CN112877645A - Evaporation crucible and evaporation equipment with same - Google Patents
Evaporation crucible and evaporation equipment with same Download PDFInfo
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- CN112877645A CN112877645A CN202110035016.6A CN202110035016A CN112877645A CN 112877645 A CN112877645 A CN 112877645A CN 202110035016 A CN202110035016 A CN 202110035016A CN 112877645 A CN112877645 A CN 112877645A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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Abstract
The utility model provides an evaporation coating crucible and have evaporation coating equipment of this evaporation coating crucible belongs to and shows technical field, and this evaporation coating crucible includes: the crucible support comprises a base, a fixed frame and a supporting piece connected between the base and the fixed frame; the crucible comprises a crucible body and a crucible body, wherein the crucible body comprises a fixed body and a telescopic body, the fixed body is provided with a fixed accommodating cavity, one end of the fixed body is provided with a discharge port, the other end of the fixed body is communicated with one end of the telescopic body, the telescopic body is provided with a variable accommodating cavity, and the fixed accommodating cavity and the variable accommodating cavity form an accommodating cavity for accommodating evaporation materials; the driving assembly comprises a fixed part and a moving part, the fixed part is fixed on the base, the moving part is connected to one side of the telescopic body far away from the outlet, and the moving part reciprocates along the telescopic direction of the telescopic body. According to the evaporation crucible provided by the disclosure, the driving assembly drives the telescopic body to stretch, so that the distance between an evaporation material and the discharge port is kept unchanged basically, and the uniformity and the stability of evaporation are ensured.
Description
Technical Field
The utility model relates to a show technical field, especially relate to an evaporation coating crucible and have evaporation coating equipment of this evaporation coating crucible.
Background
With the continuous update of mobile consumer electronics, the display industry is rapidly developed. In the display manufacturing process, material evaporation is a more central process. The vapor deposition is a process of heating a coating material in a high vacuum environment to sublimate the coating material and form a film on a substrate. At present, in the evaporation process of display products, used evaporation crucibles are all of structures with fixed accommodating cavity depths. Along with the reduction of evaporation material in the crucible holding cavity, the distance between the evaporation material and the top of the cavity is gradually increased, thereby affecting the uniformity and stability of evaporation.
The above information disclosed in the background section is only for enhancement of understanding of the background of the present disclosure and therefore it may contain information that does not constitute prior art that is known to a person of ordinary skill in the art.
Disclosure of Invention
The utility model aims at providing an evaporation crucible and have evaporation equipment of this evaporation crucible, this evaporation crucible body includes scalable body, and drive assembly is flexible through the scalable body of drive, and then changes the size that holds the chamber variably to further change and hold the distance between intracavity coating by vaporization material and the discharge port, maintain the distance between coating by vaporization material and the discharge port and basically unchangeable, thereby ensure the homogeneity and the stability of coating by vaporization.
In order to achieve the purpose, the technical scheme adopted by the disclosure is as follows:
according to a first aspect of the present disclosure, there is provided an evaporation crucible comprising:
the crucible support comprises a base, a fixed frame and a supporting piece connected between the base and the fixed frame;
the crucible comprises a crucible body, wherein the crucible body comprises a fixed body and a telescopic body, the fixed body is fixed on the fixing frame, the fixed body is provided with a fixed accommodating cavity, one end of the fixed body is provided with a discharge port, the other end of the fixed body is communicated with one end of the telescopic body, the other end of the telescopic body is a closed end, the telescopic body is telescopic along the superposition direction of the fixed body and the telescopic body, the telescopic body is provided with a variable accommodating cavity, the discharge port, the fixed accommodating cavity and the variable accommodating cavity are mutually communicated, and the fixed accommodating cavity and the variable accommodating cavity form an accommodating cavity for accommodating evaporation materials;
the driving assembly comprises a fixing portion and a moving portion, the fixing portion is fixed on the base, the moving portion is connected to one side, away from the discharge port, of the telescopic body, and the moving portion moves in a reciprocating mode in the telescopic direction of the telescopic body.
In an exemplary embodiment of the present disclosure, the driving assembly further includes a driving circuit, the moving portion is a first magnetic member, the fixing portion is a second magnetic member, and at least one of the first magnetic member and the second magnetic member is electrically connected to the driving circuit.
