CN221117714U - FLUX FLUX method material growth device - Google Patents

Abstract

The utility model discloses a FLUX FLUX method material growth device, which comprises: the protective shell is connected with the front cover through a communication pipeline and a control valve arranged on the communication pipeline, and is used for controlling the internal and external communication of the protective shell; the quartz crucible is vertically and limitedly placed in the protective shell through the limiting bearing plates and the bearing base, the vacuum sealing of the quartz crucible is controlled in the protective shell through the crucible vacuum assembly and the sealing assembly, and the limiting bearing plates are provided with heating structures for heating the quartz crucible. The utility model can adopt the integrated operation of vacuum tube sealing and high-temperature control growth of the FLUX method when the FLUX method growth of the material FLUX is carried out, thereby simplifying the whole step of the FLUX method growth of the material and improving the growth preparation quality and efficiency of the material.

Description

FLUX FLUX method material growth device

Technical Field

The utility model relates to the technical field of material growth, in particular to an FLUX FLUX method material growth device.

Background

The FLUX method is also called as molten salt method, and the principle of its use is that the raw components of crystal are dissolved in low-melting point FLUX solution at high temp. to form uniform saturated solution, then slowly cooled or otherwise formed into supersaturated solution, so that the crystal can be separated out, in which the FLUX is various in variety, metal simple substance, alloy, low-melting point oxide and salt, etc. can be used as FLUX.

Lifting methods are often used for material growth by the traditional FLUX method to obtain material crystals, namely, the material crystals are fixed through a crucible, and a lifting rod is driven to pass through a vacuum cavity under the high-temperature vacuum condition to lift the material crystals to obtain the material after growth;

Meanwhile, the conventional FLUX FLUX method material growth often needs to use an external vacuum tube sealing machine structure to perform vacuum tube sealing on a crucible, and then the quartz crucible after tube sealing is transferred into a crystal growth furnace for operation.

Therefore, the application provides a FLUX method material growth device, which can adopt the integrated operation of vacuum tube sealing and FLUX method high temperature control growth in the growth device, thereby simplifying the whole steps of the FLUX method growth of the material, meeting the methods of solid phase synthesis growth, high temperature sintering, regional melting, directional solidification growth and the like, improving the material growth quality and purity, improving the material growth efficiency, and the content is only used for assisting in understanding the technical scheme of the application, and does not represent the closest prior art.

Disclosure of utility model

The utility model mainly aims to provide the FLUX FLUX method material growing device which adopts the integrated operation of vacuum tube sealing and FLUX method high-temperature control growth in the growing device, thereby simplifying the whole step of material growth by using the FLUX FLUX method and being capable of using two growing material crystal acquisition methods of a lifting method and a lowering method.

In order to solve the technical problems, the utility model provides an FLUX FLUX method material growth device, which comprises a protection shell and a front cover hinged on the protection shell, wherein the protection shell is also provided with a lock catch assembly used for being connected with the front cover and a controller used for controlling an electric structure, and the protection shell is controlled to be communicated with the inside and the outside of a protection shell through a communication pipeline and a control valve arranged on the communication pipeline;

The quartz crucible is vertically and limitedly placed in the protective shell through the limiting bearing plates and the bearing base, the vacuum sealing of the quartz crucible is controlled in the protective shell through the crucible vacuum assembly and the sealing assembly, and the limiting bearing plates are provided with heating structures for heating the quartz crucible.

Further, an upper shell for internally mounting a crucible vacuum assembly and a lifting assembly is further arranged on the protective shell, and the lifting assembly is used for lifting the quartz crucible with the inside vacuum sealed.

Further, the crucible vacuum chamber assembly comprises a vacuum extractor located in the protective housing, a sliding sleeve connected with the vacuum extractor and arranged along the vertical direction, a quartz connecting pipe which is limited to slide in the sliding sleeve, and a rotary mounting sleeve which is arranged at the tail end of the quartz connecting pipe in a rotary mode, and a thread mounting ring which is used for threaded rotation on the rotary mounting sleeve is arranged at the opening of the quartz crucible.

Further, the lifting assembly comprises a driving motor positioned in the protective shell, a limit sleeve installed on a driving shaft of the driving motor and with the top closed, a screw shaft body installed in the middle of the limit sleeve, and a lifting rod body structure which is arranged in the limit sleeve in a sliding manner and connected with the screw shaft body;

In the process that the limit sleeve drives the screw shaft body to rotate, the lifting rod body structure drives the rotary mounting sleeve to move along a direction and rotate.

