CN207596948U - A kind of variable electric arc adjustment precipitation equipment in magnetic field - Google Patents
A kind of variable electric arc adjustment precipitation equipment in magnetic field Download PDFInfo
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- CN207596948U CN207596948U CN201721554216.8U CN201721554216U CN207596948U CN 207596948 U CN207596948 U CN 207596948U CN 201721554216 U CN201721554216 U CN 201721554216U CN 207596948 U CN207596948 U CN 207596948U
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- magnetic field
- electric arc
- coil
- variable electric
- supporting rod
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Abstract
The utility model discloses a kind of variable electric arc adjustment precipitation equipments in magnetic field, are related to vacuum PVD technical field, which includes supporting rod, cathode targets and component.Cathode targets are fixed on described supporting rod one end.Component is mounted on supporting rod, and the component includes coil and regulating current device, and the regulating current device is used for regulating winding internal current size, remains unchanged the magnetic field that the cathode targets receive on surface.The actuator of the utility model ensure that the stable magnetic field on cathode targets surface is constant by constantly adjusting the size of coil current, so as to control arc position intensity, shape, it is final enable target accurate stable be deposited on workpiece surface.
Description
Technical field
The utility model is related to vacuum PVD technical fields, and in particular to a kind of variable electric arc adjustment in magnetic field is heavy
Product device.
Background technology
Vacuum Deposition be it is a kind of under vacuum, deposited using modes such as evaporation, sputtering or ionizations in product surface various
The technique of metal and nonmetal film.This technique mainly has vacuum evaporation, sputtering plating and ion plating several types, intermediate ion
Industrial most widely used vacuum arc deposition technology at present is included in plating.Vacuum arc deposition is mainly by the cathode on coating machine
What arc source carried out.Wherein, arc source makes the target starting the arc by striking needle at work, and arc spot is quickly moved in target surface, cloudy
The cathode protection size of pole surface is small, current density is high, the material temperature of arc spot region can quickly rise to boiling point with
On, violent evaporation, splash and ionization are generated, is deposited on matrix.
However cathodic arc spot is at work, easily excites and generate the bottleneck that metal bulky grain always is cathode arc technology
A big difficulty.The prior art is according to the good electric conductivity of arc ions body, electroneutral, with magnetic field can functionality, controlled using magnetic field
Position, shape and the movement of electric arc processed.Rational design simultaneously can be very good control arc motion using magnetic field, so as to substantially
Drop amount is reduced, size is reduced, improves the film layer service life in degree ground.Therefore it is usually controlled in vacuum arc deposition using permanent magnet
System.
But people are generally acknowledged that permanent magnet was no variation in relative to the distance of target, however in practice as target
Continuous consumption, the distance between cathode targets portion target material surface and permanent magnet gradually change.I.e. permanent magnet is to cathode targets portion
The magnetic field of the target of upper different location gradually changes, and has ultimately caused cathode targets portion Surface field constantly variation and then shadow
Ring coating effects.
Utility model content
For defect in the prior art, the purpose of this utility model is to provide a kind of variable electric arc adjustment in magnetic field
Precipitation equipment gradually uses up in cathode targets portion, when changing apart from magnetic field generator, keeps the magnetic field on cathode targets portion surface
It is constant.
To achieve the above objectives, the technical scheme adopted by the utility model is that：
A kind of variable electric arc adjustment precipitation equipment in magnetic field, which is characterized in that it includes：
One supporting rod；
One cathode targets are fixed on described supporting rod one end；
One component, the support bar group are set on the component, and the component includes coil and regulating current device is electrically connected,
The regulating current device is used for regulating winding size of current.
Based on the above technical solution, the component includes main part, and the coil is installed on the main part
On point.
Based on the above technical solution, the coil is embedded at the main part.
Based on the above technical solution, the main part for annular and with coil jointly around being fixed on supporting rod
On.
Based on the above technical solution, the component further includes fixing device, and main part is fixed on support
On bar
Based on the above technical solution, the regulating current device further includes a computing unit, for calculating current
Amount.
Based on the above technical solution, the computing unit is also connected with a distance meter, the range measurement
Instrument is used to measure cathode targets consumption.
Based on the above technical solution, the component further includes a temperature alarming device, for detection coil temperature
And it is higher than preset value alarm in temperature.
Based on the above technical solution, the regulating current device is equipped with reading table.