In an exemplary embodiment of the present disclosure, the evaporation crucible further includes:
the guide rail is connected between the base and the fixed frame, and the moving part is in sliding connection with the guide rail.
In an exemplary embodiment of the present disclosure, a connection plate is disposed between the moving part and the guide rail, one end of the connection plate is fixedly connected to the moving part, and the other end of the connection plate is slidably connected to the guide rail.
In an exemplary embodiment of the present disclosure, a linear bearing is disposed at a connection position of the connecting plate and the guide rail, a mounting hole is formed in one end of the connecting plate, which is connected to the guide rail, in a penetrating manner, the mounting hole is coaxially disposed with a bearing hole of the linear bearing, the guide rail penetrates through the mounting hole and the bearing hole, and the shape and the size of the mounting hole, the bearing hole and the guide rail are matched.
In an exemplary embodiment of the present disclosure, a pad is disposed between the connecting plate and the linear bearing, and a through hole is disposed through the pad and is coaxial with the bearing hole.
In an exemplary embodiment of the present disclosure, the supporting member includes a plurality of supporting pillars, the supporting pillars are circumferentially and uniformly distributed on the periphery of the retractable body, the top end of the supporting pillar is detachably connected to the fixing frame, and the bottom end of the supporting pillar is fixedly connected to the base.
In an exemplary embodiment of the disclosure, the supporting column is located at a side of the guide rail away from the stretchable body.
In an exemplary embodiment of the present disclosure, the stretchable body is an elastic bellows.
According to a second aspect of the present disclosure, there is provided an evaporation apparatus comprising the evaporation crucible of the first aspect.
The utility model provides an evaporation crucible, including crucible body, drive assembly and crucible support. Wherein the crucible body includes fixed body and scalable body, and the one end of fixed body is provided with the discharge port, and the other end and the scalable body intercommunication of fixed body. The fixed body is provided with a fixed accommodating cavity, and the telescopic body is provided with a variable accommodating cavity. The fixed chamber and the variable chamber that holds constitute and hold the chamber for hold the coating by vaporization material. The variable accommodating cavity has elasticity, so that the accommodating space of the variable accommodating cavity is adjustable. The crucible support comprises a base, a fixing frame and a supporting piece connected between the base and the fixing frame. The driving assembly comprises a fixed part and a moving part, the fixed part is fixed on the base, the moving part is connected to one side of the telescopic body far away from the outlet, and the moving part reciprocates along the telescopic direction of the telescopic body. In actual coating by vaporization in-process, this disclosure provides an evaporation coating crucible, crucible body include scalable body, and drive assembly is flexible through the scalable body of drive, and then changes the size that variably holds the chamber to further change and hold the distance between intracavity coating by vaporization material and the discharge port, maintain the distance between coating by vaporization material and the discharge port and be unchangeable basically, thereby ensure the homogeneity and the stability of coating by vaporization. In addition, the crucible body still includes fixed body, and fixed body can avoid scalable body to shrink the transition at the coating by vaporization in-process to guarantee the security of coating by vaporization.
Drawings
The above and other features and advantages of the present disclosure will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.
FIG. 1 is a schematic view showing a state before evaporation of an evaporation material in a crucible in the related art;
FIG. 2 is a schematic view showing a state after evaporation of an evaporation material in a crucible in the related art;
FIG. 3 is a schematic structural diagram of an evaporation crucible before evaporation in an exemplary embodiment of the disclosure;
FIG. 4 is a schematic diagram of a shrinkage structure of an evaporation crucible in an exemplary embodiment of the disclosure after evaporation.
The reference numerals of the main elements in the figures are explained as follows:
100-crucible body; 110-a fixed body; 111-a fixed containment chamber; 112-a discharge port; 120-a scalable body; 121-a variable containment chamber; 200-a drive assembly; 210-a moving part; 220-a fixed part; 300-crucible support; 310-a base; 320-a fixed frame; 330-a support; 400-a guide rail; 500-linear bearings; 600-a connecting plate; 700-cushion block; 10-a crucible; 20-vapor deposition of material.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many different forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the disclosure.