Further, the lifting rod body structure comprises a lifting column body, a lifting sleeve ring which is sleeved on the neck of the rotary mounting sleeve in a limiting mode, a supporting shaft bracket which is arranged at the bottom end of the lifting column body and used for mounting the lifting sleeve ring, a rotary sleeve which is sleeved on the lifting column body in a rotary mode, and a meshing toothed ring group which is used for connecting the rotary sleeve with the rotary mounting sleeve.

Further, the screw shaft body is screwed in the top end of the lifting column body, the top end of the rotating sleeve is slidably mounted on the inner side of the limiting sleeve through the limiting sliding assembly, and the limiting sliding assembly is used for limiting the rotating sleeve to move in the limiting sleeve in the linear direction.

Further, the limiting sliding assembly comprises a limiting sliding groove formed in the inner side of the limiting sleeve along the length direction of the limiting sleeve and a limiting sliding block arranged at the top end of the rotating sleeve and used for sliding in the limiting sliding groove.

Further, the front cover is provided with quartz glass for observing the inside of the protective shell in a clamping manner.

The beneficial effects of the utility model are as follows:

1. According to the utility model, the sealing assembly and the crucible vacuum assembly are arranged in the shell, so that the vacuum tube sealing treatment can be controlled on the quartz crucible placed on the limiting bearing plate and the bearing base, and the integrated operation of vacuum tube sealing and high-temperature control growth by the FLUX method can be adopted when the FLUX method of the material is grown by matching with the arrangement of the heating structure, thereby simplifying the whole step of growing the material by the FLUX method, and improving the growth preparation quality and efficiency of the material.

2. According to the utility model, the rotating mounting sleeve and the threaded mounting ring are arranged to be connected with the quartz crucible, and when the material FLUX FLUX method growth operation is carried out, the lifting assembly is used for controlling the lifting or descending of the rotating mounting sleeve, so that the heating assembly is matched, the lifting and lifting method growth can be adopted when the material growth preparation is carried out, the crucible descending method growth can be adopted, the use according to the growth requirements of different materials is convenient, the methods such as solid phase synthesis growth, high temperature sintering, regional melting and directional solidification growth are satisfied, and compared with the structure for preparing the material by the traditional FLUX FLUX method growth preparation, the purity, quality and efficiency of the growth material can be greatly improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model. In the drawings:

FIG. 1 is an overall perspective view of the present utility model in a closed position;

FIG. 2 is an overall perspective view of the present utility model in an open state;

FIG. 3 is a split perspective view showing a connection structure of the quartz crucible of the present utility model;

FIG. 4 is an overall perspective view of the connection structure of the vacuum chamber assembly and the pulling assembly of the crucible of the present utility model;

FIG. 5 is a schematic perspective view of the connection structure between the pull rod body structure and the crucible vacuuming assembly of the present utility model;

FIG. 6 is a schematic cross-sectional view of the overall structure of the pull assembly of the present utility model.

In the figure:

1. a protective housing; 11. a front cover; 111. quartz glass; 12. a latch assembly; 13. a communication pipe; 131. a control valve; 14. a melt-sealing assembly; 15. a limit bearing plate; 16. a load-bearing base; 17. a heating structure; 18. an upper housing; 19. a controller;

2. a quartz crucible; 21. a threaded mounting ring;

3. A crucible vacuumization assembly; 31. a vacuum extractor; 32. a quartz connecting tube; 33. a sliding sleeve; 34. and rotating the mounting sleeve.

4. A lifting assembly; 41. a lifting rod body structure; 411. pulling the collar; 412. a support shaft bracket; 413. lifting the column body; 414. rotating the sleeve; 415. a set of meshing toothed rings; 4151. a driving toothed ring; 4152. a drive ring gear; 42. a driving motor; 43. a limit sleeve; 44. a screw shaft body; 45. limiting sliding grooves; 46. and a limit sliding block.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. Embodiments of the utility model and features of the embodiments may be combined with each other without conflict. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the examples, see fig. 1 to 6 in detail.

