (19) is fixedly connected to the output end of each telescopic mechanism (18).