In the drawings, the thickness of regions and layers may be exaggerated for clarity. The same reference numerals denote the same or similar structures in the drawings, and thus detailed descriptions thereof will be omitted.
The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the disclosure. One skilled in the relevant art will recognize, however, that the embodiments of the disclosure can be practiced without one or more of the specific details, or with other methods, components, materials, and so forth. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring the primary technical ideas of the disclosure.
When a structure is "on" another structure, it may mean that the structure is integrally formed with the other structure, or that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure via another structure.
The terms "a," "an," "the," and the like are used to denote the presence of one or more elements/components/parts; the terms "comprising" and "having" are intended to be inclusive and mean that there may be additional elements/components/etc. other than the listed elements/components/etc. The terms "first" and "second", etc. are used merely as labels, and are not limiting on the number of their objects.
In the related art, an evaporation apparatus includes a housing and a crucible provided in the housing, and the crucible is provided with a heating element. The crucible is a structural body with a fixed cavity depth, and the cavity is used for containing evaporation materials. Under the heating action of the heating element, the evaporation material in the crucible is gradually reduced. As shown in fig. 1 and 2, the crucible 10 contains the evaporation material 20, and as the evaporation time continues, the evaporation material 2 is gradually consumed, and the distance between the evaporation material 20 in the cavity of the crucible 10 and the outlet at the top of the cavity gradually increases. At present, the heating temperature of the heating element is often increased to increase the vaporization rate of the evaporation material, so as to maintain the stability and uniformity of the deposition rate of the evaporation material on the substrate. However, there is instability in increasing the heating temperature of the heating element, in actual operation, it is difficult to ensure uniformity and stability of evaporation, and the heating temperature is continuously increased along with continuous consumption of the evaporation material, and too high temperature may also affect the quality of the evaporation material to a certain extent, further affecting the quality of the film layer.
As shown in fig. 2, an exemplary embodiment of the present disclosure provides an evaporation crucible, including:
the crucible holder 300, the crucible holder 300 includes a base 310, a holder 320, and a supporter 330 connected between the base 310 and the holder 320;
the crucible body 100, the crucible body 100 includes a fixed body 110 and a telescopic body 120, the fixed body 110 is fixed to a fixing frame 320, the fixed body 110 has a fixed accommodating cavity 111, one end of the fixed body 110 is provided with an outlet 112, the other end of the fixed body 110 is communicated with one end of the telescopic body 120, the other end of the telescopic body 120 is a closed end, the telescopic body 120 is telescopic along the overlapping direction of the fixed body 110 and the telescopic body 120, the telescopic body 120 has a variable accommodating cavity 121, the outlet 112, the fixed accommodating cavity 111 and the variable accommodating cavity 121 are communicated with each other, and the fixed accommodating cavity 111 and the variable accommodating cavity 121 form an accommodating cavity for accommodating evaporation materials;
the driving assembly 200, the driving assembly 200 includes a fixing portion 220 and a moving portion 210, the fixing portion 220 is fixed on the base 310, the moving portion 210 is connected to a side of the stretchable body 120 away from the outlet 112, and the moving portion 210 reciprocates along a stretching direction of the stretchable body 120.
The present disclosure provides an evaporation crucible including a crucible body 100, a driving assembly 200, and a crucible holder 300. The crucible body 100 includes a fixed body 110 and a telescopic body 120, wherein one end of the fixed body 110 is provided with a discharge port 112, and the other end of the fixed body 110 is communicated with the telescopic body 120. The fixed body 110 has a fixed receiving cavity 111, and the stretchable body 120 has a variable receiving cavity 121. The fixed accommodating chamber 111 and the variable accommodating chamber 121 constitute an accommodating chamber for accommodating an evaporation material. The variable accommodating cavity 121 has flexibility, so that the accommodating space of the variable accommodating cavity is adjustable. The crucible holder 300 includes a base 310, a holder 320, and a support 330 connected between the base 310 and the holder 320. The driving assembly 200 includes a fixing portion 220 and a moving portion 210, the fixing portion 220 is fixed to the base 310, the moving portion 210 is connected to a side of the stretchable body 120 away from the outlet 112, and the moving portion 210 reciprocates along a stretching direction of the stretchable body 120. In the actual evaporation process, the crucible body 100 of the evaporation crucible provided by the present disclosure includes the telescopic body 120, and the driving assembly 200 is driven by the telescopic body 120 to be telescopic, so as to change the size of the variable accommodating cavity 121, further change the distance between the evaporation material in the accommodating cavity and the discharge port 112, and maintain the distance between the evaporation material and the discharge port 112 to be substantially unchanged, thereby ensuring the uniformity and stability of evaporation. In addition, the crucible body 100 further includes a fixing body 110, and the fixing body 110 can prevent the retractable body 120 from shrinking and transiting during the evaporation process, so as to ensure the safety of the evaporation.
