CN214192589U - Device for preparing silicon carbide powder - Google Patents
Device for preparing silicon carbide powder Download PDFInfo
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- CN214192589U CN214192589U CN202023350223.0U CN202023350223U CN214192589U CN 214192589 U CN214192589 U CN 214192589U CN 202023350223 U CN202023350223 U CN 202023350223U CN 214192589 U CN214192589 U CN 214192589U
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Abstract
The utility model discloses a device of preparation carborundum powder, the device includes: the furnace body is provided with a heating device; the electrode at least partially penetrates through the interior of the furnace body, a carbon source is at least partially covered on the surface of the electrode part positioned in the interior of the furnace body, and the electrode is used for heating the carbon source after being electrified; the crucible is arranged in the furnace body, the electrode is positioned above the crucible, and the crucible and the electrode are relatively displaced so that the electrode can enter or leave the crucible. Through setting up the electrode, inside the electrode at least part run through the furnace body, the inside electrode part of furnace body is used for fixed carbon source raw materials, carries out the ohmic heating to the electrode for carbon source raw materials rapid heating up and with the silicon liquid reaction of fixing on the electrode, improved the production efficiency and the quality of carborundum powder.
Description
Technical Field
The application relates to a device for preparing silicon carbide powder, and belongs to the technical field of silicon carbide preparation equipment.
Background
As a third-generation semiconductor material capable of being industrially produced in a large scale, the market demand for silicon carbide single crystals is increasing. In order to shorten the growth time of silicon carbide single crystals and reduce the defect rate, the demand of silicon carbide powder for growing silicon carbide crystal rods is also increased. Besides the impurity content of the silicon carbide powder, the requirements on the grain structure, the granularity, the bulk density, the yield and the like are also met.
The traditional process generally adopts a high-temperature self-propagating reaction or a CVD method, the obtained silicon carbide powder has small granularity and low stacking density, and the growth efficiency is low and defects are easily caused in the process of growing silicon carbide single crystals by a PVT method. At present, silicon carbide powder can be synthesized by adopting a liquid phase method, silicon is melted in a crucible in a heating mode to form silicon liquid, and then a graphite shaft with the head part attached with seed crystals is extended into the liquid to grow. The existing device only utilizes a heating device outside a furnace body to heat, and can not meet the problems of production efficiency and quality of silicon carbide powder.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems, the application provides a device for preparing silicon carbide powder, which can perform power-on heating on an electrode by arranging the electrode, so that a carbon source raw material fixed on the electrode is rapidly heated and reacts with silicon liquid, and the production efficiency and the quality of the silicon carbide powder are improved.
According to an aspect of the present application, there is provided an apparatus for preparing silicon carbide powder, the apparatus comprising:
the furnace body is provided with a heating device;
the electrode at least partially penetrates through the interior of the furnace body, a carbon source is at least partially covered on the surface of the electrode part positioned in the interior of the furnace body, and the electrode is used for heating the carbon source after being electrified;
the crucible is arranged in the furnace body, a silicon source is arranged in the crucible, the electrode is positioned above the crucible, and the crucible and the electrode are relatively displaced so that a carbon source on the electrode can contact or be far away from the silicon source in the crucible.
Optionally, the electrode comprises a carbon source, the carbon source being connected to an external power source.
Optionally, the electrode comprises a fixing member and a carbon source, wherein the carbon source is fixed on the surface of the fixing member, and the fixing member is connected with an external power supply.
Optionally, a furnace cover is arranged at the top of the furnace body, and the electrode penetrates through a through hole in the furnace cover and extends into the furnace body;
the electrode extends in the axial direction of the crucible,
the electrode is connected with a cooling water pipeline.
Optionally, the heating device includes a first heating device and a second heating device, the first heating device heats the upper part in the furnace body, and the second heating device heats the lower part in the furnace body.
Optionally, the heating means is selected from an electromagnetic induction coil or a resistance wire.
Optionally, a partition board is arranged in the furnace body, and when the partition board is closed, the interior of the furnace body is divided into two parts; when the partition plate is opened, the interior of the furnace body is communicated.
