CN102268727A - Crucible driving device for Czochralski crystal growing furnace - Google Patents
Crucible driving device for Czochralski crystal growing furnace Download PDFInfo
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- CN102268727A CN102268727A CN2011101897985A CN201110189798A CN102268727A CN 102268727 A CN102268727 A CN 102268727A CN 2011101897985 A CN2011101897985 A CN 2011101897985A CN 201110189798 A CN201110189798 A CN 201110189798A CN 102268727 A CN102268727 A CN 102268727A
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Abstract
The invention discloses a crucible driving device for a Czochralski crystal growing furnace. The crucible driving device comprises a crucible holder, a crucible rotating component, a crucible shaft component and a crucible lifting component, wherein the crucible holder is fixed on a base; a rolling linear guide rail pair provided with sliders is fixed on the crucible holder; a slipway is connected with two sliders, and is provided with the crucible shaft component; the crucible rotating component is arranged on one side of the slipway and drives the crucible shaft component to rotate; the upper section of a driving ball screw pair is connected with an upper bearing block through a bearing; the upper bearing block is fixed on the top of the crucible holder; the crucible lifting component is fixed on the base and drives a worm reducer; a lower bearing block on the slipway is connected with a screw nut in the driving ball screw pair; the worm reducer is fixed on the base; the driving ball screw pair is directly connected with the worm reducer; and the worm reducer directly drives a ball screw pair to rotate. Compared with the conventional device, the crucible driving device can effectively avoid misoperation to prevent from reducing the crucible to an ultralow position so as not to damage a graphite piece.
Description
Technical field
The present invention relates to a kind of crucible drive unit, refer in particular to the crucible drive unit that is applicable to the Straight pull single crystal growing furnace.
Background technology
The Straight pull single crystal growing furnace be produce used for solar batteries silicon single crystal and unicircuit and silicon single crystal major equipment.Along with the size of solar cell silicon materials is increasing.And unicircuit is more and more higher to the quality requirements of monocrystal material.To the level of automation of corresponding single crystal growth apparatus and the stability of life-time service are had higher requirement with it.In process with the Grown by CZ Method monocrystalline, polycrystal will be placed quartz crucible, make it be molten into the polysilicon liquation through the high temperature receipt, seed crystal is lowered in the polycrystalline liquation by the top, the temperature of control liquid level makes the crystallization again around seed crystal of polycrystalline liquation, generates the silicon single crystal rod of marshalling.In this course, need the quartz crucible of placement polycrystal and seed crystal to rotate with opposite direction and upwards lifting.The stability of polysilicon liquation face, the directly single quality of producing of influence.At present, the single crystal growing furnace that China uses also exists some shortcomings aspect stable, particularly draws the single crystal growing furnace of large size, the use of high-quality monocrystalline, more needs to improve.Crucible drive unit wherein plays important effect to the performance of single crystal growing furnace, therefore, needs to propose a kind of crucible drive unit that improves structure.
Chinese patent once disclosed a kind of " linear guide rail type crucible lifting device " (China, publication number CN1995483A, open day on July 11st, 2007), and its frame parts comprises track base, gusset, base plate and lower margin adjustment piece; Pot ascending part spare comprises speed electric machine assembly, linear rolling guide, top chock, screw mandrel, lifting support, feed screw nut, step and the big assembly of band synchronously; The crucible rotation member comprise corrugated tube, crucible shaft assembly, crucible change magnetic fluid, crucible rotating motor, electric machine support He Duo ?the band assembly.But its topology layout also is not very, there is following major defect specifically: the one, can not avoid misoperation pot potential drop must cross low and the damage graphite piece, owing to be with the aging fracture cause that reaches synchronously, screw mandrel can glide suddenly in normal productive process, the pot position changes, and directly causes monocrystalline to be scrapped; The 2nd, can not prevent the lower limit fault and influence device security; The 3rd, in pot ascending part spare, fast speed motor is directly exported, and slow speed motor also is direct output, and misoperation takes place easily; The 4th, photoelectric encoder is contained on the worm type of reduction gearing, and is unreasonable.