A vapor deposition crucible and a vapor deposition apparatus according to an embodiment of the present disclosure will be described in detail below with reference to the accompanying drawings:
as shown in fig. 3 and 4, the evaporation crucible provided by the present disclosure includes a crucible body 100, a driving assembly 200, and a crucible holder 300. The crucible holder 300 includes a base 310, a holder 320, and a supporter 330 connected between the base 310 and the holder 320, for fixedly supporting the crucible body 100. The crucible body 100 comprises a fixed body 110 and a telescopic body 120, the driving assembly 200 comprises a fixed part 220 and a moving part 210, the moving part 210 is connected to one side of the telescopic body 120 far away from the discharge port 112, and the moving part 210 reciprocates along the telescopic direction of the telescopic body 120 to drive the telescopic body 120 to stretch and contract, so that the space size of the variable accommodating cavity 121 of the telescopic body 120 is changed, and the distance between the evaporation material in the variable accommodating cavity and the discharge port 112 is further changed.
In some exemplary embodiments of the present disclosure, the crucible body 100 is made of a high temperature resistant metal or alloy material, such as tantalum, tungsten, platinum or an alloy thereof, to meet the heating requirement in the actual evaporation process. The fixed body 110 and the stretchable body 120 may be made of the same material or different materials. In some embodiments of the present disclosure, the stretchable body 120 is made of a metal material with good ductility to meet the requirement of stretchability. The fixed body 110 and the retractable body 120 may be integrally formed or may be separated. When the fixing body 110 and the stretchable body 120 are separate structures, the stretchable body 120 may be connected to the fixing body 110 by a fixing connection manner such as welding, and the specific connection manner is not limited in this disclosure.
The fixed body 110 and the stretchable body 120 may be substantially prismatic or cylindrical structures, and the specific shape is not limited in the present disclosure. In some exemplary embodiments of the present disclosure, an end of the fixing body 110 provided with the discharge port 112 is a tapered structure, and the discharge port 112 is provided at a smaller end of the tapered structure. The end of the fixed body 110 connected to the stretchable body 120 is cylindrical or prismatic. The stretchable body 120 may be an elastic bellows. The elastic corrugated pipe in the present disclosure refers to a tubular elastic sensing element formed by connecting foldable corrugated sheets along a folding and stretching direction, and has elasticity. It should be noted that the elastic bellows in the present disclosure includes elastic bellows having a substantially cylindrical, prismatic or other shape, and the specific shape is not limited in the present disclosure as long as it has elasticity. The flexible body 120 may be designed as a single layer or multiple layers according to actual requirements, for example, it may be designed as a flexible structure with multiple flexible bellows connected, or it may include a single flexible bellows.
The fixing body 110 has a fixing receiving cavity 111. The retractable body 120 has a variable accommodating cavity 121, and the fixed accommodating cavity 111 and the variable accommodating cavity 121 form an accommodating cavity for accommodating an evaporation material. In the actual evaporation process, the evaporation material is placed in the accommodating cavity, is gasified after being heated, is discharged from the discharge port 112, is deposited on the substrate to be evaporated, and finishes the evaporation process. The addition amount of the evaporation material is designed according to actual requirements. Preferably, the addition amount of the evaporation material can be 1/3-2/3 of the total volume of the accommodating cavity. The evaporation material in the range has better uniformity and stability of evaporation. During the evaporation process, the driving assembly 200 drives and adjusts the telescopic body 120 to contract so as to maintain the distance between the evaporation material and the discharge port 112 to be basically unchanged, thereby ensuring the uniformity and stability of the evaporation.
