CN114657633A - Seed crystal sticking device - Google Patents
Seed crystal sticking device Download PDFInfo
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- CN114657633A CN114657633A CN202210178071.5A CN202210178071A CN114657633A CN 114657633 A CN114657633 A CN 114657633A CN 202210178071 A CN202210178071 A CN 202210178071A CN 114657633 A CN114657633 A CN 114657633A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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Abstract
The invention discloses a seed crystal sticking device, which comprises: the first fitting part defines a first mounting position suitable for mounting a first graphite cover, a first seed crystal is arranged on the first graphite cover, and a first adhesive layer is arranged between the first graphite cover and the first seed crystal; the second fitting piece and the first fitting piece define a closed cavity and abut against the first seed crystal; and the vacuumizing device is communicated with the cavity and used for applying negative pressure to the cavity so as to enable the first graphite cover and the first seed crystal to be tightly connected under the bonding of the first adhesive layer. According to the seed crystal sticking device provided by the invention, the problem of uneven pressure during sticking of the seed crystal in the related technology is solved, and the situations of dislocation of the seed crystal and the graphite cover and macroscopic defects can be avoided.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a seed crystal adhering device.
Background
In the related art of crystal growth such as silicon carbide, it is necessary to place a carrier (e.g., a graphite lid) to which a seed crystal is attached on the top of a crystal growth furnace, and heat and gasify a raw material powder to deposit on the surface of the seed crystal, thereby growing a crystal along the seed crystal. The sticking quality of the seed crystal and the bearing device directly influences the growth quality of the crystal, for example, in the growth process of the silicon carbide crystal, the seed crystal is influenced by local stress due to the non-uniformity of the pressure applied in the sticking process of the seed crystal and the graphite cover, the dislocation of the seed crystal and the graphite cover and the generation of macroscopic defects are easily caused, and the growth quality of the silicon carbide crystal is influenced.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, an object of the present invention is to provide a seed crystal sticking apparatus, which solves the problem of uneven pressure during sticking of seed crystals in the related art, and can avoid the situations of dislocation of seed crystals and graphite covers and macroscopic defects.
The seed crystal sticking device according to the embodiment of the invention comprises: the first fitting piece defines a first mounting position suitable for mounting a first graphite cover, a first seed crystal is arranged on the first graphite cover, and a first adhesive layer is arranged between the first graphite cover and the first seed crystal; the second fitting part and the first fitting part define a closed cavity and abut against the first seed crystal; and the vacuumizing device is communicated with the cavity and applies negative pressure to the cavity so as to tightly connect the first graphite cover with the first seed crystal under the bonding of the first adhesive layer.
According to the seed crystal sticking device provided by the embodiment of the invention, the second matching piece is abutted with the first seed crystal, and the vacuumizing device applies negative pressure to the closed cavity defined between the second matching piece and the first matching piece, so that the second matching piece can uniformly apply pressure to the first seed crystal, the first graphite cover and the first seed crystal are ensured to be tightly connected under the bonding of the first adhesive layer, the sticking is ensured to be reliable, the first seed crystal and the first graphite cover are uniformly pressed, the problem of nonuniform pressing during the sticking of the seed crystal in the related technology is solved, the seed crystal sticking device is not easily influenced by local stress, the conditions of dislocation and macroscopic defect of the first seed crystal and the first graphite cover are avoided, and the growth quality of the first seed crystal is effectively improved.
In addition, the seed crystal attachment device according to the above embodiment of the present invention may further have the following additional technical features:
according to the seed crystal sticking device provided by some embodiments of the invention, the first mounting position is provided with a first mounting groove, and the first graphite cover is arranged in the first mounting groove and is in threaded connection with the first mounting groove.
According to some embodiments of the invention, a first channel is provided on a bottom wall of the first mounting groove to communicate the cavity and the first mounting groove.
According to some embodiments of the invention, the first graphite cover is provided with a second passage penetrating in a thickness direction thereof, the second passage communicating with the first passage.
According to some embodiments of the invention, a graphite paper is disposed between the first seed crystal and the first graphite cover.
According to some embodiments of the invention, the seed crystal attaching apparatus further comprises: and the pressure detection device extends into the cavity and is used for detecting the pressure in the cavity.
According to some embodiments of the invention, a centerline of the cavity coincides with a centerline of the first fitting piece, the first fitting piece defining a plurality of the first mounting locations uniformly in a circumferential direction of the cavity.
According to some embodiments of the invention, a surface of the first fitting part facing the second fitting part is provided with a first groove, a surface of the second fitting part facing the first fitting part is provided with a second groove, and the first groove and the second groove are oppositely arranged to define the cavity together.
According to some embodiments of the invention, the cross-sectional area of the second groove is larger than the cross-sectional area of the first groove.
According to some embodiments of the invention, the seed crystal attaching apparatus further comprises: and the locking assembly is arranged at the outer edges of the first fitting piece and the second fitting piece and is used for connecting and fixing the second fitting piece and the first fitting piece.
According to some embodiments of the invention, the second fitting part and the first fitting part are provided with a pressing tool corresponding to the first seed crystal, the pressing tool is abutted against the first seed crystal, and an abutting surface of the pressing tool and the first seed crystal is a smooth plane.
According to some embodiments of the invention, the second fitting part is provided with a second seed crystal corresponding to the first seed crystal, the second seed crystal abuts against the first seed crystal, the second seed crystal is arranged on a second graphite cover, the second graphite cover is arranged at a second installation position defined by the second fitting part, a second adhesive layer is arranged between the second graphite cover and the second seed crystal, and negative pressure is applied to the cavity through the vacuum pumping device, so that the second graphite cover and the second seed crystal are tightly connected under adhesion of the second adhesive layer.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic structural view of a seed crystal attachment apparatus according to a first embodiment of the present invention;
FIG. 2 is a schematic structural view of a seed crystal attaching apparatus according to a second embodiment of the present invention;
fig. 3 is a partial structural schematic view of a seed crystal attachment apparatus according to a second embodiment of the present invention;
FIG. 4 is a top view of a first fitting according to an embodiment of the present invention;
FIG. 5 is a top view of a first fitting according to a third embodiment of the invention;
FIG. 6 is a schematic structural view of a graphite lid and seed crystal according to an embodiment of the invention;
fig. 7 is a schematic structural view of a locking assembly according to an embodiment of the present invention.