As shown in fig. 1, 2 and 3, the present utility model provides a FLUX material growing apparatus, comprising a protective housing 1 and a front cover 11 hinged on the protective housing 1, wherein the protective housing 1 is further provided with a latch assembly 12 for connecting with the front cover 11 and a controller 19 for controlling an electrical structure, and the protective housing 1 controls the internal and external communication of the protective housing 1 through a communication pipe 13 and a control valve 131 installed on the communication pipe 13.

It should be noted that, the latch assembly 12 may directly employ a latch in the prior art, the controller 19 may employ a computer control structure in the prior art, and the control valve 131 may be an electromagnetic control valve electrically connected to the controller 19 or a manual valve.

When the protective housing 1 is closed with the front cover 11, the contact surface of the protective housing 1 with the front cover 11 may also be provided with a rubber pad structure for sealing the interior of the protective housing 1.

It may be further described that the front cover 11 is mounted with the quartz glass 111 for observing the inside of the protective case 1 in a snap fit manner, so that an operator can conveniently perform monitoring during the growth of the FLUX material.

The quartz crucible 2 is vertically placed in the protective shell 1 in a limiting mode through a plurality of limiting bearing plates 15 and a bearing base 16, the vacuum sealing inside the quartz crucible 2 is controlled by the crucible vacuum assembly 3 and the sealing assembly 14 in the protective shell 1, and heating structures 17 for heating the quartz crucible 2 are arranged on the limiting bearing plates 15.

In the process of growing the material by the FLUX method, as the sealing component 14 and the crucible vacuum component 3 are arranged in the shell, the quartz crucible 2 placed on the limiting bearing plate 15 and the bearing base 16 can be controlled to be subjected to vacuum tube sealing treatment, and the quartz crucible 2 can be controlled to be subjected to the FLUX method growth treatment of the material in the quartz crucible 2 by being heated and controlled to a fixed high temperature in cooperation with the arrangement of the external heating structure 17 of the quartz crucible 2, and meanwhile, the structure can adopt the integrated operation of vacuum tube sealing and FLUX method high temperature control growth, so that the whole step of growing the material by the FLUX method is simplified, and the growth preparation quality and efficiency of the material are improved.

The heating structures 17 are distributed in the vertical direction and are arranged in at least two groups, and when the heating structures 17 control the quartz crucible 2 to heat, the quartz crucible 2 is heated according to a constant temperature single-temperature zone or a variable temperature multi-temperature zone, wherein constant temperature is a temperature zone, and variable temperature is a different temperature zone.

It should be noted that the sealing assembly 14 may perform sealing operation on the opening of the quartz crucible 2 by using a high-temperature plasma heat source in the prior art, the heating structure 17 may perform overall temperature-raising and constant-temperature-controlling operation on the quartz crucible 2 by using a graphite heating body in the prior art, and the controller 19 may control the sealing assembly 14 and the heating structure 17 to operate by using an embedded circuit.

Further, as shown in fig. 2, 3 and 4, the protective housing 1 is further provided with an upper housing 18 for internally mounting the crucible vacuuming unit 3 and the pulling unit 4, and the pulling unit 4 is used for pulling the internally vacuum-sealed quartz crucible 2.

As shown in fig. 4, the crucible vacuum chamber assembly 3 includes a vacuum extractor 31 located in the protective housing 1, a sliding sleeve 33 connected with the vacuum extractor 31 and arranged along a vertical direction, a quartz connecting pipe 32 sliding in the sliding sleeve 33 in a limited manner, and a rotating mounting sleeve 34 rotating at the tail end of the quartz connecting pipe 32, the opening of the quartz crucible 2 is provided with a threaded mounting ring 21 for rotating on the rotating mounting sleeve 34, the threaded mounting ring 21 and the threaded connection of the rotating mounting sleeve 34 can facilitate the quick assembly and disassembly of the device in the use process for the growth operation of the quartz crucible 2 by the flux method, and the vacuum extractor 31 can directly adopt the vacuum extractor disclosed in the prior art.

As shown in fig. 4, 5 and 6, the lifting assembly 4 includes a driving motor 42 located in the protection casing 1, a limit sleeve 43 installed on the driving shaft of the driving motor 42 and having a closed top, a screw shaft body 44 installed in the middle of the limit sleeve 43, and a lifting rod body structure 41 slidably disposed in the limit sleeve 43 and connected to the screw shaft body 44.