As shown in fig. 3 and 4, in some embodiments of the present disclosure, the driving assembly 200 further includes a driving circuit (not shown), the moving portion 210 is a first magnetic member, the fixing portion 220 is a second magnetic member, and at least one of the first magnetic member and the second magnetic member is electrically connected to the driving circuit. The first magnetic member is connected to a side of the stretchable body 120 away from the discharge opening 112. The second magnetic member is disposed on a side of the first magnetic member away from the stretchable body 120. In the embodiment of the present disclosure, the second magnetic member is fixed to the base 310. The driving circuit is used for driving the first magnetic piece to move towards the direction far away from the second magnetic piece.
The first and second magnetic members may be electromagnets or permanent magnets. Specifically, one of the first magnetic member and the second magnetic member is an electromagnet, the other is a permanent magnet, or both of them may be electromagnets. When the first magnetic member is an electromagnet, the driving circuit is electrically connected with the first magnetic member. When the second magnetic member is an electromagnet, the driving circuit is electrically connected with the second magnetic member. When first magnetic force spare and second magnetic force spare are the electro-magnet, drive circuit all is connected with first magnetic force spare and second magnetic force spare electricity. In a specific embodiment of the present disclosure, the first magnetic member is a permanent magnet, and the second magnetic member is an electromagnet.
In some embodiments of the present disclosure, the driving circuit is configured to provide a current to the first magnetic member or the second magnetic member connected thereto, and change a moving distance of the first magnetic member by changing a magnitude of the current. During the evaporation process, the magnitude of the magnetic force between the first magnetic member and the second magnetic member is adjusted by changing the magnitude of the current, so that the first magnetic member moves towards the direction close to the discharge port 112 and pushes the stretchable body 120 to contract towards the end close to the discharge port 112, thereby maintaining the distance between the evaporation material and the discharge port 112 substantially unchanged. In the actual evaporation process, according to the magnetic conditions of the first magnetic member and the second magnetic member, in combination with the right-handed screw law, the direction of the current is set, so that a repulsive force is generated between the first magnetic member and the second magnetic member, so that the first magnetic member moves toward the discharge port 112. Specifically, in an embodiment, the current level may be adjusted according to the consumption of the evaporation material, and the consumption of the evaporation material may be calculated from the evaporation thickness. And calculating the intensity of the magnetic field required between the first magnetic piece and the second magnetic piece according to the consumption of the evaporation materials, and calculating the current required to be introduced according to the intensity of the magnetic field required. For example, it is calculated from a calculation formula of the magnetic field intensity generated by direct current. The calculation formula is as follows: h is NxI/Le, wherein H is the magnetic field intensity and has the unit of A/m; n is the number of turns of the excitation coil; i is exciting current and has the unit of A; le is the effective magnetic path length in m. As shown in fig. 3 and 4, the first magnetic member is a permanent magnet, and the second magnetic member is an electromagnet. In the evaporation process, the current applied to the electromagnet is adjusted, so that the first magnetic member moves toward the discharge port 112 and pushes the retractable body 120 to retract, and thus the distance between the evaporation material and the discharge port 112 is substantially unchanged before (fig. 3) and after (fig. 4) evaporation.
In still other exemplary embodiments of the present disclosure, the fixed portion 220 of the driving assembly 200 is a hydraulic cylinder, and the moving portion 210 is a moving plate, and the hydraulic cylinder includes a piston rod, and the moving plate is connected to a telescopic end of the piston rod. In the evaporation process, the moving distance of the moving plate is adjusted by controlling the displacement of the piston rod, so as to adjust the expansion condition of the telescopic body 120.