Reference numerals:
a seed crystal sticking apparatus 100; a first graphite cover 200; a first seed crystal 300; graphite paper 400; a second graphite cover 500; a second seed crystal 600;
a first fitting member 10; a first mounting groove 11; a first channel 12; a communication port 13; a first flange 14;
a second fitting member 20; a presser 21; a seal ring 22; a second flange 23; a second mounting groove 24; a third channel 25;
a cavity 30; a recess 31; a first groove 301; a second recess 302;
a vacuum-pumping device 40; a control assembly 41; a flange 42; a connection pipe 43;
a second channel 50; a fourth passage 51;
a first heating device 60; a second heating device 61;
a pressure detection device 70; a buckle 71;
a locking assembly 80; a locking member 81; a fastener 82; the locking groove 811.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, but are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the invention.
In the description of the present invention, "a first feature" or "a second feature" may include one or more of the features, and "a plurality" means two or more, and the first feature may be "on" or "under" the second feature, and may include the first and second features being in direct contact, or may include the first and second features being not in direct contact but being in contact with another feature therebetween, and the first feature being "on", "above" and "above" the second feature may include the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature is higher in level than the second feature.
A seed crystal attachment apparatus 100 according to an embodiment of the present invention will be described below with reference to the accompanying drawings.
Referring to fig. 1 and 2, a seed crystal attachment apparatus 100 according to an embodiment of the present invention may include: a first fitting part 10.
Specifically, the first fitting member 10 defines a first mounting position where the first graphite cover 200 can be mounted, so that the first graphite cover 200 is conveniently fixed, the position of the first graphite cover 200 is ensured to be accurate, and the first fitting member is not easy to move. Set up first seed crystal 300 on first graphite lid 200, be equipped with first gluing layer between first graphite lid 200 and the first seed crystal 300, can carry out prepositioning between first graphite lid 200 and the first seed crystal 300 through first gluing layer, be convenient for ensure the relative position of first seed crystal 300 and first graphite lid 200, position accuracy when ensureing that first seed crystal 300 further pastes. For example, the first seed crystal 300 and the first graphite cover 200 may be coupled by a carbon-like paste.
In addition, as shown in fig. 1 and 2, the seed crystal attaching device 100 may further include a second fitting 20 and a vacuum extractor 40, the second fitting 20 and the first fitting 10 define a closed cavity 30, and the second fitting 20 abuts against the first seed crystal 300, the vacuum extractor 40 is communicated with the cavity 30, and negative pressure may be applied to the cavity 30, thereby forming a negative pressure region in the cavity 30, so that the second fitting 20 may move toward the first fitting 10, and the first graphite cover 200 and the first seed crystal 300 may be tightly connected by adhesion of the first adhesive layer through reduction of the distance between the second fitting 20 and the first fitting 10, thereby ensuring reliable attachment of the first seed crystal 300 and the first graphite cover 200.
Meanwhile, negative pressure is applied to the cavity 30 through the vacuumizing device 40, so that the second matching part 20 can uniformly apply pressure, the first seed crystal 300 and the first graphite cover 200 are uniformly pressed and are not easily affected by local stress, the problem of nonuniform pressing when the seed crystals are pasted in the related art is solved, the conditions of pasting dislocation and macroscopic defects of the first seed crystal 300 and the first graphite cover 200 are avoided, better flatness is ensured, and the growth quality of the first seed crystal 300 is effectively improved.
According to the seed crystal sticking device 100 provided by the embodiment of the invention, the second fitting part 20 abuts against the first seed crystal 300, the vacuum pumping device 40 applies negative pressure to the closed cavity 30 defined between the second fitting part 20 and the first fitting part 10, so that the second fitting part 20 can uniformly apply pressure to the first seed crystal 300, the first graphite cover 200 and the first seed crystal 300 are ensured to be tightly connected under the bonding of the first adhesive layer, the sticking is ensured to be reliable, the first seed crystal 300 and the first graphite cover 200 are uniformly pressed, the problem of uneven pressing during seed crystal sticking in the related technology is solved, the seed crystal sticking device is not easily affected by local stress, the situation that the first seed crystal 300 and the first graphite cover 200 are dislocated and have macroscopic defects is avoided, and the growth quality of the first seed crystal 300 is effectively improved.
According to some embodiments of the present invention, as shown in fig. 1 to 3, the first fitting part 10 is provided with a first mounting groove 11, and the first graphite cover 200 can be disposed in the first mounting groove 11, so as to fix the first graphite cover 200 on the first fitting part 10, ensure that the first graphite cover 200 is stably mounted, avoid the problems of inaccurate bonding position between the first seed crystal 300 and the first graphite cover 200 or uneven pressure caused by the deviation of the first graphite cover 200 during bonding, ensure that the first seed crystal 300 and the first graphite cover 200 are reliably bonded, and effectively improve the growth quality of the first seed crystal 300.
In addition, first mounting groove 11 and first graphite lid 200 can be through threaded connection, ensure that first graphite lid 200 is firm to be installed in first mounting groove 11, difficult emergence is removed, avoid leading to the fact first graphite lid 200 whereabouts scheduling problem after pressurizing to first seed crystal 300, and first graphite lid 200 is convenient for place and take out first graphite lid 200 in first mounting groove 11 through the thread fastening, and it is more convenient to use, is favorable to improving production efficiency. Meanwhile, the first graphite cover 200 can be moved in the first mounting groove 11 by a screw thread, so that the first graphite cover 200 can select a proper mounting position, which facilitates the matching of the second matching member 20 and the first matching member 10.