Optionally, the partition extends along the radial direction of the furnace body, and the side wall of the partition is matched with the inner side wall of the furnace body
Optionally, the partition is a water-cooled partition having a water-cooled conduit.
Optionally, the crucible is connected with a lifting device, and the lifting device is used for controlling the crucible to move up and down;
the lifting device comprises a pillar and a lifting platform driven by a screw transmission mechanism, one end of the pillar is fixed at the bottom of the crucible, and the other end of the pillar sequentially penetrates through the furnace body to be connected with the lifting platform.
The utility model has the advantages of but not limited to:
(1) the application provides a device of preparation carborundum powder, through setting up the electrode, inside the furnace body was run through to the electrode part at least part, the inside electrode part of furnace body covers at least part has the carbon source, carries out the ohmic heating to the electrode for carbon source rapid heating up on the electrode and with the silicon liquid reaction, improved carborundum powder's production efficiency and quality.
(2) The application provides a device for preparing carborundum powder includes first heating device and second heating device through heating device, and first heating device sets up in furnace body upper portion outside, and second heating device sets up in the furnace body lower part outside. The first heating device and the second heating device are respectively controlled to realize different heating temperatures of the upper part and the lower part of the furnace body.
(3) According to the device for preparing the silicon carbide powder, the crucible and the fixing component can be separated by arranging the partition plate in the furnace body, so that the phenomenon that silicon liquid in the crucible is volatilized to be crystallized at a graphite raw material during heating is avoided; the partition plate is opened, so that the fixing member to which the graphite raw material is fixed enters the silicon liquid for growing silicon carbide crystal grains.
(4) The application provides a device of preparation carborundum powder, baffle are water-cooling baffle, and water-cooling baffle has water-cooling pipeline. The water-cooling partition plate can isolate atmosphere transportation of the upper part and the lower part of the furnace body, the partition plate also isolates transmission of heat of the upper part and the lower part of the furnace body to a certain extent, and the partition plate is provided with a water-cooling pipeline to prevent the partition plate from being overheated.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
fig. 1 is a schematic structural diagram of an apparatus for preparing silicon carbide powder according to the present invention;
wherein, 1, a furnace body; 2. a crucible; 3. an electrode; 4. a partition plate; 5. a first heating device; 6. a second heating device; 7. a furnace cover; 8. a lifting device.
Detailed Description
The present application will be described in detail with reference to examples, but the present application is not limited to these examples.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, the present application may be practiced in other ways than those described herein, and therefore the scope of the present application is not limited by the specific embodiments disclosed below.
In addition, in the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "coupled," and the like are to be construed broadly and include, for example, fixed or removable connections or integral parts; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Example 1
The embodiment provides an apparatus for preparing silicon carbide powder, which comprises: a furnace body 1, an electrode 3 and a crucible 2; furnace body 1 is provided with heating device, and heating device is used for heating in 1 to the furnace body, and inside electrode 3 at least part run through furnace body 1, the surface that is located the electrode part of 1 inside of furnace body covers at least partially has the carbon source, be used for heating the carbon source after 3 circular telegrams of electrode, crucible 2 is arranged in 1 inside of furnace body, be used for placing the silicon source in crucible 2, electrode 3 is located the top of crucible 2, crucible 2 and electrode 3 take place relative displacement to make the carbon source on the electrode 3 can contact or keep away from the silicon source in crucible 2. Through setting up electrode 3, carry out the ohmic heating to electrode 3 for carbon source raw materials fixed on electrode 3 rapid heating up and with the silicon liquid reaction, improved the production efficiency and the quality of carborundum powder.
Specifically, the structural composition of the electrode 3 is not particularly limited, as long as the electrode is ensured to heat the carbon source on the surface after being electrified. For example, a graphite rod as a carbon source may be used as an electrode directly, or a carbon source may be fixed on the surface of a graphite electrode, and a combination of the carbon source and the graphite electrode may be used as an electrode.
As an embodiment of the present application, the electrode comprises a carbon source, which is connected to an external power source. Preferably, the carbon source is at least one selected from the group consisting of a graphite rod, a graphite column, and a graphite tube, and the carbon source graphite raw material may be directly subjected to electrical heating.