As shown in fig. 3 and 4, in some exemplary embodiments of the present disclosure, the evaporation crucible further includes a guide rail 400, and the driving assembly 200 drives one end of the stretchable body 120 to slide along the guide rail 400. The guide rail 400 is located at the periphery of the stretchable body 120, and the number of the guide rail 400 may be plural. As shown in fig. 3 and 4, the number of the guide rails 400 is two, and the guide rails are symmetrically located at two opposite sides of the stretchable body 120. It should be noted that the number of the guide rails 400 may also be three, four or more, and the guide rails 400 are circumferentially and uniformly distributed on the periphery of the stretchable body 120, and the specific number and distribution position of the guide rails 400 are not limited in this disclosure as long as the stretchable body 120 can slide along the guide rails 400. In addition, one end of the telescopic body 120 of the present disclosure slides along the guide rail 400, and may include one end of the telescopic body 120 directly connected to the guide rail 400 and sliding along the guide rail 400, or may include one end of the telescopic body 120 indirectly connected to the guide rail 400. In the embodiment of the present disclosure, the moving portion 210 is slidably connected to the guide rail 400, and the stretchable body 120 is slid along the guide rail 400 by means of the moving portion 210.
In some embodiments of the present disclosure, one side surface of the moving portion 210 is connected to a surface of the stretchable body 120 away from the discharge opening 112, and both ends of the moving portion 210 are slidably connected to the guide rails 400. The sliding connection between the moving part 210 and the guide rail 400 is not limited.
In an embodiment of the present disclosure, a linear bearing 500 is disposed at a connection of the moving part 210 and the guide rail 400, and the moving part 210 slides along the guide rail 400 through the linear bearing 500. Specifically, a connecting plate 600 is disposed between the moving part 210 and the guide rail 400, one end of the connecting plate 600 is fixedly connected to the moving part 210, and the other end of the connecting plate 600 is slidably connected to the guide rail 400. The connecting plate 600 is provided with a mounting hole through the one end of the connecting rail 400, the mounting hole is coaxial with the bearing hole of the linear bearing 500, the connecting rail 400 is provided with a mounting hole and a bearing hole through the mounting hole, and the mounting hole, the bearing hole and the connecting rail 400 are matched in shape and size, so that the moving part 210 can stably slide along the connecting rail 400. In still other exemplary embodiments of the present disclosure, a spacer 700 is disposed between the connecting plate 600 and the linear bearing 500, and a through hole is disposed through the spacer 700, and the through hole is disposed coaxially with the bearing hole. Spacer block 700 helps reduce wear of linear bearing 500.
In another embodiment of the present disclosure, a sliding groove is disposed on the guide rail 400, and a protrusion matching with the sliding groove is disposed on the moving portion 210 itself or the connecting plate 600 connecting the moving portion 210 and the guide rail 400. The moving part 210 slides along the guide rail 400 by engagement of the protrusion with the slide groove.
In some exemplary embodiments of the present disclosure, the crucible holder 300 includes a base 310, a holder 320, and a support 330 connected between the base 310 and the holder 320, for fixedly supporting the crucible body 100. The supporting member 330 includes a plurality of supporting pillars, the supporting pillars are circumferentially and uniformly distributed on the periphery of the retractable body 120, the top ends of the supporting pillars are detachably connected to the fixing frame 320, and the bottom ends of the supporting pillars are fixedly connected to the base 310. The number of the support columns may be two, three or more, the support columns may be cylindrical or prismatic, and the specific number and shape are not limited in this disclosure. As shown in fig. 3 and 4, in some embodiments, the guide rail 400 is located at the periphery of the retractable body 120, and the support pillar is located at the side of the guide rail 400 away from the retractable body 120.
The present disclosure also provides an evaporation plating apparatus including the above evaporation plating crucible. In a specific embodiment, the evaporation device further comprises a heating element, wherein the heating element is arranged outside the evaporation crucible and used for providing a heat source for the evaporation crucible. The heating member can be wound on the outer wall of the evaporation crucible to heat the evaporation material in the evaporation crucible, so that the evaporation material is gasified and discharged from the discharge port 112, deposited on the substrate to be evaporated, and the evaporation process is completed. The utility model provides an evaporation crucible, crucible body 100 includes scalable body 120, and drive assembly 200 is flexible through scalable body 120 of drive, and then changes the size that variably holds chamber 121 to further change and hold the distance between intracavity coating by vaporization material and the discharge port 112, maintain the distance between coating by vaporization material and the discharge port 112 and basically unchangeable, thereby reduce the temperature variation of heating member in the coating by vaporization in-process, and then ensure the homogeneity and the stability of coating by vaporization, and guarantee the quality of rete.