It should be noted that the driving motor 42 is generally a servo motor structure as shown in fig. 4, and other conventional structures capable of driving the limiting sleeve 43 to rotate may be used instead.

Therefore, as shown in fig. 4 and 5, the quartz crucible 2 is connected by arranging the rotary mounting sleeve 34 and the threaded mounting ring 21, and when the material FLUX method growth operation is carried out, the lifting assembly 4 is used for controlling the rotary mounting sleeve 34 to lift or descend, so that the heating assembly can be matched for growth by adopting a lifting method and a crucible descending method when the material is grown and prepared, the material can be conveniently used according to the growth requirements of different materials, the methods such as solid phase synthesis growth, high temperature sintering, regional melting, directional solidification growth and the like are satisfied, and compared with the traditional FLUX method growth preparation material, the structure can also greatly improve the purity, quality and efficiency of the growth material.

Meanwhile, in the process that the limit sleeve 43 drives the screw shaft 44 to rotate, the pull rod structure 41 drives the rotation mounting sleeve 34 to move and rotate along a direction.

Specific structure as shown in fig. 5, the pull rod body structure 41 includes a lifting column 413, a pull collar 411 that is sleeved on the neck of the rotary mounting sleeve 34 in a limiting manner, a support shaft bracket 412 that is arranged at the bottom end of the lifting column 413 and is used for mounting the pull collar 411, a rotary sleeve 414 that is sleeved on the lifting column 413 in a rotating manner, and a meshing gear ring set 415 that is used for connecting the rotary sleeve 414 and the rotary mounting sleeve 34, wherein the support shaft bracket 412 can be used for limiting the rotary bearing of the rotary sleeve 414.

Wherein the engaging gear ring set 415 is composed of a driving gear ring 4151 mounted and fixed at the bottom end of the rotating sleeve 414 and a driving gear ring 4152 mounted on the rotating mounting sleeve 34, and the driving gear ring 4151 is engaged with the driving gear ring 4152 because the supporting shaft bracket 412 controls the rotating mounting sleeve 34 to be at a constant distance from the rotating sleeve 414 on the horizontal plane.

At this time, in the lifting process, the rotation direction of the rotation mounting sleeve 34 is preferably the same as the rotation direction of the rotation mounting sleeve 34 screwed into the threaded mounting ring 21, and it should be noted here that the driving rotation of the rotation mounting sleeve 34 in the state that the rotation mounting sleeve 34 screwed into the threaded mounting ring 21 does not drive the rotation mounting sleeve 34 to be separated from the threaded mounting ring 21 in a screw reverse rotation.

Further, as shown in fig. 6, the top end of the rotating sleeve 414 is slidably mounted inside the limiting sleeve 43 through a limiting sliding component, and the limiting sliding component is used for limiting the movement of the rotating sleeve 414 in the limiting sleeve 43 along a linear direction, wherein the limiting sliding component comprises a limiting sliding groove 45 formed inside the limiting sleeve 43 along the length direction of the limiting sleeve 43 and a limiting sliding block 46 arranged at the top end of the rotating sleeve 414 and used for sliding in the limiting sliding groove 45.

When the driving motor 42 controls the limit sleeve 43 to rotate, the limit sliding assembly can control the rotation sleeve 414 to synchronously rotate, and the driving toothed ring 4151 and the driving toothed ring 4152 are meshed with each other, so that the rotation sleeve 414 can drive the rotation mounting sleeve 34 to rotate when rotating, and the quartz crucible 2 is driven to rotate through the threaded mounting ring 21.

At this time, the screw shaft body 44 is screwed on the top end of the lifting column 413, and when the limit sleeve 43 drives the screw shaft body 44 to rotate, the lifting column 413 is connected with the lifting collar 411 through the supporting shaft bracket 412 to avoid the rotation of the lifting column 413, so that the lifting column 413 can be driven by the screw to lift and move, the limit sleeve 43 is driven by the supporting shaft bracket 412 and the lifting collar 411 to lift and move in the vertical direction, and the quartz crucible 2 is driven by the screw mounting ring 21 to descend or ascend in the vertical direction, so that the precipitation and the acquisition of the material growth crystal can be completed in the growth operation process of the material FLUX method.

The pipe structure, the column shaft structure and the pad sleeve structure adopted by the device are made of MA956 alloy materials.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.