Chinese patent once disclosed " a kind of czochralski crystal growing furnace crucible drive unit " (China, notification number CN201241197Y, May 12 2009 day for announcing), be provided with lifting driven unit and rotary drive assembly, the lifting driven unit is provided with mounting bracket, line slideway, ball-screw, line slideway and ball-screw are fixed on the mounting bracket, crucible shaft is by the crucible shaft bearing support, be fixed on the crucible holder, crucible holder links together by the nut of transition contiguous block and ball-screw and the slide block of line slideway; Slow speed motor is connected with an end input shaft of worm reducer with the harmonic speed reducer direct connection and by clutch coupling; The rotary drive assembly of crucible is provided with rotating machine, is connected with crucible shaft by planetary reduction gear and rotation wedge type band.But its also many place needs to improve.
Summary of the invention
The object of the present invention is to provide a kind of Straight pull single crystal growing furnace crucible drive unit, it can be avoided misoperation pot potential drop must cross low effectively and damage graphite piece.
For achieving the above object, the scheme that the invention is taked is: a kind of Straight pull single crystal growing furnace crucible drive unit, it comprises crucible holder, the crucible rotary components, the crucible shaft assembly, crucible rises assembly, crucible holder is fixed on the base, the linear rolling guide that two paired are furnished with slide block is fixed on the crucible holder, slide unit is connected with two slide blocks, dress crucible shaft assembly on the slide unit, the crucible rotary components is contained in slide unit one side, the crucible rotary components drives the rotation of crucible shaft assembly, driving the ball wire bar pair epimere is connected with top chock by bearing, top chock is fixed on the crucible holder end face, crucible rises assembly and is fixed on the base, crucible rises assembly and drives worm reducer, and the step on the slide unit is connected with feed screw nut in the driving ball wire bar pair, and worm reducer is fixed on the base, drive ball wire bar pair and directly connect worm reducer, worm reducer directly drives and drives the ball wire bar pair rotation.
This Straight pull single crystal growing furnace is compared with existing apparatus with crucible drive unit, drive ball wire bar pair and directly connect worm reducer, worm reducer directly drives and drives the ball wire bar pair rotation, worm reducer can avoid misoperation pot potential drop must cross low and the damage graphite piece again as driving the very reliable self-locking structure of ball wire bar pair effectively.
Description of drawings
Fig. 1 is the explosive view of present embodiment.
Fig. 2 is the main TV structure synoptic diagram of present embodiment.
Fig. 3 is a crucible rotary components structural representation.
Fig. 4 is that crucible rises the unit construction synoptic diagram.
Fig. 5 is a crucible shaft unit construction synoptic diagram.
Among the figure: 1, crucible holder, 2, the crucible shaft assembly, 3, the crucible rotary components, 4, crucible rises assembly, 5, the crucible limit assembly, 6, drive ball wire bar pair, 7, linear rolling guide, 8, worm reducer, 9, step, 10, top chock, 11, encoder, 12, the horizontal adjustment under-chassis, 13, crucible limit lower limit collision protection buffer block, 14, base, 15, slide unit, 16, slide block, 17, the feed screw nut, 18, the upper stroke switch seat, 19, the lower stroke switch seat, 20, limitation travel switch, 21, the crucible gag lever post, 22, pot changes many contracts band, 23, crucible frame mounting plate, 24, dustproof corrugated tube, 31, adjustable support, 32, the pot rotating motor, 33, belt wheel, 34, adjustable skid, 35, speed reduction unit, 36, governing screw, 41, slow lifting motor, 42, clutch pack, 43, fast lifting motor, 44, be with 45 synchronously, synchronous pulley, 46, support, 47, slide plate is installed, 201, crucible shaft, 202, the magnetic fluid pallet that prevents dust, 203, lengthening magnetic current sealing mechanism, 205, pot commentaries on classics belt wheel, 206 cooling systems.
Embodiment
Below in conjunction with embodiment and accompanying drawing thereof the present invention is remake description.