As an embodiment of the application, the electrode comprises a fixing piece and a carbon source, wherein the carbon source is fixed on the surface of the fixing piece, and the fixing piece is connected with an external power supply and is used for electrifying and heating the carbon source. Preferably, the fixing piece is a metal electrode or a graphite electrode, the carbon source is connected with the fixing piece through a graphite joint, the graphite joint is in threaded connection with the fixing piece, and the carbon source is inserted into a groove of the graphite joint and is fixed through a graphite pin.
Specifically, the specific position of the electrode 3 is not limited, and the electrode 3 may be partially located inside the furnace body 1, or the electrode 3 may be entirely located inside the furnace body 1, as long as it is ensured that the electrode 3 for fixing the carbon source material is partially located inside the furnace body 1. The electrode 3 can be arranged obliquely to the crucible 2 or arranged parallel to the axial direction of the crucible 2, so that the part of the electrode 3 for fixing the carbon source raw material can enter the crucible 2. The material of the electrode 3 is not particularly limited, and the material of the electrode 3 is selected from graphite in order not to introduce new impurities, as conventionally understood in the art.
As an embodiment of the present application, the electrode 3 extends along the axial direction of the crucible 2, so that the carbon source material is located in the axial direction of the crucible 2, and the electrode 3 and the carbon source material can be prevented from touching the inner wall of the crucible 2 to affect the reaction of the carbon source material and the silicon liquid.
As an implementation mode of the application, the electrode 3 is connected with a cooling water pipeline, cooling water can be introduced into the electrode 3, the electrode and a cable and other structures connected with the electrode can be protected from being damaged due to heating, the carbon source raw material after reaction can be rapidly cooled, and the production efficiency is further improved.
As an embodiment of the application, a furnace cover 7 is arranged on the top of the furnace body 1, and the electrode 3 extends into the furnace body 1 through a through hole on the furnace cover 7. The electrode 3 part outside the furnace body 1 is connected with a power supply, and the electrode 3 part inside the furnace body 1 fixes graphite raw materials.
In one embodiment of the present application, the heating device includes a first heating device 5 and a second heating device 6, the first heating device 5 is disposed outside the upper portion of the furnace body, and the second heating device 6 is disposed outside the lower portion of the furnace body. First heating device 5 and second heating device 6 control respectively to realize the different heating temperature in furnace body 1 upper portion and furnace body 1 lower part, can make silicon source raw materials and carbonization raw materials have the temperature difference, thereby be favorable to the inside silicon source raw materials and the silicon source raw materials reaction of soaking of silicon liquid raw materials.
As an embodiment of the present application, the heating means is selected from an electromagnetic induction coil or a resistance wire. Preferably, the heating device is a resistance wire, and the resistance wire is adopted for heating, so that the production cost can be reduced.
As an embodiment of the application, the inner part of the furnace body 1 is provided with a clapboard 4, and when the clapboard 4 is closed, the inner part of the furnace body 1 is divided into two parts; when the partition plate 4 is opened, the interior of the furnace body 1 is communicated. The crucible 2 and the electrode 3 can be separated by arranging the partition plate 4 in the furnace body 1, so that the phenomenon that silicon liquid in the crucible 2 is volatilized to be crystallized at a graphite raw material during heating is avoided; the partition plate 4 is opened so that the electrode 3 to which the graphite raw material is fixed partially enters the silicon liquid for growing silicon carbide crystal grains.
Specifically, the specific position of the partition plate 4 is not limited, and the partition plate 4 can divide the interior of the furnace body 1 into an upper part and a lower part, or the partition plate 4 can divide the interior of the furnace body 1 into a left part and a right part, as long as the partition plate 4 can divide or communicate the interior of the furnace body 1. The mode of the crucible 2 moving relative to the electrode is not particularly limited, and the crucible 2 can be fixed and the electrode 3 can move; or the electrode 3 is fixed, and the crucible 2 moves; or both the electrode 3 and the crucible 2 move, as long as the crucible 2 moves relative to the electrode 3 and the electrode 3 can move into or away from the interior of the crucible 2.
