CN208379052U - A kind of bonder of silicon carbide seed piece - Google Patents
A kind of bonder of silicon carbide seed piece Download PDFInfo
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- CN208379052U CN208379052U CN201821020049.3U CN201821020049U CN208379052U CN 208379052 U CN208379052 U CN 208379052U CN 201821020049 U CN201821020049 U CN 201821020049U CN 208379052 U CN208379052 U CN 208379052U
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- silicon carbide
- carbon paste
- bonder
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- bottom plate
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Abstract
The utility model discloses a kind of bonders of silicon carbide seed piece, including bottom plate, the inside of cavity is fixedly installed with servo motor, the top for watching pedestal is equipped with heating plate, the top of heating plate is equipped with graphite cover, the internal slide of first sliding groove is connected with gag lever post, the top of second supporting plate is equipped with optical microscopy, the other side on bottom plate top is equipped with cabinet, the inside of cabinet offers carbon paste room and briquetting room, a kind of bonder of silicon carbide seed piece of the utility model, the carbon paste being put in using heater plate on graphite cover, servo motor drives pedestal rotation, carbon paste is evenly distributed on graphite cover, after putting seed wafer, recycle the mode of weight pressurization, residual air is exhausted, seed wafer can be closely bonded together with graphite cover, so that thermal energy transmitting is more uniform, caused by improving because of non-uniform temperature Defect formed.
Description
Technical field
The utility model relates to bonder, in particular to a kind of bonder of silicon carbide seed piece belongs to chip and adds
Work technical field.
Background technique
Single-crystal silicon carbide material belongs to the representative of third generation wide bandgap semiconductor materials, has broad stopband, high heat conductance, height
The features such as breakdown electric field, high radiation preventing ability, will be expected to break through the development bottleneck of the first and second generation semiconductor material application technology,
Be mainly used in semiconductor lighting, power electronic devices, laser and detector and other etc. fields, single-crystal silicon carbide at present
With physical vaporous deposition (PVT) for main growth pattern, difficulty is very high for growth, it is necessary to 2100oC temperatures above with it is low
Silicon carbide powder is directly sublimed into gas under pressure ring border, and is transferred to lower temperature region from high-temperature region along temperature gradient
Depositing crystalline at seed crystal.
And the fixed form of seed wafer is sticked together seed wafer and graphite cover with carbon paste based on bonding mode, and
Heating allows carbon paste to solidify, and is fallen off with preventing seed wafer from removing in crystal growing process.The adhesive surface feelings of seed wafer and graphite cover
Condition also affects crystal quality, including the formation of defect, crystalline quality.
Utility model content
The purpose of this utility model is to provide a kind of bonders of silicon carbide seed piece, to solve above-mentioned background technique
The fixed form of the seed wafer of middle proposition is sticked together based on bonding mode, by seed wafer and graphite cover with carbon paste, and is risen
Temperature allows carbon paste to solidify, and is fallen off with preventing seed wafer from removing in crystal growing process.The adhesive surface situation of seed wafer and graphite cover
Also crystal quality is affected, including the formation of defect, the problem of crystalline quality.
To achieve the above object, the utility model provides the following technical solutions: a kind of bonder of silicon carbide seed piece,
Including bottom plate, the inside of the bottom plate offers cavity, and the inside of the cavity is fixedly installed with servo motor, the servo electricity
The output shaft of machine is fixedly connected with pedestal, and the top of the pedestal is equipped with heating plate, and the top of the heating plate is equipped with graphite cover,
The two sides of the pedestal are equipped with bearing piece, and the two sides of the bearing piece offer first sliding groove, and the inside of the first sliding groove is sliding
Dynamic to be connected with gag lever post, the side on the bottom plate top is equipped with sliding rail, slidably connects support rod, the support on the sliding rail
The side of bar bottom is equipped with the first supporting plate, and the top of first supporting plate is equipped with hydraulic cylinder, and the side of the support rod offers
Second sliding slot, the internal slide of the second sliding slot are connected with the second supporting plate, the bottom end of second supporting plate and hydraulic cylinder it is defeated
Shaft is fixedly connected, and the top of second supporting plate is equipped with optical microscopy, and the other side on the bottom plate top is equipped with cabinet, institute
The inside for stating cabinet offers carbon paste room and briquetting room.
As a kind of optimal technical scheme of the utility model, the side of the gag lever post is equipped with positioning screw.
As a kind of optimal technical scheme of the utility model, the side of the bottom plate is equipped with control panel, the control
Panel is equipped with first switch, second switch and third switch, and the servo motor is electrical by first motor and external power supply
Connection, the hydraulic cylinder are electrically connected by second switch and external power supply, and the heating plate passes through third switch and external electricity
Source is electrically connected.
As a kind of optimal technical scheme of the utility model, the inside of the briquetting room is placed with briquetting, the carbon paste
The inside of room is placed with carbon paste.