In some embodiments, the inner wall of the first mounting groove 11 may be provided with an internal thread, and the circumferential wall of the first graphite cover 200 may be provided with an external thread, so that the first graphite cover 200 can be mounted in the first mounting groove 11 by matching the internal thread with the external thread, thereby ensuring that the first graphite cover 200 is stably mounted and facilitating mounting and dismounting of the first graphite cover 200.
In some embodiments of the present invention, as shown in fig. 1 to 3, the central line of the cavity 30 coincides with the central line of the first fitting element 10, the first fitting element 10 uniformly defines a plurality of first mounting positions along the circumferential direction of the cavity 30, and a plurality of first graphite covers 200 can be mounted through the plurality of first mounting positions, so that when the seed crystal pasting device 100 is used once, a plurality of first seed crystals 300 can be pasted, which is beneficial to improving the production efficiency. Meanwhile, the cavity 30 can be located at the center of the first fitting piece 10, so that the first graphite covers 200 located at a plurality of first installation positions and the first seed crystals 300 are uniformly pressed, reliable adhesion is ensured, and the growth quality of the first seed crystals 300 is effectively improved.
In the embodiment of the present invention, the number of the first installation positions may be flexibly set according to actual situations, for example, the number of the first installation positions may be four as shown in fig. 3, or may be two, three, five, six or more, which is within the protection scope of the present invention.
In the related technology, when the seed crystal is pasted, air holes are easily generated between the seed crystal and the graphite cover, and the air holes easily cause growth defects on the seed crystal, so that the crystal penetrates through the crystal in the crystal growth process.
Therefore, in some embodiments of the present invention, as shown in fig. 1 and fig. 2, the first channel 12 is disposed on the bottom wall of the first installation groove 11, the first channel 12 communicates the cavity 30 and the first installation groove 11, and the vacuum pumping device 40 can apply negative pressure between the first graphite cover 200 and the first seed crystal 300 through the first channel 12, so that gas between the first seed crystal 300 and the first graphite cover 200 can be discharged through the first channel 12, thereby effectively avoiding gas holes from being generated between the first graphite cover 200 and the first seed crystal 300, ensuring good adhesion effect between the first seed crystal 300 and the first graphite cover 200, and being beneficial to ensuring subsequent high-quality crystal growth.
In some embodiments, as shown in fig. 1 and 2, the communication port 13 between the first passage 12 and the first installation groove 11 may be located at the center of the bottom wall of the first installation groove 11, which can facilitate the vacuum pumping device 40 to apply negative pressure between the first graphite cover 200 and the first seed crystal 300 through the first passage 12; or, the communication port 13 may be located at the outer edge of the bottom wall of the first mounting groove 11, so that the vacuum pumping device 40 applies negative pressure between the first graphite cover 200 and the first seed crystal 300 more uniformly, and the adhesive layer between the first graphite cover 200 and the first seed crystal 300 can be prevented from flowing out due to the influence of the negative pressure.
It should be noted that, for convenience of description, the orientations of the "lower", "upper", "front", and "rear" in the present invention are based on the orientation relationship shown in the drawings, and are not limited to the orientation during the actual application.
In some embodiments, the first graphite cover 200 may be a porous graphite member, so that the gas between the first seed crystal 300 and the first graphite cover 200 can conveniently penetrate out of the first graphite cover 200, the gas can more conveniently flow out, which is beneficial to avoiding generation of pores between the first graphite cover 200 and the first seed crystal 300, ensuring good adhesion effect between the first seed crystal 300 and the first graphite cover 200, and ensuring subsequent high-quality crystal growth.
According to some embodiments of the present invention, as shown in fig. 6, the first graphite cover 200 may be provided with the second passage 50, and in a thickness direction (for example, an up-down direction shown in fig. 1) of the first graphite cover 200, the second passage 50 may penetrate through the first graphite cover 200, and the second passage 50 is communicated with the first passage 12, so that the vacuum pumping device 40 may apply a negative pressure between the first graphite cover 200 and the first seed crystal 300 through the first passage 12 and the second passage 50, and gas between the first seed crystal 300 and the first graphite cover 200 is convenient to flow out through the second passage 50, thereby effectively avoiding generation of pores between the first seed crystal 300 and the first graphite cover 200, ensuring a better and smoother adhesion effect between the first seed crystal 300 and the first graphite cover 200, and being beneficial to ensuring subsequent high-quality crystal growth.
In some embodiments, the first adhesive layer between the first graphite cover 200 and the first seed crystal 300 may be heated to ensure that the first graphite cover 200 and the first seed crystal 300 are reliably connected.
In the embodiment of the present invention, the specific heating manner of the first adhesive layer can be set according to actual conditions. For example, the first adhesive layer may be heated externally, and then placed in the seed crystal attachment apparatus 100 after being heated.
For example, in some embodiments, as shown in fig. 1 and fig. 2, the seed crystal attaching device 100 further includes a first heating device 60, the first heating device 60 is disposed on the first fitting 10, and the first heating device 60 is located on a side (e.g., a lower side shown in fig. 1) of the first graphite cover 200 away from the first seed crystal 300, and the first heating device 60 may be configured to heat the first adhesive layer between the first graphite cover 200 and the first seed crystal 300, so as to facilitate curing between the first seed crystal 300 and the first graphite cover 200, so that the first seed crystal 300 may be stably attached to the first graphite cover 200, ensure that the first seed crystal 300 is reliably connected to the first graphite cover 200, and enable continuity of the attaching, curing and sintering processes of the first seed crystal 300, which is beneficial to improving the attaching efficiency.