As an embodiment of the present application, the partition plate 4 extends in the radial direction of the furnace body 1, and the side wall of the partition plate 4 is fitted to the inner side wall of the furnace body 1. The baffle 4 extends along the radial direction of the furnace body 1, and the baffle 4 divides the furnace body 1 into an upper part and a lower part; the crucible 2 is close to the lower part of the furnace body 1, the electrode 3 is close to the upper part of the furnace body 1, and when the crucible 2 moves relative to the electrode 3, carbon source raw materials on the electrode 3 can enter the crucible 2 through an opening at the top of the crucible 2; this structural design is reasonable, convenient operation.
As an embodiment of the present application, the partition plate 4 is a water-cooled partition plate having a water-cooled duct. The water-cooling partition plate can isolate the atmosphere transportation of the upper part and the lower part of the furnace body, the partition plate 4 also isolates the transmission of heat of the upper part and the lower part of the furnace body to a certain extent, and the partition plate 4 is provided with a water-cooling pipeline to prevent the partition plate from being overheated.
Specifically, the opening or closing of the partition 4 can be controlled manually, electrically or pneumatically. Preferably, the opening and closing of the partition 4 is electrically controlled. The device as a preferred embodiment of the present application further comprises a control mechanism for controlling the opening or closing of the partition plate 4, wherein the control mechanism comprises a valve body, and the partition plate is inserted into the valve body and can reciprocate in the valve body so as to enable the partition plate 4 to be separated or communicated with the furnace body 1.
In one embodiment of the present application, the crucible 2 is connected to a lifting device 8, and the lifting device 8 is used for controlling the crucible 2 to move up and down. The lifting device 8 drives the crucible 2 to move up and down so as to realize that the electrode 3 can enter or be far away from the inside of the crucible 2.
In one embodiment of the present application, the lifting device 8 includes a pillar and a lifting platform driven by a screw transmission mechanism, one end of the pillar is fixed at the bottom of the crucible 2, and the other end of the pillar sequentially penetrates through the furnace body 1 and is connected with the lifting platform. Specifically, screw drive mechanism includes ball screw, screw-nut, support and motor, and ball screw and screw-nut screw-thread fit, screw-nut and elevating platform fixed connection, and ball screw rotates and supports on the support, and the motor passes through the shaft coupling and drives ball screw and rotate. The specific structure of the screw transmission mechanism is not limited to the above manner, as long as the screw transmission mechanism can drive the lifting table and the crucible 2 to move up and down. Preferably, the electrode can also be connected with a lifting device. After the silicon carbide powder grows, the electrode is lifted, the carbon source graphite rod is taken down, and crystal grains on the surface of the carbon source are collected.
Example 2
A method of preparing silicon carbide powder using the apparatus of example 1, the method comprising the steps of:
(1) placing an electronic grade silicon block (with the purity of 5N-9N and the size of more than 20mm) in a graphite crucible as a silicon source raw material, wherein the silicon source raw material can also be selected from other high-purity silicon blocks or silicon powder as long as the silicon source raw material can be melted into liquid;
fixing a graphite rod on a graphite electrode positioned above a graphite crucible to be used as a carbon source raw material. Specifically, the carbon source raw material can be graphite columns, graphite tubes or other similar shapes, and only a certain surface is ensured;
the purity of the carbon source raw material and the silicon source raw material is not lower than 99 percent; preferably, the purity of the carbon source raw material and the silicon source raw material is not lower than 99.99%;
(2) coating a growth agent on the surface of the graphite rod, wherein the growth agent comprises silicon carbide powder, carbon powder and an organic solvent, and the molar ratio of the silicon carbide powder to the carbon powder is 1: 2-15, the ratio of the mass sum of the silicon carbide powder and the carbon powder to the amount of the organic solvent is 1-6 g: 1 mL; preferably, the molar ratio of the silicon carbide powder to the carbon powder is 1: 5-10, wherein the ratio of the mass sum of the silicon carbide powder and the carbon powder to the amount of the organic solvent is 2-5 g: 1 mL; the grain diameter of the silicon carbide powder is less than or equal to 0.1 mm; the molecular formula of the organic solvent only contains carbon, hydrogen and oxygen elements; preferably, the thickness of the growth agent layer is 0.1-3 mm; preferably, the thickness of the growth agent layer is 1-2 mm;