Referring to Fig. 1, a kind of Straight pull single crystal growing furnace crucible drive unit, it comprises crucible holder 1, crucible rotary components 3, crucible shaft assembly 2, crucible rises assembly 4, crucible holder 1 is fixed on the base 14, the linear rolling guide 7 that two paired are furnished with slide block 16 is fixed on the crucible holder 1, slide unit 15 is connected with two slide blocks 16, dress crucible shaft assembly 2 on the slide unit 15, crucible rotary components 3 is contained in slide unit 15 1 sides, crucible rotary components 3 drives 2 rotations of crucible shaft assembly, driving ball wire bar pair 6 epimeres is connected with top chock 10 by bearing, top chock 10 is fixed on crucible holder 1 end face, crucible rises assembly 4 and is fixed on the base 14, crucible rises assembly 4 and drives worm reducers 8, and the step 9 in the slide unit 15 is connected with feed screw nut 17 in the driving ball wire bar pair 6, and worm reducer 8 is fixed on the base 14, drive ball wire bar pair 6 and directly connect worm reducer 8, worm reducer 8 directly drives and drives ball wire bar pair 6 rotations.
Referring to Fig. 1, crucible limit lower limit collision protection buffer block 13 is set on the described base 14, it is spacing to carry out the safety precaution pressure, when preventing the lower limit fault, guarantees device security.
Referring to Fig. 1 and Fig. 2, fixedly upper stroke switch seat 18 and lower stroke switch seat 19 on described crucible holder 1 one sides, on upper stroke switch seat 18 and the lower stroke switch seat 19 limitation travel switch 20 is housed respectively, two limitation travel switches 20 and crucible gag lever post 21 constitute crucible limit assemblies 5, fixedly on the slide unit 15, upper stroke switch seat 18 and lower stroke switch seat 19 positions are adjustable for crucible gag lever post 21.Crucible limit assembly 5 is set, avoids pot position to rise so high and low excessively.Upper stroke switch seat 18 and lower stroke switch seat 19 upper-lower positions are adjustable, and promptly stroke is adjustable.
Referring to Fig. 1 and Fig. 2, encoder 11 is installed on described driving ball wire bar pair 6 tops, and encoder 11 is fixedly on the top chock 10.Encoder 11 is directly measured the rotating speed that drives ball wire bar pair 6, than the angle that the worm type of reduction gearing output shaft of measuring in the CN201241197Y patent turns over, comes directly and conveniently.
Referring to Fig. 1, Fig. 2 and Fig. 3, described crucible rotary components 3 is made of adjustable support 31, pot rotating motor 32, belt wheel 33, adjustable skid 34, speed reduction unit 35, governing screw 35, adjustable skid 34 is contained in the adjustable support 31, on pot rotating motor 32 and the speed reduction unit 35 stationary adjustable slide plates 34, pot rotating motor 32 drives belt wheel 33 rotations by speed reduction unit 35, governing screw 35 is regulated the position of adjustable skid 34, and adjustable support 31 is installed in slide unit 15 1 sides.Regulate the position of adjustable skids 34, rapid adjustment belt tension or replacing belt in good time by governing screw 35.
Referring to Fig. 1, Fig. 2 and Fig. 4, described crucible rise assembly 4 by slow lifting motor 41, clutch pack 42, fast lifting motor 43, be with 44 synchronously, synchronous pulley 45, support 46, slide plate 47 is installed is constituted, clutch pack 42 and support 46 are fixed on to be installed on the slide plate 47, slow lifting motor 41 is connected with clutch pack 42, fast lifting motor 43 is fixed on clutch pack 42 end faces, install on the slide plate 47 and have some waist shaped holes, slide plate 47 is installed is fixed on the base 14; The rotation of slow lifting motor 41 passes to by clutch pack 42, synchronous pulley 45, worm reducer 8 and drives ball wire bar pair 6, realizes the rising at a slow speed or the decline of slide unit 15; When clutch pack 42 dead electricity are thrown off, the rotation of fast lifting motor 43 by be with 44 synchronously, synchronous pulley 45, worm reducer 8 pass to and drive ball wire bar pair 6, realizes the fast rise or the decline of slide unit 15.Install on the slide plate 47 and have some waist shaped holes, can regulate belt wheel parallelism and transmission belt tensile force easily and fast.