It is to be understood that the disclosure is not limited in its application to the details of construction and the arrangements of the components set forth in the specification. The present disclosure is capable of other embodiments and of being practiced and carried out in various ways. The foregoing variations and modifications are within the scope of the present disclosure. It should be understood that the disclosure disclosed and defined in this specification extends to all alternative combinations of two or more of the individual features mentioned or evident from the text and/or drawings. All of these different combinations constitute various alternative aspects of the present disclosure. The embodiments of this specification illustrate the best mode known for carrying out the disclosure and will enable those skilled in the art to utilize the disclosure.
Claims (10)
1. An evaporation crucible, comprising:
the crucible support comprises a base, a fixed frame and a supporting piece connected between the base and the fixed frame;
the crucible comprises a crucible body, wherein the crucible body comprises a fixed body and a telescopic body, the fixed body is fixed on the fixing frame, the fixed body is provided with a fixed accommodating cavity, one end of the fixed body is provided with a discharge port, the other end of the fixed body is communicated with one end of the telescopic body, the other end of the telescopic body is a closed end, the telescopic body is telescopic along the superposition direction of the fixed body and the telescopic body, the telescopic body is provided with a variable accommodating cavity, the discharge port, the fixed accommodating cavity and the variable accommodating cavity are mutually communicated, and the fixed accommodating cavity and the variable accommodating cavity form an accommodating cavity for accommodating evaporation materials;
the driving assembly comprises a fixing portion and a moving portion, the fixing portion is fixed on the base, the moving portion is connected to one side, away from the discharge port, of the telescopic body, and the moving portion moves in a reciprocating mode in the telescopic direction of the telescopic body.
2. An evaporation crucible according to claim 1, wherein the driving assembly further comprises a driving circuit, the moving part is a first magnetic member, the fixing part is a second magnetic member, and at least one of the first magnetic member and the second magnetic member is electrically connected to the driving circuit.
3. An evaporation crucible according to claim 1, further comprising:
the guide rail is connected between the base and the fixed frame, and the moving part is in sliding connection with the guide rail.
4. An evaporation crucible according to claim 3, wherein a connecting plate is provided between the moving part and the guide rail, one end of the connecting plate is fixedly connected to the moving part, and the other end of the connecting plate is slidably connected to the guide rail.
5. The evaporation crucible according to claim 4, wherein a linear bearing is provided at a joint of the connecting plate and the guide rail, a mounting hole is provided through an end of the connecting plate connected to the guide rail, the mounting hole is coaxial with a bearing hole of the linear bearing, the guide rail is provided through the mounting hole and the bearing hole, and the mounting hole, the bearing hole and the guide rail are matched in shape and size.
6. An evaporation crucible according to claim 5, wherein a spacer is provided between the connection plate and the linear bearing, and a through hole is provided through the spacer, and the through hole is provided coaxially with the bearing hole.
7. The evaporation crucible according to claim 3, wherein the support member comprises a plurality of support columns, the support columns are circumferentially and uniformly distributed on the periphery of the telescopic body, the top ends of the support columns are detachably connected with the fixed frame, and the bottom ends of the support columns are fixedly connected with the base.
8. An evaporation crucible according to claim 7, wherein the support column is located on the side of the guide rail remote from the collapsible body.
9. A vaporization crucible according to claim 1, wherein the collapsible body is an elastic bellows.
10. An evaporation apparatus comprising the evaporation crucible according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110035016.6A CN112877645B (en) | 2021-01-12 | 2021-01-12 | Evaporation crucible and evaporation equipment with same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110035016.6A CN112877645B (en) | 2021-01-12 | 2021-01-12 | Evaporation crucible and evaporation equipment with same |
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| CN112877645A true CN112877645A (en) | 2021-06-01 |
| CN112877645B CN112877645B (en) | 2023-06-16 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN114015985B (en) * | 2021-11-15 | 2024-05-07 | 合肥维信诺科技有限公司 | Evaporation equipment |
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| CN112877645B (en) | 2023-06-16 |
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