(3) vacuum-pumping to 1.0 × 10-4mbar, closing the baffle in the furnace body. Heating the upper part in the furnace body to 1000-1500 ℃, continuously vacuumizing, and maintaining for 1-3 hours to remove the graphite rod and nitrogen in the furnace body; preferably, the temperature of the upper part in the furnace body is controlled to be 1100-1400 ℃;
meanwhile, heating the lower part in the furnace body to 1200-1800 ℃ to liquefy the silicon briquette and continuously keeping the vacuum degree; preferably, the temperature of the lower part in the furnace body is controlled to be 1300-1600 ℃; if the silicon source raw material is high-purity silicon powder, heating the lower part in the furnace body to 1200-1400 ℃;
if the furnace body is not provided with the partition plate, the upper part in the furnace body and the lower part in the furnace body do not need to be controlled respectively. Controlling the temperature in the furnace body, controlling the furnace body to be heated to 1200-1800 ℃ under a vacuum condition, liquefying the silicon briquette, and continuously keeping the vacuum degree;
(4) the partition is opened while the heating of the lower part of the furnace body is stopped (if no partition is provided in the furnace body, this operation is not performed). And controlling the graphite crucible to rise until the graphite rod is immersed in the silicon liquid. In the whole growth process, the distance between the lowest point of the graphite rod and the bottom of the crucible is more than or equal to 30mm, so that the crucible is prevented from being broken during crystallization, at least part of the graphite rod is immersed in silicon liquid, and the optimal immersion height is 200-500 mm.
Meanwhile, 50-180A of current is introduced into the graphite rod, preferably 60-150A of current is introduced into the graphite rod, so that the temperature of the graphite rod is increased and the graphite rod and the silicon liquid react quickly; the reaction temperature is controlled to be 1300-1800 ℃, preferably 1400-1700 ℃, and at the moment, silicon carbide crystal grains begin to grow on the surface of the graphite rod.
(5) And after the crystal grows for 8-40 h, preferably 10-30 h, controlling the graphite crucible to descend, separating the silicon liquid in the graphite crucible from the crystallized graphite rod, and cooling. When the temperature of the lower part of the furnace body is reduced to 1500-1600 ℃, the graphite crucible is returned to the lower part in the furnace body, and the partition plate is closed;
heating the upper part in the furnace body to 1600-1800 ℃ at a heating rate of 1-5 ℃/min, maintaining for 1-6 h, gasifying unreacted silicon on the surfaces of the crystal grains through high temperature to remove a surface silicon layer, preferably heating to 1650-1750 ℃, and maintaining for 2-5 h to prepare beta silicon carbide powder;
or heating the upper part in the furnace body to 2000-2300 ℃ at the heating rate of 1-5 ℃/min, maintaining for 20-80 min, converting beta silicon carbide powder on the surface of the crystal bar into alpha silicon carbide powder, and gasifying unreacted silicon on the surface of the crystal grains at high temperature to remove a surface silicon layer; preferably, heating to 2100-2200 ℃, and maintaining for 30-60 min to prepare alpha silicon carbide powder;
(6) and stopping heating the upper part in the furnace body, stopping introducing the current of the graphite rod, introducing cooling water into the electrode, and cooling to room temperature.
(7) Opening the furnace body, taking out the graphite rod and collecting surface crystal grains to obtain silicon carbide powder; the mass of the obtained silicon carbide powder is 1.1-1.4 times of the mass of the silicon source.
The silicon carbide powders prepared by the above method are different from the above method in that, as shown in table 1, silicon carbide powder No. 2, silicon carbide powder No. 3, silicon carbide powder No. 4 and silicon carbide powder No. 5, comparative silicon carbide powder No. D1, comparative silicon carbide powder No. D2 and comparative silicon carbide powder No. D3 are prepared. Wherein, an electronic grade silicon block with the purity of 99.999 percent is selected as a silicon source, and a graphite rod with the purity of 99.999 percent is selected as a carbon source.