Based on the above technical solution, the cathode targets are also comprising target and containing reeded cathode target base, institute
It states cathode target base to be fixed on supporting rod, target is fixed on cathode target base.
Compared with prior art, the utility model has the advantage of：
(1) the utility model be adjusted in arc ion plating composite deposition device being capable of active accommodation line there is provided component
Electric current in circle, the magnetic field that Indirect method coil generates so that the magnetic field that the electric arc of target material surface is subject to remains unchanged and then makes
The generation of drop amount, the cathode targets for reducing the larger ionic condition of size must be greatly decreased so that physical vapour deposition (PVD) can be steady
Fixed efficient quality and the service life for carrying out, film layer being provided..
(2) it is annular that main part in arc ion plating composite deposition device and coil, which is adjusted, in the utility model,
It is capable of providing the stable and easily controlled magnetic field in shape direction so that magnetic field is preset as preferably controlling electric arc electric shock cathode
Target location.
(3) the computing unit electrical connection current control list in arc ion plating composite deposition device is adjusted in the utility model
Member and distance meter, can calculate needs drive shaft turns angle, and the electric current being calculated so that coil acts on the moon
Magnetic field on the target of pole remains unchanged.
(4) cathode targets that the utility model is adjusted in arc ion plating composite deposition device are included containing reeded the moon
Pole target stand and and target, setting cathode target base enable one end that target is preferably fixed on supporting rod by cathode targets.
Description of the drawings
Fig. 1 is the structure diagram that arc ion plating composite deposition device embodiment 1 is adjusted in the utility model；
1 original state structure diagram of arc ion plating composite deposition device embodiment is adjusted for the utility model in Fig. 2
Fig. 3 is the knot that the utility model was adjusted after the work a period of time of arc ion plating composite deposition device embodiment 1
Structure schematic diagram；
Fig. 4 is the vertical view for the component that arc ion plating composite deposition device embodiment 2 is adjusted in the utility model
Fig. 5 is sectional views of the Fig. 4 along A-A directions；
Fig. 6 is the structure diagram that arc ion plating composite deposition device embodiment 3 is adjusted in the utility model；
Fig. 7 is the structure diagram that arc ion plating composite deposition device embodiment 4 is adjusted in the utility model.
In figure：1- supporting rods, 2 ,-cathode targets, 20- targets, 21- cathode target bases, 3- components, 30- coils, 31- electric currents
Regulating device, 32- main parts, 33- fixing devices, 34- computing units.
Specific embodiment
The embodiment of the utility model is described in further detail below in conjunction with attached drawing.
Embodiment one
Referring to shown in Fig. 1, Fig. 2 and Fig. 3, the utility model embodiment provides a kind of magnetic field variable electric arc adjustment deposition dress
It puts, including supporting rod 1, cathode targets 2 and component 3.
The original state of this adjustable arc ion plating composite deposition device is illustrated in figure 2, cathode targets 2 are located at support
One end of bar 1, under vacuum, the electric arc for being generated/inspiring by low-voltage and high current is so as to generate for cathode targets 2
The target 20 of ionic condition.The target 20 of the ionic condition is detached from the surface of cathode targets 2, and accurate and stable is deposited on workpiece
Surface.Component 3 includes coil 30, and when this adjustable arc ion plating composite deposition device is started to work, coil 30 passes through
Magnetic field is generated after the electric current of default size, the magnetic field is can preferably control electric arc electric shock 2 position of cathode targets and electric arc
Shape and movement.The magnetic field set in this way by predetermined current can be greatly decreased drop amount, reduce the larger ion of size
The generation of the cathode targets 2 of state so that physical vapour deposition (PVD) is capable of the progress of stability and high efficiency, provides quality and the longevity of film layer
Life.In addition to coil 30, component 3 also includes regulating current device 31, regulating current device 31 can regulating winding 30 by
The size of electric current, coil 30 always affect the magnetic field size of its generation by the variation of size of current.
As shown in figure 3, after cathode targets 2 are consumed, volume reduces, and height or length become smaller so that cathode target
The surface of material 2 relative to coil 30 distance change so that the changes of magnetic field on the surface of target 20, is then controlled by magnetic field
Phone when reaching 20 surface of target, state etc. attribute will change.Regulating current device 31 adjusts line at this time
Electric current increase or reduction in circle 30 so that the magnetic field on 20 surface of target remains unchanged, although that is, cathode targets 2 are constantly disappeared
Consumption, in 31 constantly regulate coil 30 of regulating current device by electric current, so as to keep acting on the electric arc of cathode targets 2 not
Become, ensure to reduce the generation of drop amount, the cathode targets 2 for reducing the larger ionic condition of size so that physical vapour deposition (PVD) can
The progress of stability and high efficiency provides quality and the service life of film layer.