Referring to Fig. 1, Fig. 2 and Fig. 5, described crucible shaft assembly 2 is by crucible shaft 201, the magnetic fluid pallet 202 that prevents dust, lengthening magnetic current sealing mechanism 203, pot commentaries on classics belt wheel 205 and cooling system 206 constitute, crucible shaft 201 is passed the dustproof pallet 202 of magnetic fluid, lengthening magnetic current sealing mechanism 203, pot commentaries on classics belt wheel 205 is sleeved on crucible shaft 201 hypomeres, crucible shaft connects cooling system 206 201 times, lengthening magnetic current sealing mechanism 203 is fixed in the slide unit 15, the dustproof pallet 202 of magnetic fluid is on lengthening magnetic current sealing mechanism 203, being with pot on the pot commentaries on classics belt wheel 205 changes many contracts band 22, and the magnetic fluid in the lengthening magnetic current sealing mechanism 203 adopts three grades of bearings.The dustproof pallet 202 of magnetic fluid is set, can be connected on pallet to a large amount of oxide compounds that produced in the production process and the polycrystalline waste material that splashes, avoid falling in magnetic current rotation and the stationary engagement slit.Because oxide compound is extremely hard, may directly cause magnetic fluid to damage in the magnetic fluid in case fall into, and the magnetic fluid bite appears, the phenomenon of having the hiccups, in normal crystal pulling process, cause polycrystal and graphite piece to be scrapped usually; In normal productive process, sudden leakage silicon happens occasionally, and the dustproof pallet 202 of magnetic fluid can fine protection magnetic fluid.Magnetic fluid adopts three grades of bearings, has advantages such as supporting capacity is big, rotating accuracy is high, shock resistance is strong, long service life.
Referring to Fig. 1 and Fig. 2, be fixed with 12, four horizontal adjustment under-chassis 12 of 12, four horizontal adjustment under-chassis of four horizontal adjustment under-chassis below the described base 14 and be placed on the crucible frame mounting plate 23.
Referring to Fig. 2, described driving ball wire bar pair 6 epimeres are with dustproof corrugated tube 24.
This device is after contrasting through test of many times, select suitable mechanism (assembly) for use according to comparing result, with rational layout each assembly is installed on the crucible frame, control the assembly precision between each parts effectively, and from user and spot check maintenance personnel's angle, with convenient, rapidly, reliably be principle, carry out well-designedly, improved crucible mechanism widely in the operating stationarity of work, reliability, and the control accuracy of operation.Be furnished with on the crystal furnace of full-automatic control system, product percent of pass, yield rate, every index parameter are very good, satisfy the requirement of various uses to monocrystal material fully.
Claims (7)
1. Straight pull single crystal growing furnace crucible drive unit, it comprises crucible holder (1), crucible rotary components (3), crucible shaft assembly (2), crucible rises assembly (4), crucible holder (1) is fixed on the base (14), the linear rolling guide (7) that two paired are furnished with slide block (16) is fixed on the crucible holder (1), slide unit (15) is connected with two slide blocks (16), slide unit (15) is gone up dress crucible shaft assembly (2), crucible rotary components (3) is contained in slide unit (15) one sides, crucible rotary components (3) drives crucible shaft assembly (2) rotation, driving ball wire bar pair (6) epimere is connected with top chock (10) by bearing, top chock (10) is fixed on crucible holder (1) end face, crucible rises assembly (4) and is fixed on the base (14), crucible rises assembly (4) and drives worm reducer (8), it is characterized in that: the step (9) in the slide unit (15) is connected with feed screw nut (17) in driving ball wire bar pair (6), worm reducer (8) is fixed on the base (14), drive ball wire bar pair (6) and directly connect worm reducer (8), worm reducer (8) directly drives and drives ball wire bar pair (6) rotation.
2. Straight pull single crystal growing furnace crucible drive unit according to claim 1 is characterized in that: crucible limit lower limit collision protection buffer block (13) is set on the described base (14).
3. Straight pull single crystal growing furnace crucible drive unit according to claim 1, it is characterized in that: fixedly upper stroke switch seat (18) and lower stroke switch seat (19) on described crucible holder (1) one side, on upper stroke switch seat (18) and the lower stroke switch seat (19) limitation travel switch (20) is housed respectively, two limitation travel switches (20) and crucible gag lever post (21) constitute crucible limit assembly (5), fixedly on the slide unit (15), upper stroke switch seat (18) and lower stroke switch seat (19) upper-lower position are adjustable for crucible gag lever post (21).
4. Straight pull single crystal growing furnace crucible drive unit according to claim 1 is characterized in that: encoder (11) is installed on described driving ball wire bar pair (6) top, and encoder (11) is fixedly on the top chock (10).