Compared with prior art, the utility model has the beneficial effects that a kind of silicon carbide seed piece of the utility model is viscous
It attaches together and sets, be put in the carbon paste on graphite cover using heater plate, servo motor drives pedestal rotation, enables carbon paste uniform
Be distributed on graphite cover, after putting seed wafer, recycle the mode of weight pressurization, residual air exhausted, allow seed wafer energy
It is enough to be closely bonded together with graphite cover, so that thermal energy transmitting is more uniform, defect shape caused by improving because of non-uniform temperature
At.
Detailed description of the invention
Fig. 1 is the utility model positive structure schematic；
Fig. 2 is the structural schematic diagram of the bearing piece of the utility model.
In figure: 1, bottom plate；2, cabinet；3, carbon paste room；4, briquetting room；5, pedestal；6, bearing piece；7, gag lever post；8, heating plate；
9, graphite cover；10, optical microscopy；11, the second supporting plate；12, hydraulic cylinder；13, support rod；14, the first supporting plate；15, cavity；
16, sliding rail；17, control panel；18, servo motor.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
The utility model provides a kind of bonder of silicon carbide seed piece, including bottom plate 1, bottom plate referring to FIG. 1-2,
1 inside offers cavity 15, and the inside of cavity 15 is fixedly installed with servo motor 18, and the output shaft of servo motor 18 is fixed to be connected
It is connected to pedestal 5, the top of pedestal 5 is equipped with heating plate 8, and the top of heating plate 8 is equipped with graphite cover 9, and the two sides of pedestal 5 are equipped with branch
Block 6, the two sides of bearing piece 6 offer first sliding groove, and the internal slide of first sliding groove is connected with gag lever post 7, and the one of 1 top of bottom plate
Side is equipped with sliding rail 16, slidably connects support rod 13 on sliding rail 16, and the side of 13 bottom of support rod is equipped with the first supporting plate 14, and first
The top of supporting plate 14 is equipped with hydraulic cylinder 12, and the side of support rod 13 offers second sliding slot, the internal slide connection of second sliding slot
There is the second supporting plate 11, the bottom end of the second supporting plate 11 is fixedly connected with the output shaft of hydraulic cylinder 12, and the top of the second supporting plate 11 is equipped with
The other side of optical microscopy 10,1 top of bottom plate is equipped with cabinet 2, and the inside of cabinet 2 offers carbon paste room 3 and briquetting room 4.
Preferably, the side of gag lever post 7 is equipped with positioning screw, and gag lever post 7 is fixed in bearing piece 6 by rotational positioning screw rod,
Graphite cover 9 is fixed.
Preferably, the side of bottom plate 1 be equipped with control panel 17, control panel 17 be equipped with first switch, second switch and
Third switch, servo motor 18 are electrically connected by first motor and external power supply, hydraulic cylinder 12 by second switch with it is external
Power supply is electrically connected, and heating plate 8 is electrically connected by third switch with external power supply, and servo motor 18 drives pedestal 5 to rotate, and makes
Obtaining carbon paste can be evenly distributed on graphite cover 9.
Preferably, the inside of briquetting room 4 is placed with briquetting, and the inside of carbon paste room 3 is placed with carbon paste, inside briquetting room 4
Briquetting is taken out, is placed on graphite cover 9, residual air is exhausted, seed wafer can be closely bonded together with graphite cover,
So that thermal energy transmitting is more uniform, defect is formed caused by improving because of non-uniform temperature.
When specifically used, graphite cover 9 is placed on heating plate by a kind of bonder of silicon carbide seed piece of the utility model
Gag lever post 7 is slided on 8 tops in bearing piece 6, and gag lever post 7 is fixed in bearing piece 6 by rotational positioning screw rod, carries out to graphite cover 9
Limit is fixed, and takes out carbon paste inside carbon paste room 3, and upper 2~4g carbon paste is dripped at graphite cover center, starts heating plate 8, by graphite
9 are heated to 60 to 120 degree, continue 20 to 40 minutes mobility to increase carbon paste, start servo motor 18, drive graphite cover 9
Rotation, low speed 300 to 500rpm speed rotate 10 to 20 seconds, then are rotated 10 to 20 seconds with high speed 1000 to 2000rpm speed, allow
Carbon paste can be uniformly distributed on graphite cover 9, and alignment seed wafer and 9 central point of graphite cover connect in seed wafer silicon face with graphite cover
Touching bonding, takes out briquetting, and allow to 15kg briquetting to external pressurized from center in laying out 10 in seed wafer inside briquetting room 4
Residual gas in adhesive surface can be smoothly discharged, and support rod 13 is slided on sliding rail 16, drive optical microscopy 10 close
Graphite cover 9, and 10 upper and lower displacement of optical microscopy is driven by hydraulic cylinder 12, the height of optical microscopy 10 is adjusted, light is used
Learn the case where microscope 10 checks adhesive surface, confirm the size and distribution situation and other exceptions of emptying aperture, if adhesive surface all
Normally, carry out carbon paste curing schedule, by seed wafer bond and graphite cover 9 under ar gas environment, in 800 degree to 1000 degree it
Between carry out hot setting reaction, complete cured seed wafer and graphite cover 9 can be normally used for growing silicon carbice crystals.