In addition, if a directional indication (such as up, down, left, right, front, and rear … …) is included in the embodiment of the present utility model, the directional indication is merely used to explain a relative positional relationship between the components, a movement condition, etc. in a specific posture, and if the specific posture is changed, the directional indication is correspondingly changed.

In addition, if there is a description of "first", "second", etc. in the embodiments of the present utility model, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" as it appears throughout includes three parallel schemes, for example "A and/or B", including the A scheme, or the B scheme, or the scheme where A and B are satisfied simultaneously. In addition, in the embodiment of the present utility model, "a plurality of" means two or more. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present utility model.

Claims (9)

1. The FLUX FLUX method material growth device comprises a protection shell (1) and a front cover (11) hinged on the protection shell (1), wherein the protection shell (1) is also provided with a lock catch assembly (12) used for being connected with the front cover (11) and a controller (19) used for controlling an electric structure, and the device is characterized in that the protection shell (1) is used for controlling the internal and external communication of the protection shell (1) through a communication pipeline (13) and a control valve (131) arranged on the communication pipeline (13);

The inside quartz crucible (2) that has vertically placed through a plurality of spacing loading board (15) and loading base (16) of protective housing (1), just the inside vacuum seal of quartz crucible (2) is controlled through crucible vacuum subassembly (3) and melting seal subassembly (14) in protective housing (1), all be equipped with on spacing loading board (15) and be used for quartz crucible (2) heating structure (17) of rising temperature and heating.

2. The FLUX material growth apparatus of claim 1, wherein the protective housing (1) is further provided with an upper housing (18) for internally mounting the crucible vacuuming means (3) and the pulling means (4), and the pulling means (4) is for pulling the internally vacuum-sealed quartz crucible (2).

3. The FLUX material growth device according to claim 2, wherein the crucible vacuum chamber assembly (3) comprises a vacuum extractor (31) positioned in the protective shell (1), a sliding sleeve (33) connected with the vacuum extractor (31) and arranged along the vertical direction, a quartz connecting pipe (32) sliding in the sliding sleeve (33) in a limiting manner and a rotary mounting sleeve (34) rotatably arranged at the tail end of the quartz connecting pipe (32), and a threaded mounting ring (21) for rotating on the rotary mounting sleeve (34) in a threaded manner is arranged at the opening of the quartz crucible (2).

4. A FLUX material growth apparatus according to claim 3, wherein the pull-up assembly (4) comprises a drive motor (42) located in the protective housing (1), a limit sleeve (43) installed on the drive shaft of the drive motor (42) and having a closed top, a screw shaft body (44) installed in the middle of the limit sleeve (43), and a pull-up rod body structure (41) slidably disposed in the limit sleeve (43) and connected to the screw shaft body (44);

In the process that the limit sleeve (43) drives the screw shaft body (44) to rotate, the lifting rod body structure (41) drives the rotary mounting sleeve (34) to move along a direction and rotate.

5. The FLUX material growth apparatus of claim 4, wherein the pull rod body structure (41) comprises a lifting column body (413), a pull collar (411) which is sleeved on a neck of the rotary mounting sleeve (34) in a limiting manner, a support shaft bracket (412) which is arranged at the bottom end of the lifting column body (413) and is used for mounting the pull collar (411), a rotary sleeve (414) which is sleeved on the lifting column body (413) in a rotary manner, and an engaged toothed ring group (415) which is used for connecting the rotary sleeve (414) and the rotary mounting sleeve (34).

6. The FLUX material growth apparatus of claim 5, wherein the screw shaft (44) is threaded into the top of the lifting cylinder (413).

7. The FLUX material growth apparatus of claim 6, wherein the top end of the rotating sleeve (414) is slidably mounted inside the limiting sleeve (43) by a limiting slide assembly, and the limiting slide assembly is used for limiting the movement of the rotating sleeve (414) in a linear direction inside the limiting sleeve (43).

8. The FLUX material growth apparatus of claim 7, wherein the limit sliding assembly comprises a limit chute (45) formed on the inner side of the limit sleeve (43) along the length direction of the limit sleeve (43), and a limit slider (46) formed on the top end of the rotary sleeve (414) for sliding in the limit chute (45).

9. The FLUX material growth apparatus according to claim 1, wherein the front cover (11) is fitted with a quartz glass (111) for observing the inside of the protective case (1).