In some embodiments, the first heating device 60 may be a thermal resistor, which has high mechanical strength, better high temperature and pressure resistance, small size, less space occupation, and low cost.
In some embodiments, as shown in fig. 1 and 2, the number of the first heating devices 60 may be multiple, and multiple first heating devices 60 are disposed on the first fitting 10, so as to facilitate the curing between the first seed crystal 300 and the first graphite cover 200, and make the curing between the first seed crystal 300 and the first graphite cover 200 more efficient.
In the embodiment of the present invention, the number of the first heating devices 60 can be flexibly set according to actual situations, for example, the number of the first heating devices 60 can be four as shown in fig. 1, and can also be two, three, five, six or more, which is within the protection scope of the present invention.
In some embodiments of the first fitting member 10 having the first mounting groove 11, as shown in fig. 1 and fig. 2, the first heating device 60 may be located on the bottom wall of the first mounting groove 11, so as to facilitate mounting of the first heating device 60, and the first heating device 60 has a better heating effect on the first adhesive layer between the first graphite cover 200 and the first seed crystal 300, which is beneficial to curing between the first seed crystal 300 and the first graphite cover 200.
In some embodiments of the present invention, as shown in fig. 1-3, the seed crystal attaching apparatus 100 further includes a pressure detecting device 70, the pressure detecting device 70 extends into the cavity 30, so that the pressure detecting device 70 can detect the pressure in the cavity 30, thereby facilitating the detection of the pressure in the cavity 30, accurately obtaining the pressure in the cavity 30, facilitating the control of the pressure in the cavity 30 by detecting the pressure in the cavity 30, calculating the pressure condition of the surface of the first seed crystal 300, thereby controlling the acting force of the surface of the first seed crystal 300, avoiding the problem of uneven pressure of the first seed crystal 300, and satisfying the pressure requirement of the cavity 30.
In some embodiments, as shown in fig. 1-3, the pressure detecting device 70 may include a detecting end and a pressure gauge, one end of the detecting end is connected to the pressure gauge, the other end of the detecting end extends into the cavity 30, the pressure gauge detects the pressure in the cavity 30 through the detecting end, and the pressure gauge is connected to the detecting end through a buckle 71, so that the pressure gauge and the detecting end can be conveniently detached and replaced.
In some embodiments, as shown in fig. 2 and 3, the second fitting 20 is provided with a second seed crystal 600, the second seed crystal 600 corresponds to the first seed crystal 300, the second seed crystal 600 abuts against the first seed crystal 300, the second seed crystal 600 is disposed on the second graphite cover 500, and the second graphite cover 500 is disposed at a second mounting position defined by the second fitting 20, so that the second graphite cover 500 is conveniently fixed, and the second graphite cover 500 is ensured to be accurate in position and not easy to move. Be equipped with the second gluing layer between second graphite lid 500 and the second seed crystal 600, can carry out prepositioning between second graphite lid 500 and the second seed crystal 600 through the second gluing layer, be convenient for ensure the relative position of second graphite lid 500 and second seed crystal 600, position accuracy when ensureing that second seed crystal 600 further pastes.
In addition, negative pressure is applied to the cavity 30 through the vacuum pumping device 40, thereby, a negative pressure region is formed in the cavity 30, so that the second fitting piece 20 can move towards the first fitting piece 10, the distance between the second fitting piece 20 and the first fitting piece 10 is reduced, the first graphite cover 200 and the first seed crystal 300 can be tightly connected under the adhesion of the first adhesive layer, the second graphite cover 500 and the second seed crystal 600 are tightly connected under the adhesion of the second adhesive layer, and the reliable adhesion of the first seed crystal 300 and the first graphite cover 200 as well as the second graphite cover 500 and the second seed crystal 600 is ensured, therefore, the seed crystal adhesion device 100 can realize the adhesion of the second seed crystal 600 and the first seed crystal 300 on the second fitting piece 20 and the first fitting piece 10 at the same time, and the adhesion efficiency is effectively improved.
According to some embodiments of the present invention, as shown in fig. 2 and fig. 3, the first fitting element 10 and the second fitting element 20 may have the same structure, and the second graphite cover 500 on the second fitting element 20 and the first graphite cover 200 on the first fitting element 10 may have the same structure, so that the first fitting element 10, the second fitting element 20, the second graphite cover 500 and the first graphite cover 200 may be conveniently manufactured, which is beneficial to reducing the production cost, and is beneficial to ensuring the relative positions of the first fitting element 10 and the second fitting element 20, and ensuring that the second graphite cover 500 of the second fitting element 20 and the first graphite cover 200 of the first fitting element 10 are arranged oppositely, so that the first seed crystal 300 and the second seed crystal 600 are well adhered.
In some embodiments, as shown in fig. 1 to fig. 3, the second fitting part 20 is provided with a second mounting groove 24, and the second graphite cover 500 can be disposed in the second mounting groove 24, so as to fix the second graphite cover 500 on the second fitting part 20, ensure that the second graphite cover 500 is stably mounted, avoid the problems of inaccurate or uneven pressure between the second seed crystal 600 and the second graphite cover 500 due to the deviation of the second graphite cover 500 during the adhering process, ensure that the second seed crystal 600 and the second graphite cover 500 are reliably adhered, and effectively improve the growth quality of the second seed crystal 600.
In addition, second mounting groove 24 and second graphite lid 500 can pass through threaded connection, ensure that second graphite lid 500 is firm to be installed in second mounting groove 24, difficult emergence is removed, avoid causing second graphite lid 500 whereabouts scheduling problem after 600 pressurizations of second seed crystal, and second graphite lid 500 is convenient for place and take out second graphite lid 500 in second mounting groove 24 through the thread fastening, and it is more convenient to use, is favorable to improving production efficiency. Meanwhile, the second graphite cover 500 may be moved in the second mounting groove 24 by a screw thread, so that the second graphite cover 500 may select a suitable mounting position for the second fitting member 20 to be fitted with the first fitting member 10.