Embodiment two
Referring to shown in Fig. 1, Fig. 4 and Fig. 5, the utility model provides a kind of magnetic field variable electric arc adjustment precipitation equipment embodiment
With embodiment one difference lies in：Component 3 includes main part 32, and 32 material of main part is stainless steel, it includes
Coil 30 is mounted in main part 32, when size of current leads to coil 30 due to magnetic in 31 regulating winding 30 of regulating current device
When power variation generates vibration, main part 32 can fix coil 30, prevent coil 30 from vibrating, although avoiding coil 30
It produces magnetic field but is happened since 30 oscillating magnetic field of coil is unstable instead.Preferably, coil 30 is embedded at main body
Part 32, fixed inlay so that coil 30 is relatively constant in the placement of entire magnetron cathode arc adjusting dress, will not become because of electric current
Change promotes changes of magnetic field, prevents changes of magnetic field from promoting magnetic force change, avoids the vibration that final magnetic force change generates and reacts on
The magnetic field of coil 30, i.e. coil 30 are stably fixed to theme part, are carried out so as to which physical vapour deposition (PVD) be kept to stablize.
Further, main part 32 and coil 30 are annular.The coil 30 of annular and 32 axle center of main part overlap,
The coil 30 of annular is capable of providing the stable and easily controlled magnetic field in shape direction so that magnetic field is preset as preferably controlling
Electric arc electric shock 2 position of cathode targets and shape and the movement of electric arc.The magnetic field set in this way can be greatly decreased drop amount,
Reduce the generation of the cathode targets 2 of the larger ionic condition of size so that physical vapour deposition (PVD) is capable of the progress of stability and high efficiency, provides
The quality of film layer and service life.
Specifically, component 3 further includes a fixing device 33, theme part is fixed on supporting rod 1 so that also solid
An entirety is formed due to the cathode targets 2 on supporting rod 1 and component 3, will not cause Magnetic field shifts etc. because of relative motion
Deng.Preferred fixing device 33 is buckle, and material is polytetrafluoro, polytetrafluoro layer high temperature resistant, insulation and rub resistance.Polytetrafluoro layer
When high temperature resistant will not be melted because of friction so that buckle is engaged supporting rod 1, which can be firmly fixed to supporting rod 1
On.Rub resistance cause be buckled the longer time be applied to fix so that the usage time for driving rod piece is longer, so this practicality newly
The service life that arc ion plating composite deposition device is adjusted in type is longer.Insulation is so that polytetrafluoro layer is adjustable in the utility model
Electric arc ion plating composite deposition device will not attract electric power so as to which physical vapour deposition (PVD) is interfered or be caused when working
Accident.
Embodiment three
Shown in Figure 6, the utility model provides a kind of variable electric arc adjustment precipitation equipment embodiment in magnetic field and embodiment
One difference lies in：Regulating current device 31 further includes a computing unit 34, according to time and arc stiffness calculating current
Regulating device 31 needs the electricity adjusted.Can more accurately it be disappeared after setting computing unit 34 according to cathode targets 2 by electric arc
The amount of consumption analyzes the required magnetic field size of current electric arc and provides more accurate magnetic field.
Preferably, a distance meter is set, is used to measure the variable quantities of cathode targets, and the distance meter with it is upper
The computing unit electrical connection stated.The electric signal that computing unit can be transmitted directly by distance meter obtains disappearing for cathode targets
Consumption so as to directly calculate the present position in control cathode targets surface, adjusts electric current to adjust by current adjusting device 31
Magnetic field causes the electric arc size shape on the cathode targets surface etc. is excited to remain unchanged, so as to ensure to reduce drop amount, reduce
The generation of the cathode targets of the larger ionic condition of size so that physical vapour deposition (PVD) is capable of the progress of stability and high efficiency, provides film layer
Quality and the service life.
Further, component is electrically connected, the temperature alarming also comprising a temperature alarming device with current adjusting device 31
Device be used for measuring coil temperature, when coil for a long time be powered or by electric current it is excessive, cause coil own temperature excessively high
More than preset value, temperature alarming device sends alarm signal to regulating current device 31, and regulating current device 31 will lead in coil
The electric current crossed is adjusted to zero, prevents coil from burning because temperature is excessively high or causing accident.