TABLE 1
The silicon carbide powder No. 1, the silicon carbide powder No. 2, the silicon carbide powder No. 3, the silicon carbide powder No. 4 and the silicon carbide powder No. 5, the comparative silicon carbide powder No. D1, the comparative silicon carbide powder No. D2 and the comparative silicon carbide powder No. D3, which are prepared as described above, were tested, and the test results are shown in Table 2.
TABLE 2
From the results in table 2, it is understood that the high purity silicon carbide powder produced in the examples of the present application has a suitable particle size and a high bulk density. Compared with the embodiment of the application, in the comparative example, the particle size of the silicon carbide powder in the growth agent is increased, the current passing through the graphite rod is changed, and the obtained silicon carbide powder is smaller in particle size and lower in bulk density. Therefore, the high-purity silicon carbide powder prepared by optimizing the parameters such as the particle size of the silicon carbide powder in the growth agent, the current passing through the graphite rod and the like has proper particle size and high bulk density.
The above description is only an example of the present application, and the protection scope of the present application is not limited by these specific examples, but is defined by the claims of the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the technical idea and principle of the present application should be included in the protection scope of the present application.
Claims (10)
1. An apparatus for preparing silicon carbide powder, comprising:
the furnace body is provided with a heating device;
the electrode at least partially penetrates through the interior of the furnace body, a carbon source is at least partially covered on the surface of the electrode part positioned in the interior of the furnace body, and the electrode is used for heating the carbon source after being electrified;
the crucible is arranged in the furnace body, a silicon source is arranged in the crucible, the electrode is positioned above the crucible, and the crucible and the electrode are relatively displaced so that a carbon source on the electrode can contact or be far away from the silicon source in the crucible.
2. The apparatus for preparing silicon carbide powder according to claim 1, wherein the electrode comprises a carbon source, and the carbon source is connected to an external power source.
3. The apparatus for preparing silicon carbide powder according to claim 1, wherein the electrode comprises a fixing member and a carbon source fixed to a surface of the fixing member, and the fixing member is connected to an external power source.
4. The apparatus for preparing silicon carbide powder according to claim 1, wherein a furnace cover is provided on the top of the furnace body, and the electrode is inserted into the furnace body through a through hole in the furnace cover;
the electrode extends in the axial direction of the crucible,
the electrode is connected with a cooling water pipeline.
5. The apparatus for preparing silicon carbide powder according to claim 1, wherein the heating means comprises a first heating means for heating an upper portion in the furnace body and a second heating means for heating a lower portion in the furnace body.
6. The apparatus for preparing silicon carbide powder according to claim 5, wherein the heating means is selected from an electromagnetic induction coil or a resistance wire.
7. The apparatus for preparing silicon carbide powder according to claim 1, wherein a partition is provided inside the furnace body, and when the partition is closed, the interior of the furnace body is divided into two parts; when the partition plate is opened, the interior of the furnace body is communicated.
8. The apparatus for preparing silicon carbide powder according to claim 7, wherein the partition plate extends in a radial direction of the furnace body, and a side wall of the partition plate is fitted to an inner side wall of the furnace body.
9. The apparatus for preparing silicon carbide powder according to claim 7, wherein the partition is a water-cooled partition having a water-cooled pipe.
10. The apparatus for preparing silicon carbide powder according to claim 1, wherein the crucible is connected to a lifting device for controlling the crucible to move up and down;
the lifting device comprises a pillar and a lifting platform driven by a screw transmission mechanism, one end of the pillar is fixed at the bottom of the crucible, and the other end of the pillar sequentially penetrates through the furnace body to be connected with the lifting platform.
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| CN113788480A (en) * | 2021-09-29 | 2021-12-14 | 浙江大学杭州国际科创中心 | Preparation method of high-purity silicon carbide and corresponding high-purity silicon carbide |
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| CN113788480A (en) * | 2021-09-29 | 2021-12-14 | 浙江大学杭州国际科创中心 | Preparation method of high-purity silicon carbide and corresponding high-purity silicon carbide |
| CN113788480B (en) * | 2021-09-29 | 2023-12-19 | 浙江大学杭州国际科创中心 | Preparation method of high-purity silicon carbide and corresponding high-purity silicon carbide |
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