According to some embodiments of the present invention, as shown in fig. 1 to 3, the central line of the cavity 30 coincides with the central line of the second fitting 20, the second fitting 20 uniformly defines a plurality of second mounting positions along the circumferential direction of the cavity 30, and a plurality of second graphite covers 500 can be mounted on the plurality of second mounting positions, so that when the seed crystal pasting device 100 is used once, a plurality of second seed crystals 600 can be pasted, which is beneficial to improving the production efficiency. Meanwhile, the cavity 30 can be located at the center of the second fitting piece 20, so that the second graphite covers 500 and the second seed crystals 600 located at a plurality of second mounting positions are uniformly pressed, reliable adhesion is ensured, and the growth quality of the second seed crystals 600 is effectively improved.
In the embodiment of the present invention, the number of the second mounting positions can be flexibly set according to actual situations, for example, the number of the second mounting positions can be four as shown in fig. 3, and can also be two, three, five, six or more, which are all within the protection scope of the present invention.
In some embodiments, as shown in fig. 2, a third channel 25 is provided on the bottom wall of the second mounting groove 24, the third channel 25 communicates the cavity 30 with the second mounting groove 24, and the vacuum extractor 40 can also apply negative pressure between the second graphite cover 500 and the second seed crystal 600 through the third channel 25, so that gas between the second graphite cover 500 and the second seed crystal 600 can be discharged through the third channel 25, thereby effectively avoiding generation of pores between the second graphite cover 500 and the second seed crystal 600, ensuring good adhesion effect between the second graphite cover 500 and the second seed crystal 600, and being beneficial to ensuring subsequent high-quality crystal growth.
In some embodiments of the present invention, as shown in fig. 6, the second graphite cover 500 may be provided with a fourth channel 51, and in a thickness direction (for example, an up-down direction shown in fig. 1) of the second graphite cover 500, the fourth channel 51 may penetrate through the second graphite cover 500, and the fourth channel 51 is communicated with the third channel 25, so that the vacuum pumping device 40 may apply a negative pressure between the second graphite cover 500 and the second seed crystal 600 through the third channel 25 and the fourth channel 51, and gas between the second graphite cover 500 and the second seed crystal 600 is convenient to flow out through the fourth channel 51, thereby effectively avoiding generation of pores between the second graphite cover 500 and the second seed crystal 600, ensuring a better and smoother adhesion effect between the second graphite cover 500 and the second seed crystal 600, and being beneficial to ensuring subsequent high-quality crystal growth.
In some embodiments, as shown in fig. 2, the seed crystal attaching device 100 further includes a second heating device 61, the second heating device 61 is disposed on the second fitting 20, and the second heating device 61 is located on a side (e.g., the upper side shown in fig. 1) of the second graphite cover 500 far from the second seed crystal 600, the second heating device 61 may be used to heat a second adhesive layer between the second graphite cover 500 and the second seed crystal 600, so as to facilitate curing between the second graphite cover 500 and the second seed crystal 600, so that the second seed crystal 600 may be stably attached to the second graphite cover 500, ensure that the second graphite cover 500 is reliably connected to the second seed crystal 600, and continuity of the attaching, curing and sintering processes of the second seed crystal 600 can be achieved, which is beneficial to improving the attaching efficiency.
In some embodiments, as shown in fig. 6, a graphite paper 400 may be disposed between the second seed crystal 600 and the second graphite cover 500, the graphite paper 400 may prevent the second adhesive layer between the second seed crystal 600 and the second graphite cover 500 from seeping out of the second graphite cover 500, and the graphite paper 400 may prevent the second seed crystal 600 from being contaminated and damaged, thereby ensuring that the second seed crystal 600 is well adhered.
In some embodiments of the present invention, as shown in fig. 1-5, a surface (e.g., the upper surface shown in fig. 1) of the first fitting member 10 facing the second fitting member 20 is provided with a groove 31, and an inner wall of the groove 31 and a surface (e.g., the lower surface shown in fig. 1) of the second fitting member 20 facing the first fitting member 10 can jointly define a cavity 30, so that the vacuum device 40 can apply negative pressure to the cavity 30, so that the second fitting member 20 moves towards the first fitting member 10, and the adhesion of the first seed crystal 300 is ensured.
It should be noted that the surface of the second fitting member 20 facing the first fitting member 10 may be a lower surface of the second fitting member 20 as shown in fig. 1, and the lower surface of the second fitting member 20 and the inner wall of the groove 31 of the first fitting member 10 may jointly define the cavity 30; or, as shown in fig. 2, the second fitting member 20 may also be provided with a groove 31, an inner wall of the groove 31 of the second fitting member 20 may be formed as a surface of the second fitting member 20 facing the first fitting member 10, and the inner wall of the groove 31 of the first fitting member 10 and the inner wall of the groove 31 of the second fitting member 20 may jointly define the cavity 30, both of which may be flexibly arranged according to actual situations, so as to meet different use requirements.
In some embodiments, as shown in fig. 2 and fig. 3, a surface of the first fitting member 10 facing the second fitting member 20 may be provided with a first groove 301, a surface of the second fitting member 20 facing the first fitting member 10 may be provided with a second groove 302, and the first groove 301 and the second groove 302 are oppositely arranged, so that the first groove 301 and the second groove 302 may jointly define the cavity 30, which may make the range of the cavity 30 larger, facilitate the vacuum pumping device 40 applying negative pressure to the cavity 30, facilitate the increase of pressure, make the vacuum pumping device 40 have better vacuum pumping effect, and ensure that the first seed crystal 300 is more uniformly compressed.