In the description of the present invention, it should be understood that term " coaxial ", " bottom ", " one end ", " top ", " in
The orientation of the instructions such as portion ", " other end ", "upper", " side ", " top ", "inner", " front ", " center ", " both ends " or position are closed
System is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of describing the present invention and simplifying the description, rather than
The device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot
It is construed as a limitation of the present invention.
In addition, term " first ", " second ", " third ", " the 4th " are used for description purposes only, and should not be understood as instruction or
It implies relative importance or implicitly indicates the quantity of indicated technical characteristic, define " first ", " second ", " the as a result,
Three ", the feature of " the 4th " can explicitly or implicitly include at least one of the features.
In the present invention unless specifically defined or limited otherwise, term " installation ", " setting ", " connection ", " Gu
Calmly ", the terms such as " being screwed on " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；
It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, can also indirectly connected through an intermediary, it can be with
It is the interaction relationship of the connection or two elements inside two elements, unless otherwise restricted clearly, for this field
For those of ordinary skill, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (4)
1. a kind of bonder of silicon carbide seed piece, including bottom plate (1), which is characterized in that the inside of the bottom plate (1) opens up
Have cavity (15), the inside of the cavity (15) is fixedly installed with servo motor (18), the output shaft of the servo motor (18)
It is fixedly connected with pedestal (5), the top of the pedestal (5) is equipped with heating plate (8), and the top of the heating plate (8) is equipped with graphite
It covers (9), the two sides of the pedestal (5) are equipped with bearing piece (6), and the two sides of the bearing piece (6) offer first sliding groove, and described the
The internal slide of one sliding slot is connected with gag lever post (7), and the side on bottom plate (1) top is equipped with sliding rail (16), the sliding rail
(16) it being slidably connected on support rod (13), the side of support rod (13) bottom is equipped with the first supporting plate (14), and described first
The top of supporting plate (14) is equipped with hydraulic cylinder (12), and the side of the support rod (13) offers second sliding slot, the second sliding slot
Internal slide be connected with the second supporting plate (11), the output shaft of the bottom end of second supporting plate (11) and hydraulic cylinder (12) is fixed to be connected
It connects, the top of second supporting plate (11) is equipped with optical microscopy (10), and the other side on bottom plate (1) top is equipped with cabinet
(2), the inside of the cabinet (2) offers carbon paste room (3) and briquetting room (4).
2. a kind of bonder of silicon carbide seed piece according to claim 1, it is characterised in that: the gag lever post (7)
Side be equipped with positioning screw.
3. a kind of bonder of silicon carbide seed piece according to claim 1, it is characterised in that: the bottom plate (1)
Side is equipped with control panel (17), and the control panel (17) is equipped with first switch, second switch and third switch, described to watch
It takes motor (18) to be electrically connected by first motor and external power supply, the hydraulic cylinder (12) passes through second switch and external power supply
It is electrically connected, the heating plate (8) is electrically connected by third switch with external power supply.
4. a kind of bonder of silicon carbide seed piece according to claim 1, it is characterised in that: the briquetting room (4)
Inside be placed with briquetting, the inside of the carbon paste room (3) is placed with carbon paste.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821020049.3U CN208379052U (en) | 2018-06-29 | 2018-06-29 | A kind of bonder of silicon carbide seed piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821020049.3U CN208379052U (en) | 2018-06-29 | 2018-06-29 | A kind of bonder of silicon carbide seed piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208379052U true CN208379052U (en) | 2019-01-15 |
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ID=64964976
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| CN201821020049.3U Active CN208379052U (en) | 2018-06-29 | 2018-06-29 | A kind of bonder of silicon carbide seed piece |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112725892A (en) * | 2020-12-18 | 2021-04-30 | 国宏中宇科技发展有限公司 | Method for improving bonding quality of silicon carbide seed crystal |
| CN113151896A (en) * | 2021-04-13 | 2021-07-23 | 露笑新能源技术有限公司 | Seed crystal heating and pressurizing device and using method thereof |
| CN113550002A (en) * | 2021-09-18 | 2021-10-26 | 浙江大学杭州国际科创中心 | Method and structure for fixing silicon carbide seed crystal |
| CN114657633A (en) * | 2022-02-25 | 2022-06-24 | 江苏集芯半导体硅材料研究院有限公司 | Seed crystal sticking device |
-
2018
- 2018-06-29 CN CN201821020049.3U patent/CN208379052U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112725892A (en) * | 2020-12-18 | 2021-04-30 | 国宏中宇科技发展有限公司 | Method for improving bonding quality of silicon carbide seed crystal |
| CN113151896A (en) * | 2021-04-13 | 2021-07-23 | 露笑新能源技术有限公司 | Seed crystal heating and pressurizing device and using method thereof |
| CN113151896B (en) * | 2021-04-13 | 2023-06-13 | 露笑新能源技术有限公司 | Seed crystal heating and pressurizing device and application method thereof |
| CN113550002A (en) * | 2021-09-18 | 2021-10-26 | 浙江大学杭州国际科创中心 | Method and structure for fixing silicon carbide seed crystal |
| CN114657633A (en) * | 2022-02-25 | 2022-06-24 | 江苏集芯半导体硅材料研究院有限公司 | Seed crystal sticking device |
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