5. Straight pull single crystal growing furnace crucible drive unit according to claim 1, it is characterized in that: described crucible rotary components (3) is by adjustable support (31), pot rotating motor (32), belt wheel (33), adjustable skid (34), speed reduction unit (35), governing screw (35) constitutes, adjustable skid (34) is contained in the adjustable support (31), on pot rotating motor (32) and speed reduction unit (35) the stationary adjustable slide plate (34), pot rotating motor (32) drives belt wheel (33) rotation by speed reduction unit (35), governing screw (35) is regulated the position of adjustable skid (34), and adjustable support (31) is installed in slide unit (15) one sides.
6. Straight pull single crystal growing furnace crucible drive unit according to claim 1, it is characterized in that: described crucible rises assembly (4) by slow lifting motor (41), clutch pack (42), fast lifting motor (43), be with synchronously (44), synchronous pulley (45), support (46), slide plate (47) is installed to be constituted, clutch pack (42) and support (46) are fixed on to be installed on the slide plate (47), slow lifting motor (41) is connected with clutch pack (42), fast lifting motor (43) is fixed on clutch pack (42) end face, install on the slide plate (47) and have some waist shaped holes, slide plate (47) is installed is fixed on the base (14); The rotation of slow lifting motor (41) passes to by clutch pack (42), synchronous pulley (45), worm reducer (8) and drives ball wire bar pair (6), realizes the rising at a slow speed or the decline of slide unit (15); When clutch pack (42) dead electricity was thrown off, the rotation of fast lifting motor (43) was by band (44), synchronous pulley (45), worm reducer (8) pass to driving ball wire bar pair (6), the fast rise or the decline of realization slide unit (15) synchronously.
7. Straight pull single crystal growing furnace crucible drive unit according to claim 1, it is characterized in that: described crucible shaft assembly (2) is by crucible shaft (201), the magnetic fluid pallet (202) that prevents dust, lengthening magnetic current sealing mechanism (203), pot commentaries on classics belt wheel (205) and cooling system (206) constitute, crucible shaft (201) is passed the dustproof pallet (202) of magnetic fluid, lengthening magnetic current sealing mechanism (203), pot commentaries on classics belt wheel (205) is sleeved on crucible shaft (201) hypomere, connect cooling system (206) under the crucible shaft (201), lengthening magnetic current sealing mechanism (203) is fixed in the slide unit (15), magnetic fluid prevents dust pallet (202) on lengthening magnetic current sealing mechanism (203), being with pot on the pot commentaries on classics belt wheel (205) changes many contracts band (22), and the magnetic fluid in the lengthening magnetic current sealing mechanism (203) adopts three grades of bearings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101897985A CN102268727A (en) | 2011-07-04 | 2011-07-04 | Crucible driving device for Czochralski crystal growing furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101897985A CN102268727A (en) | 2011-07-04 | 2011-07-04 | Crucible driving device for Czochralski crystal growing furnace |
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| CN102268727A true CN102268727A (en) | 2011-12-07 |
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| CN2011101897985A Pending CN102268727A (en) | 2011-07-04 | 2011-07-04 | Crucible driving device for Czochralski crystal growing furnace |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103132135A (en) * | 2012-12-13 | 2013-06-05 | 苏州工业园区杰士通真空技术有限公司 | High-efficient novel sapphire crystal growth system |
| CN103982636A (en) * | 2014-02-24 | 2014-08-13 | 苏州新一磁业有限公司 | Sealing transmission mechanism |
| CN104451884A (en) * | 2014-12-11 | 2015-03-25 | 河北同光晶体有限公司 | Lifting controlsystem and lifting control method for crucible of silicon carbide crystal furnace |