According to some embodiments of the present invention, as shown in fig. 2 and 3, the cross-sectional area of the second groove 302 is larger than the cross-sectional area of the first groove 301, so that the pressure of the second fitting 20 can be larger than the pressure of the first fitting 10, which is beneficial to increasing the pressure in the first groove 301 and the second groove 302, so that the vacuum extractor 40 can apply negative pressure to the cavity 30 more quickly, the efficiency of the vacuum extractor 40 applying negative pressure to the cavity 30 is beneficial to increasing, and the efficiency of attaching the first seed crystal 300 is more efficient.
In some embodiments, as shown in fig. 1 and fig. 2, the seed crystal attachment apparatus 100 may include a flange 42 and a connecting pipe 43, the first fitting 10 and the vacuum extractor 40 may be fixed by the flange 42, so as to ensure that the first fitting 10 and the vacuum extractor 40 are reliably connected, and the connecting pipe 43 may implement the remote connection between the first fitting 10 and the vacuum extractor 40, so as to facilitate the selection of the placement position of the vacuum extractor 40, and the connection structure is simple, which is beneficial to reducing the production cost.
In some embodiments, as shown in fig. 1 and fig. 2, the flange 42 and the connecting pipe 43 may be connected by a buckle 71, so as to ensure that the flange 42 and the connecting pipe 43 are reliably connected, and are convenient to detach, maintain and the like; or the connecting pipe 43 and the vacuum-pumping device 40 can be connected through the buckle 71, so that the connecting pipe 43 and the vacuum-pumping device 40 are reliably connected, and the disassembly, the maintenance and the like are convenient; or, the connection pipe 43 can be connected with the vacuum extractor 40 and the flange 42 through the buckle 71, so that the connection of the connection pipe 43 with the vacuum extractor 40 and the flange 42 is ensured to be reliable, and the disassembly, the maintenance and the like are convenient.
In some embodiments, as shown in fig. 1 and fig. 2, the sealing ring 22 may be disposed inside the buckle 71, which is beneficial to ensure reliable structural connection of the interconnection, good sealing effect, effectively preventing external air from entering through the joint, and ensuring good negative pressure application effect of the vacuum pumping device 40 to the cavity 30.
In some embodiments, the connection tube 43 may be a corrugated tube, the corrugated tube may be flexibly connected to the first fitting member 10 and the vacuum pumping device 40, the connection is convenient, the reliability is high, and the corrugations of the corrugated tube may be mutually compressed under the action of pressure, so as to facilitate the installation.
In some embodiments of the present invention, as shown in FIG. 1, the first mating member 10 and the second mating member 20 may not be identical in structure. The second fitting piece 20 is provided with a pressing tool 21, the pressing tool 21 corresponds to the first seed crystal 300 on the first fitting piece 10, the pressing tool 21 abuts against the first seed crystal 300, the abutting surface of the pressing tool 21 and the first seed crystal 300 is a smooth plane, the second fitting piece 20 is in contact with the first seed crystal 300 through the pressing tool 21 and applies pressure, polishing of the surface of the first seed crystal 300 is facilitated, scratches on the surface of the first seed crystal 300 in the pasting process are avoided, and the pasting effect of the first seed crystal 300 is ensured.
In some embodiments where the first mounting groove 11 is multiple, as shown in fig. 1, the plurality of pressing tools 21 may be multiple, the plurality of pressing tools 21 correspond to the plurality of first mounting positions one by one, and the plurality of pressing tools 21 can contact and press the first seed crystals 300 on the plurality of first graphite covers 200, so that the sticking efficiency of the first seed crystals 300 is effectively improved, and the polishing of the surfaces of the first seed crystals 300 is ensured.
In some embodiments, the presser 21 may be a silicon carbide member, a graphite member, or the like, which can ensure the surface polishing of the presser 21, prevent the surface of the first seed crystal 300 from being scratched when the presser 21 is in contact with the first seed crystal 300, and ensure that the surface of the first seed crystal 300 maintains a high-quality polishing. For example, the presser 21 may be a silicon carbide plate, or the presser 21 may be a polished graphite ring or the like.
In some embodiments of the present invention, a surface (e.g., the lower surface shown in fig. 1) of the presser 21 facing the first fitting 10 may be coated with graphite paper, and the presser 21 contacts the first seed crystal 300 through the graphite paper, so as to prevent the first seed crystal 300 from being contaminated, further avoid the surface of the first seed crystal 300 from being damaged, effectively avoid scratches on the surface of the first seed crystal 300, ensure the surface of the first seed crystal 300 to be polished, and achieve a good adhering effect of the first seed crystal 300.
According to some embodiments of the present invention, as shown in fig. 1-3, the outer edge of the surface of the second fitting member 20 facing the first fitting member 10 may be provided with a sealing ring 22, the sealing ring 22 is used to seal the gap between the second fitting member 20 and the first fitting member 10, so as to ensure reliable sealing between the second fitting member 20 and the first fitting member 10, so as to define a sealed cavity 30, ensure that the seed crystal attachment apparatus 100 has good sealing performance, prevent external air from entering the cavity 30 from between the second fitting member 20 and the first fitting member 10, ensure that the vacuum pumping apparatus 40 applies negative pressure to the cavity 30 more reliably, and facilitate increasing the effect of the vacuum pumping apparatus 40 on applying negative pressure to the cavity 30, and effectively avoid energy loss. In addition, when the second fitting member 20 is connected with the first fitting member 10, the sealing ring 22 can deform, so that the relative position where the second fitting member 20 is connected with the first fitting member 10 is more reliable, and the uniform stress of the first seed crystal 300 is ensured.