Regulating current device 31 is preferably provided with number of degrees table in the present embodiment, can show that the size of electric current is convenient for personnel
Observation experiment and calculating.
Example IV
Shown in Figure 7, the utility model provides a kind of variable electric arc adjustment precipitation equipment embodiment in magnetic field and embodiment
Three difference lies in：Cathode targets 2 are included containing reeded cathode target base 21 and target 20, and cathode target base 21 is fixed on supporting rod
On 1, target 20 is fixed on cathode target base 21.Cathode target base 21 is contained fluted and is fixed on supporting rod so that cathode targets
2 can preferably be fixed on target 20 one end on supporting rod 1.Coil 30 is fixed on by fixing device 33 on supporting rod 1,
So that coil 30 is constant relative to 20 relative distance of target.
The utility model is not only limited to above-mentioned preferred forms, anyone can obtain under the enlightenment of the utility model
Go out other various forms of products, however, make any variation in its shape or structure, it is every to have and the utility model phase
Same or close technical solution, within its protection domain.
Claims (10)
1. a kind of variable electric arc adjustment precipitation equipment in magnetic field, which is characterized in that it includes：
One supporting rod (1)；
One cathode targets (2) are fixed on the supporting rod (1) one end；
One component (3), the supporting rod (1) are mounted on the component (3), and the component (3) includes coil (30) and electric current tune
Regulating device (31) is electrically connected, and the regulating current device (31) is for regulating winding (30) size of current.
2. the variable electric arc adjustment precipitation equipment in magnetic field as described in claim 1, it is characterised in that：The component (3) is including master
Body portion (32), the coil (30) are installed in the main part (32).
3. the variable electric arc adjustment precipitation equipment in magnetic field as claimed in claim 2, it is characterised in that：The coil (30) is embedded at
The main part (32).
4. the variable electric arc adjustment precipitation equipment in magnetic field as claimed in claim 3, it is characterised in that：The main part (32) is
Annular and with coil (30) jointly around being fixed on supporting rod (1).
5. the variable electric arc adjustment precipitation equipment in magnetic field as claimed in claim 2, it is characterised in that：The component (3) further includes
Fixing device (33), main part (32) is fixed on supporting rod (1).
6. the variable electric arc adjustment precipitation equipment in magnetic field as claimed in claim 5, it is characterised in that：The regulating current device
(31) computing unit (34) is further included, for calculating current amount.
7. the variable electric arc adjustment precipitation equipment in magnetic field as claimed in claim 6, it is characterised in that：The computing unit (34) is also
It is connected with a distance meter, the distance meter is used to measure cathode targets (2) consumption.
8. the variable electric arc adjustment precipitation equipment in magnetic field as claimed in claim 5, it is characterised in that：The component (3) further includes
One temperature alarming device is higher than preset value alarm for detection coil (30) temperature and in temperature.
9. the variable electric arc adjustment precipitation equipment in magnetic field as described in claim 1-7 any one, it is characterised in that：The electric current
Regulating device (31) is equipped with reading table.
10. the variable electric arc adjustment precipitation equipment in magnetic field as described in claim 1, it is characterised in that：The cathode targets (2) are also
Comprising target (20) and containing reeded cathode target base (21), the cathode target base (21) is fixed on supporting rod (1), target
(20) it is fixed on cathode target base (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721554216.8U CN207596948U (en) | 2017-11-20 | 2017-11-20 | A kind of variable electric arc adjustment precipitation equipment in magnetic field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721554216.8U CN207596948U (en) | 2017-11-20 | 2017-11-20 | A kind of variable electric arc adjustment precipitation equipment in magnetic field |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207596948U true CN207596948U (en) | 2018-07-10 |
Family
ID=62760834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721554216.8U Expired - Fee Related CN207596948U (en) | 2017-11-20 | 2017-11-20 | A kind of variable electric arc adjustment precipitation equipment in magnetic field |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207596948U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114032512A (en) * | 2021-11-13 | 2022-02-11 | 东莞市华升真空镀膜科技有限公司 | Multi-arc source device and vacuum coating equipment |
-
2017
- 2017-11-20 CN CN201721554216.8U patent/CN207596948U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114032512A (en) * | 2021-11-13 | 2022-02-11 | 东莞市华升真空镀膜科技有限公司 | Multi-arc source device and vacuum coating equipment |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180710 Termination date: 20181120 |