| CN107460540A (en) * | 2017-09-22 | 2017-12-12 | 浙江昀丰新材料科技股份有限公司 | A kind of balance adjustment type Winder |
| CN107858748A (en) * | 2017-12-15 | 2018-03-30 | 江苏润弛太阳能材料科技有限公司 | A kind of mobile runner device for solar energy quartz crucible |
| CN108656714A (en) * | 2018-06-21 | 2018-10-16 | 珠海镇东有限公司 | Vacuum screen printer stepping Tai Kuang mechanisms, vacuum screen printer and screen printing method |
| CN108688936A (en) * | 2018-05-29 | 2018-10-23 | 上海鸿研物流技术有限公司 | A kind of carrier |
| CN110733879A (en) * | 2019-11-27 | 2020-01-31 | 广东凌丰五金装备科技股份有限公司 | Concentric positioning clamp with lifting device |
| CN111074333A (en) * | 2018-10-19 | 2020-04-28 | 中国电子科技集团公司第四十八研究所 | Single crystal growth equipment and use method thereof |
| CN112877645A (en) * | 2021-01-12 | 2021-06-01 | 合肥京东方卓印科技有限公司 | Evaporation crucible and evaporation equipment with same |
| CN113758252A (en) * | 2021-08-24 | 2021-12-07 | 上海汉虹精密机械有限公司 | Crucible lifting and rotating mechanism special for silicon carbide furnace |
| CN117128768A (en) * | 2023-10-26 | 2023-11-28 | 福建福碳新材料科技有限公司 | Roasting fixing device for production of isostatic pressing graphite crucible for third-generation semiconductor |
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| CN1995483A (en) * | 2006-12-16 | 2007-07-11 | 杭州慧翔电液技术开发有限公司 | Linear guide rail type crucible lifting device |
| CN201241197Y (en) * | 2008-08-15 | 2009-05-20 | 北京七星华创电子股份有限公司 | Copple drive device for vertical pulling single crystal furnace |
| CN201402043Y (en) * | 2009-04-21 | 2010-02-10 | 上海汉虹精密机械有限公司 | Crucible elevator mechanism |
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2011
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Patent Citations (3)
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| CN1995483A (en) * | 2006-12-16 | 2007-07-11 | 杭州慧翔电液技术开发有限公司 | Linear guide rail type crucible lifting device |
| CN201241197Y (en) * | 2008-08-15 | 2009-05-20 | 北京七星华创电子股份有限公司 | Copple drive device for vertical pulling single crystal furnace |
| CN201402043Y (en) * | 2009-04-21 | 2010-02-10 | 上海汉虹精密机械有限公司 | Crucible elevator mechanism |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103132135A (en) * | 2012-12-13 | 2013-06-05 | 苏州工业园区杰士通真空技术有限公司 | High-efficient novel sapphire crystal growth system |
| CN103982636A (en) * | 2014-02-24 | 2014-08-13 | 苏州新一磁业有限公司 | Sealing transmission mechanism |
| CN104451884A (en) * | 2014-12-11 | 2015-03-25 | 河北同光晶体有限公司 | Lifting controlsystem and lifting control method for crucible of silicon carbide crystal furnace |
| CN107460540A (en) * | 2017-09-22 | 2017-12-12 | 浙江昀丰新材料科技股份有限公司 | A kind of balance adjustment type Winder |
| CN107858748A (en) * | 2017-12-15 | 2018-03-30 | 江苏润弛太阳能材料科技有限公司 | A kind of mobile runner device for solar energy quartz crucible |
| CN108688936A (en) * | 2018-05-29 | 2018-10-23 | 上海鸿研物流技术有限公司 | A kind of carrier |
| CN108656714A (en) * | 2018-06-21 | 2018-10-16 | 珠海镇东有限公司 | Vacuum screen printer stepping Tai Kuang mechanisms, vacuum screen printer and screen printing method |
| CN111074333A (en) * | 2018-10-19 | 2020-04-28 | 中国电子科技集团公司第四十八研究所 | Single crystal growth equipment and use method thereof |
| CN110733879A (en) * | 2019-11-27 | 2020-01-31 | 广东凌丰五金装备科技股份有限公司 | Concentric positioning clamp with lifting device |
| CN112877645A (en) * | 2021-01-12 | 2021-06-01 | 合肥京东方卓印科技有限公司 | Evaporation crucible and evaporation equipment with same |
| CN113758252A (en) * | 2021-08-24 | 2021-12-07 | 上海汉虹精密机械有限公司 | Crucible lifting and rotating mechanism special for silicon carbide furnace |
| CN117128768A (en) * | 2023-10-26 | 2023-11-28 | 福建福碳新材料科技有限公司 | Roasting fixing device for production of isostatic pressing graphite crucible for third-generation semiconductor |
| CN117128768B (en) * | 2023-10-26 | 2024-02-13 | 福建福碳新材料科技有限公司 | Roasting fixing device for production of isostatic pressing graphite crucible for third-generation semiconductor |
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Application publication date: 20111207 |