In some embodiments, as shown in fig. 1 to 5, the outer edge of the surface of the first fitting member 10 facing the second fitting member 20 may also be provided with a sealing ring 22, and by the sealing ring 22 of the second fitting member 20 cooperating with the sealing ring 22 of the first fitting member 10, the reliable connection between the second fitting member 20 and the first fitting member 10 can be further ensured, and the sealing effect between the second fitting member 20 and the first fitting member 10 is better ensured.
In some embodiments of the present invention, as shown in fig. 7, the seed crystal attachment apparatus 100 further includes a locking assembly 80, the locking assembly 80 is disposed at the outer edges of the first fitting member 10 and the second fitting member 20, and can be used to connect and fix the second fitting member 20 and the first fitting member 10, so as to ensure that the second fitting member 20 and the first fitting member 10 are reliably connected, ensure that the relative position between the second fitting member 20 and the first fitting member 10 is accurate, the second fitting member 20 and the first fitting member 10 are not easily dislocated, ensure that the first seed crystal 300 is uniformly pressed, and ensure that the first seed crystal 300 is well attached.
In the embodiment of the present invention, the specific structure of the locking assembly 80 can be set according to actual conditions. For example, the locking assembly 80 may be a bolt or the like.
For example, in some embodiments, as shown in fig. 1-5 and 7, the peripheral wall of the first mating member 10 may be provided with a first flange 14, the peripheral wall of the second mating member 20 may be provided with a second flange 23, the locking assembly 80 includes two locking members 81, the openings of the two locking members 81 are opposite, the inner wall of each locking member 81 is provided with a locking groove 811, the first flange 14 and the second flange 23 are both located in the locking grooves 811, and the first flange 14 and the second flange 23 are positioned through the two locking grooves 811, so that the position accuracy of the second mating member 20 and the first mating member 10 can be ensured, and the relative position between the second mating member 20 and the first mating member 10 is ensured to be reliable and not easy to be misaligned. Meanwhile, the two ends of the two locking members 81 in the length direction (for example, the front and back direction shown in fig. 7) are respectively connected through the fastening members 82, and the two locking members 81 can be connected and fixed, so that the positions of the first flange 14 and the second flange 23 are fixed, the second fitting member 20 and the first fitting member 10 are reliably connected, the relative positions are accurate, the second fitting member 20 and the first fitting member 10 are prevented from being dislocated, and the first seed crystal 300 is ensured to be well adhered. For example, the fasteners 82 may be screws, bolts, or the like.
According to some embodiments of the present invention, as shown in fig. 6, a graphite paper 400 may be disposed between the first seed crystal 300 and the first graphite cover 200, the graphite paper 400 may prevent the first adhesive layer between the first seed crystal 300 and the first graphite cover 200 from seeping out of the first graphite cover 200, and the graphite paper 400 may prevent the first seed crystal 300 from being contaminated and damaged, thereby ensuring a good pasting effect of the first seed crystal 300.
In some embodiments, the graphite paper 400 is bonded to the first graphite cover 200, so that the first seed crystal 300, the graphite paper 400 and the first graphite cover 200 can be well connected, and separation is avoided, thereby ensuring the bonding reliability of the first seed crystal 300.
In the embodiment of the present invention, the specific structure of the peripheral walls of the second fitting member 20 and the first fitting member 10 can be set according to practical situations. For example, the outer peripheral walls of the second fitting member 20 and the first fitting member 10 may be circular, quadrangular, hexagonal, or the like.
For example, in some embodiments where the number of the first mounting locations is plural, as shown in fig. 5, the peripheral walls of the second fitting member 20 and the first fitting member 10 may be formed in a square shape, and the first mounting locations may be provided at diagonal lines of the square shape; alternatively, as shown in fig. 3 to 4, the outer circumferential walls of the second fitting member 20 and the first fitting member 10 may be formed in a circular shape, the plurality of first installation positions are uniformly arranged along the circumferential direction of the cavity 30, and the circular second fitting member 20 and the first fitting member 10 are arranged at the first installation positions conveniently, so that the utilization rate of the second fitting member 20 and the first fitting member 10 is higher.
In some embodiments, as shown in fig. 1 and 2, the vacuum apparatus 40 may include a control assembly 41, and the vacuum apparatus 40 may be turned on and off by the control assembly 41, so as to ensure reliable control and facilitate control of the pressure in the cavity 30.
According to the attachment method of the seed attachment apparatus 100 of the embodiment of the present invention, the seed attachment apparatus 100 is the seed attachment apparatus 100 according to the above-described embodiment of the present invention. The pasting method can comprise the following steps:
separating the second fitting part 20 from the first fitting part 10;
the first seed crystal 300 is pasted on the first graphite cover 200, so that the relative position of the first seed crystal 300 and the first graphite cover 200 is ensured, and the position is ensured to be accurate when the first seed crystal 300 is further pasted;
the first graphite cover 200 is fixedly arranged on the first mating member 10, in other words, the first graphite cover 200 can be directly arranged on the first mating member 10, or the first graphite cover 200 can be arranged in the first mounting groove 11 of the first mating member 10 to be fixed on the first mating member 10, or the first graphite cover 200 can be fixedly connected with the first mounting groove 11 of the first mating member 10 through threads on the first mating member 10, etc., so as to ensure that the first graphite cover 200 is stably arranged on the first mating member 10, and the first graphite cover 200 is not easy to move;
the second fitting member 20 and the first fitting member 10 are firmly connected, in other words, the second fitting member 20 and the first fitting member 10 can be connected through the locking component 80 and the like, so that the reliable connection between the second fitting member 20 and the first fitting member 10 is ensured, and the reliable relative positions of the second fitting member 20 and the first fitting member 10 are ensured;
the vacuumizing device 40 is started, so that the vacuumizing device 40 can apply negative pressure to the cavity 30, and therefore, a negative pressure area is formed in the cavity 30, the second matching piece 20 can move towards the first matching piece 10, the distance between the second matching piece 20 and the first matching piece 10 is reduced, the first graphite cover 200 and the first seed crystal 300 can be tightly connected under the bonding of the first adhesive layer, the first seed crystal 300 and the first graphite cover 200 can be reliably bonded, the second matching piece 20 can uniformly apply pressure, the first seed crystal 300 and the first graphite cover 200 are uniformly pressed, the influence of local stress is avoided, the problem of uneven pressing during seed crystal bonding in the related technology is solved, the situations of dislocation and macroscopic defects of the first seed crystal 300 and the first graphite cover 200 are avoided, better flatness of the seed crystal is ensured, and the growth quality of the first seed crystal 300 is effectively improved.
In some embodiments where the seed crystal attachment apparatus 100 includes the first heating apparatus 60, the attachment method further includes:
after the pressure is applied and maintained for a period of time, the first heating device 60 is started, and meanwhile, a certain pressure is maintained, so that the solidification of the first seed crystal 300 is completed, the first seed crystal 300 is reliably connected with the first graphite cover 200, the continuity of the adhering, solidifying and sintering processes of the first seed crystal 300 can be realized, and the adhering efficiency of the first seed crystal 300 is improved.
In some embodiments where the first fitting 20 is provided with the first channel 12, the first seed crystal 300 can apply a negative pressure between the first graphite cover 200 and the first seed crystal 300 through the sintering and vacuum-pumping device 40 of the first heating device 60, so that air holes between the first seed crystal 300 and the first graphite cover 200 can be eliminated, which is beneficial to the subsequent high-quality crystal growth process.
Other configurations and operations of the seed attachment apparatus 100 according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail herein.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description herein, references to the description of the terms "embodiment," "particular embodiment," "example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (12)
1. A seed crystal sticking device is characterized by comprising:
the first fitting piece defines a first mounting position suitable for mounting a first graphite cover, a first seed crystal is arranged on the first graphite cover, and a first adhesive layer is arranged between the first graphite cover and the first seed crystal;
the second fitting piece defines a closed cavity with the first fitting piece and abuts against the first seed crystal;
and the vacuumizing device is communicated with the cavity and applies negative pressure to the cavity so as to tightly connect the first graphite cover with the first seed crystal under the bonding of the first adhesive layer.
2. The seed crystal sticking device as claimed in claim 1, wherein a first mounting groove is formed at the first mounting position, and the first graphite cover is arranged in the first mounting groove and is in threaded connection with the first mounting groove.
3. A seed crystal attaching apparatus as claimed in claim 2, wherein a first passage communicating said cavity and said first mounting groove is provided on a bottom wall of said first mounting groove.
4. A seed crystal sticking apparatus as claimed in claim 3, wherein said first graphite cover is provided with a second passage penetrating in the thickness direction thereof, said second passage communicating with said first passage.
5. A seed crystal sticking device as claimed in claim 1, wherein graphite paper is arranged between the first seed crystal and the first graphite cover.
6. A seed crystal attachment apparatus as claimed in claim 1, further comprising:
and the pressure detection device extends into the cavity and is used for detecting the pressure in the cavity.
7. A seed crystal application apparatus as claimed in claim 1, wherein a center line of the cavity coincides with a center line of the first fitting member, the first fitting member defining a plurality of the first mounting positions uniformly in a circumferential direction of the cavity.
8. A seed crystal applicator as claimed in claim 1, wherein the surface of the first fitting facing the second fitting is provided with a first groove, the surface of the second fitting facing the first fitting is provided with a second groove, and the first groove and the second groove are oppositely arranged to define the cavity together.
9. A seed crystal applicator as set forth in claim 8 wherein the cross-sectional area of said second recess is greater than the cross-sectional area of said first recess.
10. A seed crystal attachment apparatus as claimed in claim 1, further comprising:
and the locking assembly is arranged at the outer edges of the first fitting piece and the second fitting piece and is used for connecting and fixing the first fitting piece and the second fitting piece.
11. A seed crystal sticking apparatus as claimed in any one of claims 1 to 10, wherein a presser is provided on said second fitting member in correspondence with said first seed crystal on said first fitting member, said presser abutting against said first seed crystal and an abutting surface with said first seed crystal being a smooth plane.
12. The seed crystal sticking device as claimed in any one of claims 1 to 10, wherein the second fitting part is provided with a second seed crystal corresponding to the first seed crystal, the second seed crystal abuts against the first seed crystal, the second seed crystal is arranged on a second graphite cover, the second graphite cover is arranged at a second mounting position defined by the second fitting part, a second adhesive layer is arranged between the second graphite cover and the second seed crystal, and negative pressure is applied to the cavity through the vacuum pumping device, so that the second graphite cover and the second seed crystal are tightly connected under the adhesion of the second adhesive layer.
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| CN202210178071.5A CN114657633B (en) | 2022-02-25 | 2022-02-25 | Seed crystal pasting device |
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| CN202210178071.5A CN114657633B (en) | 2022-02-25 | 2022-02-25 | Seed crystal pasting device |
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| US20060254507A1 (en) * | 2001-06-15 | 2006-11-16 | Bridgestone Corporation | Silicon carbide single crystal and production thereof |
| JP2006151756A (en) * | 2004-11-30 | 2006-06-15 | Matsushita Electric Ind Co Ltd | Method for fixing seed crystal |
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Effective date of registration: 20230814 Address after: 221000 Xuzhou High tech Industrial Development Zone, Xuzhou City, Jiangsu Province Electronic Information Industry Park Phase II, Plant 2 Patentee after: Jiangsu Jixin Advanced Materials Co.,Ltd. Address before: Room 669, E1 building, software park, Xuzhou Economic and Technological Development Zone, Xuzhou City, Jiangsu Province, 221004 Patentee before: Jiangsu Jixin semiconductor silicon material Research Institute Co.,Ltd. |